The present application belongs to the field of precise optical
machine adjustment, and relates to an off-axis three-mirror
system adjustment
optical path and method without
intermediate image point. The adjustment
optical path comprises an interferometer, a
primary mirror, a
secondary mirror, a third mirror, a computer
holographic grating (CGH), a first flat
crystal, a standard sphere and a light screen. The adjustment method requires that the
primary mirror is first installed on the
system frame, the positioning of the
primary mirror and the third mirror is completed by cooperating with the CGH with the
optical axis of the interferometer as the reference, the third mirror is then installed on the
system frame, the relative position of the third mirror and the primary mirror is adjusted, the CGH is removed, the
secondary mirror is installed on the multi-dimensional adjustment platform, the
reference surface on the back of the
secondary mirror is monitored by the interferometer, and the position of the secondary mirror in the X / Y / Z three-dimensional translation direction and the rotation around the Z axis are adjusted. After the system
wavefront meets the design requirements, the secondary mirror is fixed, and the off-axis three-mirror system adjustment is completed. The off-axis three-mirror system adjustment method and the matching computer
holographic grating (CGH) are provided, the technical problem of the off-axis reflection system adjustment with high freedom, long period and high difficulty without
intermediate image point is solved, the adjustment efficiency is improved, and the adjustment quality is ensured.