Supporting machine table
A machine and support pin technology, which is applied in optics, instruments, electrical components, etc., can solve the problem of particles generated by support pins and pin grooves, and achieve the effects of improving yield, reducing particles, and reducing the generation of particles
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[0023] The specific embodiments of the present invention will be described in further detail below with reference to the accompanying drawings and embodiments. The following examples are intended to illustrate the present invention, but not to limit the scope of the present invention.
[0024] figure 1 It is a partial cross-sectional view of the support machine in the vertical direction of the present invention, figure 2 It is a partial cross-sectional view of a pin hole of the supporting machine of the present invention in the horizontal direction at its annular groove. The surface of the support machine 1 is horizontal for placing the substrate. Compared with the prior art, the improvement of the present invention lies in the structure of the pin hole, so the structure of the pin hole is mainly described below.
[0025] The support machine 1 includes at least one pin hole 2, the pin hole 2 accommodates a support pin 3 that can move up and down, the hole wall of the pin h...
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