The invention provides an organic
metal compound and a preparation method thereof, a patterning composition, a patterning method, a patterning film, a patterning substrate and an
electronic component, the organic
metal compound is obtained through special molecular design, the molecular formula of the organic
metal compound comprises a structure shown as a formula 1: (RaM) b (mu2-O) c (L) d formula 1, [mu] 2-O is a two-linked
oxygen atom, R is at least one of C1-30 linear
alkyl or branched
alkyl or naphthenic base, C2-30 alkenyl, C2-30 alkynyl and C6-30
aryl; l is an organic ligand capable of coordinating with M, M is Sn, Sd or In, 1 < = a < = 5, 1 < = b < = 10, 1 < = c < = 10, and 1 < = d < = 6b. The organometallic compound of the present invention can be used with advantages in terms of
high resolution and pattern fidelity, and is particularly suitable for fine patterning in microelectronic and
semiconductor manufacturing.