The invention discloses a
metal substrate vertical GaN-based LED (Light-Emitting
Diode)
chip and a manufacturing method of the
metal substrate vertical GaN-based LED
chip. The LED
chip is formed by compounding and depositing a
metal substrate, an AlxGayIn1-x-yN buffer layer, an undoped AlxGayIn1-x-yN layer, an n-type doped AlxGayIn1-x-yN layer, an InxGa1-xN / GaN multi-
quantum well (MQW) layer, a p-type AlxGa1-x-N layer, a p-type doped AlxGayIn1-x-yN layer, an n+ heavy
doping type AlxGayIn1-x-yN layer and an
indium tin oxide (ITO) layer, wherein an Ni / Au
electrode layer is formed on the surface of the ITO layer. The method for manufacturing the
metal substrate vertical GaN-based LED chip sequentially comprises the following steps of: arranging materials, performing
plasma cleaning, performing
nitrogen treatment, manufacturing a buffer layer, manufacturing an undoped layer, manufacturing an n-type
doping layer, manufacturing a MQW layer, manufacturing a p-type
doping layer, manufacturing a second p-type doping layer, and manufacturing an n+ heavy doping layer, the ITO layer and the
electrode layer. The chip has the advantages of reasonable structure, wide spectrum range and the like, and the manufacturing method has the advantages of reasonable process, low temperature, environment friendliness, high quality of finished product, low manufacturing cost and the like.