Method for on-line monitoring of residual gas on coiling coating machine
A residual gas and residual gas analysis technology, applied in sputtering plating, ion implantation plating, vacuum evaporation plating, etc.
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
Embodiment Construction
[0019] In order to describe the above-mentioned features, advantages and working principles of the patent of the present invention in detail, the present invention will be further described below in conjunction with the accompanying drawings and specific implementation methods, but the protection scope of the present invention is not limited thereto.
[0020] A method for on-line monitoring of residual gas on a winding coating machine is completed by the following steps:
[0021] A), the residual gas analyzer 1 on the roll coating machine is connected with the induction probe 3 and the computer 4;
[0022] B), the induction probe 3 in the step A is extended into the unwinding vacuum chamber 2 on the winding coating machine, and the gas generated after the pretreatment of the fast-moving PET coil is collected in time;
[0023] The unwinding vacuum chamber 2 includes a base material coil 5, an infrared heater 6, a plasma etching 7, and a tension isolation drum 8;
[0024] The i...
PUM
Abstract
Description
Claims
Application Information
- R&D Engineer
- R&D Manager
- IP Professional
- Industry Leading Data Capabilities
- Powerful AI technology
- Patent DNA Extraction
Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.
© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com