120 results about "Deformable mirror" patented technology

The invention discloses a metal plate laser cutting control method, and relates to the technical field of laser cutting, material parameters, thickness information and cutting path data are obtained, a mixed enveloping rectangle algorithm is combined with a genetic algorithm to optimize a cutting sequence, and a path sequence containing idle stroke avoidance and nested graph priority is generated; constructing a laser parameter prediction model based on the material, thickness and path characteristics, and dynamically adjusting the power gradient; the slag splashing state is judged through data fusion of a capacitive sensor and an encoder, a quality feedback signal is extracted in combination with machine vision, and laser parameters are dynamically adjusted through a fuzzy control algorithm; wavefront distortion is monitored in real time, the correction frequency is adjusted according to the slag splashing state, and a deformable mirror is used for compensating the phase; when the quality is abnormal, historical parameter combinations are retrieved through a cosine similarity algorithm for joint compensation. According to the method, the path cutting efficiency is improved, and the problems of low efficiency of path planning and parameter adjustment lagging in the prior art are solved.

The invention relates to the technical field of laser processing, and discloses a sports kettle trepanning method and system based on a laser cutting technology. The method comprises the steps that through three-dimensional point cloud scanning and local curvature calculation, reinforcement learning dynamic path planning, transient thermodynamic coupling parameter optimization, deformable mirror-mechanical arm cooperative control and infrared temperature field feedback closed loop, high-precision cutting and thermal damage suppression of the complex curved surface are achieved, and path re-planning is triggered when deviation exceeds the limit. The system comprises a laser ranging sensor array module, a reinforcement learning decision module, a thermodynamic coupling solver module, a deformable mirror and six-axis mechanical arm cooperative control module and a multi-sensor feedback module. Through curvature self-adaptive laser processing, multi-physical field thermal damage cooperative control, optical-mechanical dynamic focusing and intelligent closed-loop optimization, high-precision cutting of the complex curved surface is achieved, the calculation efficiency and the system stability are both considered, and the processing quality and adaptability are effectively improved.

The invention discloses an optical imaging and coding hole technology fused optical imaging system and method, and aims to integrate scattered polarization components in a reflected light signal into coding light field data with clear layers by constructing a polarization coding modulation system, so as to highlight a coupling relationship among optical elements. A refocusing sequence and a focal plane chromatography technology are adopted, spatial geometric information and light intensity distribution characteristics of different depth layers are fully excavated, and a three-dimensional distribution rule of surface topography is disclosed; wavefront correction and deformable mirror control technologies are introduced, imaging parameters of an optical system are adjusted in a self-adaptive mode, and the application range of measurement precision is expanded; light intensity modulation analysis and phase unwrapping window processing are combined, the change trend of the surface curvature is depicted, and key feature points of morphology measurement are grasped; finally, multi-dimensional and multi-level optical measurement information is fused, three-dimensional measurement output with rich content and reliable precision is formed, and comprehensive and high-quality measurement technology resources can be provided for application scenes such as precision optical detection and surface quality evaluation.

The invention relates to the technical field of laser beam shaping, discloses an active test method and system for a circuit breaker, and is used for solving the problem that the self-adaptive shaping capability of a CO2 laser beam is difficult to improve by the existing method. Firstly, a stable light path is constructed, and the stability of the light path is ensured through mechanical limiting, a thermal management module and multi-stage optical alignment; then low-power calibration is carried out, a deformable mirror initial driving table is generated through a least square inversion algorithm, and a flat-topped beam reference is established; data are collected through a wavefront sensor, a high-order mode is reconstructed, the voltage of a deformable mirror is dynamically refreshed, and wavefront control and scanning motion synchronization is ensured in combination with scanning galvanometer time sequence synchronization, closed-loop control and exception handling; monitoring the temperature of the deformable mirror, starting water-cooling adjustment, and correcting the driving table to cope with the heat effect; finally, a safety system is constructed, laser power, wavefront distortion and deformable mirror stroke parameters are monitored, dry gas purging is conducted on the diffractive optical element regularly, and safety guarantee and performance verification of the whole process are achieved.

The invention discloses a wavefront distortion correction method based on a dynamic adaptive MESSA algorithm and a coherent free space optical communication system. The problems that an existing method is prone to falling into a local optimal solution, the correction effect is poor under dynamic turbulence, and the adaptive capacity is weak are solved. According to the method, an individual position is initialized through a Circle chaotic mapping method, iterative optimization is carried out in combination with a Levy flight strategy and a variable spiral search strategy, and a step size control parameter, a safety threshold, spiral strength and a spiral adjustment coefficient are dynamically adjusted through a double-discrimination dynamic adaptive parameter adjustor. And reducing the population scale according to a nonlinear population reduction strategy, finally outputting an optimal individual position, and driving the deformable mirror to perform wavefront correction according to a control voltage vector corresponding to the optimal individual position. According to the invention, the dynamic adjustment of the algorithm parameters and the population structure is realized, and the adaptability, convergence speed and stability of the wavefront distortion correction method in the dynamic turbulence environment are enhanced.

The invention relates to the technical field of image processing, and discloses a laser wavefront distortion correction system and method based on adaptive optics, and the system comprises a first module which is used for calculating a noise covariance matrix and an interaction matrix; the second module is used for solving a control matrix and a phase reconstruction matrix; the third module is used for calculating to obtain a current slope vector; the fourth module is used for updating a deformable mirror command; the fifth module is used for calculating to obtain a point spread function; and the sixth module is used for calculating an image quality index and outputting a correction result. According to the method, a noise covariance matrix and an interaction matrix are accurately constructed under reference light, and a weighted least square method with double regularization is combined, so that the influence of measurement noise is effectively inhibited, the stroke constraint of an actuator is balanced, and the robustness of a correction model is greatly improved; by means of combination of integral control, leakage processing and amplitude limiting design, saturation of an actuator due to command accumulation is avoided, and correction error superposition is prevented.

The invention provides a performance prediction and control method for a multi-physics-field coupled high-energy laser system, and relates to the technical field of laser systems, and the method comprises the steps: obtaining optimized environment parameters; configuring laser system parameters; determining turbulence compensation parameters and laser energy distribution data; determining turbulence compensation control parameters at the current moment; controlling a deformable mirror of the high-energy laser system based on the turbulence compensation control parameters; determining optical element temperature field data, optical element deformation and wave aberration variation based on the laser system parameters and the laser energy distribution data; determining task feasibility of the current task based on the optical element temperature field data; under the condition that the task feasibility is feasible, determining a target dynamic damage threshold; and determining a performance prediction result of the high-energy laser system. According to the technical scheme, control and performance prediction are carried out on the high-energy laser system based on multi-parameter cooperation in the coupled physical field, the environmental adaptability and the parameter configuration efficiency are improved, and closed-loop compensation can be carried out in real time.

The invention discloses a method for correcting an offset error of a slope response matrix of a deformable mirror, and belongs to the technical field of wavefront correction. By simultaneously driving a plurality of drivers to accurately measure the offset error of the deformable mirror relative to the system design original position, the measurement range and precision of the offset can be obviously expanded; the conventional correction method of re-measuring the response matrix is broken, the interpolation theory is introduced into correction of the response matrix, correction of the deformation mirror response matrix about the offset error can be realized only according to the initial response matrix, and the closed-loop correction effect of the system is improved. The method is not limited by the density and arrangement of the deformable mirror drivers, the stability of system operation is ensured by measuring the offset error of the deformable mirror and correcting the response matrix of the deformable mirror, the correction efficiency and precision of the system are improved, and the method has the advantages of being simple and practical.

The invention discloses a free-form surface non-zero interference detection device and method based on thin film deformable mirror wavefront compensation. The device comprises a laser source, a polarization regulation and control module, a film deformation mirror surface type control and monitoring module, an interference measurement module and a data processing and control module. The control and monitoring module performs closed-loop adjustment on the deformed mirror surface type to realize high-precision wavefront compensation; in the interference measurement module, reference light is generated by laser collimation, measurement light forms interference with the reference light after being modulated by a deformable mirror and a free-form surface to be measured, four frames of phase-shifting interferograms with 45-degree phase difference are extracted, and profile data after compensation are obtained by combining an algorithm; and carrying out point-to-point subtraction on the data and deformed mirror surface type data to obtain the surface type of the free-form surface to be detected, and completing high-precision detection. The problems that interference fringes are low in contrast ratio and cannot be distinguished due to aberration in free-form surface detection are effectively solved, the large-curvature and large-inclination free-form surface detection precision and efficiency are improved, and the method is suitable for high-precision free-form surface optical element detection scenes.

The invention discloses a wavefront detection-free adaptive optical correction method and system, and the method comprises the steps: obtaining a real in-focus image and a real out-of-focus image of a to-be-corrected light beam, and outputting an updated deformable mirror control voltage through a physical information neural network; generating a predicted wavefront phase according to the deformable mirror control voltage signal and a deformable mirror voltage-phase mapping model; generating a predicted in-focus image and a predicted out-of-focus image through a derivable Fourier optical propagation model; constructing a label-free composite loss function according to the real in-focus image, the real out-of-focus image, the predicted in-focus image and the predicted out-of-focus image; performing unsupervised training updating on the physical information neural network according to the composite loss function, and performing repeated iteration to obtain an optimized deformable mirror control voltage; and driving the deformable mirror to carry out self-adaptive optical correction in real time according to the optimized deformable mirror control voltage to obtain a correction result. According to the invention, the correction efficiency and the system stability are obviously improved.

The invention relates to the technical field of free space optical communication, in particular to an atmospheric turbulence adaptive optical compensation method for wireless laser communication, which comprises the following steps of: performing light beam coarse tracking by using a fast reflector to eliminate tilt drift; monitoring the received light intensity of the wavefront sensor in real time, and setting a threshold value for mode judgment; when a channel is good, a Kalman filtering algorithm is adopted to predict and compensate system delay, modal decoupling is carried out on reconstructed wavefront, a large-stroke deformable mirror is controlled to correct low-frequency large-amplitude aberration, and a micro-electro-mechanical deformable mirror is controlled to correct high-frequency residual error; and when the channel is in deep fading or the detector fails, the blind optimization mode is automatically switched, the state of the large-stroke deformable mirror is locked, and SPGD iterative control is applied to the micro-electro-mechanical deformable mirror based on the communication light intensity. According to the invention, through a double-deformable mirror frequency division cooperation and hybrid sensing strategy, the problems of insufficient bandwidth, limited stroke, easy interruption and the like of a traditional system under strong turbulence are effectively solved, and the optical fiber coupling efficiency and the robustness of a communication link are significantly improved.

According to the invention, a collaborative deformable mirror, a two-dimensional galvanometer scanning system and a high-precision three-dimensional displacement sample table are designed, and rapid tracking and spot scanning imaging of a freely moving sample are completed. And under the condition of single cell analysis resolution, the tracking range is large, and the imaging speed is high. As the galvanometer controls the deflection angle through the driving voltage, the propagation path of the imaging light path can be efficiently adjusted in real time. Therefore, the tracking response speed based on the galvanometer scanning system is obviously superior to that of a traditional mechanical displacement compensation mode. The displacement is compensated through the sample table, and the tracking range is expanded. The displacement compensation process adopts a sample motion trail pre-judgment algorithm, is carried out in real time and is small in compensation amount, and rapid response of the system is ensured; displacement compensation and galvanometer tracking work cooperatively, the tracking speed is optimized, and spot scanning imaging is completed at the same time. Axial scanning is completed by modulating excitation light wave front through a deformable mirror. The system is integrated with a light stimulation module, wavefront phase modulation is carried out on stimulation light by utilizing a spatial light modulator, single-point or multi-point focusing is realized, single or multiple neurons can be accurately controlled, and the system has important significance on research of neuroscience.

The invention provides a fundus camera system integrated with adaptive optics and a correction method, and relates to the technical field of ophthalmology imaging. The fundus camera system comprises a beacon light source, an imaging light source and an imaging sensor; the device comprises a wavefront sensor, a wavefront correction device and a control module, and the wavefront correction device comprises a focusing lens group and a deformable reflector; the focusing lens group and the deformable reflector are arranged in the same light path from the beacon light source to human eyes and from the human eyes to the wavefront sensor; moreover, the control module executes a two-step closed-loop control strategy of first focusing and second correction: firstly, based on a first measurement result of the wavefront sensor, the focusing lens group is driven to move so as to compensate low-order aberration; and after the focusing is completed, the deformable reflector is driven to deform based on the subsequent measurement result of the wavefront sensor so as to compensate the high-order aberration in a closed-loop manner. On the basis of inheriting the advantage of rapid focusing in the prior art, the self-adaptive optical technology is further integrated, so that the limitation of high-order aberration on resolution is solved.

An aberration regulation method of a reflective double-beam interference exposure system, comprising: constructing a reflective double-beam interference exposure system, dividing a light beam output by a laser into two double beams with the same intensity, and forming an interference exposure field; constructing an aberration regulation system, testing and recording the aberration of the double-beam light path by using a spherical interferometer, and regulating the wavefront of any light beam in the double beam by using a deformable mirror, so that the aberration of the light beam matches the aberration of the other light beam, and the regulation of the aberration of the interference exposure field is completed. The present application solves the problems of precise assembly and adjustment, wavefront aberration control and the like of the reflective double-beam interference exposure system based on a large-aperture off-axis parabolic mirror, and provides a new solution for the preparation of a meter-level large-aperture, low-aberration diffraction grating.

The invention discloses a self-adaptive optical distortion compensation device and compensation method based on high-speed closed-loop control, and the device comprises an optical path front-end interface which is used for connecting a coupling wind tunnel or a laser emission system; the wavefront sensor is used for measuring a local wavefront slope by adopting a distributed array; the FPGA controller comprises a wavefront reconstruction processor and a closed-loop logic controller and is used for reconstructing wavefront and generating a control instruction; the MEMS deformable mirror array comprises a plurality of MEMS drivers and is used for correcting a wavefront phase; the feedback monitoring module is used for performing dual verification through deformation capacitance measurement and CCD image feedback; and the imaging / laser output end is used for converting the corrected optical signal into an image and outputting the image. The method can be widely applied to the fields of high-speed aircraft wind tunnel testing, laser communication, infrared imaging guide head calibration, high-energy laser beam shaping and the like, a programmable hardware platform, a high-speed parallel operation structure and a predictive control algorithm are introduced, and unprecedented sub-microsecond closed-loop compensation is achieved.

This invention relates to an interferometric measurement method and apparatus for large warp wafers, belonging to the field of optical detection and semiconductor measurement technology. The detection light is polarized and birefringently split to form P-beams and S-beams, which are then further divided into P-reference beams, S-silicon beams, S-reference beams, and P-silicon beams, respectively. By adjusting the spatial orientation of the reference mirror and the wafer under test, and using an aperture for spatial filtering, the P-reference beam and S-silicon beam are allowed to enter the subsequent optical path, while the S-reference beam and P-silicon beam are blocked. The S-silicon beam forms a measurement wavefront carrying information about the surface shape of the wafer under test. The P-reference beam is modulated by a deformable mirror to form a modulated reference wavefront similar to the measurement wavefront. The two form a resolvable interference fringe pattern at the camera. A wavefront sensor measures the surface shape information of the deformable mirror, and a calculation system obtains the surface shape information of the wafer under test based on the deformable mirror surface shape information and the relative surface shape change. This invention can reduce the interference fringe density in the detection of large warp wafers, reduce splicing measurement errors, and improve detection efficiency and accuracy.

The application provides a deformable mirror assembly, comprising: a deformable mirror mirror body, a back surface of which is provided with a telescopic piezoelectric actuator, which comprises a plurality of linearly arranged actuating units; a pad, which is arranged on the back surface of the deformable mirror mirror body; a control system, which is used for providing an actuating alternating voltage to the telescopic piezoelectric actuator, so that the sinusoidal vibration of different actuating units adopts random amplitude and random phase; the peak-to-valley maximum amplitude of the mirror surface of the deformable mirror mirror body caused by the sinusoidal vibration overcomes the Rayleigh criterion, and the periodicity of the spatial frequency is destroyed through the randomness of the phase of the actuating unit, so that the homogenization of the light beam speckle is realized when the deformable mirror mirror body is used for light beam deflection. The application also provides a corresponding two-dimensional optical system. The deformable mirror assembly of the application improves the speckle homogeneity in the imaging process and reduces the influence of the speckle.

Device for modulating a laser beam, including a deformable mirror with a reflective surface to receive an incident laser beam and to reflect a corresponding reflected laser beam provided with an output wavefront, and an actuator for deforming the reflective surface. The device also includes a detection system having an electromagnetic radiation source to emit a control beam incident on the reflective surface, and a wavefront sensor to intercept the reflected control beam reflected by the reflective surface to detect measurements of the wavefront of the reflected control beam and generate corresponding measurement signals. The device further includes a logic control unit, which receives the measurement signals, associates them with corresponding forms of the output wavefront of the reflected laser beam, actuates the actuator to deform the reflective surface in order to feedback control the output wavefront of the reflected laser beam.

In an aspect of the present invention, a new active optic is provided, namely, a photo-magnetically actuated deformable mirror (PMADM) made of a magnetic composite structure and an optical quality substrate layer. The magnetic layer is composed of Polydimethylsiloxane (PDMS) and powdered ferromagnetic CrO2. A magnet may be used to deform the mirror surface. The powdered CrO2 has a low Curie temperature (preferably around 395 K) which allows changing the magnetization of the magnetic layer using a laser heating source, thus providing control over the deformation. In one embodiment, the structure has an overall dimension of 1.2 inch 1.2 inch 175 μm with an optical pupil diameter of 8 mm. The PMADM is estimated to deform to a maximum stroke of 8.7731 μm before failure with a 3 safety factor.

The present invention provides a double silicon-gold bonded MEMS deformable mirror and its fabrication method. The MEMS deformable mirror comprises a silicon wafer substrate, a silicon nitride insulating layer, a lower polysilicon electrode, a first phosphosilicate glass sacrificial layer, an upper interdigitated electrode, a first bonding electrode layer, an SOI wafer structure, a second bonding electrode layer, and a gold-based reflective mirror surface. The fabrication method sequentially involves silicon wafer substrate pretreatment, silicon nitride insulating layer deposition, lower polysilicon electrode formation, first phosphosilicate glass sacrificial layer deposition and thinning, upper interdigitated electrode and related structure etching, first bonding electrode layer formation, SOI wafer pretreatment and solution channel formation, second phosphosilicate glass sacrificial layer filling, second bonding electrode layer formation, gold-to-gold hot-compression bonding, deep silicon etching, structural release and annealing, and gold-based reflective mirror surface fabrication and packaging. This invention can simplify the process flow, improve the correction performance of optical systems, and has broad market application prospects.

The invention relates to the technical field of light field wavefront sensing, in particular to a method for calibrating a multi-spatial sampling rate response matrix of a deformable mirror, and the method comprises the steps: obtaining a response matrix with the highest spatial sampling rate through a checkerboard algorithm; receiving a wavefront target spatial sampling rate input by a user, and calculating the size of a down-sampling window of the response matrix of the highest spatial sampling rate; performing down-sampling on the highest spatial sampling rate response matrix to generate a slope vector of a target spatial sampling rate, performing slope consistency evaluation in a down-sampling window, and judging whether the wavefront target spatial sampling rate is suitable for current wavefront distribution or not according to an evaluation result; and splicing slope vectors of all wavefront target space sampling rates to generate a target space sampling rate response matrix. The target spatial sampling rate response matrix can be generated as required only by executing the maximum spatial sampling rate calibration once, the calibration workload is reduced, and the system efficiency is improved.

The application discloses a kind of based on voltage modulation's deformable mirror slope response matrix measurement method and device, belong to adaptive optics technical field, this method includes: the range of influence of single driver is calculated, and driver is grouped;According to the sampling frequency of Hartmann wavefront sensor, the frequency response characteristics of deformable mirror, generate the voltage control signal for controlling deformable mirror;According to driver group number, voltage control signal is applied to all drivers and the wavefront sensor slope signal of each group driver is recorded;Wavefront sensor slope signal is bidirectional filtering, the slope signal corresponding to each driver is recovered, the difference of each slope signal and its corresponding voltage control signal phase is calculated, voltage control signal is truncated, and the response matrix of deformable mirror is obtained.The application realizes that the time of deformable mirror slope response matrix measurement is effectively shortened, avoids the problem of the decline of response matrix calculation accuracy due to voltage control signal and slope signal phase misalignment.

The present invention discloses a wavefront aberration compensation method based on a nonlinear response cascade model, which uses the frequency reconstruction technology in the process of establishing a Bouc-Wen hysteresis model of a fast steering mirror (FSM). The frequency reconstruction technology can overcome the zero-point drift characteristics of piezoelectric ceramic materials and improve the accuracy and robustness of Bouc-Wen hysteresis modeling. Subsequently, the present invention uses the hysteresis model of FSM for a wavefront corrector with a cascade structure of FSM and a deformable mirror (DM), and proposes a wavefront closed-loop compensation method based on absolute phase distortion based on the model structure of the nonlinear response cascade of the wavefront corrector. Taking absolute phase distortion as the fitting target avoids the accumulation of model errors and hardware noise, so that the wavefront corrector of the FSM and DM cascade can complete the correction of the wavefront with only one closed-loop feedback, thereby improving the compensation capability range, accuracy and efficiency.

The invention provides a multi-site adaptive optical correction method and device applied to a mesoscopic two-photon scanning microscope, and the method comprises the steps: employing a resonance mirror and two galvanometers as a scanning module of a system, dividing a whole imaging view into a plurality of sub-regions, and carrying out the sequential scanning of the sub-regions one by one; a reflective deformable mirror is used as an aberration compensator, and an aberration compensation value is updated in real time; the whole visual field is filled with a regular hexagon, the center and vertex positions of the regular hexagon are set as aberration compensation points, and a reflective deformable mirror is used for carrying out aberration correction on the compensation points in advance; and automatically loading an optical aberration compensation value closest to the center of the sub-region according to the central coordinate position of the sub-region so as to ensure that the image resolution near the optical diffraction limit is kept in the whole view region.

The invention provides a control circuit based on a deformable mirror device driver. The control circuit comprises a multi-stage power supply framework, a driving channel module, a monitoring module and an FPGA (Field Programmable Gate Array) control module, the multi-stage power supply framework comprises an external main power supply, an FPGA power supply module and a driving channel power supply module, and the external main power supply is 12V power supply output and is used for providing power supply input for the FPGA power supply module and the driving channel power supply module; the number of the driving channel power supply modules is N, the driving channel power supply modules are marked as the first driving channel power supply module to the Nth driving channel power supply module, and each driving channel power supply module comprises a voltage reference source, a voltage reduction voltage stabilizer, a voltage boosting voltage stabilizer and a D / A voltage reference source. According to the invention, the cooperative feedback of the multi-path monitoring module is utilized, the circuit operation quality is ensured, the FPGA algorithm is fused for dynamic compensation, the crosstalk between driving voltage channels is reduced, the synchronism and consistency of a large-scale array are ensured, and the accumulative error of an optical image is reduced.

The present application relates to the technical field of adaptive optics, and particularly provides a transverse piezoelectric deformable mirror and a preparation method thereof, which structurally comprises a lens, electrodes and a driving element for driving the lens to deform, the driving element can comprise a bulk driving piezoelectric ceramic piece for bulk driving, or can comprise a discrete driving piezoelectric ceramic piece for fine driving deformation, in order to simplify the preparation of the driving electrode array and the complicated preparation process of the driving electrode conductive circuit in the preparation process of the transverse piezoelectric deformable mirror, the present application designs a flexible circuit board with integrated driving wiring, the patterned driving electrode array and the corresponding conductive circuit can be prepared in advance, the flexible circuit board and the deformation driving element can be directly bonded by conductive adhesive, and two technical difficulties in the manufacture of the transverse piezoelectric deformable mirror, i.e. the preparation and electrical connection of the driving electrode array, are directly solved, the manufacturing process of the transverse piezoelectric deformable mirror is simplified, and the compactness of the structure is improved.

A method for designing the initial structure of a stationary zoom system includes the following steps: S1, establishing the basic structure of a classic stationary zoom system, determining the mathematical range of key parameters of the intermediate zoom group, and realizing the partitioning of the solution region and parameter dimensionality reduction; S2, introducing a rear focusing group, and introducing minimum braking constraints for deformable mirrors and realizing continuous zoom and basic aberration constraints based on free space; S3, establishing a nonlinear evaluation function, and obtaining the globally optimal numerical solution within the boundary conditions of the set variables and the analytical region of the structure. This invention solves the problem of not being able to obtain a convergent solution when directly using optical design software for optimization design. By incorporating the telescope structure into the stationary zoom system to reduce the dimensionality of key parameters, the numerical solution of the initial structure is calculated. This process involves a series of equations and constraints describing the stationary zoom system, which can effectively correct aberrations, achieve high zoom efficiency, and maintain a stable image plane at the required magnification.

The application discloses a compact voice coil deformable mirror based on a micro voice coil driver and belongs to the field of adaptive optics. The application considers that the output force of the micro voice coil driver is two to three orders of magnitude smaller than that of a conventional voice coil driver, adopts a polyimide to replace a glass, silicon carbide and other materials with a large stiffness coefficient which are conventionally used to make a thin mirror surface, provides certain stiffness for the polyimide through a spring structure so as to meet the stiffness requirement, comprehensively considers the correlation between structure parameters, materials, working currents and other performances of the voice coil deformable mirror and the phase modulation amount, frequency and other performances of the voice coil deformable mirror, balances and optimizes the structure parameters, and obtains the compact voice coil deformable mirror with the best comprehensive performance. It is verified through experiments that the single micro driver provided in the application can reach a maximum output force of 1mN, a motor constant of 0.032N x W ‑1 / 2 ; the phase modulation amount of the compact deformable mirror reaches ±45um, and the first resonance frequency reaches 2000Hz.

The invention provides an MEMS deformable mirror based on double-silicon gold bonding and a preparation method thereof. The MEMS deformable mirror comprises a silicon wafer substrate, a silicon nitride insulating layer, a lower polycrystalline silicon electrode, a first phosphorosilicate glass sacrificial layer, an upper interdigital electrode, a first bonding electrode layer, an SOI wafer structure, a second bonding electrode layer and a gold-based reflecting mirror surface. The preparation method sequentially comprises the steps of silicon wafer substrate pretreatment, silicon nitride insulating layer deposition, lower-layer polycrystalline silicon electrode formation, first phosphorosilicate glass sacrificial layer deposition and thinning, upper-layer interdigital electrode and related structure etching, first bonding electrode layer formation, SOI wafer pretreatment and solution channel formation, second phosphorosilicate glass sacrificial layer filling, high-temperature sintering, high-temperature sintering, high-temperature sintering, high-temperature sintering, high-temperature sintering, high-temperature sintering, high-temperature sintering, high-temperature sintering, high-temperature sintering, high-temperature sintering, high-temperature sintering and high-temperature sintering. The method comprises the following steps: preparing a first bonding electrode layer, forming a second bonding electrode layer, performing gold-gold hot pressing bonding, performing deep silicon etching, performing structure release and annealing treatment, and preparing and packaging a gold-based reflecting mirror surface. The method can simplify the technological process, improves the correction performance of the optical system, and has a wide market application prospect.

The invention discloses an HAR microstructure morphology restoration method based on a modulation aberration data model, which avoids using expensive devices such as a deformable mirror to compensate aberration in the process of measuring a microstructure by near-infrared microscopic interferometry, avoids an aberration detection link, achieves transient response and accelerates the characterization process of a sample to be detected. On the basis of a BP neural network, a modulation aberration data network is constructed, errors are transmitted layer by layer through training, so that network parameters are corrected, a modulation aberration data model is constructed and optimized, required modulation aberration data are obtained through prediction according to characteristic parameters of a sample to be tested, a virtual phase filter is constructed, and accordingly aberration of an HAR microstructure interferogram is corrected. And finishing the morphology restoration of the HAR microstructure. The modulation aberration data model is continuously iterated and updated, accidental errors are avoided, and the robustness of the correction algorithm is higher.