229 results about "Magnetic films" patented technology

The invention discloses a flexible magnetic tactile sensing device based on a microstructure elastic layer, a three-dimensional force measuring device and a measuring method.The flexible magnetic tactile sensing device comprises a flexible magnetic film, the microstructure elastic layer, a Hall sensor, a PCB and a bottom shell, the Hall sensor is installed on the PCB, and the flexible magnetic film, the microstructure elastic layer, the PCB and the bottom shell are sequentially stacked from top to bottom; the microstructure elastic layer is of a non-planar structure, when the flexible magnetic film deforms due to stress, deformation of the flexible magnetic film is transmitted to the microstructure elastic layer, the change of the three-axis magnetic field intensity is measured through the Hall sensor and uploaded to a PC terminal for data processing, and three-dimensional force measurement is achieved. Three-dimensional force measurement can be achieved, the flexible magnetic film can generate local deformation in the normal direction when normal force is applied, the flexible magnetic film can generate tangential displacement when tangential force is applied, and application scenes suitable for different microstructure elastic layers are provided according to quantitative analysis results.

The invention discloses a self-decoupling three-dimensional force multi-mode sensing device, system and method based on radial magnetization, the device comprises a flexible magnetic film with radial magnetization, a microstructure layer, an optical waveguide layer, a shell, a Hall element, a PCB, a common camera and an infrared camera, the flexible magnetic film, the microstructure layer, the optical waveguide layer and the shell are stacked in sequence from top to bottom, and the Hall element is arranged in the shell. The PCB, the common camera and the infrared camera are all located on the bottom face of the shell, and the Hall element is installed on the PCB. The system comprises a self-decoupling three-dimensional force multi-mode sensing device and a signal processing device, and the signal processing device can realize three-dimensional force decoupling, infrared distance sensing and force application position measurement according to data of a PCB, a common camera and an infrared camera. According to the invention, the resolution is high, three-dimensional force decoupling can be realized, and multi-modal sensing can be realized.

The invention provides a large-area split type flexible magnetic tactile sensor with a sensing function, and the sensor employs a plurality of flexible square magnetic sheets which are magnetized in the thickness direction, and the polarities of the flexible square magnetic sheets are alternately arranged in a checkerboard array mode in which the polarities of the magnetic fields of the adjacent flexible square magnetic sheets are opposite, so as to simulate a flexible magnetic film which is magnetized in a folded manner. The magnetic flux density of a contact force acquisition area is enhanced, a U-net algorithm is adopted to carry out field intensity-force relation fitting on the divided acquisition area, and a contact force cloud picture is generated, so that a Hall sensor and a flexible magnetic film can keep a large distance to carry out split type large-area contact force sensing, and lossless split type installation is realized; and compared with simple magnetic field modes such as unidirectional magnetization, the touch sensor has higher sensitivity. According to the size of a required contact force measuring surface, more flexible magnetic touch sensor arrays are arranged, a contact force cloud picture is drawn together through a plurality of units, and the flexible magnetic touch sensor array has application potential in the fields of bionic robots, flexible electronics, medical treatment and the like.

The invention relates to a soft mesh magnetic sensor for tactile and non-tactile perception. The sensor comprises a neodymium iron boron-organic silicon elastomer magnetic film, an aluminum foil, a PDMS elastomer, a TMR element and a printed circuit board, wherein the TMR element is welded on the printed circuit board, and the PDMS elastomer coats the TMR element and covers the PCB; the PDMS elastomer is covered with an aluminum foil, and a neodymium iron boron-organic silicon elastomer magnetic film is arranged on the aluminum foil; the PDMS elastomer is of a sandwich structure and is composed of an upper thin film, a lower thin film and a middle small cylinder array. The lower film is provided with a strip-shaped groove which is used for wrapping the TMR element. The soft grid magnetic sensor disclosed by the invention has the advantages of high sensitivity, high flexibility and strong multi-mode sensing capability.

The invention provides a preparation method of an HDMI (High Definition Multimedia Interface) high-performance common-mode suppressor made of a nanocrystalline material, relates to the technical field of electronic component preparation, and aims to meet the harsh requirement of HDMI high-frequency high-speed signals on common-mode noise suppression, the method comprises the following steps: constructing a multi-layer heterogeneous magnetic film with a gradient interface on a microstructured substrate by utilizing multi-target magnetron sputtering; a selective energy field assisted annealing technology is adopted to realize precise nanocrystallization and magnetic anisotropy regulation and control of the magnetic film; and a high-precision three-dimensional coil structure is integrated by combining a micromachining process. The prepared common-mode suppressor is small in size and high in integration level, shows excellent common-mode suppression efficiency, wide working bandwidth and excellent signal integrity in a high-frequency band, has high reliability, and is suitable for a new generation of HDMI (High-Definition Multimedia Interface).

The invention discloses a colored magnetic particle preparation method, a colored magnetic particle, a magnetic microcapsule and a magnetic film, and relates to the technical field of magnetic particle preparation. According to the preparation method, ferric salt and an alkaline substance are adopted, a ferroferric oxide precursor precipitation solution is generated through a coprecipitation method, surface modification is conducted through oleic acid, the dispersity and stability of particles in an organic system are enhanced, a solvent is adopted for washing and drying, and the purity and chemical stability of the particles are further improved; subsequently, mixing the modified nano ferroferric oxide, a dye, a high polymer and a functional additive to obtain the colored magnetic particle. The method has the advantages that the preparation process is simple, and the prepared colored magnetic particles are excellent in dispersity, stability and functionality.

The invention discloses a flexible multi-dimensional force sensor based on centripetal gradient magnetic field design and a preparation method thereof, and belongs to the field of electronic devices. A flexible multi-dimensional force sensor sequentially comprises, from top to bottom, a protection layer comprising a flexible substrate material having a force sensitive characteristic; a cross-shaped groove is formed in the bottom face of the magnetic film layer, the edge of the groove is in an arc shape, and a magnetic field with gradient magnetic flux can be formed; a buffer layer including a strained material having a stepped shape; and the transmission layer comprises an electromagnetic effect chip with a triaxial magnetic field sensing capability and a reading circuit of the electromagnetic effect chip. Compared with the prior art, the sensor provided by the invention realizes natural decoupling from the magnetic field design, and has decoupling capability on three axes. The gradient design enables the sensor to have different response slopes at different stress stages when the sensor is stressed, the force measurement range of the device is greatly improved, and the sensing sensitivity and the sensing range on three axes are the same.

The invention provides a resin composition, a magnetic film and application thereof. The resin composition comprises the following components: (A) magnetic filler, (B) epoxy resin, (C) a curing agent, (D) a flexibilizer and (E) polyester polyol, the number average molecular weight of the (E) polyester polyol is 2000 to 3000. According to the resin composition provided by the invention, through screening and synergistic compounding of specific components, the resin composition has relatively high magnetic conductivity and relatively low magnetic loss under high frequency after being cured, and meanwhile, the binding force with a copper layer is relatively high.

The application discloses a flexible multi-dimensional force sensor based on a centripetal gradient magnetic field design and a preparation method thereof, and belongs to the field of electronic devices. The flexible multi-dimensional force sensor comprises, from top to bottom, a protective layer, a magnetic film layer, a buffer layer and a transmission layer. The protective layer comprises a flexible base material with force-sensitive characteristics. The magnetic film layer is provided with a cross-shaped groove on the bottom surface, and the edges of the groove are arc-shaped, so that a magnetic field with a gradient magnetic flux can be formed. The buffer layer comprises a strain material with a stepped shape. The transmission layer comprises an electromagnetic effect chip with three-axis magnetic field sensing capability and a readout circuit thereof. Compared with the prior art, the sensor of the application realizes natural decoupling from the magnetic field design, and has decoupling capability on three axes. The gradient design of the application enables the sensor to have different response slopes at different stress stages when subjected to stress, greatly improves the force measurement range of the device, and the sensing sensitivity and range on the three axes are the same.

The invention discloses a visual tactile sensor based on a magnetic imaging principle. The visual tactile sensor comprises a shell, an image acquisition module, a magnetic pole display film, an elastic body and a magnetic film, the magnetic pole display film, the elastic body and the magnetic thin film are arranged in the shell from top to bottom, and the image acquisition module is located above the magnetic pole display film and used for acquiring an image of the magnetic pole display film; when the sensor is used for pressure sensing, the position with the maximum gray level variation of the magnetic pole display film image is the pressure acting position, and the pressure is equal to the result that the gray level variation of the magnetic pole display film image is divided by the magneto-optical conversion coefficient of the magnetic pole display film and the product thereof. The magnetic induction intensity in the center range of the surface of the magnetic film, the initial distance between the magnetic film and the magnetic pole display film and the equivalent elastic coefficient of the magnetic film and the elastic body are related. The sensor converts a mechanical signal into a magnetic field signal and then converts the magnetic field signal into an optical image, high-sensitivity sensing of tiny pressure is achieved, and meanwhile the sensor has the higher signal-to-noise ratio, stability and anti-interference capacity.

The invention relates to the technical field of microcapsules, provides a magnetic microcapsule capable of preventing particle sedimentation, a preparation method of the magnetic microcapsule and a magnetic film, and aims to solve the problems of low writing smoothness and poor trace durability due to particle sedimentation and aggregation in the prior art. The magnetic microcapsule comprises a wall material and a core material, the wall material is a mixture comprising an anionic polymer and a cationic polymer, and the core material is a mixture comprising magnetic particles, non-magnetic particles, an oily solvent and a suspension stabilizer; the suspension stabilizer comprises any one or more of phthalic ester, polyamide wax, polysiloxane, sorbitan oleate, sorbitan monostearate, silicon dioxide, magnesium aluminum silicate and magnesium lithium silicate; according to the invention, magnetic particles and non-magnetic particles can be prevented from settling and gathering, and writing fluency and trace durability are ensured.

The invention discloses a nano low-pass filter based on a skyrmion spring oscillator, which is characterized in that an antiferromagnetic coupled MnSi magnetic film structure is prepared, spin transfer torque is utilized to drive skyrmion to move, and a stable oscillation mode is formed through film boundary reflection; by changing the length Lx of the thin film and combining with an accurate mathematical formula, the oscillation frequency of the skyrmion is dynamically regulated and controlled, and high-precision adjustment of the cut-off frequency is achieved. Skyrmion oscillation shows an obvious high-frequency attenuation characteristic when an input signal is higher than a cut-off frequency, and an out-of-band signal is quickly cut off, so that out-of-band leakage is remarkably reduced, and the quality of a filtered signal is improved. The magneto-resistance effect is adopted to read oscillation response, a signal output structure is simplified, system power consumption is reduced, meanwhile, the anti-ferromagnetic coupling structure effectively suppresses spin Hall effect interference, and high stability of system operation is ensured.

The invention discloses intelligent tongue muscle pressure detection equipment, and relates to the technical field of tongue muscle pressure detection. Comprising an array type sensing assembly, and the array type sensing assembly comprises an array type Hall sensor, a middle elastic body and a magnetic film which are sequentially connected from bottom to top; the array type Hall sensor comprises a substrate layer, a plurality of graphene active parts are uniformly arranged on the substrate layer in an array mode, and metal electrodes are arranged on the peripheral sides of the graphene active parts. The device further comprises a handheld assembly, and the handheld assembly is connected with the array type sensing assembly. The array type sensing assembly is integrally soft and can fully combine with the deformation characteristic of human skin, and the multiple graphene active parts are arranged in an array and matched with the vertical periodic magnetization magnetic film, so that the force resolution, the sensitivity, the linearity, the hysteresis and the like are greatly improved; and a basis is provided for subsequent clinical experiments such as tongue muscle pressure test and marketization application.

The invention discloses a visual tactile sensor, an electronic skin and a robot, relates to the field of sensors, and is used for improving the comprehensiveness and sensitivity of stress detection. The sensor comprises a magnetic film covering the top surface and the side surface, and the magnetic film is prepared by mixing magnetic powder and silicone rubber; the support supports the magnetic thin film, a magnetic display card and a light source are arranged in the support, the visual touch collector collects magnetic induction data and development data of stress of the magnetic thin film, and then the multi-mode pressure detection model analyzes the stress position and / or the stress size. The stress detection sensitivity is high, comprehensive detection of the top face and the side faces can be achieved, and the detection precision is high.

The invention belongs to the technical field of low-noise magnetic shielding, and particularly relates to a flexible high-temperature-resistant magnetic shielding film and a preparation method thereof.The preparation method comprises the steps that a PI double-sided tape is attached to one side of a glass slide, and a PTFE / PDMS film is attached to one side of the glass slide to serve as a substrate sprayed by a silver nanometer bundle net; preparing a silver nanowire solution, and spraying the silver nanowire solution on the PTFE / PDMS film by using a spray gun to obtain a silver nano bundle net; spin-coating, curing and transferring the silver nano bundle net to obtain a flexible substrate of the cured silver nano bundle net; according to the flexible high-temperature-resistant magnetic shielding thin film and the preparation method thereof, the characteristic that the silver nanometer bundle net has the electromagnetic shielding performance is utilized, soft magnetic thin films are sputtered on the two sides of the silver nanometer bundle net, the shielding effectiveness of a traditional single-layer shielding thin film is further improved, and the flexible high-temperature-resistant magnetic shielding thin film is obtained. The obtained thin film is light in weight and meets the flexible application requirement of the magnetic shielding thin film, the application space is complex and changeable, and the flexible shielding thin film is light in weight, good in flexibility and excellent in shielding performance.

The invention relates to a high-toughness anti-crack magnetic decorative film and a preparation method thereof. The decorative film is prepared from the following raw materials in parts by weight: 40 to 60 parts of poly (dihydrothiophene-vinyl ether) copolymer, 10 to 25 parts of shell layer self-assembly modified Fe3O4 nanosheets, 5 to 15 parts of polyether ester block elastomer, 0.5 to 2 parts of sodium dodecyl benzene sulfonate, 0.5 to 1.5 parts of fluorosilane coupling agent, 0.1 to 1.0 part of 2-hydroxybenzotriazole ultraviolet absorbent, 3 to 6 parts of bisphenol A type epoxy curing agent and 0.05 to 0.5 part of imidazole catalyst. The flexible copolymer is synthesized through copolymerization of dihydrothiophene and vinyl ether, the modified Fe3O4 nanosheets form a Fe3O4 structure through coprecipitation of ferric chloride and ferrous chloride and regulation and control of ammonia water, and shell self-assembly coating is carried out through tetraethoxysilane and a block micromolecule interface agent. The material has excellent tensile strength, elongation at break, magnetic adsorption force and cycling stability, and is suitable for the application fields of flexible magnetic films and high-adhesion decorations.

The invention provides a magnetic resin composition, a magnetic film and application thereof. The magnetic resin composition comprises (A) a magnetic filler, (B) epoxy resin, (C) a curing agent and (D) a flexibilizer, the magnetic filler (A) comprises carbonyl iron powder (A1), FeSiCr alloy (A2) and iron-based nanocrystals (A3); based on the total mass of the magnetic resin composition as 100%, the content of the (A) magnetic filler is 85% or more; based on 100% of the total mass of the magnetic filler (A), the content of the carbonyl iron powder (A1) is 55%-65%, the content of the FeSiCr alloy (A2) is 15%-25%, and the content of the iron-based nanocrystalline (A3) is 15%-25%. According to the magnetic resin composition and the preparation method thereof, specific types of magnetic fillers are introduced and compounded according to a specific content, so that the magnetic resin composition has relatively high magnetic conductivity and relatively low magnetic loss after being cured, and meanwhile, the binding force with a copper layer is relatively high.

The invention provides a tactile sensor and a calibration method of the tactile sensor, and belongs to the technical field of sensors, the tactile sensor comprises a magnetic sensing layer, a pressure sensing layer and a flexible stress layer which are stacked in sequence; a magnetic film made of a magnetic material is embedded in the flexible stress layer, and after the flexible stress layer is subjected to three-dimensional force, the position of the magnetic film is changed; the pressure sensing layer is used for measuring a normal force of a three-dimensional force; and the magnetic sensing layer is used for detecting and acquiring magnetic field data of the magnetic film at different positions before and after the magnetic film is stressed so as to solve a three-dimensional force. According to the touch sensor provided by the invention, after the flexible stress layer is stressed, the pressure is transmitted to the pressure sensing layer through deformation, so that normal force detection is realized; meanwhile, according to the magnetic field change of the magnetic sensor before and after the flexible stress layer is stressed, the displacement change of the magnetic film is calculated, and finally the three-dimensional force is generated through decoupling.

The invention discloses a method for reducing critical current density in SOT driving magnetization overturning, and relates to the technical field of spintronics, and the method comprises the following steps: building a structure model of a magnetic film which is of a double-layer structure, symmetrically arranging two defect areas on the magnetic layer along the x-axis direction, the physical parameter value of the defect area is smaller than that of the magnetic layer; the junction of the magnetic layer and the defect region is a domain wall; the structure model is subjected to micro-magnetic simulation, a magnetic domain and domain wall evolution process is obtained, the critical current density in SOT driving magnetization overturning is determined based on the evolution process, the critical current density is the minimum current density for driving domain wall movement, and the maximum current density is the minimum current density for driving domain wall movement. And the SOT effective field generated by the critical current density is the minimum SOT effective field required for unpinning the domain wall from the defect area. The method can be compatible with the existing micro-nano electronic process and material system.

The invention relates to a three-dimensional force-temperature dual-mode tactile sensor based on a magnetic thin film. The sensor comprises a graphene-silica gel elastomer, a thermocouple, a magnetic film, an elastomer strut, a wrapping body, a Z-axis TMR element and a flexible printed circuit board, wherein the three Z-axis TMR elements are distributed on the flexible printed circuit board in a right-angle shape; the wrapping body covers the flexible printed circuit board and wraps the Z-axis TMR element array therein; the five elastomer supporting columns are distributed on the wrapping body in a five-point plum blossom shape; the graphene-silica gel elastomer is fixed on the five elastomer supporting columns; a magnetic film and a thermocouple are wrapped in the graphene-silica gel elastomer, and the thermocouple is located on the magnetic film. The touch sensor has the advantages of being low in hysteresis, high in resolution, high in sensitivity, easy to decouple and multifunctional, and double information sensing of external three-dimensional force and temperature can be achieved at the same time.

The invention belongs to the technical field of magnetic field sensing, and discloses a silicon-based anisotropic magnetic film non-contact magnetic field sensing device which comprises an organic glass probe, a rotating table, a steering engine, a support, a solar panel, a rear-end waterproof box and a fixed base which are sequentially combined from top to bottom. Magnetic field components at different angles are obtained through the variable attitude angle scanning mechanism, so that the optimal sensing angle is selected, measurement errors caused by installation attitude deviation, structural tolerance and environmental disturbance can be effectively eliminated, the reliability and stability of the system in outdoor long-term operation are remarkably improved, and the reliability and stability of the system in outdoor long-term operation are improved. The magnetic field of the wire is sensed in a non-contact mode, the light-weight probe and the movable fixing support are matched, fixation can be directly carried out below the measured wire, the installation process is simple, convenient and rapid, and the device is very suitable for the rapid arrangement and temporary monitoring requirements of an electric power field.

A magnetic thin film laminated structure includes a first layer structure and a second layer structure stacked on the first layer structure. The first layer structure includes an adhesive layer on a substance, the adhesive layer being made of a material having compressive stress, at least one pair of layers on the adhesive layer, each pair of the at least one pair of layers including a magnetic film layer and an isolation layer, and an additional magnetic film layer on the at least one pair of layers. The second layer structure includes another adhesive layer on the first layer structure, another at least one pair of layers on the another adhesive layer, each pair of the another at least one pair of layers including a magnetic film layer and an isolation layer, and another additional magnetic film layer on the another at least one pair of layers.

[Problem] To provide: a highly magnetized magnetic material film having a thickness of several tens to several hundreds of microns; a magnetic-material-film-equipped member having the magnetic material film; an actuator; and a sensor. [Solution] A magnetic material film 10 includes a main magnetic material layer 20 having at least one or more crystal particles, and the concentration (T / (R+T)) of a transition metal element (T) with respect to the total (R+T) of a rare earth element (R) and the transition metal element (T) in at least one or more crystal particles 22 changes along the thickness direction of the main magnetic material layer 20.

To provide an aluminum alloy sheet for a magnetic disk, an aluminum alloy sheet blank for the magnetic disk, and an aluminum alloy sheet substrate for the magnetic disk, having satisfactory rigidity and capable of suppressing thermal deformation during magnetic film sputtering.SOLUTION: An aluminum alloy sheet for a magnetic disk, comprising: 0.1 to 7.0 mass% of Mg; 0.005 to 1.0 mass% of Cr; 3 to 100 mass ppm of Be; 0.20 mass% or less of Si; 0.05 to 5.9 mass% of at least one or more of Fe, Mn, and Ni in total; and a balance of Al and impurities.SELECTED DRAWING: None

A scalable high-impedance component (SHIC) may include a flexible polyimide core may include one or more vias. The SHIC may include a magnetic film formed on one or more sides of the flexible polyimide core. The SHIC may include a polymer layer formed on the magnetic film, the polymer layer isolating the magnetic film and the flexible polyimide core. The SHIC may include a metal layer formed on the polymer layer and within the vias, such that the metal layer forms windings that extend through the one or more vias. The SHIC may include a magnetic paste disposed on the metal layer such that the SHIC shields a desired frequency of electromagnetic interference.

The invention relates to a novel moving magnet type electromagnetic MEMS micromirror and a manufacturing method thereof.The novel moving magnet type electromagnetic MEMS micromirror comprises a coil platform and a coil, a mirror surface structure comprises a mirror surface body and a magnet arranged on the upper surface of the mirror surface body, the magnet is arranged above the coil, and the mirror surface body comprises a frame and a mirror surface platform arranged in the frame; the mirror surface platform is connected with the inner wall of the frame through the rotating shaft; the magnet and the coil are used for driving the mirror surface platform to realize two-dimensional deflection; according to the MEMS electromagnetic micro-mirror, electromagnetic force is provided for deflection of the mirror surface through cooperation of the magnet and the coil, and the problems of low magnetic energy density, poor thermal stability and low durability caused by deposition of a magnetic film on the mirror surface of a traditional MEMS electromagnetic micro-mirror are solved. By integrating the Hall device, the problem of real-time measurement of the rotation angle of the mirror surface is solved. In addition, a high-quality large-size mirror surface is manufactured, the problems that a traditional fast reflecting mirror is large in mass and low in integration degree are solved, and the problems that fast reflecting mirrors in other MEMS driving modes are small in deflection angle and small in mirror surface size are solved.

The invention discloses a rare earth doped iron-cobalt-based soft magnetic thin film material as well as a preparation method and application thereof. The chemical formula of the components of the rare earth doped iron-cobalt-based soft magnetic thin film material is (Re2Co17) x (Fe0. 65Co0. 35) 1-x, in the formula, Re is at least one of lanthanide elements, scandium and yttrium, 0 lt, 0 lt, 0 lt, 0 lt, 0 lt, 0 lt, 0 lt, 0 lt, 0 lt, 0 lt, 0 lt, 0 lt, 0 lt, 0 lt, 0 lt, 0 lt, 0 lt, 0 And x is less than or equal to 0.2. The preparation method of the rare earth doped iron-cobalt-based soft magnetic thin film material comprises the following steps: carrying out double-target magnetron sputtering by adopting a Re2Co17 target material and a Fe < 0.65 > Co < 0.35 > target material, and then carrying out heat treatment. The rare earth doped iron-cobalt-based soft magnetic thin film material has the advantages of high cut-off frequency, high resistivity, small magnetic loss and the like, has excellent high-frequency soft magnetic performance and static magnetic performance, is suitable for being applied to a high-frequency working environment, is simple in preparation process and low in production cost, and is suitable for large-scale industrial production and application.

The application discloses a visual tactile sensor, an electronic skin and a robot, relates to the field of sensors, and aims to improve the comprehensiveness and sensitivity of force detection. The sensor comprises a magnetic film covering the top surface and the side surface, which is made of mixed magnetic powder and silicone rubber; a support supports the magnetic film, a magnetic display card and a light source are arranged in the support, the magnetic sensing data and the display data of the magnetic film under force are collected by a visual tactile collector, and a multi-modal pressure detection model is used for analyzing the force position and / or the force size. The application has high force detection sensitivity, can realize comprehensive detection of the top surface and the side surface, and has high detection precision.

The application discloses a four-stage paddle thrombus-removing micro robot, a preparation method and a magnetic field driving thrombus-removing micro robot system, relates to the technical field of micro robots, and comprises a conical drill bit, a main straight rod and a four-stage paddle group, wherein the conical drill bit is made of a biodegradable material; the bottom of the conical drill bit is connected with the main straight rod; the main straight rod is internally provided with a thrombolytic drug; the four-stage paddle group is arranged on the outer circumferential surface of the main straight rod in an axial direction; the paddle group comprises three paddle blades which are centrally symmetrical to the axis of the main straight rod; the paddle blades in the adjacent two-stage paddle groups are arranged in a staggered manner; the paddle blades are of a round head structure; the thickness of the paddle blades gradually increases from outside to inside; and the surface of the micro robot is coated with a magnetic film and is subjected to directional magnetization treatment. The application can obtain strong movement ability and stable movement state under the accurate control of a movement system, realizes intravascular drilling and crushing of a thrombus, and can biodegrade and release the thrombolytic drug after surgery, so as to solve the problem of downstream vascular embolism after drilling.