The invention discloses a
rare earth doped iron-
cobalt-based soft
magnetic thin film material as well as a preparation method and application thereof. The
chemical formula of the components of the
rare earth doped iron-
cobalt-based soft
magnetic thin film material is (Re2Co17) x (Fe0. 65Co0. 35) 1-x, in the formula, Re is at least one of
lanthanide elements,
scandium and
yttrium, 0 lt, 0 lt, 0 lt, 0 lt, 0 lt, 0 lt, 0 lt, 0 lt, 0 lt, 0 lt, 0 lt, 0 lt, 0 lt, 0 lt, 0 lt, 0 lt, 0 lt, 0 And x is less than or equal to 0.2. The preparation method of the
rare earth doped iron-
cobalt-based soft
magnetic thin film material comprises the following steps: carrying out double-target magnetron
sputtering by adopting a Re2Co17 target material and a Fe < 0.65 > Co < 0.35 > target material, and then carrying out heat treatment. The rare earth doped iron-cobalt-based soft magnetic thin
film material has the advantages of high
cut-off frequency,
high resistivity, small magnetic loss and the like, has excellent high-frequency soft magnetic performance and static magnetic performance, is suitable for being applied to a high-frequency
working environment, is simple in preparation process and low in production cost, and is suitable for large-scale industrial production and application.