Determination method for determining the progress of a treatment of a by-product produced in a process for reacting a substance containing a
halogen and
silicon, or the reaction of a substance containing
silicon and a substance containing a
halogen, wherein the treatment of the by-product comprises contacting the by-product with a treatment fluid containing water to obtain a first
solid, wherein the determination method comprises determining the progress of the treatment of the by-product on the basis of a
signal according to a chemical analysis of at least one of a Si-α bond (α is one selected from the group consisting of F, Cl, Br and I) and a Si-H bond of the first
solid, where the chemical analysis is a spectroscopic
infrared analysis, and containing: Determination that the treatment of the by-product is completed when a value (I1-I2) is reached, assuming an
absorbance I1 of a local maximum value in a
wavenumber range of 800 cm -1 or more and 900 cm -1 or less an
absorbance I2 of a local minimum value in a region of a
wavenumber of 900 cm -1 or more and 1000 cm -1 or less and which is located at a higher
wavenumber side than the local maximum value, in an
infrared spectrum of the first
solid is subtracted, is 0.001 or less; Determining that part of the treatment of the by-product is not completed if the value (I1-I2) is more than 0.001 and the
absorbance I2 of the local minimum value is 0.130 or less; and Determination that the treatment of the by-product is not completed if the value (I1-I2) is more than 0.001 and the absorbance I2 of the local minimum value is more than 0.130.