Method for on-line monitoring of residual gas on coiling coating machine

A residual gas and residual gas analysis technology, applied in sputtering plating, ion implantation plating, vacuum evaporation plating, etc.

Inactive Publication Date: 2012-01-04
NANCHANG O FILM TECH CO LTD
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  • Abstract
  • Description
  • Claims
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Problems solved by technology

Therefore, the traditional roll-to-roll coating method is difficult to overcome this bottleneck, ...

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  • Method for on-line monitoring of residual gas on coiling coating machine
  • Method for on-line monitoring of residual gas on coiling coating machine

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Embodiment Construction

[0019] In order to describe the above-mentioned features, advantages and working principles of the patent of the present invention in detail, the present invention will be further described below in conjunction with the accompanying drawings and specific implementation methods, but the protection scope of the present invention is not limited thereto.

[0020] A method for on-line monitoring of residual gas on a winding coating machine is completed by the following steps:

[0021] A), the residual gas analyzer 1 on the roll coating machine is connected with the induction probe 3 and the computer 4;

[0022] B), the induction probe 3 in the step A is extended into the unwinding vacuum chamber 2 on the winding coating machine, and the gas generated after the pretreatment of the fast-moving PET coil is collected in time;

[0023] The unwinding vacuum chamber 2 includes a base material coil 5, an infrared heater 6, a plasma etching 7, and a tension isolation drum 8;

[0024] The i...

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Abstract

The invention discloses a method for on-line quick monitoring of a residual gas on a coiling coating machine and relates to the fields of vacuum coating and gas analysis. The method comprises the following steps: A) connecting a residual gas analyzer on the coiling coating machine with an inductive probe and a computer; B) inserting the inductive probe in the step A) into an uncoiling vacuum chamber of the coiling coating machine, and timely collecting the gas generated after pretreating a PET (Polyethylene Terephthalate) coiled material which can quickly move after unfolding, wherein the uncoiling vacuum chamber comprises a substrate coiled material, an infrared heater, a plasma etching device and a tension isolation drum; and C) displaying a mass spectrogram of the gas to be detected by passing the gas collected in the step B through the residual gas analyzer, and comparing the mass spectrogram with a standard gas bank, so that the components and content of the gas can be determined.

Description

technical field [0001] The invention discloses a method for quickly monitoring residual gas on-line on a winding coating machine, and relates to the fields of vacuum coating and gas analysis. Background technique [0002] Vacuum roll coating technology is a technology that prepares one or more layers of thin films with certain properties on the surface of the coil substrate by thermal evaporation or magnetron sputtering in a vacuum chamber. The main technical features of the vacuum winding coating equipment are: first, the substrate to be coated is a flexible substrate, that is, it can be wound; second, the coating process is continuous, that is, the coating is carried out continuously within a working cycle; Third, the coating process is carried out in a high vacuum environment. Therefore, the basic structure of the vacuum winding coating equipment must have winding rotation, unwinding and winding of the coil (substrate). The substrate is coated with a film during unwindi...

Claims

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Application Information

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IPC IPC(8): C23C14/52C23C14/56
Inventor 郭东升于甄蔡荣军
Owner NANCHANG O FILM TECH CO LTD
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