1020results about "Pressure difference measurement between multiple valves" patented technology

The invention discloses an intelligent gas micro-differential pressure monitoring system based on multi-sensor fusion, and relates to the technical field of gas micro-differential pressure monitoring, a sensor network arranged at a pipeline collects and verifies process state data, a component fluctuation index is established to quantify the fluctuation degree of gas components, and if the component fluctuation index is abnormal, the component fluctuation index is determined to be abnormal. Calling a dynamic physical property compensation function to output a correction coefficient and a differential pressure reference value; if the accumulative deviation between the actually measured differential pressure and the theoretical differential pressure reference value exceeds a set threshold value, locally adjusting and optimizing or globally re-calibrating and updating the model; outputting a real-time correction value and deviation measurement through a fusion algorithm, and when an error continuously exceeds the standard, dynamically adjusting a fusion weight or triggering model calibration; if the obtained value exceeds the preset threshold value, early warning or alarming is sent out and fed back to the previous step.

The invention provides a preparation method of an island and beam film structure micro differential pressure sensor with an IC (Integrated Circuit), which comprises the following steps: arranging an N-type buried layer, a P-type buried layer and an island film structure on an SOI (Silicon On Insulator) silicon wafer, then connecting the SOI silicon wafer with a double-parabolic silicon wafer, and arranging a medium isolation groove, an N-type buried layer connecting region, a P well, a P-type buried layer connecting region, a sensitive resistor, a P-type base region, an N-type base region, an N-type emitter region and a P-type emitter region on the SOI silicon wafer. According to the invention, the preparation of the complementary bipolar transistor double-buried layer is completed by combining a semiconductor manufacturing technology and an MEMS manufacturing technology under the condition of not using an epitaxial process; the process flow is integrally simplified, and the preparation efficiency is improved.

The invention discloses a vacuum microcavity interferometer chip, a manufacturing method and a low-drift optical pressure sensor, a film island structure is formed on the upper surface of a first substrate, and the film island structure comprises a protruding part and a pressure sensitive film surrounding the protruding part; a first side wall part, a getter cavity, a second side wall part and an F-P interference cavity located in the center are sequentially arranged on the lower surface of the first substrate in the radial direction, a first reflecting surface is deposited on the lower surface of the first substrate in the F-P interference cavity, and a second reflecting surface is deposited on the upper surface of the second substrate in the F-P interference cavity. A first optical antireflection film is deposited on the surface of the protruding part, and the first optical antireflection film, the protruding part, the pressure sensitive film, the first reflecting surface and the second reflecting surface have the same center; the filter further comprises a vent hole, and the vent hole is formed in the second side wall part and used for communicating the getter cavity and the F-P interference cavity.

The invention relates to the technical field of transmitters, and discloses an intelligent monocrystalline silicon pressure difference transmitter which comprises a sensor, diaphragms are arranged on the left side and the right side of the sensor, a first process flange is installed on the front side of the sensor, a second process flange is installed on the rear side of the sensor, and a machine body is fixedly connected to the upper surface of the sensor. A displayer is installed on the front side of the machine body, the sensor is electrically connected with the machine body, and an overload plugging device is arranged on the inner wall of the second process flange. The overload plugging device comprises a U-shaped guide frame, the U-shaped guide frame is installed on the inner wall of the second process flange, and the inner wall of the U-shaped guide frame is connected with a connecting rod in a sliding mode. According to the invention, through the arrangement of the overload plugging device, the interface part can be cut off when the tested pressure end of the transmitter is subjected to overlarge instantaneous pressure, so that the impact of the instantaneous pressure on the diaphragm of the tested pressure end is reduced, and the protection performance of the transmitter on the large instantaneous pressure is improved.

The invention provides an air pre-heater ash clogging monitoring system and method, and relates to the technical field of air pre-heaters, and the system comprises a real-time monitoring module which is used for obtaining real-time working parameters of an air pre-heater, and judging whether the ash clogging condition exists or not at present; and the ash clogging prediction module is used for performing ash clogging prediction according to the historical working parameters of the air preheater. The permissible fluctuation range of the flue gas pressure difference is updated regularly according to the real-time working parameters of the air preheater, flue gas emission can be more accurately controlled, accidental shutdown of the air preheater caused by improper parameter setting can be reduced, and therefore the stability and safety of operation of the whole device are improved, and the service life of the whole device is prolonged. When the flue gas pressure difference is changed abnormally, ash blocking prediction is carried out, prevention measures are taken before actual occurrence of ash blocking, actual occurrence of ash blocking is avoided, and stable operation of the air preheater is guaranteed.

The invention relates to a vacuum microcavity interferometer chip, a manufacturing method and a wide-range optical pressure sensor. Comprising a first substrate and a second substrate, the second substrate and the first substrate are bonded into a whole, a pressure sensitive film is manufactured on the first substrate, a first reflecting surface is deposited on the pressure sensitive film, and a second reflecting surface corresponding to the first reflecting surface is deposited on the second substrate. After the two substrates are bonded, the first reflecting surface and the second reflecting surface form an F-P optical interference cavity, at least one getter cavity is arranged on the first substrate and / or the second substrate, a getter film is arranged on the surface of the getter cavity, and the getter cavity and the F-P optical interference cavity are separated and connected through an air channel, so that the size of the air channel can be made to be very small, and the size of the getter cavity is smaller than that of the F-P optical interference cavity. A small amount of particles generated after the getter is activated are prevented from polluting an optical film to cause device failure; the whole sensor is of a sealed structure and is not provided with a structure externally connected with the chip, so that the overall airtightness of the chip is ensured, and the vacuum degree requirement of subsequent shell packaging is reduced.

The invention discloses a continuous force measurement wind tunnel test method based on a differential pressure type pressure scanning valve, and belongs to the technical field of wind tunnel tests. In order to solve the problem that a test result can be introduced by a reference pressure error measured by reference pressure measurement equipment, the method comprises the steps that a differential pressure type pressure scanning valve is installed in an aircraft model, and a reference pressure channel and a last measurement channel of the differential pressure type pressure scanning valve are connected with a wind tunnel plenum chamber static pressure air pipeline; measuring the pressure at the same position with a wind tunnel static pressure sensor; calculating the range of the differential pressure type pressure scanning valve; performing a wind tunnel test, and synchronously acquiring the pressure of each surface pressure measuring hole, the wind tunnel total pressure and the wind tunnel plenum chamber static pressure of the aircraft model in different states; whether the difference value between the wind tunnel plenum chamber static pressure collected by the last channel of the differential pressure type pressure scanning valve and the wind tunnel plenum chamber static pressure collected by the wind tunnel static pressure sensor meets the measurement precision or not is judged based on the range of the differential pressure type pressure scanning valve; and performing test data processing on the effective test data, and calculating the coefficient of the wind tunnel flow field pressure hole.

The invention discloses a method and equipment for monitoring the operation condition of a dust removal system and a program product. The method comprises the steps that a first current negative pressure value of the air inlet side and a second current negative pressure value of the air outlet side of a filtering device in the dust removal system are obtained; respectively compensating the first current negative pressure value and the second current negative pressure value to obtain a first current compensation negative pressure value and a second current compensation negative pressure value; calibrating the first current compensation negative pressure value and the second current compensation negative pressure value by using the calibration coefficient to obtain a calibrated first calibration negative pressure value and a calibrated second calibration negative pressure value; determining a pressure difference value between the first calibration negative pressure value and the second calibration negative pressure value by using the first calibration negative pressure value and the second calibration negative pressure value; and determining the operation condition of the filtering device in the dust removal system by using the pressure difference value. According to the embodiment of the invention, the pressure difference value between the two ends of the filtering device in the dust removal system can be accurately determined, and then the operation condition of the filtering device in the dust removal system is accurately determined.

The utility model discloses a micro differential pressure sensor verification and calibration device which comprises a micro air pump, a main pipeline is arranged at the end of the micro air pump, the end, away from the micro air pump, of the main pipeline is connected with two auxiliary pipelines, one auxiliary pipeline is provided with a flow adjusting valve for controlling gas flow, the end of the other auxiliary pipeline is connected with a U-shaped pipe, and the U-shaped pipe is connected with a gas inlet pipe. The end, away from the auxiliary pipeline, of the U-shaped pipe is connected with the auxiliary pipeline, the end of the auxiliary pipeline is connected with two ventilation pipes, the end of one ventilation pipe is connected with a connector, the end of the other ventilation pipe is connected with an intelligent standard differential pressure transmitter, and the end of the connector is used for being connected with a product to be tested. The micro-differential pressure generating device is simple in structure, different water column heights are generated in the U-shaped pipe by controlling the air outlet flow of the micro air cylinder, so that differential pressure is generated, the to-be-measured differential pressure sensor can be verified and calibrated through the computer, and compared with a traditional micro-differential pressure generating device, the micro-differential pressure generating device is low in cost, low in machining difficulty, convenient and fast.

A sensing device includes a body having a first chamber, a second chamber, and a liquid path which are filled with a liquid, the liquid path communicates with the second chamber, a pressure difference detection chip installed in the first chamber, and a pressure detection chip installed in the first chamber. The pressure difference detection chip seals an opening of the liquid path disposed on a bottom surface of the first chamber. The pressure difference detection chip detects a liquid pressure difference between the first chamber and the second chamber. The pressure detection chip detects a liquid pressure in the first chamber.

The utility model relates to the field of pressure reducing valves, in particular to an intelligent pressure reducing valve capable of adjusting a pressure reducing target value and high in adjusting accuracy, which comprises a valve body, a valve cover, a valve seat, a valve rod, a valve plate, a diaphragm, a connecting seat, a pressure adjusting valve, a first electric valve, a second electric valve, a first connecting pipe, a second connecting pipe and a control system. The valve body is provided with a water inlet, a water outlet, a mounting port and an inner cavity, the valve cover is locked at the mounting port, the diaphragm is clamped between the valve cover and the valve body and seals the mounting port, the inner cavity is divided into an adjusting cavity and a flowing cavity through the diaphragm, the valve seat is arranged in the flowing cavity, the valve rod is arranged on the valve seat in a sliding mode, and the valve rod is arranged on the valve seat in a sliding mode. The upper end of the valve rod penetrates through the mounting opening and is connected with the diaphragm through the connecting seat, the valve plate is arranged at the lower end of the valve rod, a first connecting opening is formed in the position, close to the water inlet, of the valve body, a second connecting opening is formed in the position, close to the water outlet, of the valve body, and a third connecting opening and a fourth connecting opening which are communicated with the adjusting cavity are formed in the valve cover.

A filter device includes a housing including a columnar portion having a columnar shape and provided at a filter device including a filtration member that filters a liquid, a pressure difference detection unit provided at the housing and configured to detect a pressure difference between a pressure upstream of the filtration member and a pressure downstream thereof, a viscosity sensor configured to measure viscosity of the liquid, and a temperature sensor configured to measure a temperature of the liquid are included. A hollow portion is provided inside the columnar portion, both ends of the hollow portion being covered, the hollow portion is provided with the viscosity sensor and the temperature sensor, and a communication hole that allows the hollow portion and a space outside the housing to communicate with each other is provided in the housing.

The invention discloses an intelligent detection method and device for a cotton water miscellaneous micronaire value based on multi-source information fusion, and relates to the field of cotton quality detection.The method comprises the steps that the weight, the initial air pressure difference, the cotton sample image, the resistance value, the environment temperature and the environment humidity of a to-be-detected cotton sample are obtained; according to the initial air pressure difference and the weight, the compensated air pressure difference is determined through a weight compensation model; according to the cotton sample image, utilizing an image segmentation technology to extract the impurity area percentage and the impurity grain number of the cotton sample to be detected, and determining the impurity content of the cotton sample to be detected; according to the resistance value, the environment temperature and the environment humidity, utilizing a moisture regain prediction model to determine the moisture regain of the cotton sample to be detected; and determining the micronaire value of the cotton sample to be tested by using a Stacking ensemble learning model according to the compensated air pressure difference, impurity content and moisture regain. According to the method, the moisture regain, the impurity rate and the micronaire value of the cotton can be accurately detected in a non-standard detection environment.

In one aspect, the invention relates to a pressure sensor for measuring a pressure of a fluid. The pressure sensor comprises a detection chamber within which a thermal sensor is arranged. The thermal sensor comprises a heating element for providing a thermal field and a sensor component for detecting a temperature response of the thermal sensor. The heating element is designed to be controlled in an oscillating manner at at least one frequency. The pressure of the fluid can be determined on the basis of the temperature response of the thermal sensor. The thermal sensor is positioned on a support membrane which is held by a support structure and extends over a cavity. Furthermore, there is an aperture which allows for pressure compensation between the cavity and an interior region of ​​the detection chamber. In further aspects, the invention relates to a method for measuring a pressure of a fluid and to a use of the pressure sensor according to the invention for monitoring.

The invention relates to the technical field of air conditioning treatment, in particular to an air volume monitoring method and system for a centrifugal ventilator. The method comprises the steps that the difference between all belt tension data obtained through real-time monitoring data and experiment monitoring data is analyzed; calculating the deviation degree of the air volume value of the real-time monitoring data measured based on the static pressure method under different frequencies, and obtaining the real-time air volume value; based on the fluctuation degree of the wind speed data in all the wind speed sensors, the disordered distribution condition of the fluctuation degree calculated by all the wind speed sensors and the average distribution condition of the fluctuation degree calculated at all the collection moments are utilized, the reliability of real-time wind quantity measurement based on the wind speed method is obtained, and the real-time wind quantity is determined; and the final air volume of the centrifugal fan is determined by combining the air volume values measured in real time through the static pressure method and the air speed method and the deviation degree and reliability of the respective measurement methods. The invention aims to integrate the results of the static pressure method and the wind speed method and improve the overall accuracy and reliability of the air volume measurement.

The invention relates to a vacuum microcavity interferometer chip, a manufacturing method and an ultra-high precision optical pressure sensor, the lower surface of a first substrate is etched to form a concave cavity, after the first substrate and a second substrate are bonded, the concave cavity forms an F-P interference cavity, and the F-P interference cavity forms an F-P cavity; a first reflecting surface is arranged on the surface of the first substrate in the F-P interference cavity, a second reflecting surface is arranged on the surface of the second substrate in the F-P interference cavity, an annular cavity is formed in the upper surface of the third substrate, and the getter film is deposited on at least one surface in the annular cavity. The second substrate is provided with at least one vent hole, and the vent hole is communicated with the F-P interference cavity and the annular cavity; the projections of the annular cavity and the F-P interference cavity on the horizontal plane at least partially coincide.

The invention relates to a multi-channel air pressure monitoring method, an adaptive monitoring circuit and computer equipment, and the method comprises the steps: synchronously collecting an original air pressure signal set in a target region through a multi-channel air pressure sensor, and carrying out the signal optimization processing, thereby obtaining an air pressure signal set; performing data analysis on a signal cluster divided by the air pressure signal set according to a channel grouping relationship to obtain an air pressure monitoring value of each channel, and calculating a differential pressure value between the channels in the cluster; and inputting the air pressure monitoring value and the differential pressure value into a two-dimensional data anomaly monitoring model of a dual-threshold system established based on historical data and environment auxiliary parameters, and outputting an anomaly judgment result and an anomaly weight ratio, so as to solve the problems of asynchronous monitoring data and high anomaly misjudgment rate in the traditional single-channel monitoring method, and improve the accuracy of the monitoring result. And the environmental stability of the target area is ensured.

The invention relates to the technical field of pressure sensors, and provides a differential pressure sensor sensitive structure and a packaging method, and the packaging method comprises the following steps: preparing a screen printing plate; printing glass slurry on the lower substrate layer wafer; printing glass slurry on the upper substrate layer wafer; the printed lower substrate layer wafer and the printed upper substrate layer wafer are placed in a drying oven to be subjected to glue discharging and pre-sintering; the lower substrate layer wafer and the pressure sensing film layer wafer are pre-fixed after being aligned; aligning the upper substrate layer wafer with the fixed lower substrate layer wafer and the pressure sensing film layer and then pre-fixing the upper substrate layer wafer and the fixed lower substrate layer wafer and the pressure sensing film layer; putting the three layers of pre-fixed wafer combinations into a variable-load muffle furnace, and applying a pre-load for sintering; cutting up the three layers of wafers to form a naked DIE of the MEMS header; and mounting an ASIC bare DIE, and interconnecting each electrode with the ASIC chip to complete electrical connection. The packaging precision, the structural stability, the electrical performance and the production efficiency of the differential pressure sensor sensitive structure are improved, and meanwhile the production cost is reduced.

The invention relates to the technical field of railway safety protection monitoring, in particular to an intelligent monitoring device for a railway tunnel protective door. According to the method, the characteristic that piston wind is generated when a train passes through a tunnel, so that air pressure changes remarkably is utilized, the air pressure transmitter collects the air pressure in real time and transmits the air pressure value to the edge calculation unit, the train passing state is detected, and under the condition that the air pressure changes remarkably after the train passes, the train passing state is detected. The image acquisition device is triggered to execute the photographing function with the flash lamp, the safety of the train is not influenced, the method is simple and easy to implement, convenient and reliable, the problem that the driving safety is influenced when a conventional monitoring device works is solved, 24-hour uninterrupted photographing and image recognition are not needed, and the dependence on network data transmission and network server hardware equipment is reduced.

The utility model relates to the technical field of sensor packaging, in particular to a batch packaging structure and a batch packaging process for sensors, the batch packaging structure comprises a substrate and a packaging cover, the windowing position of the substrate is provided with a mounting area, the mounting area is divided into a plurality of packaging stations arranged in a rectangular array, and the packaging stations are arranged on the substrate. First positioning holes are formed in two opposite sides of the mounting area of the substrate; the surface, provided with the mounting area, of the substrate is connected with a packaging layer, the packaging layer comprises a plurality of packaging tube shells, and the packaging tube shells are in one-to-one correspondence with the packaging stations; the packaging cover comprises a cover plate area, the cover plate area is provided with a plurality of window covers arranged in a rectangular array, the window covers correspond to the packaging stations one to one, windows are formed in the window covers, waterproof films are attached to the windows, second positioning holes are formed in the positions, on the two opposite sides of the installation area, of the packaging cover, and the second positioning holes are opposite to the first positioning holes in position. According to the invention, the sensors can be packaged in batches, the production efficiency is improved, and the packaging cost is reduced.

Features relating to a cartridge for use with a vaporizer body are provided. The cartridge mates with the vaporizer body in a cartridge receptacle. The cartridge may include a cartridge body defining a reservoir configured to contain vaporizable material; a mouthpiece coupled to a proximal end region of the cartridge body; at least one proximal absorbent pad wedged within an internal volume of the mouthpiece; a mouthpiece seal with sealing ribs; a cannula defining a vaporization chamber extending through the cartridge body; a resistive heating element; a porous wick configured to draw the vaporizable material in the reservoir towards the vaporization chamber; an internal sealing gasket positioned in a distal end region of the cartridge body; a lower support structure positioned in the distal end region of the cartridge body; and at least one distal absorbent pad configured to wedge within a recess located in the lower support structure.

The invention discloses a multi-component laser gas analyzer based on front-end pretreatment, and relates to the technical field of gas detection, the multi-component laser gas analyzer specifically comprises a portable box, a control panel is arranged in the portable box, and a laser gas analysis mechanism is mounted in the portable box and located at the bottom of the control panel; the problem of spectral signal distortion caused by a high-dust and high-humidity environment in industrial gas detection is solved through a front-end pretreatment self-adaptive technology, system downtime caused by single-path blockage is avoided through a double-pipeline redundancy design aiming at the high-dust and high-humidity environment, rapid dehumidification and cooling of a compression and condensation assembly are combined, and the detection efficiency is improved. According to the multi-component laser gas analyzer system, a laser gas analysis mechanism can stably obtain high-precision spectral signals under complex working conditions, meanwhile, multi-stage intelligent early warning and filter element health management are adopted in the system, the maintenance cost is reduced, the service life of equipment is prolonged, the integrated design of the portable box supports on-site rapid overhaul, and the detection efficiency of the whole multi-component laser gas analyzer is improved.

The invention discloses an air separation pressure swing intelligent adsorption pollution discharge method, system and device combined with a pressure curve, and relates to the technical field of intelligent pollution discharge. The air separation pressure swing intelligent adsorption pollution discharge method, system and device combined with the pressure curve comprises the following steps: S1, collecting running state data in real time, and preprocessing the running state data; s2, performing pressure disturbance intensity analysis on the operation state data; s3, performing real-time analysis and feature extraction on the pressure curve; s4, performing start-stop risk prediction on the operation state data; and S5, integrating the operation state data, the pressure disturbance intensity analysis result and the start-stop risk prediction result to execute a pollution discharge control instruction. The problems that an air compressor and a pressure swing adsorption system lack linkage control based on pressure change, pollution discharge easily causes pressure fluctuation and frequent starting and stopping, energy consumption is increased, equipment abrasion is caused, and an existing control mode lacks a feedforward adjusting mechanism are solved.

A sensor includes a housing having a body and a plurality of ports, a plurality of diaphragms each disposed in one of the ports, and a package having a substrate and a sensor die attached to the substrate. The body has a first face and an opposite second face. The ports extend from the first face of the body. The substrate is attached to the second face of the body and the sensor die is disposed in a sealed containing space defined in part by the substrate.

According to the monolithic integrated MEMS micro differential pressure chip, a plurality of first injection regions (10), a second injection region (11), an all-dielectric isolation structure (6), a collector region (8), a base region (9), an emitter region (7) and a buried layer (1) are arranged on a first SOI silicon wafer, and correspondingly matched metal leads (13) are arranged on the second injection region (11), the collector region (8), the base region (9) and the emitter region (7). A second double-parabolic silicon wafer (5) is connected to the first SOI silicon wafer, and the monolithic integrated MEMS micro differential pressure chip is prepared through photoetching, injection, annealing, etching, film forming and sputtering processes. The invention has the advantages of simple structure, convenience in preparation and the like, and provides an efficient and economical solution for manufacturing a high-performance and high-reliability MEMS pressure chip.

The invention belongs to the technical field of sensors, and relates to a multi-parameter differential pressure sensor with a full-symmetric structure and double-side measurement and a use method of the multi-parameter differential pressure sensor. The pressure sensor comprises a base, two measuring cavities are formed in the base, silicon piezoresistive chips are arranged in the two measuring cavities, and the two measuring cavities are used for receiving pressure from different pressure sources respectively. Two oil guide channels are formed in the base, one end of each oil guide channel is communicated with one measuring cavity, the other end of each oil guide channel makes contact with the negative pressure side of the silicon piezoresistive chip in the other measuring cavity, in other words, the two silicon piezoresistive chips can achieve high and low pressure measurement of the two measuring cavities, and symmetrical output measurement on physical signals is achieved. The base is provided with two oil filling channels and two pressure guiding channels, and each measuring cavity is communicated with one oil filling channel and one pressure guiding channel. The oil filling channels are used for filling the two measuring cavities with silicone oil, and after silicone oil filling is completed, the two oil filling channels are sealed. The two pressure guiding channels are used for guiding the pressure to be measured into the measuring cavity.

The invention discloses a gas phase method polyethylene solid catalyst feeder pressure difference stabilizing device and a control method. The pressure difference stabilizing device comprises: a pressure difference detection unit, the high-pressure side of which is connected to the solid catalyst feeding storage tank and the low-pressure side of which is connected to the reactor, for detecting the pressure difference between the solid catalyst feeding storage tank and the reactor; the adjusting unit is used for adjusting the flow of nitrogen input or output from the solid catalyst feeding storage tank; the control unit is used for receiving the pressure difference signal acquired by the pressure difference detection unit and controlling the adjusting unit to adjust the nitrogen flow when the pressure difference between the solid catalyst feeding storage tank and the reactor deviates from a set value range; the discharge treatment unit is connected with the solid catalyst feeding storage tank through a nitrogen outlet channel, and a dust removal filter element is arranged on the outlet side of the discharge treatment unit and used for purifying nitrogen which is discharged from the outlet side of the discharge treatment unit and contains catalyst particles. Therefore, the pressure difference between the feeder and the reactor is stably controlled, and the production stability and the product quality are improved.

The utility model discloses a multi-channel gas differential pressure acquisition base and an acquisition device, a plurality of groups of high-pressure side and low-pressure side gas inlets which are arranged in pairs are arranged on a base body, and all the high-pressure side gas inlets are communicated with a high-pressure gas inlet cavity arranged in the base body, or are communicated or closed with the high-pressure gas inlet cavity through a control valve; all the low-pressure side air inlets are communicated with a low-pressure air inlet cavity formed in the base body, or are communicated or closed with the low-pressure air inlet cavity through a control valve; control valves are arranged on each high-pressure side air inlet and each low-pressure side air inlet, and the control valves are connected with a control unit. The base for collection is provided with a plurality of groups of high-pressure side air inlets and low-pressure side air inlets, so that to-be-measured bodies of a plurality of pipelines can be respectively introduced at the same time, and gas in the plurality of pipelines can be measured by using one collection device; according to the collecting device, gas differential pressure parameters in a plurality of pipelines can be measured through one device, the cost of overall investment equipment of a system is reduced, and the maintenance workload is reduced.

A method for monitoring the passage of gas through a supply tube includes measuring the pressure of the gas inside a pressurized container at a first time and at a second time. The temperature of the gas is measured. A pressure difference is calculated. A temperature difference is calculated. An alarm signal is generated if the pressure difference is less than a pre-established value and the temperature difference is greater than or equal to zero.

The invention discloses a common-film differential high-static-pressure resonant differential pressure sensor based on hot resistance driving, and relates to a pressure sensor. The invention provides a novel sensor structure based on a thermal piezoresistive effect. The sensor adopts a thermal piezoresistive effect for driving and piezoresistive detection, and comprises a low-voltage side pressure sensing film, a bonding oxide layer, a structural layer, a buried oxide layer, a high-voltage side pressure film and a substrate layer, the low-voltage side pressure sensing film is made of a silicon material, the structural layer and the high-voltage side pressure film are made of SOI sheets, and the substrate layer is made of BF33 glass; the high-pressure side pressure film and the low-pressure side pressure film respectively sense high pressure and low pressure and sense a difference value between the high pressure and the low pressure through deformation of the pressure films, deflection deformation of the films generates tensile stress in a central area and pressure stress in an edge area, the double resonators sense opposite stress and generate opposite frequency deviation, and the difference between the two is used for representing a differential pressure value. The glass substrate is mainly used for isolating thermal stress of the packaging stainless steel base.