A technique for use in fabricating an integrated circuit are disclosed. The method generally begins by performing an operation on a wafer using a fabrication tool. Next, volatiles are desorbed from the wafer. The desorbed volatiles are sampled and raw spectral data indicating the content of the desorbed volatiles is generated. The raw spectral data is subjected to a spectroscopic analysis. An operational parameter of the fabrication tool is then modified responsive to the result of the results of the spectroscopic analysis. In one particular aspect of the invention, a controller receives the raw spectral data and processes the raw spectral data to determine the presence of a residual material on the wafer. The controller then controls the process flow operation to reduce the amount of the residual material on the wafer responsive to the results of processing the raw spectral data. Other aspects of the invention include the apparatus implementing the process flow and the controller itself.
A method of in situ analysis of a biological sample comprising the steps of (a) staining the biological sample with N stains of which a first stain is selected from the group consisting of a first immunohistochemical stain, a first histological stain and a first DNAploidy stain, and a second stain is selected from the group consisting of a second immunohistochemical stain, a second histological stain and a second DNAploidy stain, with provisions that N is an integer greater than three and further that (i) if the first stain is the first immunohistochemical stain then the second stain is either the second histological stain or the second DNAploidy stain; (ii) if the first stain is the first histological stain then the second stain is either the second immunohistochemical stain or the second DNA ploidy stain; whereas (iii) if the first stain is the first DNA ploidy stain then the second stain is either the second immunohistochemical stain or the second histological stain; and (b) using a spectral data collection device for collecting spectral data from the biological sample, the spectral data collection device and the N stains are selected such that a spectral component associated with each of the N stains is collectable.
The present invention provides a method and a system for a real-time configurable definition and generation of grating profile libraries. A parameter set is used to specify the ranges of grating dimensions and resolutions of the profile library to be generated. In one embodiment, a compiler creates subsets of a large profile library, the subset designed to enable rapid search and validation of real-time data. In another embodiment, an automatic process generates a new parameter set and a new subset of the library when trigger conditions are met. Subsets of the profile library may be used to check if grating spectrum data are within the ranges established for an application and if the dimensions are within the process averages established for a manufacturing run. The system for generation of grating profile libraries is scalable, operable in a distributed environment, and includes application specific items that can be selected or determined by the client.
A multispectral X-ray imaging system uses a wideband source and filtrationassembly to select for M sets of spectral data. Spectral characteristics may be dynamically adjusted in synchrony with scan excursions where an X-ray source, detector array, or body may be moved relative to one another in acquiring T sets of measurement data. The system may be used in projection imaging and / or CT imaging. Processed image data, such as a CT reconstructed image, may be decomposed onto basis functions for analytical processing of multispectral image data to facilitate computer assisted diagnostics. The system may perform this diagnostic function in medical applications and / or security applications.
Methods, systems and computer program products for generating parameters for softwaredispersion compensation in optical coherence tomography (OCT) systems are provided. Raw spectral interferogram data is acquired for a given lateral position on a sample and a given reference reflection. A trial spectral phase corresponding to each wavenumber sample of the acquired spectral interferogram data is postulated. The acquired raw spectral data and the postulated trial spectral phase data are assembled into trial complex spectrum data. Trial A-scan data is computed by performing an inverse Fourier transform on the trial complex spectrum data and determining the magnitude of a result.
A system and method for classifying tissue by application of discriminant analysis to spectral data. Spectra are recorded as amplitudes at a series of discrete wavelengths. Pluralities of reference spectra are recorded for specimens having known conditions. The reference spectra are subjected to discriminant analysis to determine wavelength regions of interest for the analysis. A plurality of amplitudes are selected for the analysis, and are plotted in an N-dimensional space. For each plurality of reference spectra corresponding to a specific known condition, a characteristic point is determined and plotted, the characteristic point representative of the known condition. A test spectrum is recorded from a test specimen, and the plurality of amplitudes corresponding in wavelength to the wavelength regions of interest are selected. A characteristic point in N-dimensional space is determined for the test spectrum. The distance of the characteristic point of the test spectrum from each of the plurality of characteristic points representative of known conditions is determined. The test specimen is assigned the condition corresponding to the characteristic point of a plurality of reference spectra, based on a distance relationship with at least two distances, provided that at least one distance is less than a pre-determined maximum distance. In some embodiments, the test specimen can comprise human cervical tissue, and the known conditions can include normal health, metaplasia, CIN I and CIN II / III.
A multispectral X-ray imaging system uses a wideband source and filtrationassembly to select for M sets of spectral data. Spectral characteristics may be dynamically adjusted in synchrony with scan excursions where an X-ray source, detector array, or body may be moved relative to one another in acquiring T sets of measurement data. The system may be used in projection imaging and / or CT imaging. Processed image data, such as a CT reconstructed image, may be decomposed onto basis functions for analytical processing of multispectral image data to facilitate computer assisted diagnostics. The system may perform this diagnostic function in medical applications and / or security applications.
A sensor (200, 900) comprising an illuminator (212, 500, 804, 832, 858, 904), a receiver (216, 400, 420, 460, 480, 808, 836, 862, 924) and an analyzer (240) for detecting and identifying an analyte having a characteristic absorption band that is present in a sample region (208, 812, 824, 874, 922). The illuminator includes an illumination source (220) for illuminating the sample region with spectral energy across at least a portion of the characteristic absorption band. The receiver includes a detector (228, 404, 424, 460, 484, 866, 928) for sensing predetermined portions of the spectral energy band and for creating a sample spectral data vector (236). The analyzer uses the spectral data vector and known characteristic data to detect and identify the analyte.
A multispectral X-ray imaging system uses a wideband source and filtrationassembly to select for M sets of spectral data. Spectral characteristics may be dynamically adjusted in synchrony with scan excursions where an X-ray source, detector array, or body may be moved relative to one another in acquiring T sets of measurement data. The system may be used in projection imaging and / or CT imaging. Processed image data, such as a CT reconstructed image, may be decomposed onto basis functions for analytical processing of multispectral image data to facilitate computer assisted diagnostics. The system may perform this diagnostic function in medical applications and / or security applications.
A system for non-invasively monitoring at least one hemodynamic vascular parameter of an individual is disclosed. The system comprises (a) at least two infrared detectors being positionable in a spaced apart configuration against a region of a skin of the individual above at least one blood vessel, each of said at least two infrared detectors being for individually collecting infraredspectral data from said region of the skin, said infrared spectral data corresponding to a volume of blood present within said at least one blood vessel; and (b) a processing unit being in communication with said at least two infrared detectors, said processing unit being for independently processing said infrared spectral data collected by each of said at least two infrared detectors so as to yield information pertaining to the at least one hemodynamic vascular parameter of the individual.
An apparatus for processing an audio signal and method thereof are disclosed. The present invention includes receiving a spectral data of lower band and type information indicating a particular band extension scheme for a current frame of the audio signal from among a plurality of band extension schemes including a first band extension scheme and a second band extension scheme, by an audio processing apparatus; when the type information indicates the first band extension scheme for the current frame, generating a spectral data of higher band in the current frame using the spectral data of lower band by performing the first band extension scheme; and when the type information indicates the second band extension scheme for the current frame, generating the spectral data of higher band in the current frame using the spectral data of lower band by performing the second band extension scheme, wherein the first band extension scheme is based on a first data area of the spectral data of lower band, and wherein the second band extension scheme is based on a second data area of the spectral data of lower band.
A system is described that permits high-speed, high-resolution mapping of thicknesses (or other properties) of layers on patterned semiconductor wafers. The system comprises one or more spectrometers that each simultaneously image a plurality of spatial locations. In one example, the spectrometer comprises a two-dimensional CCD imager with one axis of the imager measuring spectral data and the other axis measuring spatial data. Spectral reflectance or transmission of the patterned wafer under test is obtained by passing the wafer under (or over) the imaging spectrometer(s) and taking sequential reflectance or transmission images for successive pluralities of spatial locations. The resulting spectral reflectance or transmission map can then be analyzed at discrete locations to determine the thicknesses or other properties of the layers at those locations.
An etchingprocess state judgment method comprising: a spectral data obtaining step, in which an optical emission spectrum distribution is obtained by monitoring optical emission during an etching process of a plurality of wafers; a peak detection step, in which peaks are detected from the optical emission spectrum distribution at a specific time point during the etching process, to obtain peak characteristics; a common peak identifying step, in which peaks common to the wafers are identified among the peaks detected in the peak detection step; and a state detection step, in which the characteristics are compared regarding the common peaks, to detect a state of each wafer in the etching process.A state (anomaly or normalcy) of an etching process is detected from optical emission spectrum distribution at the time of etching process, by a simple method without assuming substances.
The present invention is directed generally toward the field of spectral analysis and, more particularly, toward an improved method of identifying unknown components of a mixture from a set of spectra collected from the mixture using a spectral library including potential candidates. For example, the present method is directed to identifying components of a mixture by the steps which comprise obtaining a set of spectral data for the mixture that defines a mixture data space; ranking a plurality of library spectra of known elements according to their angle of projection into the mixture data space; calculating a corrected correlation coefficient for each combination of the top y ranked library spectra; and selecting the combination having the highest corrected correlation coefficient, wherein the known elements of the selected combination are identified as the components of the mixture.
Provided is a laserablationspectroscopy apparatus and method. A pulse laser is focused on the sample site to generate a plasma plume during a laserablation process. The plasma plume is detected with a spectrometer and an intensified charge coupled device. A sample of material is coupled to a stage movable in the x, y and z directions using an array of x-y-z motors. A change in the height of the sample is detected using a triangulation sensor. The apparatus includes a system computer for synchronizing the movement of the stage in the x, y and z direction during the laser ablation process. The method includes a protocol of generating one or more laser ablations per sample site. The spectral data of the total number of laser ablations for each sample site are averaged together. The protocol includes laser ablating additional sample sites and averaging the spectral data of the total number of sample sites.
Fluorescencespectral data acquired from tissues in vivo or in vitro is processed in accordance with a multivariate statistical method to achieve the ability to probabilistically classify tissue in a diagnostically useful manner, such as by histopathological classification. The apparatus includes a controllable illumination device for emitting electromagnetic radiation selected to cause tissue to produce a fluorescence intensity spectrum. Also included are an optical system for applying the plurality of radiation wavelengths to a tissue sample, and a fluorescence intensity spectrum detecting device for detecting an intensity of fluorescence spectra emitted by the sample as a result of illumination by the controllable illumination device. The system also include a data processor, connected to the detecting device, for analyzing detected fluorescence spectra to calculate a probability that the sample belongs in a particular classification. The data processor analyzes the detected fluorescence spectra using a multivariate statistical method. The five primary steps involved in the multivariate statistical method are (i) preprocessing of spectral data from each patient to account for inter-patient variation, (ii) partitioning of the preprocessed spectral data from all patients into calibration and prediction sets, (iii) dimension reduction of the preprocessed spectra in the calibration set using principal component analysis, (iv) selection of the diagnostically most useful principal components using a two-sided unpaired student's t-test and (v) development of an optimal classification scheme based on logistic discrimination using the diagnostically useful principal component scores of the calibration set as inputs.
An encoding device (100) includes (i) a first encoding unit (132) that encodes spectral data in the lower frequency band represented by a plularity of parameters, out of the spectral data obtained by transforming an audio signal inputted for a fixed time length, (ii) a second quantizing unit (133) that generates sub information representing characteristics of the spectral data in the higher frequency by fewer parameters than those for the lower frequency band, out of the spectral data obtained by the transformation, (iii) a second encoding unit (134) that encodes the generated sub information, and (iv) a stream output unit (140) that outputs the data encoded by the first encoding unit (132) and the data encoded by the second encoding unit (134).
A monitoring network system for inspecting and controlling harmful substances includes probe assemblies that each includes a sensor comprising nano structured surfaces or nano particles in a solution, configured to adsorb molecules of a sample material captured adjacent to the sensor, a laser that can emit a laser beam to illuminate the molecules adsorbed to the nano structured surfaces, a spectrometer that can produce spectral data from light scattered by the molecules adsorbed to the nano structured surfaces, and a ID reader that can retrieve identification information about the sample material. A central office can determine a spectral signature matching spectral signatures stored in a database and to identify a harmful substance in the sample material. An alert and response system can send out an alert signal about the sample material when the harmful substance is identified in the sample material.
A method for exploiting the nonlinear structure of hyperspectral imagery employs a manifold coordinate system that preserves geodesic distances in the high-dimensional hyperspectral data space. Data representing physical parameters such as a scene is divided into a set of smaller tiles. The manifolds derived from the individual tiles are then aligned and stitched together to complete the scene. Coordinates are derived for a very large although not complete representative subset of the data termed the “backbone”. Manifold coordinates are derived for this representative backbone and then the remaining samples inserted into the backbone using a reconstruction principle using the property of local linearity everywhere on the manifold to reconstruct the manifold coordinates for the samples not originally belonging to the backbone. The output is a global manifold coordinate system, which for topographical image data depicts clearer detail of land and water portions of a scene.