59 results about "Deformable mirror" patented technology

The invention discloses a wavefront distortion correction method based on a dynamic adaptive MESSA algorithm and a coherent free space optical communication system. The problems that an existing method is prone to falling into a local optimal solution, the correction effect is poor under dynamic turbulence, and the adaptive capacity is weak are solved. According to the method, an individual position is initialized through a Circle chaotic mapping method, iterative optimization is carried out in combination with a Levy flight strategy and a variable spiral search strategy, and a step size control parameter, a safety threshold, spiral strength and a spiral adjustment coefficient are dynamically adjusted through a double-discrimination dynamic adaptive parameter adjustor. And reducing the population scale according to a nonlinear population reduction strategy, finally outputting an optimal individual position, and driving the deformable mirror to perform wavefront correction according to a control voltage vector corresponding to the optimal individual position. According to the invention, the dynamic adjustment of the algorithm parameters and the population structure is realized, and the adaptability, convergence speed and stability of the wavefront distortion correction method in the dynamic turbulence environment are enhanced.

The invention relates to the technical field of image processing, and discloses a laser wavefront distortion correction system and method based on adaptive optics, and the system comprises a first module which is used for calculating a noise covariance matrix and an interaction matrix; the second module is used for solving a control matrix and a phase reconstruction matrix; the third module is used for calculating to obtain a current slope vector; the fourth module is used for updating a deformable mirror command; the fifth module is used for calculating to obtain a point spread function; and the sixth module is used for calculating an image quality index and outputting a correction result. According to the method, a noise covariance matrix and an interaction matrix are accurately constructed under reference light, and a weighted least square method with double regularization is combined, so that the influence of measurement noise is effectively inhibited, the stroke constraint of an actuator is balanced, and the robustness of a correction model is greatly improved; by means of combination of integral control, leakage processing and amplitude limiting design, saturation of an actuator due to command accumulation is avoided, and correction error superposition is prevented.

The invention provides a performance prediction and control method for a multi-physics-field coupled high-energy laser system, and relates to the technical field of laser systems, and the method comprises the steps: obtaining optimized environment parameters; configuring laser system parameters; determining turbulence compensation parameters and laser energy distribution data; determining turbulence compensation control parameters at the current moment; controlling a deformable mirror of the high-energy laser system based on the turbulence compensation control parameters; determining optical element temperature field data, optical element deformation and wave aberration variation based on the laser system parameters and the laser energy distribution data; determining task feasibility of the current task based on the optical element temperature field data; under the condition that the task feasibility is feasible, determining a target dynamic damage threshold; and determining a performance prediction result of the high-energy laser system. According to the technical scheme, control and performance prediction are carried out on the high-energy laser system based on multi-parameter cooperation in the coupled physical field, the environmental adaptability and the parameter configuration efficiency are improved, and closed-loop compensation can be carried out in real time.

The invention discloses a wavefront detection-free adaptive optical correction method and system, and the method comprises the steps: obtaining a real in-focus image and a real out-of-focus image of a to-be-corrected light beam, and outputting an updated deformable mirror control voltage through a physical information neural network; generating a predicted wavefront phase according to the deformable mirror control voltage signal and a deformable mirror voltage-phase mapping model; generating a predicted in-focus image and a predicted out-of-focus image through a derivable Fourier optical propagation model; constructing a label-free composite loss function according to the real in-focus image, the real out-of-focus image, the predicted in-focus image and the predicted out-of-focus image; performing unsupervised training updating on the physical information neural network according to the composite loss function, and performing repeated iteration to obtain an optimized deformable mirror control voltage; and driving the deformable mirror to carry out self-adaptive optical correction in real time according to the optimized deformable mirror control voltage to obtain a correction result. According to the invention, the correction efficiency and the system stability are obviously improved.

The invention relates to the technical field of free space optical communication, in particular to an atmospheric turbulence adaptive optical compensation method for wireless laser communication, which comprises the following steps of: performing light beam coarse tracking by using a fast reflector to eliminate tilt drift; monitoring the received light intensity of the wavefront sensor in real time, and setting a threshold value for mode judgment; when a channel is good, a Kalman filtering algorithm is adopted to predict and compensate system delay, modal decoupling is carried out on reconstructed wavefront, a large-stroke deformable mirror is controlled to correct low-frequency large-amplitude aberration, and a micro-electro-mechanical deformable mirror is controlled to correct high-frequency residual error; and when the channel is in deep fading or the detector fails, the blind optimization mode is automatically switched, the state of the large-stroke deformable mirror is locked, and SPGD iterative control is applied to the micro-electro-mechanical deformable mirror based on the communication light intensity. According to the invention, through a double-deformable mirror frequency division cooperation and hybrid sensing strategy, the problems of insufficient bandwidth, limited stroke, easy interruption and the like of a traditional system under strong turbulence are effectively solved, and the optical fiber coupling efficiency and the robustness of a communication link are significantly improved.

The invention provides a fundus camera system integrated with adaptive optics and a correction method, and relates to the technical field of ophthalmology imaging. The fundus camera system comprises a beacon light source, an imaging light source and an imaging sensor; the device comprises a wavefront sensor, a wavefront correction device and a control module, and the wavefront correction device comprises a focusing lens group and a deformable reflector; the focusing lens group and the deformable reflector are arranged in the same light path from the beacon light source to human eyes and from the human eyes to the wavefront sensor; moreover, the control module executes a two-step closed-loop control strategy of first focusing and second correction: firstly, based on a first measurement result of the wavefront sensor, the focusing lens group is driven to move so as to compensate low-order aberration; and after the focusing is completed, the deformable reflector is driven to deform based on the subsequent measurement result of the wavefront sensor so as to compensate the high-order aberration in a closed-loop manner. On the basis of inheriting the advantage of rapid focusing in the prior art, the self-adaptive optical technology is further integrated, so that the limitation of high-order aberration on resolution is solved.

An aberration regulation method of a reflective double-beam interference exposure system, comprising: constructing a reflective double-beam interference exposure system, dividing a light beam output by a laser into two double beams with the same intensity, and forming an interference exposure field; constructing an aberration regulation system, testing and recording the aberration of the double-beam light path by using a spherical interferometer, and regulating the wavefront of any light beam in the double beam by using a deformable mirror, so that the aberration of the light beam matches the aberration of the other light beam, and the regulation of the aberration of the interference exposure field is completed. The present application solves the problems of precise assembly and adjustment, wavefront aberration control and the like of the reflective double-beam interference exposure system based on a large-aperture off-axis parabolic mirror, and provides a new solution for the preparation of a meter-level large-aperture, low-aberration diffraction grating.

This invention relates to an interferometric measurement method and apparatus for large warp wafers, belonging to the field of optical detection and semiconductor measurement technology. The detection light is polarized and birefringently split to form P-beams and S-beams, which are then further divided into P-reference beams, S-silicon beams, S-reference beams, and P-silicon beams, respectively. By adjusting the spatial orientation of the reference mirror and the wafer under test, and using an aperture for spatial filtering, the P-reference beam and S-silicon beam are allowed to enter the subsequent optical path, while the S-reference beam and P-silicon beam are blocked. The S-silicon beam forms a measurement wavefront carrying information about the surface shape of the wafer under test. The P-reference beam is modulated by a deformable mirror to form a modulated reference wavefront similar to the measurement wavefront. The two form a resolvable interference fringe pattern at the camera. A wavefront sensor measures the surface shape information of the deformable mirror, and a calculation system obtains the surface shape information of the wafer under test based on the deformable mirror surface shape information and the relative surface shape change. This invention can reduce the interference fringe density in the detection of large warp wafers, reduce splicing measurement errors, and improve detection efficiency and accuracy.

Device for modulating a laser beam, including a deformable mirror with a reflective surface to receive an incident laser beam and to reflect a corresponding reflected laser beam provided with an output wavefront, and an actuator for deforming the reflective surface. The device also includes a detection system having an electromagnetic radiation source to emit a control beam incident on the reflective surface, and a wavefront sensor to intercept the reflected control beam reflected by the reflective surface to detect measurements of the wavefront of the reflected control beam and generate corresponding measurement signals. The device further includes a logic control unit, which receives the measurement signals, associates them with corresponding forms of the output wavefront of the reflected laser beam, actuates the actuator to deform the reflective surface in order to feedback control the output wavefront of the reflected laser beam.

In an aspect of the present invention, a new active optic is provided, namely, a photo-magnetically actuated deformable mirror (PMADM) made of a magnetic composite structure and an optical quality substrate layer. The magnetic layer is composed of Polydimethylsiloxane (PDMS) and powdered ferromagnetic CrO2. A magnet may be used to deform the mirror surface. The powdered CrO2 has a low Curie temperature (preferably around 395 K) which allows changing the magnetization of the magnetic layer using a laser heating source, thus providing control over the deformation. In one embodiment, the structure has an overall dimension of 1.2 inch 1.2 inch 175 μm with an optical pupil diameter of 8 mm. The PMADM is estimated to deform to a maximum stroke of 8.7731 μm before failure with a 3 safety factor.

The invention relates to the technical field of light field wavefront sensing, in particular to a method for calibrating a multi-spatial sampling rate response matrix of a deformable mirror, and the method comprises the steps: obtaining a response matrix with the highest spatial sampling rate through a checkerboard algorithm; receiving a wavefront target spatial sampling rate input by a user, and calculating the size of a down-sampling window of the response matrix of the highest spatial sampling rate; performing down-sampling on the highest spatial sampling rate response matrix to generate a slope vector of a target spatial sampling rate, performing slope consistency evaluation in a down-sampling window, and judging whether the wavefront target spatial sampling rate is suitable for current wavefront distribution or not according to an evaluation result; and splicing slope vectors of all wavefront target space sampling rates to generate a target space sampling rate response matrix. The target spatial sampling rate response matrix can be generated as required only by executing the maximum spatial sampling rate calibration once, the calibration workload is reduced, and the system efficiency is improved.

The invention provides a multi-site adaptive optical correction method and device applied to a mesoscopic two-photon scanning microscope, and the method comprises the steps: employing a resonance mirror and two galvanometers as a scanning module of a system, dividing a whole imaging view into a plurality of sub-regions, and carrying out the sequential scanning of the sub-regions one by one; a reflective deformable mirror is used as an aberration compensator, and an aberration compensation value is updated in real time; the whole visual field is filled with a regular hexagon, the center and vertex positions of the regular hexagon are set as aberration compensation points, and a reflective deformable mirror is used for carrying out aberration correction on the compensation points in advance; and automatically loading an optical aberration compensation value closest to the center of the sub-region according to the central coordinate position of the sub-region so as to ensure that the image resolution near the optical diffraction limit is kept in the whole view region.

The present application relates to the technical field of adaptive optics, and particularly provides a transverse piezoelectric deformable mirror and a preparation method thereof, which structurally comprises a lens, electrodes and a driving element for driving the lens to deform, the driving element can comprise a bulk driving piezoelectric ceramic piece for bulk driving, or can comprise a discrete driving piezoelectric ceramic piece for fine driving deformation, in order to simplify the preparation of the driving electrode array and the complicated preparation process of the driving electrode conductive circuit in the preparation process of the transverse piezoelectric deformable mirror, the present application designs a flexible circuit board with integrated driving wiring, the patterned driving electrode array and the corresponding conductive circuit can be prepared in advance, the flexible circuit board and the deformation driving element can be directly bonded by conductive adhesive, and two technical difficulties in the manufacture of the transverse piezoelectric deformable mirror, i.e. the preparation and electrical connection of the driving electrode array, are directly solved, the manufacturing process of the transverse piezoelectric deformable mirror is simplified, and the compactness of the structure is improved.

The application discloses a compact voice coil deformable mirror based on a micro voice coil driver and belongs to the field of adaptive optics. The application considers that the output force of the micro voice coil driver is two to three orders of magnitude smaller than that of a conventional voice coil driver, adopts a polyimide to replace a glass, silicon carbide and other materials with a large stiffness coefficient which are conventionally used to make a thin mirror surface, provides certain stiffness for the polyimide through a spring structure so as to meet the stiffness requirement, comprehensively considers the correlation between structure parameters, materials, working currents and other performances of the voice coil deformable mirror and the phase modulation amount, frequency and other performances of the voice coil deformable mirror, balances and optimizes the structure parameters, and obtains the compact voice coil deformable mirror with the best comprehensive performance. It is verified through experiments that the single micro driver provided in the application can reach a maximum output force of 1mN, a motor constant of 0.032N x W ‑1 / 2 ; the phase modulation amount of the compact deformable mirror reaches ±45um, and the first resonance frequency reaches 2000Hz.

The present disclosure relates to the technical field of light field wavefront sensing, and particularly relates to a method for calibrating a multi-space sampling rate response matrix of a deformable mirror, which adopts a checkerboard algorithm to obtain a response matrix of the highest space sampling rate; receives a user input of a wavefront target space sampling rate, calculates a down-sampling window size of the response matrix of the highest space sampling rate; down-samples the response matrix of the highest space sampling rate to generate a slope vector of the target space sampling rate, and performs a slope consistency evaluation within the down-sampling window, judges whether the wavefront target space sampling rate is suitable for the current wavefront distribution according to the evaluation result; and splices the slope vectors of all the wavefront target space sampling rates to generate a response matrix of the target space sampling rate. Only a single execution of the calibration of the highest space sampling rate is required, and the response matrix of the target space sampling rate can be generated as required, thereby reducing the calibration workload and improving the system efficiency.

The invention discloses a deformable mirror precision adjustment method for a self-adaptive optical auxiliary microscope, and belongs to the field of microscopic imaging. The method is simple in process steps, high in practicability and wide in application prospect. A simple and low-cost fluorescent bead sample is utilized to quickly realize precise adjustment of transverse and axial positions of the deformable mirror, so that the light path adjustment difficulty of the self-adaptive optical auxiliary microscope can be greatly reduced, and the application range of self-adaptive optics in microscopic imaging is expanded.

The present application relates to a kind of big warping wafer interference measurement method and device, belong to optical detection and semiconductor measurement technical field.Detection light is converted and diffracted after birefringence, and P light and S light are formed, and P reference light, S silicon light, S reference light and P silicon light are formed respectively;By adjusting the spatial posture of reference mirror and the wafer to be measured, and cooperating with spatial screening of diaphragm, P reference light and S silicon light enter subsequent optical path, while S reference light and P silicon light are blocked;S silicon light forms the measurement wave front carrying the wafer to be measured surface shape information, P reference light is modulated as the modulation reference wave front similar to the measurement wave front by deformable mirror, and the two form analytical interference fringe pattern at camera;Wave front sensor measures deformable mirror surface shape information, and the computing system obtains the surface shape information of the wafer to be measured according to deformable mirror surface shape information and relative surface shape variation amount.The present application can reduce the interference fringe density in the detection of big warping wafer, reduce splicing measurement error, improve detection efficiency and accuracy.

An optical system includes an optical antenna configured to receive and / or transmit laser beams through a first aperture, a gimbal-mounted deformable mirror (GDM) configurable to correct aberrations of a received laser beam, a power selector configurable to split the received laser beam into a first light beam and a second light beam, a wavefront sensor configured to measure a wavefront of the first light beam, a collimator configured to couple the second light beam into an optical fiber, and a controller configured to control the GDM for laser beam tracking and for correcting the aberrations of the received laser beam based on the wavefront of the first light beam measured by the wavefront sensor. The GDM is configurable to scan, within a field of regard (FOR), a beacon beam to be transmitted for laser beam tracking; or scan within the FOR to acquire a beacon beam transmitted by a terminal.

A radiation system comprising: a deformable mirror having a reflective surface arranged to receive and reflect a laser beam to form a reflected laser beam; a beam splitter arranged to split the reflected laser beam into a first portion and a second portion; a sensor; a focusing system configured to form an image of the reflective surface at a sensor using a first portion of the reflected laser beam, the sensor configured to output beam data representative of the reflected laser beam; means for generating radiation using a second portion of the reflected laser beam; and a controller operable to cause the deformable mirror to deform the reflective surface based on the beam data.

The invention discloses a three-dimensional light sheet fluorescence microscopic imaging device without mechanical motion and an imaging method, and solves the problems that a galvanometer affects the imaging quality and limits the imaging speed, the image post-processing process is complicated, the image processing time and cost are increased, and the imaging efficiency is high. The device comprises a multi-wavelength laser source, a light field regulation and control light sheet generation and movement module, a double-objective lens and sample box module, a deformable mirror focusing module and a wide-field imaging module which are sequentially arranged along a light path, according to the three-dimensional light sheet fluorescence microscopic imaging device without mechanical motion, generation and axial movement of the illumination light sheet are realized by utilizing a pure optical method, the complexity of the three-dimensional light sheet fluorescence microscopic imaging device without mechanical motion is reduced, the environmental interference resistance is improved, and various different types of illumination light sheets can be flexibly and dynamically generated to meet different imaging scenes.

The application provides an optical system of a fundus camera, which comprises an ocular lens, an aperture diaphragm, an aberration-correcting lens group, a field lens group, a half-transmission half-reflection mirror and an imaging lens group, light of a light source is irradiated to a pupil through the ocular lens, the light goes out from the pupil and sequentially passes through the ocular lens, the aperture diaphragm, the aberration-correcting lens group and the field lens group to reach the half-transmission half-reflection mirror, 50% of the light transmits through the half-transmission half-reflection mirror to the imaging lens group and is imaged on a CCD, and the other 50% of the light is reflected by the half-transmission half-reflection mirror and is used for connection with a wavefront sensor, and the field lens group comprises a deformable mirror.The application realizes synchronous and efficient collection of high-resolution fundus imaging and high-precision wavefront sensing by optimizing the structure of the aberration-correcting lens group, integrating the field lens group and the deformable mirror and adopting the half-transmission half-reflection mirror light splitting design, and the imaging quality, light energy utilization rate and functional integration degree of the system are improved, and the high-performance requirement of the fundus camera in modern ophthalmic diagnosis and treatment is met.

The invention discloses a low-orbit satellite laser broadcast type remote sensing data distribution system, and belongs to the technical field of satellite communication. The system comprises a laser communication unit, a task sensing unit, a distributed beam control unit, a file priority forwarding unit, a resource scheduling unit and an inter-satellite cooperative routing unit. According to the invention, the adaptive optics is embedded into the laser terminal, so that the atmospheric turbulence compensation precision is greatly improved, and the laser link stability is enhanced; meanwhile, a high-performance deformable mirror is adopted, the response frequency is greatly improved, the dynamic response capacity of the system is enhanced, a traditional fixed rate control mode is broken through, wide-range stepless speed change transmission is achieved, specific transmission rates are customized for different application scenes, diversified requirements are met, a packet forwarding scheme is improved, and a three-level threshold mechanism is introduced; the file processing strategy is flexibly adjusted according to the transmission pause count, the idle time of computing resources is effectively shortened, and the transmission efficiency is improved.

The application relates to a method for optimizing the arrangement of a deformable mirror actuator, which comprises the following steps: obtaining an influence function matrix between the actuator control voltage of a deformable mirror and the mirror deformation; selecting a Zernike polynomial order, dividing to obtain a basic region, and performing'region folding' on the actuator of the deformable mirror; determining the optimal arrangement of the actuator in the basic region according to the obtained influence function matrix and the obtained basic region; and performing overall 'unfolding' on the'region folded' actuator of the deformable mirror to obtain the optimal topological arrangement of the entire deformable mirror. The application can reduce the calculation amount and complexity of the actuator control system in the actual wavefront correction process, and relieve the fatigue of the actuator during long-time work.

The application discloses a wavefront correction method based on an extreme learning mechanism and constructing a nonlinear influence function, and belongs to the technical field of adaptive optics. The method comprises the following steps: constructing a nonlinear training set of a Hartmann wavefront sensor slope vector and a deformable mirror voltage vector; training by using an extreme learning machine neural network, optimizing an activation function and a number of hidden layer neurons; after the training is completed, collecting a to-be-corrected wavefront slope vector, inputting the trained neural network model to obtain an error voltage vector; processing the error voltage through a proportional-integral controller to obtain a correction voltage, driving a deformable mirror to generate a compensation surface shape, realizing wavefront correction, and forming a closed-loop control. The application breaks through the limitation of a traditional linear recovery matrix, can more accurately calculate the error voltage, significantly reduces a correction residual error, improves a convergence speed, and shows excellent adaptability and correction effect in a static scene.

The invention provides a deformable mirror structure generation method based on a particle swarm algorithm, relates to the technical field of adaptive optics, and aims to solve the technical problems of low design efficiency and low design accuracy of a deformable mirror structure in the prior art. The method comprises the following steps: constructing a finite element simulation model according to structural parameters of the deformable mirror; on the basis of a finite element simulation model, relation characteristics of influence of each actuator on deformation of the deformable mirror are obtained, and the actuators are used for adjusting the surface shape of the deformable mirror by applying control voltage; according to the relation characteristics and a preset target surface shape, target control voltage needed by the target surface shape is calculated through a high-precision voltage iterative algorithm, and a fitting surface shape is obtained; according to the fitting surface shape and the target surface shape, obtaining a residual wavefront; optimizing the residual wavefront by using a particle swarm algorithm to obtain a target structure parameter of the deformable mirror; and generating a deformable mirror structure according to the target structure parameters.

The application discloses an active compensation method for wavefront system error of an interferometer, and provides active compensation for wavefront error introduced by a second collimating lens in a large-aperture interferometer. Firstly, an interferometric reference light path system model is established in optical design software Zemax; a polynomial is used to represent wavefront introduced by the second collimating lens; a self-defined surface type in Zemax is used to realize modeling of surface shape error, material uniformity error, residual stress, clamping deformation, gravity deformation and other system errors of the second collimating lens, and to simulate and analyze the influence of the system errors on the reference wavefront. On the basis of accurate modeling of the interferometric system, system errors caused by the above error sources in the reference wavefront of the large-aperture interferometer are compensated by controlling the surface shape parameters of a deformable mirror. The application accurately models the system errors introduced by the second collimating lens in the reference wavefront, and compensates the wavefront error by controlling the surface sag of the deformable mirror, so that the precision is high and the practicability is good.

This invention proposes an optical system for imaging complex systems, comprising an eyepiece, an aperture stop, an aberration-correcting lens group, a front field lens group, a rear field lens group, and a prism group. The rear field lens group includes a semi-transparent, semi-reflective mirror. Light from the light source passes through the eyepiece and illuminates the pupil. Reflected light from the fundus exits the pupil and passes through the eyepiece, aperture stop, aberration-correcting lens group, front field lens group, and rear field lens group to reach the semi-transparent, semi-reflective mirror. 50% of the light passes through the semi-transparent, semi-reflective mirror into the prism group for RGB imaging, while the other 50% is reflected by the semi-transparent, semi-reflective mirror for white light imaging. The front field lens group includes a transmission-type deformable mirror. The focusing surfaces of the fundus, the aberration-correcting lens group, the front field lens group, and the prism group are conjugate. The pupil, the aperture stop, and the transmission-type deformable mirror are also conjugate. This invention ensures high precision, high stability, and high light energy utilization in complex imaging scenarios, providing a solution for multi-band, high-resolution diagnosis of fundus diseases.

The application is a large field telescope deformable mirror surface type control method, comprising: (1) determining the actuator arrangement matrix M according to the arrangement of the deformable mirror actuator; (2) measuring the on-axis field optical transfer function matrix W corresponding to the deformable mirror in the system; (3) calling the pupil shape matrix P of the field according to the field coordinate Φ Φ ; (4) screening the effective actuator M Φ of the deformable mirror under the field M Φ =P ; (5) calculating the effective transfer function W Φ of the deformable mirror in the field according to the effective actuator W Φ =M ; (6) calculating the voltage value of each actuator according to the input deformable mirror surface type Ψ Φ , generating the control voltage vector (7) limiting the voltage of the edge actuator, calculating the final control voltage vector V' Φ =V Φ ×F; (8) outputting the voltage vector and loading to the deformable mirror, completing the closed-loop control of the deformable mirror.

The application discloses a kind of high contrast imaging wave front detection and correction method and system, this method uses FPGA and CPU hybrid programming architecture to realize high-precision high contrast imaging wave front detection and correction, locking is realized to high contrast imaging dark area in closed-loop correction, wherein, high-precision wave front slope calculation is completed in FPGA, sub-aperture image division and wave front recovery calculation are realized in CPU, and voltage control deformable mirror correction wave front aberration is output.The application uses hybrid programming architecture to carry out high contrast imaging wave front detection and correction, realizes high-precision wave front detection and correction, solves the problem of insufficient performance of CPU for aerospace, and then realizes the locking of high contrast imaging dark area of space coronagraph, for direct imaging detection of exoplanet.After wave front detection and correction, the energy stability of high contrast imaging dark area can be guaranteed, and dark area locking is completed.

The invention discloses a wavefront correction method for establishing a nonlinear influence function based on an extreme learning machine, and belongs to the technical field of adaptive optics. The method comprises the following steps: constructing a nonlinear training set of a Hartmann wavefront sensor slope vector and a deformable mirror voltage vector; training by adopting an extreme learning machine neural network, and optimizing an activation function and the number of neurons of a hidden layer; after the training is completed, acquiring a wavefront slope vector to be corrected, and inputting the wavefront slope vector into the trained neural network model to obtain an error voltage vector; the error voltage is processed through a proportion-integral controller to obtain correction voltage, a deformable mirror is driven to generate a compensation surface type, wavefront correction is achieved, and closed-loop control is formed. According to the method, the limitation of a traditional linear recovery matrix is broken through, the error voltage can be calculated more accurately, the correction residual error is remarkably reduced, the convergence speed is improved, and excellent adaptability and correction effect are shown in a static scene.