The invention discloses a low-power-consumption planar three-dimensional magnetic sensor based on a
graphene microcoil /
magnetic composite film and a three-dimensional
magnetic field measurement method thereof. The sensor is formed by sequentially laminating a substrate, a bottom-layer soft
magnetic composite film, an insulating layer, a
graphene microcoil, a
passivation layer and a top-layer soft
magnetic composite film. The sensor utilizes a planar structure to realize three-dimensional
magnetic field detection, on one hand, the sensor is based on an inductive giant
magneto-impedance mechanism, and high-precision detection of a
magnetic field in a plane (X / Y axis) is realized by utilizing the change of inductive
reactance between excitation and induction
graphene coils along with the magnetic field; on the other hand, by means of the excellent
Hall effect of graphene, magnetic field components in the vertical direction (Z axis) can be sensed at the same time. According to the sensor, real-time decoupling of a three-dimensional magnetic field can be realized by using a planar structure through one-time measurement, and angle and space errors introduced in the conventional three-dimensional sensor assembling process are avoided. In addition, due to the collaborative optimization design of the graphene coil and the soft
magnetic thin film,
power consumption is reduced, and the resolution ratio is improved.