548 results about "Micromachinery" patented technology

Microelectromechanical component (100) for motion measurement, comprising: a fortified section (118); a single, central anchor (106) coupled to the attached section (118) with four sides; a first non-straight suspension element (108) coupled to the anchor (106) on one side of the anchor (106); a second non-straight suspension member (120) coupled to the anchor (106) on the same side of the anchor (106), wherein the second non-straight suspension member (120) has a shape and position that mirrors the first non-straight suspension member (108) on a plane (122) bisecting the anchor; and a test mass (104) which is planar, wherein the test mass (104) is suspended at least partially on the first non-straight suspension member (108) and the second non-straight suspension member (120) such that the test mass (104) is rotatable about the anchor (106) and displaceable in a plane which is parallel to the attached section (118), where the first and second non-straight suspension members (108, 120) are bending bearings, wherein the first non-straight suspension member (108) has a C-shape, wherein the C-shape includes an inner section (110) which is coupled to the anchor (106) and extends towards the plane (122) bisecting the anchor, a central section (114) which includes a nearby section and has a distant section, whereby the near section is coupled to the inner section (110), and the far section extends away from the anchor (106) along the plane (122) bisecting the anchor and is coupled to an outer section (112) extending away from the plane (122) bisecting the anchor.

The teachings of the present disclosure enable the manufacture of one or more piezoelectric micromachined ultrasonic transducers (PMUTs) having a resonant frequency of a specific target value and / or substantially matched resonant frequencies. In accordance with the present disclosure, a flexible membrane of a PMUT is modified to impart a desired parameter profile for stiffness and / or mass to tune its resonant frequency to a target value. The desired parameter profile is achieved by locally removing or adding material to regions of one or more layers of the flexible membrane to alter its geometric dimensions and / or density. In some embodiments, material is added or removed non-uniformly across the structural layer to realize a material distribution that more strongly affects membrane stiffness than mass. In some embodiments, material having a specific residual stress is added to, and / or removed from, the membrane to define a desired modal stiffness for the membrane.

The invention discloses a micro-mechanical gyroscope zero offset online temperature compensation method based on Q value active control, and belongs to the technical field of micro-mechanical gyroscope zero offset temperature compensation. According to the method, on the basis that asymmetry of quality factors of a driving mode and a detection mode is a main cause of an in-phase zero offset error, improvement of in-phase zero offset is achieved in a mode of controlling the quality factors of the modes through parametric excitation. According to the method, online identification of the intrinsic quality factor and the equivalent quality factor of the detection mode is realized by using a signal injection method, and online compensation of the equivalent quality factor is realized through parametric excitation. The method solves the problem of zero offset error drift caused by mismatching of quality factors of a driving mode and a detection mode in a temperature change environment, and a universal scheme is provided for the zero offset temperature stability of the high-performance micromechanical gyroscope.

The invention relates to the field of pressure (0-200 kPa) detection, in particular to an MEMS integrated pressure sensing device or a monolithic integrated multi-frequency capacitive micromachined ultrasonic transducer (CMUTs) for wide-range pressure measurement. According to the monolithic integrated multi-frequency CMUTs, a first CMUTs, a second CMUTs and a third CMUTs are integrated on a chip; by adjusting the diaphragm thickness, cavity height and diaphragm radius of the first, second and third CMUT units and the pressure value in the cavity of the second CMUT unit, the first and second CMUT units work in a linear range of small deflection deformation, and the third CMUT unit works in a linear range of large deflection deformation. And the working ranges of the first CMUT unit, the second CMUT unit and the third CMUT unit form a continuous and complete measurement interval, and the resonant frequencies are not overlapped, so that the integrated pressure sensing device which can be used for 0-200 kPa full-pressure range measurement is realized.

The present invention features a micrometer-scale torsion balance device comprising a rigid mass and two or more nanoribbons attached to the rigid mass. The rigid mass may be suspended by the two or more nanoribbons. The two or more nanoribbons may be placed under tensile stress. A local acceleration value may be derived from a torsional stiffness of the two or more nanoribbons. In some embodiments, the rigid mass may comprise silicon. In some embodiments, the two or more nanoribbons may comprise silicon nitride. In some embodiments, the rigid mass may have a polygon shape, the polygon shape having four or more sides. A side of the four or more sides may be longer than all others.

MEMS actuators having micro spring structures and methods of fabricating the same are provided. An example MEMS actuator includes a first micromechanical arm array including multiple first micromechanical arms spaced from each other in a first horizontal direction and a second micromechanical arm array including multiple second micromechanical arms spaced from each other in the first horizontal direction. The first and the second micromechanical arm arrays are interposed in the first horizontal direction. The MEMS actuator further includes a metal connection structure connected to each first micromechanical arm, and a vertical micro spring structure disposed between the metal connection structure and one of the second micromechanical arms. The vertical micro spring structure includes an upper portion connected to the metal connection structure and a lower portion connected to a top end of the second micromechanical arm.

The invention discloses a comprehensive safety monitoring system for a building structure. The comprehensive safety monitoring system comprises an equipment sensing unit, a data processing unit, a system management unit, a terminal monitoring platform and a communication unit. The sensing module is integrated in the equipment main body of the equipment sensing unit, the equipment sensing unit is convenient to install and use, the MEMS sensor technology based on microelectronic elements and micromechanical elements is adopted, the acceleration, angle, temperature and humidity, wall internal stress and settlement change of a building structure are accurately monitored, and the construction quality is improved. According to the method, a plurality of algorithm models in an algorithm processing module of a data processing unit are matched, the health state of a monitoring structure is comprehensively judged, abnormal data are classified and managed according to disaster types, corresponding emergency rescue measures are intelligently recommended, and according to the autocorrelation and seasonality of sensing data and based on historical data, the monitoring structure is monitored. The method is used for predicting the trend of future sensing data, and predicting potential risks possibly occurring in the future in cooperation with a danger data threshold value, set by the system, of a building structure and big data analysis.

The invention belongs to the technical field of micromachining, and discloses a flexible micro needle tip array electrode based on composite multi-layer metal and a preparation method of the flexible micro needle tip array electrode. The flexible micro needle tip array electrode comprises a flexible substrate and a silicon micro needle tip array structure arranged on the flexible substrate, each silicon micro needle tip in the silicon micro needle tip array structure is provided with composite multilayer metal capable of conducting electricity and conducting signals, and the composite multilayer metal sequentially comprises a seed layer, a structural layer, an adhesion layer and a contact layer from inside to outside; the material of the seed layer is Cr, Ti, Ni, Mo, Ta, W, Fe, Cu, Au, Ag or Pt, the material of the structural layer is Cu, Ag or Au, the material of the adhesion layer is Cr, Ni, Ti, Mo, Ta or W, and the material of the contact layer is Au, Ag or AgCl. According to the invention, the composite multi-layer metal is used as the conductive layer of the flexible micro-needle-point array electrode, so that the contact impedance of the flexible micro-needle-point array electrode is reduced.

The invention relates to a method for the temporary fixing of micro-electro-mechanically movable elements (100), in particular those that can be used in equipment for semiconductor technology. In the method for temporarily fixing an element (100) that is micro-electro-mechanically movable relative to a basic structure (101) in at least one degree of freedom by at least one actuator (102), the fixing is carried out by filling at least one cavity (103) provided for the movement of the element, wherein - the material (202) intended for filling the at least one cavity (103) is introduced into the at least one cavity (103) in gaseous form in such a way that the material (202) is adsorbed and fills the at least one cavity (103) in layers, and - wherein at least one surface (200) of the movable element (100) to be kept free of the material (202) intended for filling is heated to a temperature above the sublimation temperature of the material (202) in order to prevent adsorption of the material (202) on the at least one surface (200) to be kept free. The invention also relates to a micro-electro-mechanically movable element (100) which is or was fixed by a method according to the invention.

The invention discloses a biaxial silicon micro-accelerometer based on a three-degree-of-freedom weak coupling resonator, and belongs to the technical field of micro-electro-mechanical systems and microfluid measurement. Comprising a glass base and a silicon micromechanical sensor, the center of the glass base is provided with a protruding common anchor point, the silicon micromechanical sensor is connected to the glass base through the common anchor point, and signal electrodes for transmitting signals are distributed on the glass base; the silicon micromechanical sensor comprises a stress base and resonance modules; the stress base is mounted on the glass base, and the resonance modules arranged in a Y shape are arranged on the stress base; the Y-shaped head of the resonance module is provided with a pair of resonators which are perpendicular to each other and are used for detecting acceleration in the horizontal direction and acceleration in the vertical direction respectively. The stability and the measurement accuracy of the biaxial accelerometer are further improved by arranging a resonator arrangement mode of a stable structure and cooperating with the mechanical stable design of the amplification unit and the safety structure.

The invention provides a triaxial accelerometer based on a four-degree-of-freedom weak coupling resonator, the triaxial accelerometer comprises an upper-layer structure and a lower-layer structure, the upper layer is a micromechanical sensitive element constructed by taking silicon as a material, the lower layer is a glass base processed by a silicon dioxide material, and the glass base is used for providing mechanical support and electrical isolation functions. Wherein the micromechanical sensitive element has a signal conversion function; and the lower-layer glass base is formed by wet etching and metal sputtering processes and is used for signal output. On the basis of collaborative design of the orthogonally distributed resonance unit array and the mechanical amplification mechanism, electrostatic driving and amplitude ratio detection are combined, synchronous and accurate sensing of acceleration of the Y axis, the X axis and the Z axis is achieved through a single sensitive element, the technical limitation of a traditional single-axis detection mode is broken through, the complexity of a rear-end signal processing circuit is reduced, and the detection precision is improved. The device space utilization rate is improved.

A moveable micromachined member of a microelectromechanical system (MEMS) device includes an insulating layer disposed between first and second electrically conductive layers. First and second mechanical structures secure the moveable micromachined member to a substrate of the MEMS device and include respective first and second electrical interconnect layers coupled in series, with the first electrically conductive layer of the moveable micromachined member and each other, between first and second electrical terminals to enable conduction of a first joule-heating current from the first electrical terminal to the second electrical terminal through the first electrically conductive layer of the moveable micromachined member.

A MEMS AE transducer system is provided that takes advantage of the low power consumption and lightweight characteristics of MEMS AE transducers, while also achieving higher sensing sensitivity. To address the problem of low sensitivity typically associated with MEMS AE transducers, electrical responses of multiple MEMS AE transducers operating at different frequency ranges are combined to increase the bandwidth and sensitivity of the MEMS AE transducer system. As the frequencies are constructive, the combined response on a single channel is the actual summation of two signals with an improved signal to noise ratio. Additionally, each frequency can be decomposed because they are well separated from each other due to the super narrowband response and high Quality factor of MEMS AE transducers.

A gyroscope structure, a chip, a gyroscope and an electronic device, the gyroscope structure comprises a substrate and a structural layer, the structural layer comprises an anchor point, a first elastic structure, a second elastic structure, a third elastic structure, a lever, a first mass block and a second mass block, the anchor point is connected with the substrate, the third elastic structure is used for connecting the anchor point with the lever, and the second elastic structure is used for connecting the first mass block and the second mass block. The first elastic structure is used for connecting the lever with the first mass block, and the second elastic structure is used for connecting the lever with the second mass block. Therefore, the orthogonality problem caused by micromachining manufacturing can be inhibited and counteracted through torsion of the first lever, and the precision and the stability of the gyroscope are improved.

The invention provides a piezoelectric micro-mechanical ultrasonic transducer, an array and a manufacturing method, and belongs to the technical field of micro electro mechanical systems, the piezoelectric micro-mechanical ultrasonic transducer comprises a substrate layer and a stacking structure arranged on the substrate layer, the substrate layer comprises a substrate area, a first cavity area and a second cavity area, and the first cavity area and the second cavity area are surrounded by the substrate area; the orthographic projection area of the first cavity region on the stacked structure is larger than that of the second cavity region on the stacked structure, and the suspended part of the stacked structure on the substrate layer is a vibrating diaphragm of the ultrasonic transducer. According to the invention, the boundary of the diaphragm of the PMUT is accurately defined by using the silicon surface cavity, and the pressed diaphragm damping is reduced by combining the bulk silicon back etching structure, so that the performance of the PMUT is improved; besides, the bandwidth and sensitivity of the PMUT can be regulated and controlled by adjusting the size ratio of the second cavity area to the first cavity area, so that the corresponding bandwidth and sensitivity can be set according to different application requirements, and the PMUT can be widely applied to the fields of distance measuring sensors, flow meters, liquid level meters, material identification and the like.

A micro-electro-mechanical systems (MEMS) die includes a piston; an electrode facing the piston, wherein a capacitance between the piston and the electrode changes as the distance between the piston and the electrode changes; and a resilient structure (e.g., a gasket or a pleated wall) disposed between the piston and the electrode, wherein the resilient structure supports the piston and resists the movement of the piston with respect to the electrode. A back volume is bounded by the piston and the resilient structure and the resilient structure blocks air from leaving the back volume. The piston may be a rigid body made of a conductive material, such as metal or a doped semiconductor. The MEMS die may also include a second resilient structure, which provides further support to the piston and is disposed within the back volume.

The invention discloses a two-way micropump driven by a double-layer nickel-titanium-based shape memory alloy film, and relates to the technical field of microfluid transmission and control and micromachinery. The invention aims to solve the problem that an existing micropump cannot realize alternate conveying and bidirectional conveying of two different liquids or the same liquid. The device comprises a left cover plate, a gasket, a right cover plate, a first shape memory alloy diaphragm, a pressing block, a second shape memory alloy diaphragm and four copper foil sheets, and the first shape memory alloy diaphragm and the second shape memory alloy diaphragm are oppositely arranged between the right cover plate and the left cover plate in parallel. The gasket is arranged on the outer edge between the first shape memory alloy diaphragm and the second shape memory alloy diaphragm, and the pressing block is arranged in the middle between the first shape memory alloy diaphragm and the second shape memory alloy diaphragm. The outer sides of the edges of the upper portions and the lower portions of the first shape memory alloy membrane and the second shape memory alloy membrane are each provided with a copper foil piece. The invention is used for liquid delivery of the micro-flow control system.

A gyroscope structure, a chip, a gyroscope, and an electronic device. The gyroscope structure comprises a substrate (100) and a first structure layer (300). The first structure layer (300) comprises an anchor point (301), a first elastic structure (304), a second elastic structure (314), a third elastic structure (302), a first lever (303), a first mass block (305), and a second mass block (315), the anchor point (301) being connected to the substrate (100), the third elastic structure (302) being used for connecting the anchor point (301) and the first lever (303), the first elastic structure (304) being used for connecting the first lever (303) and the first mass block (305), and the second elastic structure (314) being used for connecting the first lever (303) and the second mass block (315). Thus, the orthogonality problem caused by micromachining manufacturing can be suppressed and offset by means of torsion of the first lever (303), improving the precision and stability of the gyroscope.

The invention belongs to the technical field of acoustic emission sensors, and discloses a partial discharge detection device and method based on distributed capacitive micro-machined ultrasonic transducers, and the device comprises the steps: arranging at least four capacitive micro-machined ultrasonic transducers at different positions of a housing of a to-be-detected transformer; acquiring an ultrasonic signal in the transformer in real time through the capacitive micro-mechanical ultrasonic transducer; and calculating the position information of the partial discharge source in the transformer by using the time information of the ultrasonic signals acquired by all the capacitive micro-mechanical ultrasonic transducers, the propagation speed of the ultrasonic waves in the transformer and the position information of each capacitive micro-mechanical ultrasonic transducer. According to the invention, the MEMS ultrasonic sensor is adopted to measure the partial discharge phenomenon of the transformer, the measurement result is accurate, and the partial discharge source with partial discharge in the transformer can be accurately judged.

The invention discloses a high-integration micro-mechanical accelerometer-gyroscope, and belongs to the technical field of inertial sensing. According to the invention, by sharing a mechanical structure and an electrode, applying a pair of direct-current voltage, resonance voltage and carrier voltage with opposite symbols on a symmetrical parallel-plate capacitor structure, and combining a PLL phase closed-loop control method, resonance driving, amplitude detection and frequency detection of a three-axis structure can be realized at the same time; force balance feedback voltage can be obtained through weighted fusion and controller calculation, the position of the mass block is kept constant, and at the moment, the feedback voltage reflects the acceleration; meanwhile, the three-axis resonant structure is subjected to the coriolis force coupling effect, the sum of the resonant frequencies of the two orthogonal axes comprises angular velocity information of the third orthogonal axis, and the angular velocity can be obtained through multiplication demodulation and low-pass filtering calculation with a sinusoidal signal with the frequency being the difference between the two frequencies. The micro-mechanical accelerometer-gyroscope integration method is simple, and temperature drift can be effectively inhibited at the same time.

A micro-electromechanical-system (MEMS) device may include a capacitive micromachined ultrasonic transducer (CMUT) that includes an actuation membrane and a sensing dielectric layer that are spaced apart by a cavity. The sensing dielectric layer may be formed such that the thickness of the sensing dielectric layer may extend the operational of the CMUT while enabling the CMUT to accommodate a sufficiently high direct current voltage bias for collapsed mode operation. In this way, the thickness of the sensing dielectric layer enables the CMUT to operate in the collapsed mode, which enables the CMUT to achieve greater sound pressure output relative to other operational modes and enables the frequency response of the CMUT to be adjustable, thereby enabling the frequency response to be optimized for specific use cases and applications.

The invention discloses a capacitive micromechanical ultrasonic transducer for acoustic emission detection, the ultrasonic transducer is composed of a plurality of infinitesimal elements, each infinitesimal element structurally comprises a metal upper electrode, a vibrating membrane, a high dielectric constant dielectric layer, a lower electrode, an insulating layer and a matching layer, the upper end face of the lower electrode is provided with a spherical groove, and the lower end face of the lower electrode is provided with a spherical surface. The spherical groove is covered with a high-dielectric-constant dielectric layer, the high-dielectric-constant dielectric layer is covered with a horizontal vibrating membrane, a metal upper electrode is arranged in the middle of the upper end face of the vibrating membrane, and a matching layer covering the surfaces of the vibrating membrane and the metal upper electrode is arranged on the lower electrode. A spherical vacuum cavity is formed by a cavity formed by the high-dielectric-constant dielectric layer and the vibrating membrane, and an insulating layer is arranged at the bottom of the lower electrode. According to the method, the sensitivity and the signal-to-noise ratio of the CMUT can be synchronously improved, the CMUT can be applied to positioning of a structural sound source after a vibrating diaphragm of the CMUT is protected, and a feasible way is provided for damage detection of the CMUT in a plate structure.

An actuator of a micro-electromechanical system (MEMS) includes a semiconductor substrate. The actuator includes an array of micromechanical arms disposed over the semiconductor substrate. The actuator includes a first capping member disposed over the micromechanical arms. The actuator includes a second capping member disposed opposite the first capping member such that the micromechanical arms extend between the first capping member and the second capping member along a vertical direction.

The present invention discloses a high-sensitivity micro-mechanical system (MEMS) differential pressure sensor and a preparation method thereof, wherein the differential pressure sensor comprises a silicon nitride (SiN) with an etched window. x ) thin films, silicon (Si) substrates, SiN x Suspended structure self-supporting film, PdSe2 polycrystalline ultra-thin film, metal electrode and surface passivation layer. Ultra-thin PdSe2 has significant piezoresistive effect and ultra-thin suspended SiN x The device has a high pressure differential stress sensing characteristic, and the high Young's modulus SiN x The device ensures the reliability of differential pressure sensing. The Wheatstone bridge formed by the optimized metal electrode structure suppresses temperature drift, ensuring the accuracy of differential pressure measurement. Advantages of this invention include compatibility with silicon-based semiconductor processes, high yield, strong repeatability, good stability, and high device sensitivity.

The invention discloses an impact resistance method and device for a stabilized platform based on a micromechanical gyroscope, and the method comprises the steps: recording the angle amount of the stabilized platform which is not operated due to a control bandwidth when the stabilized platform is subjected to impact or high-frequency vibration by adopting a gyroscope integration method, and continuously compensating the angle amount to a control system. The problem of pointing angle deviation caused by transient impact or high-frequency vibration can be effectively solved. The invention relates to the technical field of platform design. According to the impact resistance method and device for the stabilized platform based on the micromechanical gyroscope, the acceleration of the environment where the stabilized platform is located is calculated through a gyroscope differential method, and the acceleration is used for judging the stability of the platform environment and serves as a threshold value for starting integration of gyroscope data; a solution is given under the condition that the stable holder in a continuous tracking state is subjected to external impact, the pointing of a system can be kept stable for small-order impact, and the stable holder can still point to a target after being impacted for large-order impact.

A measuring arrangement (400) for characterizing a fuel gas mixture comprises a support structure (410) and components arranged thereon that can be exposed to the fuel gas mixture, namely: a micromechanical resonator (20; 120, 220) with gas-dependent vibration properties; and a thermal conductivity sensor (44; 144); an infrared measuring arrangement (440) with a thermal infrared radiation source (442), an infrared spectroscopic sensor arrangement (444), and an irradiated infrared measuring volume (446) between the thermal infrared radiation source (442) and the infrared spectroscopic sensor arrangement (444); a pressure sensor (430) arranged on the support structure (410) for detecting a static pressure of the fuel gas mixture; a temperature sensor (50; 150) configured to detect a temperature measurement value of the fuel gas mixture; and a measuring and operating circuit (600) for receiving signals from the components;and for determining at least one final measured value of a variable characterizing the energy content of the gas on the basis of the received signals, wherein the variable characterizing the energy content of the fuel gas mixture is selected from calorific value, heating value, upper Wobbe index of the fuel gas mixture and lower Wobbe index of the fuel gas mixture;

The invention relates to an actuation system (20) for a timepiece movement, the actuation system (20) being configured to be able to at least partially displace a component between a plurality of positions, the actuation system (20) comprising a micromechanical actuator (30) intended to engage with said component, the actuator (30) comprising a stationary portion (33) intended to be mounted such as to remain stationary relative to a board of the timepiece movement, the invention relates to an actuation system comprising a stationary part (33), and a movable part (37) movable relative to the stationary part (33), the actuator (30) comprising a spring part (35) connecting the movable part (37) to the stationary part (33), the spring part (35) carrying the movable part (37), the actuation system further comprising setting means cooperating with the actuator (30), the spring portion (35) is arranged to be able to displace the movable portion (37) of the actuator (30) between a plurality of positions, the spring portion (35) comprising a guide with flexible vanes.

The invention provides a self-check resonant micro-mechanical accelerometer. The self-check resonant micro-mechanical accelerometer comprises a substrate; the anchoring platform is arranged above the substrate, and the anchoring platform is connected with the substrate through an anchoring part; the mass block is connected with the anchoring platform through a cantilever supporting assembly, and the cantilever supporting assembly enables the mass block to be arranged above the substrate in a suspended mode; the acceleration detection assembly comprises a resonance unit and an electrode group arranged corresponding to the resonance unit; the force transmission assembly is connected with the mass block and the resonance unit; the self-detection assembly is arranged on the outer side of the mass block and forms a variable capacitance structure with the mass block; wherein the self-detection assembly is used for providing an excitation signal with a preset size for the mass block and driving the mass block to generate an X-axis displacement response, the force transmission assembly transmits the X-axis displacement of the mass block to the resonance unit so as to change the Y-axis vibration frequency of the resonance unit, and the acceleration is determined according to the Y-axis vibration frequency of the resonance unit. And performing performance detection on the resonant micro-mechanical accelerometer based on the acceleration corresponding to the X-axis displacement response.

The present specification relates to an ultrasonic probe (100) comprising: an electronic chip (110) having a front face (110A) and comprising a substrate (111) and at least one micro-machined ultrasonic transducer (210) in and on the substrate and on the front face; an electrically insulating protective layer (130) covering the at least one transducer; and a metallic shielding layer (140) on the protective layer, the shielding layer forming an electromagnetic shield of the at least one transducer.