3 results about "Residual gas analyzer" patented technology

This invention discloses an online detection method and device for the interlayer vacuum degree of multi-layer insulation in cryogenic containers, belonging to the field of cryogenic insulation vacuum detection technology. The method includes: installing a vacuum-sealed base on the outer wall of the container; penetrating the outer liner with a piercing capillary probe and inserting it into the interlayer gap; constructing a two-stage high-vacuum differential system consisting of an oil-free dry forepump, a turbomolecular pump, a fine-tuning needle valve, a flow-limiting capillary, a differential chamber, and a residual gas analyzer to form a low-speed drainage loop; after pre-evacuating the background gas, adjusting the fine-tuning needle valve to extract the interlayer gas at low speed, simultaneously collecting the total pressure and component partial pressures; calculating the true vacuum degree by combining flow resistance, gas resistance, permeation resistance, and temperature correction; after detection, leaving the end of the piercing capillary probe inside the layer without removing it, and permanently sealing the base port; repeating the detection at different points and depths to complete a full-area scan. This application has the advantages of direct online detection, minimally invasive and leak-free operation, repeatable testing, and accurate tracing of failure causes.

1. The name of the design product: residual gas analyzer. 2. The use of the design product: for gas mass spectrometry, detecting gas leakage rate. 3. The design points of the design product: in the shape of the product. 4. The picture or photo that best indicates the design points: perspective view.

This invention relates to the field of microelectromechanical system (MEMS) packaging and testing, and discloses a method and system for testing the gas composition inside a microcavity in a MEMS wafer-level package. The method includes the following steps: acquiring the coordinate information and geometric parameters of a target microcavity on the wafer under test; aligning a locally sealed sampling head with the surface of the region where the target microcavity is located; releasing gas from the target microcavity into the locally sealed sampling cavity; updating the posterior probability distribution of the gas component concentration vector in real time based on a Bayesian inference framework; inputting the enriched sample gas into a residual gas analyzer; and retrieving the gas composition and concentration inside a single microcavity based on gas type and partial pressure information. Precise positioning is achieved by acquiring the coordinate information and geometric parameters of the target microcavity, and adaptive optimal stopping of the accumulated number is achieved by updating the posterior probability distribution of the gas component concentration vector in real time during the sequential opening process based on a Bayesian inference framework.