108results about How to "Reduce particles" patented technology

A barrier film made of a ZrB₂ film is formed by use of a coating apparatus provided with plasma generation means including a coaxial resonant cavity and a microwave supply circuit for exciting the coaxial resonant cavity, the coaxial resonant cavity including spaced apart conductors provided around the periphery of a nonmetallic pipe for reactive gas introduction, the coaxial resonant cavity having an inner height equal to an integer multiple of one-half of the exciting wavelength, the plasma generation means being constructed such that a gas injected from one end of the nonmetallic pipe is excited into a plasma state by a microwave when the gas is in a region of the nonmetallic pipe which is not covered with the conductors and such that the gas in the plasma state is discharged from the other end of the nonmetallic pipe.

Provided is a nonmagnetic material particle dispersed ferromagnetic material sputtering target comprising a material including nonmagnetic material particles dispersed in a ferromagnetic material. The nonmagnetic material particle dispersed ferromagnetic material sputtering target is characterized in that all particles of the nonmagnetic material with a structure observed on the material in its polished face have a shape and size that are smaller than all imaginary circles having a radius of 2 μm formed around an arbitrary point within the nonmagnetic material particles, or that have at least two contact points or intersection points between the imaginary circles and the interface of the ferromagnetic material and the nonmagnetic material. The nonmagnetic material particle dispersed ferromagnetic material sputtering target is advantageous in that, in the formation of a film by sputtering, the influence of heating or the like on a substrate can be reduced, high-speed deposition by DC sputtering is possible, the film thickness can be regulated to be thin, the generation of particles (dust) or nodules can be reduced during sputtering, the variation in quality can be reduced to improve the mass productivity, fine crystal grains and high density can be realized, and the nonmagnetic material particle dispersed ferromagnetic material sputtering target is particularly best suited for use as a magnetic recording layer.

The present invention provides a panel alignment apparatus and a panel alignment method. The panel alignment apparatus comprises an image detection device and a first clamp. The method comprises the following steps: utilizing the image detection device to detect a position of a display panel, and to calculate a position adjustment value; and utilizing the first clamp to hold the standing display panel, and to rotate the display panel according to the position adjustment value for adjusting a position of the display panel. The present invention can utilize the clamps to precisely align the standing display panel.

A wiring over a substrate capable of reducing particles between wirings and a method for manufacturing the wiring is disclosed. A wiring over a substrate capable of preventing short-circuiting between wirings due to big difference in projection and depression between wirings and a method for manufacturing the wiring is also disclosed. Further, a wiring over a substrate capable of preventing cracks in the insulating layer due to stress at the edge of a wiring or particles and a method for manufacturing the wiring is also disclosed. According to the present invention, a method for manufacturing a wiring over a substrate is provided that comprises the steps of: forming a first conductive layer over an insulating surface; forming a first mask pattern over the first conductive layer; forming a second mask pattern by etching the first mask pattern under a first condition, simultaneously, forming a second conductive layer having a side having an angle of inclination cross-sectionally by etching the first conductive layer; and forming a third conductive layer and a third mask pattern by etching the second conductive layer and the second mask pattern under a second condition; wherein a selective ratio under the first condition of the first conductive layer to the first mask pattern is in a range of 0.25 to 4, and a selective ratio under the second condition of the second conductive layer to the second mask pattern is larger than that under the first condition.

Hydrofluoric acid (HF) mixed with water and often buffered with ammonium fluoride is a standard silicon dioxide wet etchant which is followed by a rinse. An improved silicon dioxide etch is vapor HF which may be followed by a water vapor rinse. The invention discloses a further improved silicon dioxide etch. Following an initial exposure to vapor HF for oxide removal, a first insitu water rinse occurs. A second exposure to vapor HF then occurs and is followed by a second insitu water rinse. Water, rather than water vapor, aids in freeing particles from the wafer surface. During both the water rinses, the wafer may be rotated at increasing speeds to aid in sweeping particles from wafer surface. The process may be practiced in a commercially available reactor and is suitable for ULSI devices having complex topographies, such as, for example, 64 megabit DRAMs employing crown type memory cells.

A method for applying PAM to soil wherein said PAM is intermixed, impregnated and/or applied to solid carriers.

The present invention provides a compact horizontal air filter. The electrode array of the elements tending to be tainted with dust in the air filter is simple and convenient to generate clean and fresh air. The air filter comprises a case, a frame slidably inserted in and drew out of the case, a first array electrode fixed on the frame, a second array electrode fixed on the frame and being apart from the first array electrode, and a high voltage pulse generator. The electropositive particles in the air are attracted by the electronegative metal made collecting dust vane when they pass through a collecting dust chamber.

A carotenoid-containing emulsion composition comprises carotenoid, wherein the composition further comprises: at least one water-soluble emulsifier in an aqueous phase; and tocopherol and lecithin in an oil phase.

A spraying head assembly has a tubular body, a cap, an upper plug, a lower plug and a spring. The cap is attached to the body and has a spraying channel, a conical cavity and a spraying hole. The conical cavity is defined inside the cap and communicates with the spraying channel and the spraying hole. The upper plug is held in the body and comprises a spraying end, a connecting end, a head and shaft. The head has a recess communicating with the spraying channel having a conical bottom. Multiple passages are defined in the head and communicate with the recess. The lower plug is mounted movably in the chamber in the body and is connected to the upper plug using the spring. In this arrangement, a liquid supplied to the connecting end forms vortexes in the body to reduce particles of liquid nebulization and raise ejection speed and therefore distance.

A particle reducing method includes a step of supplying a first gas to a vacuum chamber in which a susceptor, formed by an insulating object and the surface of which is provided with a substrate mounting portion, is rotatably provided; a step of generating plasma from the first gas by supplying high frequency waves to a plasma generating device provided for the vacuum chamber; and a step of exposing the substrate mounting portion, on which a substrate is not mounted, to the plasma while rotating the susceptor.

The present invention provides a lighting device which can high efficiently extract white light and reduce granular sensation about light source. The lighting device includes: plural semiconductor luminescent components, transparence substrate, transparence bonding layer, reflection member, transparence sealing member, luminophore layer. The luminescent components has semiconductor luminescent layer on back laminated layer of transparence component substrate and extracts the light emitted from the luminescent layer. Lead (conductive portion) of the transparence substrate is connected with p side and n side electrodes of the luminescent component. The backside of the transparence substrate is bonded with surface of component substrate of each luminescent component via the bonding layer. The seal member is arranged at back side of the transparence substrate to seal the luminescent component. The reflection member covers the seal member. The luminophore layer covers the surface of the transparence substrate. The luminophore layer includes luminophore for wavelength convertion of first light emitted by the semiconductor luminescent layer to second light with different wavelength.

A method for applying a soil stabilizer, to soil wherein the soil stabilizer is intermixed, impregnated, and/or applied to solid carriers.

The invention relates to a transport roller (19) of tobacco processing industry, comprising a containing hopper (66) for containing rod-shaped objects (52, 54) of the tobacco processing industry, wherein the rod-shaped objects (52, 54) can be orderly, transversely and axially arranged into at least one row. The transport roller (19) is characterized in that the transport roller (19) at least partially comprises a sucking device (80) on the circumference thereof; furthermore, the invention also relates to a machine of the tobacco processing industry, in particular to a filter tip connecting and assembling machine.

The invention relates to the field of cereal drying, and in particular relates to a cereal drying machine. The cereal drying machine comprises a drying tower (1) and a heat pump (2) which is communicated with the drying tower (1) and is used for providing hot air for the drying tower, wherein the heat pump (2) comprises a pump shell (3) and an evaporator (4) arranged in the pump shell; the cereal drying machine is characterized by further comprising a dust collection room (5) which is communicated with the drying tower (1) and is used for collecting waste air discharged by the drying tower; and a defrosting heating device is arranged on the evaporator (4). The cereal drying machine can efficiently filter the discharged waste air, and the phenomenon that cold air is generated at an air outlet where the evaporator is positioned during defrosting of the evaporator is avoided.

The invention relates to a making and sterilizing method of a polypropylene plastic infusion bottle, comprising the following steps of: (1) an injection molding and blow molding process: melting medicinal-grade polypropylene granules at high temperature, extruding to make a bottle blank, blowing into a medicine bottle by using clean high-pressure air, wherein a blow molding control mode is a five-speed five-pressure method, and stretching foreblow is carried out before blow molding shaping; (2) a cleaning, filing and sealing process: cleaning the medicine bottle in a pumping way by using clean negative ion air, then filing medicine-containing liquid, controlling the medicine-containing liquid to be filled at the constant temperature of 50-75 DEG C, filling and then sealing a cover; (3) a high-temperature sterilizing process: placing the completely-filled and cover-sealed medicine bottle into a high-pressure sterilizing tank for sterilization, wherein inner pressure is controlled between 0.20 MPa and 0.35 MPa, sterilization temperature is 117-121 DEG C, and sterilization time is 20-12 minutes.

The invention discloses an engine SCR (Selective Catalytic Reduction) catalyst system and a control method thereof. The engine SCR catalyst system comprises an engine body, an SCR catalyst and a bypass pipe; a supercharger compressor, an intake pipe, an engine intake manifold and an intake throttling valve are arranged at the intake end of the engine body, and the intake throttling valve is located on the intake pipe; an engine exhaust pipe and a turbocharger turbine are arranged at the exhaust end of the engine body, and an exhaust temperature sensor is arranged on the engine exhaust pipe; an SCR upstream temperature sensor and an SCR downstream temperature sensor are arranged in the upstream and the downstream of the SCR catalyst respectively; the bypass pipe is connected at the front end of an inlet of the SCR catalyst in parallel, and a two-way bypass valve is arranged at an inlet of the bypass pipe. The engine SCR catalyst system can reduce heat loss of the SCR catalyst to the maximum extent, raise or keep temperature of the SCR catalyst and improve the conversion efficiency of the SCR catalyst.

Disclosed is a technique for effectively suppressing the generation of particles resulting from peeling-off of unnecessary films that have unavoidably adhered to the inner surface of the reaction tube of an ALD film-forming apparatus. A precoating process utilizing ALD is performed to deposit a metal oxide film, e.g., an aluminum oxide film, onto the unnecessary films, in order to prevent peeling-off of the unnecessary films. The type and/or position of the nozzle for supplying ozone, as a precoat gas, into the reaction tube during the precoating process is different from that of the nozzle for supplying ozone, as a film-forming gas, into the reaction tube during forming of a film on a semiconductor substrate.

A method for manufacturing a bonded wafer, including at least implanting at least one type of gas ion selected from a hydrogen ion and a rare gas ion from a surface of a bond wafer to form an ion-implanted layer in the wafer, bonding an ion-implanted surface of the bond wafer to a surface of a base wafer directly or through an insulator film, and then delaminating the bond wafer at the ion-implanted layer to fabricate a bonded wafer. A plasma treatment is applied to a bonding surface of one of the bond wafer and the base wafer to grow an oxide film, etching the grown oxide film is carried out, and bonding to the other wafer is performed. The method enables preventing defects by reducing particles on the bonding surface and performing strong bonding when effecting bonding directly or through the insulator film.

The invention provides a method for preparing levofloxacin hydrochloride sodium chloride injection. By researching a liquid medicine preparation method, medicinal charcoal pretreatment and a terminal sterilization process, product quality is ensured by the aid of technologies of a concentrated solution and diluted solution method, charcoal slurry preparation from medicinal charcoal, water bath sterilization and the like, production is facilitated, obtained finished products have higher stability, so that the storage life of the finished products can be prolonged, and clinical use effects are better.

This liquid treatment method for substrates involves performing: a liquid treatment step for liquid-treating a substrate with a treatment liquid; a rinse treatment step for rinsing the liquid-treated substrate with a rinsing liquid; a water-repellency treatment step for subjecting the rinsed substrate to a water-repellency treatment using a water-repellency-imparting solution; next, a substitution treatment step for subjecting the substrate subjected to the water-repellency treatment to a substitution treatment acceleration liquid; a cleaning treatment step for cleaning the substrate subjected to the water-repellency treatment by using a cleaning solution; and thereafter, a drying treatment step for substituting the cleaning solution with a drying solution having a higher volatility than that of the cleaning solution, and removing the drying solution from the substrate. Thus, it is possible to prevent pattern collapse during the drying treatment, and to decrease particles caused by watermarks.

The present invention relates to high quality motherwort injection and its preparation process. The present invention proposes the HPLC fingerprint standard, and has determined characteristic matters in motherwort injection, optimized technological process, raised injection consistency and high and stable product quality.

A double-alloy NdFeB rare earth permanent magnetic material and manufacturing method thereof are provided. The method comprises respectively melting an A1 alloy comprising heavy rare earth such as Dy, Tb, Ho and Gd as well as an A2 alloy comprising light rare earth such as La, Ce, Pr and Nd; mixing the A1 alloy and the A2 alloy by a two-dimensional or three-dimensional mixer with a ratio of A1/A2=0˜0.5 under protection of nitrogen; producing powder in a jet mill after mixing; collecting fine powder; putting and mixing the powder and the fine powder in the two-dimensional or three-dimensional mixer; putting into a magnetic field pressing machine for pressing under the protection of the nitrogen after mixing and producing permanent magnetic products by sintering, aging, etc. The present invention can obviously decrease rare earth utilization and increase a magnetic energy product and coercivity of the rare earth permanent magnet.