A single bipolar coexistence resistance change memory of single-layer amorphous
gallium oxide with controllable defects and a preparation method, the device comprises a lower
electrode, a resistance change material layer and an upper
electrode arranged in turn from bottom to top; the lower
electrode, the resistance change material layer and the upper electrode are all single-layer structures, the lower electrode adopts a Pt substrate, the resistance change material layer adopts an amorphous
gallium oxide film, and the upper electrode adopts an
active electrode Ag; wherein the resistance change material layer is prepared by a magnetron
sputtering method, the
oxygen defect concentration in the amorphous
gallium oxide film can be controlled by changing the proportion of
argon and
oxygen flow in the magnetron
sputtering process, so that the device has both unipolar and bipolar
modes, and only the same
current limiting is used in the single bipolar reversible change, and the same
current limiting condition can simplify the
circuit design of the integrated resistance change memory periphery, so as to reduce the
integrated circuit area and the circuit
power consumption. Finally, a
vacuum evaporation equipment is used to prepare a 100-200nm upper electrode Ag. The present application simplifies the process flow, and has the advantages of simple structure, low
power consumption and high device performance.