The invention discloses a defect detection method,
system and device and
semiconductor measurement equipment, and relates to the technical field of
semiconductor manufacturing, and the method comprises the steps: obtaining image data of a
semiconductor sample to be detected, and carrying out the preprocessing operation of
data combination and the like determined according to the input requirement of a defect detection
algorithm on the image data through a first
programmable hardware processor, and generating target
processing data, then sending the target
processing data to the cluster
server, executing defect detection calculation on the target
processing data by using the cluster
server, and outputting a defect detection result of the semiconductor sample to be detected. The first
programmable hardware processor is used for executing preprocessing operation on the image data,
data combination and preprocessing are completed before the cluster
server executes defect detection of the image data, participation of a processor of the cluster server is not needed, the calculation burden of the server in the preprocessing stage of the image data can be greatly reduced, and the processing efficiency is improved. Therefore, the technical effect of reducing the number of cluster servers is achieved.