Spectrum magneto-optical ellipsometry analysis device of rotary compensator as well as application thereof

A rotary compensator and analysis device technology, applied in the field of spectroscopic magneto-optical ellipsometric analysis devices, can solve the problems of high device cost, poor applicability in the industrial field, slow measurement speed, etc., and achieve wide spectral range, small physical meaning, The effect of fast modulation

Active Publication Date: 2019-10-15
SHANDONG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0007] 4. The measurement speed is slow, and the cost of some devices is relatively high. It is only suitable for scientific research and has poor applicability in the industrial field.

Method used

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  • Spectrum magneto-optical ellipsometry analysis device of rotary compensator as well as application thereof
  • Spectrum magneto-optical ellipsometry analysis device of rotary compensator as well as application thereof
  • Spectrum magneto-optical ellipsometry analysis device of rotary compensator as well as application thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0062] Such as figure 1 with figure 2 As shown, a spectral magneto-optical ellipsometric analysis device for a rotary compensator includes a light source module, an optical path module, a magnetic field module, a sample stage, a motor control module, and a detection and analysis module. The design idea is: use the combination of xenon lamp light source and monochromator to realize spectral magneto-optical ellipsometric analysis, use the rotating compensator to realize the modulation of the polarization state of the incident light, and use the electromagnet to apply the magnetic field required for the test to the surface of the magnetic sample , use the detector to receive the outgoing light intensity, and calculate the sample thickness, complex refractive index, magneto-optical coupling coefficient and magneto-optical Kerr deflection angle by analyzing the light intensity signal received by the detector.

[0063] Wherein, the detection and analysis module includes a computer...

Embodiment 2

[0075] This example introduces a method for performing spectral magneto-optical ellipsometric analysis on thin film samples.

[0076] Can utilize the spectral magneto-optical ellipsometry device of the rotary compensator of embodiment 1 to carry out, comprise the following steps:

[0077] 1) Turn on the magnet control system to preheat the electromagnet.

[0078] 2) Turn on the power supply of the xenon lamp light source, monochromator, detector and computer; the computer controls the monochromator to select the initial wavelength, controls the motor control module to make the compensator rotate at a constant speed, and makes the analyzer motor rotate to select the analyzer angle A1; The system angle is defined as: the positive direction of the x-axis is within the incident surface, that is, the positive direction of the p light, the positive direction of the y-axis is perpendicular to the incident surface, that is, the positive direction of the s light, and the positive direc...

Embodiment 3

[0111] The present embodiment carries out the method for spectroscopic magneto-optical ellipsometry of film sample, and the method for embodiment 2 is different in that, in step 4), the magnetic field direction is perpendicular to the sample surface (refer to image 3 structure shown), corresponding to the poloidal magneto-optical Kerr effect measurement. For the two measurement methods, the other measurement steps are the same, and can be the same as the method steps in Embodiment 2, and can be flexibly selected during the measurement, and will not be repeated here.

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PUM

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Abstract

The invention discloses a spectrum magneto-optical ellipsometry analysis device of a rotary compensator as well as application thereof. The spectrum magneto-optical ellipsometry analysis device comprises a light source module, a light path module, a magnetic field module, a sample table, a motor control module and a detection and analysis module, the light path module comprises a collimating lens,a polarizer, a compensator and a polarization analyzer, the detection and analysis module comprises a computer and a detector, the collimating lens, the polarizer, the compensator, the sample table,the polarization analyzer and the detector are sequentially arranged along a light path direction, the polarizer and the compensator are located in an incidence light path, the polarization analyzer is located in an emergence light path, and the incidence light path and the emergence light path are located at the two sides of the sample table and respectively keep an included angle Phi with normalof the sample table. The device disclosed by the invention can represent optical and magnetic parameters of a magnetic film material under longitudinal or poloidal magneto-optical Kerr effect, can obtain thickness, optical parameters and magnetic parameters of a magnetic film sample during one test and is relatively high in automation degree.

Description

technical field [0001] The invention belongs to the technical field of magneto-optical ellipsometry, in particular to a spectral magneto-optical ellipsometry device for a rotary compensator and its application. Background technique [0002] Nanomaterials are playing an increasingly important role in the fields of communication, biology, and military industry. As a special nanomaterial, nanomagnetic thin film materials have shown outstanding performance in the fields of magnetic storage, magneto-optical sensors, and magneto-optical switches. The excellent performance has attracted more and more attention. The preparation and optimization of nano-magnetic thin film materials require more advanced characterization techniques. Magneto-optical ellipsometry technology has the advantages of sensitive testing, high precision, fast measurement speed, no physical damage to samples, real-time monitoring of sample growth process, etc. It is an ideal means for magnetic material measurem...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N21/21G01N21/01G01N21/25G01B11/06
CPCG01N21/211G01N21/01G01N21/25G01N21/255G01B11/0641G01N2021/213G01N2021/218
Inventor 连洁宋浩男石玉君戴凯姜清芬魏铭洋
Owner SHANDONG UNIV
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