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676 results about "Magnetic thin film" patented technology

Single-chip magnetic sensor, and laser heating-assisted annealing apparatus thereof and laser heating-assisted annealing method thereof

The invention discloses a single-chip magnetic sensor, and a laser heating-assisted annealing apparatus thereof and a laser heating-assisted annealing method thereof. The laser heating-assisted annealing method comprises the following steps: (a), annealing is carried out on a magnetic thin film in a strong magnetic field, so that magnetic moments on a pinning layer of the magnetic thin film are towards a same direction; (b), the magnetic thin film is fixedly disposed on a clamp of a movable platform; (c), a laser source is opened to emit a laser beam, which is attenuated through an optical attenuator; the direction of the attenuated laser beam is changed through a reflective mirror; and the laser beam with the changed direction is focused into a light spot by a focusing objective lens; (d), the movable platform is moved, in order that the focused light spot of the laser beam is aimed at the magnetic thin film so as to enable the magnetic thin film to be heated by the laser beam; (e), a magnetic field intensity of an electromagnet arranged on the movable platform is adjusted, so that a magnetic domain of the heating area of the magnetic thin film can be overturned; and (f), the magnetic thin film is cut into slices, and the slices of the cut magnetic thin film are bound into one.
Owner:MULTIDIMENSION TECH CO LTD

Single-chip three-shaft magnetic field sensor and production method

The invention provides a single-chip three-shaft magnetic field sensor and a production method. The single-chip three-shaft magnetic field sensor at least comprises a first substrate, at least two first electrodes, at least four second electrodes, a second substrate, a single-shaft rotation structure, a double-shaft rotation structure, a first magnetic film structure and a second magnetic film structure, wherein the first electrodes and the second electrodes are formed on the surface of the first substrate, the second substrate and the first substrate bond together through keys, the second substrate is provided with the single-shaft rotation structure and the double-shaft rotation structure, the single-shaft rotation structure and each of the two first electrodes form a capacitor structure, and the double-shaft rotation structure and each of the four second electrodes form a capacitor structure. The first magnetic film structure is formed on the surface of the single-shaft rotation structure and can generate corresponding torque under the action of a magnetic field in a first direction, and the second magnetic film structure is formed on the surface of the double-shaft rotation structure and can generate corresponding torque under the action of a magnetic field in a second direction and a magnetic field in a third direction. The single-chip three-shaft magnetic field sensor has the advantages of being high in sensitivity, small in size, low in power consumption and cost, easy to package and the like.
Owner:SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI
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