The invention discloses an optical
waveguide sensor and preparation methods thereof. The optical
waveguide sensor comprises a structure as follows: an optical
waveguide substrate medium consists of heat resisting
optical materials and is provided with linear optical waveguides, and in which an optical
grating structure is arranged in the linear optical waveguides. The invention further discloses many preparation methods of the structure. Another
waveguide sensor comprises a structure as follows: the optical waveguide substrate medium consists of heat resisting
optical materials and is provided with linear optical waveguides, and an optical
grating structure is further arranged on the surface of the optical waveguide substrate. The invention further discloses many preparation methods of the structure. Because the optical waveguide apparatus has a simple module structure or a structure with few modules, the optical
grating on the optical
waveguide channel only has a
harmonic module or few modules. When the environment temperature is changed, the
refractive index of the optical waveguide material and the period of the optical
waveguide grating can be changed, therefore, the change of temperature can be measured by measuring the change of
wavelength of
harmonic wave of the optical grating in the optical
waveguide channel on the optical waveguide substrate. Due to the adoption of the
laser technology and microelectronic production process, a plurality of optical
waveguide grating sensing apparatuses can be further produced on a same substrate with low production cost and high efficiency.