83 results about "Deformable mirror" patented technology

The invention discloses an optical imaging and coding hole technology fused optical imaging system and method, and aims to integrate scattered polarization components in a reflected light signal into coding light field data with clear layers by constructing a polarization coding modulation system, so as to highlight a coupling relationship among optical elements. A refocusing sequence and a focal plane chromatography technology are adopted, spatial geometric information and light intensity distribution characteristics of different depth layers are fully excavated, and a three-dimensional distribution rule of surface topography is disclosed; wavefront correction and deformable mirror control technologies are introduced, imaging parameters of an optical system are adjusted in a self-adaptive mode, and the application range of measurement precision is expanded; light intensity modulation analysis and phase unwrapping window processing are combined, the change trend of the surface curvature is depicted, and key feature points of morphology measurement are grasped; finally, multi-dimensional and multi-level optical measurement information is fused, three-dimensional measurement output with rich content and reliable precision is formed, and comprehensive and high-quality measurement technology resources can be provided for application scenes such as precision optical detection and surface quality evaluation.

The invention relates to the technical field of laser beam shaping, discloses an active test method and system for a circuit breaker, and is used for solving the problem that the self-adaptive shaping capability of a CO2 laser beam is difficult to improve by the existing method. Firstly, a stable light path is constructed, and the stability of the light path is ensured through mechanical limiting, a thermal management module and multi-stage optical alignment; then low-power calibration is carried out, a deformable mirror initial driving table is generated through a least square inversion algorithm, and a flat-topped beam reference is established; data are collected through a wavefront sensor, a high-order mode is reconstructed, the voltage of a deformable mirror is dynamically refreshed, and wavefront control and scanning motion synchronization is ensured in combination with scanning galvanometer time sequence synchronization, closed-loop control and exception handling; monitoring the temperature of the deformable mirror, starting water-cooling adjustment, and correcting the driving table to cope with the heat effect; finally, a safety system is constructed, laser power, wavefront distortion and deformable mirror stroke parameters are monitored, dry gas purging is conducted on the diffractive optical element regularly, and safety guarantee and performance verification of the whole process are achieved.

The invention discloses a wavefront distortion correction method based on a dynamic adaptive MESSA algorithm and a coherent free space optical communication system. The problems that an existing method is prone to falling into a local optimal solution, the correction effect is poor under dynamic turbulence, and the adaptive capacity is weak are solved. According to the method, an individual position is initialized through a Circle chaotic mapping method, iterative optimization is carried out in combination with a Levy flight strategy and a variable spiral search strategy, and a step size control parameter, a safety threshold, spiral strength and a spiral adjustment coefficient are dynamically adjusted through a double-discrimination dynamic adaptive parameter adjustor. And reducing the population scale according to a nonlinear population reduction strategy, finally outputting an optimal individual position, and driving the deformable mirror to perform wavefront correction according to a control voltage vector corresponding to the optimal individual position. According to the invention, the dynamic adjustment of the algorithm parameters and the population structure is realized, and the adaptability, convergence speed and stability of the wavefront distortion correction method in the dynamic turbulence environment are enhanced.

The invention relates to the technical field of image processing, and discloses a laser wavefront distortion correction system and method based on adaptive optics, and the system comprises a first module which is used for calculating a noise covariance matrix and an interaction matrix; the second module is used for solving a control matrix and a phase reconstruction matrix; the third module is used for calculating to obtain a current slope vector; the fourth module is used for updating a deformable mirror command; the fifth module is used for calculating to obtain a point spread function; and the sixth module is used for calculating an image quality index and outputting a correction result. According to the method, a noise covariance matrix and an interaction matrix are accurately constructed under reference light, and a weighted least square method with double regularization is combined, so that the influence of measurement noise is effectively inhibited, the stroke constraint of an actuator is balanced, and the robustness of a correction model is greatly improved; by means of combination of integral control, leakage processing and amplitude limiting design, saturation of an actuator due to command accumulation is avoided, and correction error superposition is prevented.

The invention provides a performance prediction and control method for a multi-physics-field coupled high-energy laser system, and relates to the technical field of laser systems, and the method comprises the steps: obtaining optimized environment parameters; configuring laser system parameters; determining turbulence compensation parameters and laser energy distribution data; determining turbulence compensation control parameters at the current moment; controlling a deformable mirror of the high-energy laser system based on the turbulence compensation control parameters; determining optical element temperature field data, optical element deformation and wave aberration variation based on the laser system parameters and the laser energy distribution data; determining task feasibility of the current task based on the optical element temperature field data; under the condition that the task feasibility is feasible, determining a target dynamic damage threshold; and determining a performance prediction result of the high-energy laser system. According to the technical scheme, control and performance prediction are carried out on the high-energy laser system based on multi-parameter cooperation in the coupled physical field, the environmental adaptability and the parameter configuration efficiency are improved, and closed-loop compensation can be carried out in real time.

The invention discloses a free-form surface non-zero interference detection device and method based on thin film deformable mirror wavefront compensation. The device comprises a laser source, a polarization regulation and control module, a film deformation mirror surface type control and monitoring module, an interference measurement module and a data processing and control module. The control and monitoring module performs closed-loop adjustment on the deformed mirror surface type to realize high-precision wavefront compensation; in the interference measurement module, reference light is generated by laser collimation, measurement light forms interference with the reference light after being modulated by a deformable mirror and a free-form surface to be measured, four frames of phase-shifting interferograms with 45-degree phase difference are extracted, and profile data after compensation are obtained by combining an algorithm; and carrying out point-to-point subtraction on the data and deformed mirror surface type data to obtain the surface type of the free-form surface to be detected, and completing high-precision detection. The problems that interference fringes are low in contrast ratio and cannot be distinguished due to aberration in free-form surface detection are effectively solved, the large-curvature and large-inclination free-form surface detection precision and efficiency are improved, and the method is suitable for high-precision free-form surface optical element detection scenes.

The invention discloses a wavefront detection-free adaptive optical correction method and system, and the method comprises the steps: obtaining a real in-focus image and a real out-of-focus image of a to-be-corrected light beam, and outputting an updated deformable mirror control voltage through a physical information neural network; generating a predicted wavefront phase according to the deformable mirror control voltage signal and a deformable mirror voltage-phase mapping model; generating a predicted in-focus image and a predicted out-of-focus image through a derivable Fourier optical propagation model; constructing a label-free composite loss function according to the real in-focus image, the real out-of-focus image, the predicted in-focus image and the predicted out-of-focus image; performing unsupervised training updating on the physical information neural network according to the composite loss function, and performing repeated iteration to obtain an optimized deformable mirror control voltage; and driving the deformable mirror to carry out self-adaptive optical correction in real time according to the optimized deformable mirror control voltage to obtain a correction result. According to the invention, the correction efficiency and the system stability are obviously improved.

The invention relates to the technical field of free space optical communication, in particular to an atmospheric turbulence adaptive optical compensation method for wireless laser communication, which comprises the following steps of: performing light beam coarse tracking by using a fast reflector to eliminate tilt drift; monitoring the received light intensity of the wavefront sensor in real time, and setting a threshold value for mode judgment; when a channel is good, a Kalman filtering algorithm is adopted to predict and compensate system delay, modal decoupling is carried out on reconstructed wavefront, a large-stroke deformable mirror is controlled to correct low-frequency large-amplitude aberration, and a micro-electro-mechanical deformable mirror is controlled to correct high-frequency residual error; and when the channel is in deep fading or the detector fails, the blind optimization mode is automatically switched, the state of the large-stroke deformable mirror is locked, and SPGD iterative control is applied to the micro-electro-mechanical deformable mirror based on the communication light intensity. According to the invention, through a double-deformable mirror frequency division cooperation and hybrid sensing strategy, the problems of insufficient bandwidth, limited stroke, easy interruption and the like of a traditional system under strong turbulence are effectively solved, and the optical fiber coupling efficiency and the robustness of a communication link are significantly improved.

The invention provides a fundus camera system integrated with adaptive optics and a correction method, and relates to the technical field of ophthalmology imaging. The fundus camera system comprises a beacon light source, an imaging light source and an imaging sensor; the device comprises a wavefront sensor, a wavefront correction device and a control module, and the wavefront correction device comprises a focusing lens group and a deformable reflector; the focusing lens group and the deformable reflector are arranged in the same light path from the beacon light source to human eyes and from the human eyes to the wavefront sensor; moreover, the control module executes a two-step closed-loop control strategy of first focusing and second correction: firstly, based on a first measurement result of the wavefront sensor, the focusing lens group is driven to move so as to compensate low-order aberration; and after the focusing is completed, the deformable reflector is driven to deform based on the subsequent measurement result of the wavefront sensor so as to compensate the high-order aberration in a closed-loop manner. On the basis of inheriting the advantage of rapid focusing in the prior art, the self-adaptive optical technology is further integrated, so that the limitation of high-order aberration on resolution is solved.

An aberration regulation method of a reflective double-beam interference exposure system, comprising: constructing a reflective double-beam interference exposure system, dividing a light beam output by a laser into two double beams with the same intensity, and forming an interference exposure field; constructing an aberration regulation system, testing and recording the aberration of the double-beam light path by using a spherical interferometer, and regulating the wavefront of any light beam in the double beam by using a deformable mirror, so that the aberration of the light beam matches the aberration of the other light beam, and the regulation of the aberration of the interference exposure field is completed. The present application solves the problems of precise assembly and adjustment, wavefront aberration control and the like of the reflective double-beam interference exposure system based on a large-aperture off-axis parabolic mirror, and provides a new solution for the preparation of a meter-level large-aperture, low-aberration diffraction grating.

The invention discloses a self-adaptive optical distortion compensation device and compensation method based on high-speed closed-loop control, and the device comprises an optical path front-end interface which is used for connecting a coupling wind tunnel or a laser emission system; the wavefront sensor is used for measuring a local wavefront slope by adopting a distributed array; the FPGA controller comprises a wavefront reconstruction processor and a closed-loop logic controller and is used for reconstructing wavefront and generating a control instruction; the MEMS deformable mirror array comprises a plurality of MEMS drivers and is used for correcting a wavefront phase; the feedback monitoring module is used for performing dual verification through deformation capacitance measurement and CCD image feedback; and the imaging / laser output end is used for converting the corrected optical signal into an image and outputting the image. The method can be widely applied to the fields of high-speed aircraft wind tunnel testing, laser communication, infrared imaging guide head calibration, high-energy laser beam shaping and the like, a programmable hardware platform, a high-speed parallel operation structure and a predictive control algorithm are introduced, and unprecedented sub-microsecond closed-loop compensation is achieved.

This invention relates to an interferometric measurement method and apparatus for large warp wafers, belonging to the field of optical detection and semiconductor measurement technology. The detection light is polarized and birefringently split to form P-beams and S-beams, which are then further divided into P-reference beams, S-silicon beams, S-reference beams, and P-silicon beams, respectively. By adjusting the spatial orientation of the reference mirror and the wafer under test, and using an aperture for spatial filtering, the P-reference beam and S-silicon beam are allowed to enter the subsequent optical path, while the S-reference beam and P-silicon beam are blocked. The S-silicon beam forms a measurement wavefront carrying information about the surface shape of the wafer under test. The P-reference beam is modulated by a deformable mirror to form a modulated reference wavefront similar to the measurement wavefront. The two form a resolvable interference fringe pattern at the camera. A wavefront sensor measures the surface shape information of the deformable mirror, and a calculation system obtains the surface shape information of the wafer under test based on the deformable mirror surface shape information and the relative surface shape change. This invention can reduce the interference fringe density in the detection of large warp wafers, reduce splicing measurement errors, and improve detection efficiency and accuracy.

The application provides a deformable mirror assembly, comprising: a deformable mirror mirror body, a back surface of which is provided with a telescopic piezoelectric actuator, which comprises a plurality of linearly arranged actuating units; a pad, which is arranged on the back surface of the deformable mirror mirror body; a control system, which is used for providing an actuating alternating voltage to the telescopic piezoelectric actuator, so that the sinusoidal vibration of different actuating units adopts random amplitude and random phase; the peak-to-valley maximum amplitude of the mirror surface of the deformable mirror mirror body caused by the sinusoidal vibration overcomes the Rayleigh criterion, and the periodicity of the spatial frequency is destroyed through the randomness of the phase of the actuating unit, so that the homogenization of the light beam speckle is realized when the deformable mirror mirror body is used for light beam deflection. The application also provides a corresponding two-dimensional optical system. The deformable mirror assembly of the application improves the speckle homogeneity in the imaging process and reduces the influence of the speckle.

Device for modulating a laser beam, including a deformable mirror with a reflective surface to receive an incident laser beam and to reflect a corresponding reflected laser beam provided with an output wavefront, and an actuator for deforming the reflective surface. The device also includes a detection system having an electromagnetic radiation source to emit a control beam incident on the reflective surface, and a wavefront sensor to intercept the reflected control beam reflected by the reflective surface to detect measurements of the wavefront of the reflected control beam and generate corresponding measurement signals. The device further includes a logic control unit, which receives the measurement signals, associates them with corresponding forms of the output wavefront of the reflected laser beam, actuates the actuator to deform the reflective surface in order to feedback control the output wavefront of the reflected laser beam.

In an aspect of the present invention, a new active optic is provided, namely, a photo-magnetically actuated deformable mirror (PMADM) made of a magnetic composite structure and an optical quality substrate layer. The magnetic layer is composed of Polydimethylsiloxane (PDMS) and powdered ferromagnetic CrO2. A magnet may be used to deform the mirror surface. The powdered CrO2 has a low Curie temperature (preferably around 395 K) which allows changing the magnetization of the magnetic layer using a laser heating source, thus providing control over the deformation. In one embodiment, the structure has an overall dimension of 1.2 inch 1.2 inch 175 μm with an optical pupil diameter of 8 mm. The PMADM is estimated to deform to a maximum stroke of 8.7731 μm before failure with a 3 safety factor.

The invention relates to the technical field of light field wavefront sensing, in particular to a method for calibrating a multi-spatial sampling rate response matrix of a deformable mirror, and the method comprises the steps: obtaining a response matrix with the highest spatial sampling rate through a checkerboard algorithm; receiving a wavefront target spatial sampling rate input by a user, and calculating the size of a down-sampling window of the response matrix of the highest spatial sampling rate; performing down-sampling on the highest spatial sampling rate response matrix to generate a slope vector of a target spatial sampling rate, performing slope consistency evaluation in a down-sampling window, and judging whether the wavefront target spatial sampling rate is suitable for current wavefront distribution or not according to an evaluation result; and splicing slope vectors of all wavefront target space sampling rates to generate a target space sampling rate response matrix. The target spatial sampling rate response matrix can be generated as required only by executing the maximum spatial sampling rate calibration once, the calibration workload is reduced, and the system efficiency is improved.

The application discloses a kind of based on voltage modulation's deformable mirror slope response matrix measurement method and device, belong to adaptive optics technical field, this method includes: the range of influence of single driver is calculated, and driver is grouped;According to the sampling frequency of Hartmann wavefront sensor, the frequency response characteristics of deformable mirror, generate the voltage control signal for controlling deformable mirror;According to driver group number, voltage control signal is applied to all drivers and the wavefront sensor slope signal of each group driver is recorded;Wavefront sensor slope signal is bidirectional filtering, the slope signal corresponding to each driver is recovered, the difference of each slope signal and its corresponding voltage control signal phase is calculated, voltage control signal is truncated, and the response matrix of deformable mirror is obtained.The application realizes that the time of deformable mirror slope response matrix measurement is effectively shortened, avoids the problem of the decline of response matrix calculation accuracy due to voltage control signal and slope signal phase misalignment.

The invention provides a multi-site adaptive optical correction method and device applied to a mesoscopic two-photon scanning microscope, and the method comprises the steps: employing a resonance mirror and two galvanometers as a scanning module of a system, dividing a whole imaging view into a plurality of sub-regions, and carrying out the sequential scanning of the sub-regions one by one; a reflective deformable mirror is used as an aberration compensator, and an aberration compensation value is updated in real time; the whole visual field is filled with a regular hexagon, the center and vertex positions of the regular hexagon are set as aberration compensation points, and a reflective deformable mirror is used for carrying out aberration correction on the compensation points in advance; and automatically loading an optical aberration compensation value closest to the center of the sub-region according to the central coordinate position of the sub-region so as to ensure that the image resolution near the optical diffraction limit is kept in the whole view region.

The present application relates to the technical field of adaptive optics, and particularly provides a transverse piezoelectric deformable mirror and a preparation method thereof, which structurally comprises a lens, electrodes and a driving element for driving the lens to deform, the driving element can comprise a bulk driving piezoelectric ceramic piece for bulk driving, or can comprise a discrete driving piezoelectric ceramic piece for fine driving deformation, in order to simplify the preparation of the driving electrode array and the complicated preparation process of the driving electrode conductive circuit in the preparation process of the transverse piezoelectric deformable mirror, the present application designs a flexible circuit board with integrated driving wiring, the patterned driving electrode array and the corresponding conductive circuit can be prepared in advance, the flexible circuit board and the deformation driving element can be directly bonded by conductive adhesive, and two technical difficulties in the manufacture of the transverse piezoelectric deformable mirror, i.e. the preparation and electrical connection of the driving electrode array, are directly solved, the manufacturing process of the transverse piezoelectric deformable mirror is simplified, and the compactness of the structure is improved.

A method for designing the initial structure of a stationary zoom system includes the following steps: S1, establishing the basic structure of a classic stationary zoom system, determining the mathematical range of key parameters of the intermediate zoom group, and realizing the partitioning of the solution region and parameter dimensionality reduction; S2, introducing a rear focusing group, and introducing minimum braking constraints for deformable mirrors and realizing continuous zoom and basic aberration constraints based on free space; S3, establishing a nonlinear evaluation function, and obtaining the globally optimal numerical solution within the boundary conditions of the set variables and the analytical region of the structure. This invention solves the problem of not being able to obtain a convergent solution when directly using optical design software for optimization design. By incorporating the telescope structure into the stationary zoom system to reduce the dimensionality of key parameters, the numerical solution of the initial structure is calculated. This process involves a series of equations and constraints describing the stationary zoom system, which can effectively correct aberrations, achieve high zoom efficiency, and maintain a stable image plane at the required magnification.

The application discloses a compact voice coil deformable mirror based on a micro voice coil driver and belongs to the field of adaptive optics. The application considers that the output force of the micro voice coil driver is two to three orders of magnitude smaller than that of a conventional voice coil driver, adopts a polyimide to replace a glass, silicon carbide and other materials with a large stiffness coefficient which are conventionally used to make a thin mirror surface, provides certain stiffness for the polyimide through a spring structure so as to meet the stiffness requirement, comprehensively considers the correlation between structure parameters, materials, working currents and other performances of the voice coil deformable mirror and the phase modulation amount, frequency and other performances of the voice coil deformable mirror, balances and optimizes the structure parameters, and obtains the compact voice coil deformable mirror with the best comprehensive performance. It is verified through experiments that the single micro driver provided in the application can reach a maximum output force of 1mN, a motor constant of 0.032N x W ‑1 / 2 ; the phase modulation amount of the compact deformable mirror reaches ±45um, and the first resonance frequency reaches 2000Hz.

The invention discloses an HAR microstructure morphology restoration method based on a modulation aberration data model, which avoids using expensive devices such as a deformable mirror to compensate aberration in the process of measuring a microstructure by near-infrared microscopic interferometry, avoids an aberration detection link, achieves transient response and accelerates the characterization process of a sample to be detected. On the basis of a BP neural network, a modulation aberration data network is constructed, errors are transmitted layer by layer through training, so that network parameters are corrected, a modulation aberration data model is constructed and optimized, required modulation aberration data are obtained through prediction according to characteristic parameters of a sample to be tested, a virtual phase filter is constructed, and accordingly aberration of an HAR microstructure interferogram is corrected. And finishing the morphology restoration of the HAR microstructure. The modulation aberration data model is continuously iterated and updated, accidental errors are avoided, and the robustness of the correction algorithm is higher.

The present disclosure relates to the technical field of light field wavefront sensing, and particularly relates to a method for calibrating a multi-space sampling rate response matrix of a deformable mirror, which adopts a checkerboard algorithm to obtain a response matrix of the highest space sampling rate; receives a user input of a wavefront target space sampling rate, calculates a down-sampling window size of the response matrix of the highest space sampling rate; down-samples the response matrix of the highest space sampling rate to generate a slope vector of the target space sampling rate, and performs a slope consistency evaluation within the down-sampling window, judges whether the wavefront target space sampling rate is suitable for the current wavefront distribution according to the evaluation result; and splices the slope vectors of all the wavefront target space sampling rates to generate a response matrix of the target space sampling rate. Only a single execution of the calibration of the highest space sampling rate is required, and the response matrix of the target space sampling rate can be generated as required, thereby reducing the calibration workload and improving the system efficiency.

The invention discloses a deformable mirror precision adjustment method for a self-adaptive optical auxiliary microscope, and belongs to the field of microscopic imaging. The method is simple in process steps, high in practicability and wide in application prospect. A simple and low-cost fluorescent bead sample is utilized to quickly realize precise adjustment of transverse and axial positions of the deformable mirror, so that the light path adjustment difficulty of the self-adaptive optical auxiliary microscope can be greatly reduced, and the application range of self-adaptive optics in microscopic imaging is expanded.

This invention provides a thermal deformation compensation device and method for the optical window of an airborne optoelectronic pod, belonging to the field of aerospace optical imaging technology. It solves the problem that there is currently no direct method to measure and correct image quality degradation caused by uneven temperature distribution in the window glass. The airborne optoelectronic pod's optical window thermal deformation compensation device is installed inside the pod and includes a forward telescope system, a microbolometer, a deformable mirror, multiple beam splitters, and multiple reflectors. The forward telescope system is located inside the pod, and the microbolometer is mounted on the forward telescope system to generate a thermal image of the pod's first optical window glass. The deformable mirror is located at the rear end of the forward telescope system. Multiple beam splitters and multiple reflectors divide the light rays passing through the deformable mirror into multiple imaging optical paths. This device can perform real-time dynamic correction of image quality changes in the optical system caused by thermal deformation.

The invention discloses a coronagraph deformable mirror actuator dead pixel interference analysis method and system. The method comprises the following steps: constructing a coronagraph high-contrast imaging system framework; measuring the obtained defective pixel position information of the deformable mirror actuator, and fixing the defective pixel position information in an actuator control matrix; establishing a phase modulation control system based on an SPGD algorithm; establishing a convolution model with interferences among the actuators; the dead pixels are introduced into a dark space optimization process, and when dark space optimization is carried out through an SPGD algorithm, a system monitors key indexes of each quadrant dark space and observes the influence degree of the dead pixels on the dark space optimization process. Amplitude modulation is achieved through the focal plane modulation optical filter, the contrast ratio of the image plane reaches 10 <-6 > magnitude, phase modulation, namely dark space optimization, is achieved through the thousand-unit deformable mirror, and the contrast ratio reaches 10 <-8 > magnitude through the SPGD modulation algorithm; the dead pixel influence is introduced into the dark space optimization process, and the coupling influence of the dead pixel on the adjacent actuator is analyzed.

The present application relates to a kind of big warping wafer interference measurement method and device, belong to optical detection and semiconductor measurement technical field.Detection light is converted and diffracted after birefringence, and P light and S light are formed, and P reference light, S silicon light, S reference light and P silicon light are formed respectively;By adjusting the spatial posture of reference mirror and the wafer to be measured, and cooperating with spatial screening of diaphragm, P reference light and S silicon light enter subsequent optical path, while S reference light and P silicon light are blocked;S silicon light forms the measurement wave front carrying the wafer to be measured surface shape information, P reference light is modulated as the modulation reference wave front similar to the measurement wave front by deformable mirror, and the two form analytical interference fringe pattern at camera;Wave front sensor measures deformable mirror surface shape information, and the computing system obtains the surface shape information of the wafer to be measured according to deformable mirror surface shape information and relative surface shape variation amount.The present application can reduce the interference fringe density in the detection of big warping wafer, reduce splicing measurement error, improve detection efficiency and accuracy.

An optical system includes an optical antenna configured to receive and / or transmit laser beams through a first aperture, a gimbal-mounted deformable mirror (GDM) configurable to correct aberrations of a received laser beam, a power selector configurable to split the received laser beam into a first light beam and a second light beam, a wavefront sensor configured to measure a wavefront of the first light beam, a collimator configured to couple the second light beam into an optical fiber, and a controller configured to control the GDM for laser beam tracking and for correcting the aberrations of the received laser beam based on the wavefront of the first light beam measured by the wavefront sensor. The GDM is configurable to scan, within a field of regard (FOR), a beacon beam to be transmitted for laser beam tracking; or scan within the FOR to acquire a beacon beam transmitted by a terminal.

A radiation system comprising: a deformable mirror having a reflective surface arranged to receive and reflect a laser beam to form a reflected laser beam; a beam splitter arranged to split the reflected laser beam into a first portion and a second portion; a sensor; a focusing system configured to form an image of the reflective surface at a sensor using a first portion of the reflected laser beam, the sensor configured to output beam data representative of the reflected laser beam; means for generating radiation using a second portion of the reflected laser beam; and a controller operable to cause the deformable mirror to deform the reflective surface based on the beam data.

The invention discloses a three-dimensional light sheet fluorescence microscopic imaging device without mechanical motion and an imaging method, and solves the problems that a galvanometer affects the imaging quality and limits the imaging speed, the image post-processing process is complicated, the image processing time and cost are increased, and the imaging efficiency is high. The device comprises a multi-wavelength laser source, a light field regulation and control light sheet generation and movement module, a double-objective lens and sample box module, a deformable mirror focusing module and a wide-field imaging module which are sequentially arranged along a light path, according to the three-dimensional light sheet fluorescence microscopic imaging device without mechanical motion, generation and axial movement of the illumination light sheet are realized by utilizing a pure optical method, the complexity of the three-dimensional light sheet fluorescence microscopic imaging device without mechanical motion is reduced, the environmental interference resistance is improved, and various different types of illumination light sheets can be flexibly and dynamically generated to meet different imaging scenes.