1212 results about "Gas analyzer" patented technology

A method and apparatus for a gas delivery system to deliver a precursor from a vessel to a process chamber via a process gas produced by flowing a first carrier gas into the vessel and combining with a second carrier gas flowing through a bypass around the vessel and a precursor monitoring apparatus disposed between the process chamber and the vessel. The precursor monitoring apparatus has a gas analyzer to generate a first signal indicative of a concentration of the precursor in the process gas or to a signal indicative of a flow rate of the process gas.

A technique for use in fabricating an integrated circuit are disclosed. The method generally begins by performing an operation on a wafer using a fabrication tool. Next, volatiles are desorbed from the wafer. The desorbed volatiles are sampled and raw spectral data indicating the content of the desorbed volatiles is generated. The raw spectral data is subjected to a spectroscopic analysis. An operational parameter of the fabrication tool is then modified responsive to the result of the results of the spectroscopic analysis. In one particular aspect of the invention, a controller receives the raw spectral data and processes the raw spectral data to determine the presence of a residual material on the wafer. The controller then controls the process flow operation to reduce the amount of the residual material on the wafer responsive to the results of processing the raw spectral data. Other aspects of the invention include the apparatus implementing the process flow and the controller itself.

A method for controlling a deposition process, includes providing a wafer in a chamber of a deposition tool, the deposition tool being adapted to operate in accordance with a recipe; providing reactant gases to the chamber, the reactant gases reacting to form a layer on the wafer; allowing exhaust gases to exit the chamber; measuring characteristics of exhaust gases; and changing the recipe based on the characteristics of the exhaust gases. A deposition tool includes a chamber, a gas supply line, a gas exhaust line, a gas analyzer, and a controller. The chamber is adapted to receive a wafer. The gas supply line is coupled to the chamber for providing reactive gases. The gas exhaust line is coupled to the chamber for receiving exhaust gases. The gas analyzer is coupled to the gas exhaust line and adapted to determine characteristics of the exhaust gases. The controller is adapted to control the processing of the wafer in the chamber based on the characteristics of the exhaust gases.

A method, and systems implementing such method, for reducing methane emissions by ruminants. The method includes providing a feed dispenser for feeding ruminants one or more nutrient supplements, and the feed dispenser includes a gas analyzer proximate to where the ruminant places its head. The method includes determining a particular ruminant has accessed the feed dispenser such as by reading an identifier from an RFID ear tag and operating the feed dispenser to provide a ration of methane-controlling nutrient supplement. The method includes using the gas analyzer to determine levels of carbon dioxide and methane and operating a data analyzing station to determine a ratio of methane to carbon dioxide and modify the type or amount of nutrient supplement for the ruminant for a next feeding to control methane production or achieve an animal production goal, such as by selectively operating a hopper with two or more supplements compartments.

The application of a gas analyzer for gas mud logging is presented to measure gases in the return mud flow used in drilling processes. A supported membrane extraction probe from the analyzer is inserted into the mud flow. The probe extracts target gases from the mud through the membrane. Extracted gases are transported by an internal pump to an internal gas sensor unit. The infrared sensor unit is utilized to subject the gases to infrared emitted energy to excite the gasses at a molecular level for sensing and detection. The sensor then transfers sensed values electronically to a digital conditioning board. As the data is digitized in the conditioning board it is encoded with information to enable a means of correlating the derived sensor data. The data is then sent to a digital wireless transceiver for transport to a remote receiving transceiver connected to a microprocessor for data logging.

The invention belongs to the technical field of gas detection and relates to a laser infrared gas analyzer based on TDLAS-WMS (tunable diode laser absorption spectroscopy-wavelength modulation spectroscopy) for detecting hydrogen chloride, methane, carbon monoxide, water vapor and other gases. The laser infrared gas analyzer comprises a laser, a laser driving circuit, a temperature control circuit, an optical system with an optical cavity, a main detector, a reference detector, an intensity modulation and canceling circuit, a phase-locking and amplification circuit and a data acquisition and display circuit, wherein the laser driving circuit and the temperature control circuit are used for controlling the laser to emit light, the two ends of the optical system are respectively connected with the laser and the detector, the intensity modulation and canceling circuit is used for canceling the influence of intensity modulation in the system, the phase-locking and amplification circuit is used for extracting harmonic signals, and the data acquisition and display circuit is used for displaying the concentration of the gas to be detected. Compared with other detection instruments, the laser infrared gas analyzer has the advantages that division operation is introduced into the intensity modulation and canceling circuit, and the laser infrared gas analyzer is combined with a space double-optical path differential detection method, so that the influence of the intensity modulation can be fundamentally canceled.

An optical nose for detecting the presence of molecular contaminants in gaseous samples utilizes a tunable seed laser output in conjunction with a pulsed reference laser output to generate a mid-range IR laser output in the 2 to 20 micrometer range for use as a discriminating light source in a photo-acoustic gas analyzer.

Apparatuses are described to accurately determine a gas concentration of a sample of a patient's breath. The apparatuses may include a sample compartment, a breath speed analyzer, a gas analyzer, and a processor. The sample compartment includes an inlet that receives the breath. The breath speed analyzer determines the speed of a portion of the breath. The gas analyzer determines a gas concentration. The processor includes an algorithm that determines a degree of non-homogeneity of the sample based on the speed, and a corrected gas concentration based on the degree of non-homogeneity. In some variations, the gas correction is determined independently of patient cooperation. Apparatuses may be tuned based on the intended population's expected breathing pattern ranges such that the sample compartment is filled with a homogenous end-tidal gas sample regardless of an individual's breathing pattern. These apparatuses are useful, for example, for end-tidal CO analysis. Methods are also described.

Object of present invention to overcome a problem of a dispersion of an evaluation of gas barrier property depending on absorbed moisture of plastic, and carry out measurements in which a measurement value response is good and accuracy is good, wherein from the beginning of a container the gas barrier property of a plastic molded body does not depend on the amount of moisture absorbed thereof. A method of measuring the gas barrier property of the plastic molded body such as a plastic container, a plastic sheet or a plastic film or the like which uses a gas analyzer to measure the amount of permeation of a measurement object gas permeating through the plastic molded body, comprising: a heat drying process which heats and dries said plastic molded body in a temperature range which does not cause deformation or heat deterioration.

A rugged, miniature, spectroscopic gas analyzer apparatus for rapid, non-invasive, multi-component breath monitoring and analysis and subsequent determination of Q or other medical diagnostic applications. The system is comprised of one or more IR emitters focussed by optical elements through a low volume sample cell receiving a sample input of a patient's breath for analysis. The patient either at rest or during exercise, inhales C₂H₂—SF₆ mixtures (balance of oxygen and nitrogen) which is subsequently monitored upon exhalation for CO₂, H₂O, C₂H₂, and SF₆ which can be employed to determine Q directly and accurately. Measurements are performed in real-time or via post-processing of stored original data. Due to its small size, ruggedness, and low power consumption, the monitor can conveniently be employed in the field or data can also be retrieved remotely using telemetry. The miniature analyzer operates on the principle of infrared absorption spectroscopy and allows very precise concentration measurements of the analytes of interest, without any bias or interference from other matrix components.

The present invention generally provides methods and apparatus for controlling ion dosage in real time during plasma processes. In one embodiment, ion dosages may be controlled using in-situ measurement of the plasma from a mass distribution sensor combined with in-situ measurement from an RF probe.

The invention discloses a carbon dioxide gas analyzer and an analysis method thereof. The optical probe of the analyzer adopts a spatial double-optical path structure which is composed of a single light source, a single gas chamber and double detectors. The analysis method comprises the following steps: firstly, the values of the voltage at the two ends of the main detector and the reference detector in the optical probe are measured when the light source is turned off , then the values of the voltage at the two ends of the main detector and the reference detector are measured when the light source is turned on and after the infrared light emitted from the light source passes through the gas chamber, after the treatment of error elimination, by using the Lambert-Beer's Law as the theoretical basis and by combining with the working mechanism of a spatial double-optical path optical structure, the measurement model of the analyzer is established and calibrated, therefore, the gas concentration of carbon dioxide can be directly calculated and output by the analyzer through the measurement value. The carbon dioxide gas analyzer has the advantages of small volume, light weight, low power consumption, high reliability and high measurement accuracy.

The invention relates to a laser gas analyzer and a calibration method; wherein, the laser gas analyzer comprises a light source radiation unit used for generating semiconductor laser beams, a spectroscopy unit which respectively transmits the generated laser beams to a reference cell which is internally encapsulated by zero gas and gas to be measured with known consistency and a measurement cell where the gas to be measured is pumped into during the measurement process and the zero gas and end gas are respectively pump into during the calibration process, a reference detector which is used for obtaining the energy intensity of the laser beam which passes through the reference cell and positioning the absorption peak wavelength of the gas spectrum, and a measurement detector which is used for measuring the energy intensity of the laser beam which passes through the measurement cell and determining the gas consistency during the measurement process; and the calibration method combines the energy signals of the laser beams obtained by the two detectors with a specific arithmetic to carry out zero calibration and end calibration on the instrument. The laser gas analyzer has the advantages of wide application range, simple calibration operation process, saving time, reducing the production cost and usage cost and the like owning to the characteristics of sealed laser passage and multi-optical passages.

The invention discloses a temperature-humidity-stress-chemical coupling test platform for porous dielectric material. The test platform comprises a closed container, a load-bearing frame, a mechanical test system, an environment simulating system and a data acquiring system; the load-bearing structure is fixedly arranged at upper and lower two ends of the closed container; the mechanical test system comprises a loading device and a power device; the loading device is arranged in the enclosed container; the environment simulating system comprises a temperature simulating device and a humidity simulating device; the environment simulating system further comprises a chemical simulating device; the chemical simulating device comprises a chemical gas generator and a gas pipeline; the outlet of the gas pipeline is connected in the closed container; and a gas analyzer used for monitoring gas component and concentration is further arranged in the closed container. By adopting the test platform provided by the invention, the temperature and humidity changes in atmosphere environment and the influence of gas containing chemical substance to the long-term mechanical property of material can be simulated; and the test platform is feasible for mechanical multi-field coupling research on materials.

In the invention, the atmosphere in a process chamber is conditioned using a primary pump, a secondary pump, speed control means for controlling the speed of the primary pump, and at least first gas analyzer means adapted for analyzing the extracted gases upstream from the primary pump and for producing first analysis signals. First signal processing means control the pumping speed as a function of the first analysis signals, so as to determine the variation in the pressure inside the process chamber during the transient stages of the treatment. In this way, deposits and turbulence are avoided in the process chamber, as are deposits in the pumping line, so that the secondary pump can be placed in the immediate vicinity of the process chamber.

The invention pertaining to the field of metallurgy and steel-making technology provides a convertor steelmaking whole-course dynamic monitoring method. The whole-course dynamic control of the convertor steelmaking can be realized by adopting a laser gas analyzer and a stock bin port bombing technology, molten steel component and temperature are forecasted continuously and detected dynamically, and the convertor is assisted to perform the end point judgment. The method comprises steps of using a network of computer to monitor the information of charging, jetting and the like; using the laser gas analyzer as the gas signal acquiring and analyzing device in the convertor smelting process; using the bombing device installed at the stock bin port to performing head ejecting to detect information of molten steel component, temperature and the like; acquired parameters are all transferred through the network of computer; the computer continuously forecasts the parameters of molten steel component, temperature and the like by utilizing the above parameters and a built-in control model, and displays the parameters and provides guidance on the user interface.The invention has advantages that the whole-course feedback signals can be obtained, a whole-course dynamic control of the convertor smelting can be realized, variation of temperature and molten steel component can be forecasted continuously, the size of the convertor capability is not limited, and the convertor has characteristics of simple structure, convenient maintenance, small investment and low rate of fault.

The invention provides a gas analysis device with an in-situ calibration function. The gas analysis device comprises a sampling chamber, an analysis chamber, a gas analyzer and a calibration module, wherein the sampling chamber is connected with a to-be-detected chamber through a first valve and used for leading in sample gas in the to-be-detected chamber; the analysis chamber is connected with the sampling chamber through a second valve, and a vacuum gauge tube is arranged on the analysis chamber and used for monitoring the degree of vacuum of the analysis chamber; the gas analyzer is arranged in the analysis chamber and used for analyzing and testing to-be-analyzed gas; the calibration module is used for providing standard gas for the gas analyzer and quantificationally calibrating the gas analysis device. The invention further provides a gas analysis method. According to the invention, the gas analysis device is periodically calibrated through the calibration module, bakeout degassing is performed through a heater, gas sweeping and protective gas filling are performed through a sweeping and degassing module, a system is enabled to maintain favorable testing background, testing accuracy is guaranteed, gas strength testing at the level of part per billion can be realized, and the gas analysis device is especially suitable for gas analysis and detection in EUV vacuum environment.