Micro-spectrograph based on micro-electronic mechanical system technique

A micro-spectrometer and micro-electro-mechanical technology, applied in the field of spectrometers, can solve problems such as large signal noise and complex optical structure, and achieve the effects of compact system structure, wide spectral range, and portability

Inactive Publication Date: 2007-08-22
江苏英特神斯科技有限公司
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Problems solved by technology

[0009] Aiming at the requirements of modern industry for the miniaturization and integration of spectrum analyzers, the present invention proposes the design of a miniature spectrum analyzer based on MEMS technology, adopts optoelectronic devices based on MEMS technology, and designs a A new type of optic

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  • Micro-spectrograph based on micro-electronic mechanical system technique
  • Micro-spectrograph based on micro-electronic mechanical system technique

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[0034] The miniature spectrometer system involved in the present invention will be described in detail below with reference to the accompanying drawings. The names, models, and parameters of related devices given in the embodiments are only used as examples, and the devices used for implementing the present invention include the described devices, but are not limited thereto. As shown in FIG. 1 , the miniature spectrometer involved in the present invention is composed of an optical fiber connector 1 , an incident slit 2 , a reflector 3 , a blazed grating 4 , a focusing mirror 5 and a detector 6 . The optical signal to be measured is transmitted from the external optical fiber to the optical fiber connector 1 SMA905, and enters the instrument through the incident slit 2. The incident slit 2 is located at the rear of the optical fiber connector 1. The slit width is 50 microns, which is smaller than the diameter of the fiber core. This design will improve spectral resolution. Th...

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Abstract

The invention discloses a micro-spectrometer based on microelectronic mechanical system technology (MEMS). It contains fiber connector, entrance slit, reflector, blazed grating, focusing mirror and detector etc. Reflector is made by MEMS, whose surface can do cycle motion controlled by external signal. Blazed grating is dispersion element, together with reflector to form spectroscopic light path system. In design of light path, after leading by fiber connecter, tested optical signal is split by reflector and blazed grating to monochromatic light with special wavelength, which is converged into detector by focusing mirror. Depending on cycle motion of reflector surface, monochromatic light with various wavelength enter detector to complete spectrum scanning. The spectrometer based on MEMS has merits of small capacity, extensive spectrum range and low cost etc.

Description

technical field [0001] The present invention relates to a spectrometer, in particular to a miniature spectrometer based on micro-electro-mechanical system technology (Micro-Electro-Mechanical System, MEMS). Background technique [0002] Spectroscopy is a technique for measuring the intensity of light in the ultraviolet, visible, near-infrared and infrared bands. It is widely used in various fields, such as color measurement, concentration detection of chemical components or electromagnetic radiation analysis. The traditional spectrometer is composed of many optical, electrical and mechanical discrete devices, which requires extremely complex optical system and precise mechanical structure, which reduces the reliability of the whole instrument, and has strict requirements on the working and storage environment of the instrument, which limits the its wider application. Especially for the application requirements of online (on-site) spectral measurement, traditional spectromet...

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Application Information

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IPC IPC(8): G01J3/10
Inventor 何野徐波
Owner 江苏英特神斯科技有限公司
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