Micro-spectrograph based on micro-electronic mechanical system technique

Abstract

The invention discloses a micro-spectrometer based on microelectronic mechanical system technology (MEMS). It contains fiber connector, entrance slit, reflector, blazed grating, focusing mirror and detector etc. Reflector is made by MEMS, whose surface can do cycle motion controlled by external signal. Blazed grating is dispersion element, together with reflector to form spectroscopic light path system. In design of light path, after leading by fiber connecter, tested optical signal is split by reflector and blazed grating to monochromatic light with special wavelength, which is converged into detector by focusing mirror. Depending on cycle motion of reflector surface, monochromatic light with various wavelength enter detector to complete spectrum scanning. The spectrometer based on MEMS has merits of small capacity, extensive spectrum range and low cost etc.

Description

technical field

[0001] The present invention relates to a spectrometer, in particular to a miniature spectrometer based on micro-electro-mechanical system technology (Micro-Electro-Mechanical System, MEMS). Background technique

[0002] Spectroscopy is a technique for measuring the intensity of light in the ultraviolet, visible, near-infrared and infrared bands. It is widely used in various fields, such as color measurement, concentration detection of chemical components or electromagnetic radiation analysis. The traditional spectrometer is composed of many optical, electrical and mechanical discrete devices, which requires extremely complex optical system and precise mechanical structure, which reduces the reliability of the whole instrument, and has strict requirements on the working and storage environment of the instrument, which limits the its wider application. Especially for the application requirements of online (on-site) spectral measurement, traditional spectromet...

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