224results about "Vacuum gauges" patented technology

The invention discloses a metal diaphragm capacitor composite vacuum gauge, and relates to the technical field of vacuum gauges, the metal diaphragm capacitor composite vacuum gauge comprises a vacuum gauge body and a control module, the lower side of the vacuum gauge body is fixedly connected with a lower sealing block, the lower side of the lower sealing block is fixedly connected with a connecting pipe, and the connecting pipe is communicated with the interior of the vacuum gauge body. The upper side of the inner wall of the vacuum gauge body is fixedly connected with an electrode, the lower side of the electrode is provided with a capacitor diaphragm, the electrode is not in contact with the capacitor diaphragm, a buffer cavity is formed in the connecting pipe, a buffer mechanism is arranged in the buffer cavity, and a detection mechanism is arranged on the outer side of the connecting pipe. According to the invention, through the arrangement of the connecting pipe, the gas channel and the stop block, high-speed gas upwelling can be effectively blocked when gas flow recoil occurs, instantaneous impact on the capacitor diaphragm is relieved, reading deviation or device damage caused by diaphragm deformation quantity overrun is avoided, and the system has the characteristics of high practicability and improvement of the adaptability of the system to complex working conditions.

The invention discloses a dynamic calculation method based on piezoresistance-resistance composite vacuum transmitter switching, and relates to the technical field of vacuum transmitters, and the method comprises the steps: obtaining a vacuum degree trend coefficient through a piezoresistance gauge vacuum degree acceleration and a resistance gauge vacuum degree acceleration; obtaining a sensitivity compensation coefficient and a vacuum degree change coefficient based on the vacuum degree trend coefficient, then obtaining a vacuum degree change abnormal coefficient based on the vacuum degree change coefficient, and finally determining the final vacuum degree based on the vacuum degree trend coefficient, the sensitivity compensation coefficient and the vacuum degree change abnormal coefficient. The output voltage of the piezoresistance-resistance composite vacuum transmitter can be obtained through the vacuum degree, the signal output smoothness can be effectively improved, the measurement accuracy is improved, and seamless signal connection is achieved.

The invention discloses a vacuum-vertical shaft-electroosmosis combined dehydration test device for waste mud, and belongs to the technical field of geotechnical tests. The device is composed of a modular model cylinder, a direct-current power supply system, a measuring system, a vacuum pump and a vertical vacuum drainage body. The model cylinder is formed by connecting a top cylinder, a middle cylinder and a bottom cylinder through bolts and stacking sealing rings, the height can be flexibly adjusted, and good air tightness is kept. And the cylinder side is provided with a standard quick-plug interface, so that a vacuum meter and a pore pressure sensor can be conveniently connected. An anode electrode plate and a cathode electrode plate which are connected with a direct-current power supply are respectively arranged on the top surface and the bottom surface of the slurry, and the vertical vacuum drainage body penetrates through the bottom horizontal drainage layer and is fixed on the positioning frame to form a vacuum-vertical shaft combined drainage channel. The device effectively overcomes the problems of vacuum pressure transmission attenuation, overlong drainage path, non-uniform electroosmosis dehydration and the like through the coupling effect of vacuum, the vertical shaft and electroosmosis, can realize accurate research on different depth dehydration mechanisms of slurry, and has the advantages of rapid dehydration, simplicity and convenience in operation, environmental protection and high efficiency.

A method for inverting true mass content of water ice in lunar soil using a lunar soil water molecule analyzer (LSWMA) includes: obtaining weight data of a lunar soil sample, temperature data of a sample receiving container that receives the lunar soil sample, and duration of a transfer process of the lunar soil sample; obtaining measurement data of total pressure of the water vapor; calculating a sublimation loss based on a sublimation rate and the duration of the transfer process, and estimating a relative sublimation loss rate; correcting the measurement data of the total pressure of the water and obtaining true pressure data of the water vapor; and calculating, based on the true pressure data of the water vapor, mass of the water vapor, and further calculating mass content of water ice in lunar soil.

To provide a method for manufacturing a vacuum pressure sensor, a device including the vacuum pressure sensor, and / or a system including the vacuum pressure sensor.SOLUTION: The vacuum pressure sensor can comprise a weld ring and a header element welded to the weld ring. The header element may comprise one or more header pins hermetically sealed to the header element, a piezoresistive sensing element coupled to the header element and electrically coupled to the one or more header pins, a corrugated diaphragm coupled to the header element and the weld ring, the corrugated diaphragm defining, with the header element, a cavity configured to contain a material, and a plastic spacer disposed within the cavity. The vacuum pressure sensor may comprise a protruding sharp edge or a substantially flat edge without corner breaks of at least a portion of the header element in physical contact with the metal plate.SELECTED DRAWING: Figure 1

A single vacuum source is used for multiple high flow rate subsystems in an inkjet printer to control the dispersal of satellite droplets during ink ejection while printing and ensuring that the substrates are sufficiently flat for the printing process. This reduces cost and layout requirements, provides a simplified control structure, and allows integration of a centralized liquid removal system and a single vacuum source. Accordingly the printing quality, robustness, and versatility of inkjet printers is improved.

The utility model discloses a cup body temperature measuring table which comprises a table frame, a rotatable rotating disc is arranged on the table frame, the rotating disc is connected with a rotation driving mechanism, a plurality of temperature measuring mechanisms are arranged on the rotating disc, each temperature measuring mechanism comprises a fixing frame, a plurality of temperature measuring rings are arranged in the fixing frame, and a plurality of temperature sensors are arranged on the inner wall of each temperature measuring ring. And the temperature measuring mechanisms are uniformly arranged on the rotating disc at intervals, so that the angles between the fixing frames are the same. The rotation driving mechanism can drive the rotating disc to rotate, so that the temperature measuring mechanisms at different positions of the rotating disc can rotate to the feeding position. And the temperature measuring mechanisms are uniformly distributed, and the moving time of each temperature measuring mechanism is the same, so that uniform operation of feeding operation is facilitated, and the feeding process of temperature measurement is more automatic and more intelligent. When the vacuum cup is placed in the temperature measuring device, the temperature can be measured, the temperature can be measured after the rotating disc rotates by one circle, and the time in the transferring and feeding process can be shortened.

The utility model discloses an automatic monitoring device which comprises an acquisition base, a communication base and a locking assembly. An acquisition plate is arranged in the acquisition base, and at least one probe assembly is connected to the acquisition plate; a forwarding module is arranged in the communication base, and the forwarding module is in data connection with the acquisition board; the locking assembly is used for locking the communication base on the acquisition base and comprises a fixed disc and a limiting plate, the fixed disc is connected with the acquisition base, and the limiting plate is movably arranged on the communication base; wherein a limiting groove with a side opening is formed in the fixing disc, the limiting plate can move between a locking position where the limiting plate stretches into the limiting groove and an avoiding position where the limiting plate is in avoiding with the limiting groove, and the limiting plate is limited by the limiting groove in the vertical direction when stretching into the limiting groove through the side opening. According to the utility model, the communication base can be locked on the fixed disc, and the communication base has the advantages of convenient assembly and strong practicability.

This invention discloses a vacuum glass, relating to the field of glass product technology. The vacuum glass includes a glass body and a vacuum sensing probe. The glass body includes a first glass layer, a second glass layer, and a sealing edge. A gap is provided between the first and second glass layers, and the sealing edge seals the periphery of the gap, forming a vacuum cavity. The vacuum cavity is formed by welding solder in a vacuum environment. The vacuum sensor probe is disposed within the vacuum cavity and is used to detect the vacuum level of the vacuum cavity. A data processor is disposed outside the vacuum cavity and is wired or wirelessly connected to the sensing probe to receive data transmitted by the vacuum sensing probe. By placing a vacuum sensing probe within the vacuum cavity inside the vacuum glass, the vacuum level inside the vacuum glass can be detected conveniently and quickly, enabling efficient detection of the vacuum glass.

The utility model discloses a performance detection device for a vacuum arc-extinguishing chamber, which comprises a supporting plate, a supporting plate and an insulation detection transformer, the supporting plate is arranged at the top of the supporting plate, the insulation detection transformer is arranged at the bottom of the supporting plate, the supporting plate is movably provided with a vertical clamping plate, the vertical clamping plate is provided with a horizontal slot, and the vertical clamping plate is provided with a horizontal slot. The top of the clamping plate is provided with a fastener which extends downwards into the slot, and the supporting plate is provided with a moving contact reciprocating pulling member which is located at the upper part of the supporting plate. The utility model belongs to the technical field of vacuum arc-extinguishing chamber performance detection devices, and particularly relates to a performance detection device for a vacuum arc-extinguishing chamber.

The utility model discloses a formation and capacity grading negative pressure device which comprises an argon bottle, a vacuum generator and a gas washing bottle, the argon bottle is communicated with the vacuum generator through a first pipeline, and the vacuum generator is communicated with the gas washing bottle through a second pipeline. And the vacuum generator is used for converting gas in the argon bottle from positive pressure to negative pressure. And a second gas valve is mounted on the first pipeline between the argon bottle and the vacuum generator. And an air filter is arranged on the second pipeline between the vacuum generator and the gas washing bottle. The argon bottle provides a gas source, the gas source is converted into negative pressure through the vacuum generator, and waste gas generated during formation and capacity grading of the sodium-ion battery is pumped out. Meanwhile, argon is used as protective gas to effectively prevent waste gas of the battery cell from polluting an interface, so that various properties of the battery cell are improved. And the whole module is simple in structure, modular operation can be realized, and the cost is relatively low while the production efficiency of the battery cell is improved.

The invention relates to the technical field of petroleum pipes in the water and petroleum industry, in particular to a U-shaped thermos bottle type petroleum casing pipe for a geothermal well, which comprises an inner-layer casing pipe, an outer-layer casing pipe and a vacuum module. The inner-layer sleeve and the outer-layer sleeve are both of a hollow cylindrical structure, the outer-layer sleeve is connected with the inner-layer sleeve through two annular connecting pieces to form a vacuum interlayer, the outer wall of the outer-layer sleeve is provided with a through hole and an NPT bolt, the NPT bolt is used for vacuumizing the vacuum interlayer, the outer wall of the outer-layer sleeve is provided with a vacuum degree module, and the vacuum degree module is connected with the outer-layer sleeve. The vacuum degree module comprises a shell, an air bag, a sealing ring, a spring and a vacuum ruler and is used for monitoring the vacuum degree of the vacuum interlayer in real time. According to the thermos bottle type petroleum casing pipe for the U-shaped geothermal well, the design is similar to a thermos bottle, heat conduction can be effectively reduced, the heat preservation effect of the inner-layer casing pipe is improved, meanwhile, the monitoring module is arranged, the thermos bottle type petroleum casing pipe is suitable for the high-temperature geothermal environment, and the exploitation efficiency and safety of the geothermal well are improved.

The utility model relates to the technical field of capacitance film vacuum gauges, and discloses a capacitance film vacuum gauge for high-temperature gas, which comprises a capacitance film vacuum gauge, the bottom surface of the capacitance film vacuum gauge is fixedly communicated with a gas inlet pipe, and a cooling mechanism is arranged outside the capacitance film vacuum gauge; the cooling mechanism comprises a heat preservation cylinder, the inner wall of the heat preservation cylinder is fixedly connected with the outer surface of the capacitance film vacuum gauge, the outer surface of the heat preservation cylinder is fixedly connected with a fixing cover, the outer surface of the heat preservation cylinder is sleeved with a heat dissipation copper pipe, and the air inlet end of the heat dissipation copper pipe fixedly communicates with an air supply pipe. The end, away from the heat dissipation copper pipe, of the air feeding pipe penetrates through the fixing cover and fixedly communicates with the outer surface of the air inlet pipe, and the air outlet end of the heat dissipation copper pipe fixedly communicates with a backflow pipe. According to the capacitance film vacuum gauge for the high-temperature gas, when the capacitance film vacuum gauge is used for carrying out vacuum pressure detection on the high-temperature gas, the temperature of the high-temperature gas can be well balanced, and the pressure detection precision of the capacitance film vacuum gauge is ensured.

The invention provides a capacitive vacuum gauge and a semiconductor device, and the capacitive vacuum gauge comprises a detection cavity, one side of which is provided with a through hole; the first end of the air inlet pipe is communicated with the through hole, and the second end of the air inlet pipe is communicated with a cavity to be measured; and the insulating pipe is connected to any position of the air inlet pipe, so that the detection cavity is grounded without passing through the air inlet pipe. According to the capacitive vacuum gauge and the semiconductor equipment provided by the embodiment of the invention, the detection cavity is not electrically connected with the outside through the air inlet pipe by virtue of the insulating pipe, so that the precision of a capacitance acquisition circuit is improved, and the precision of air pressure measurement is improved.

This application relates to a vacuum monitoring device for connection to a vacuum pipeline. It includes a first storage body forming a vacuum cavity; a second storage body connected to the first storage body; an indicator block disposed within the second storage body, one end of which is movably connected to the outer wall of the first storage body, and the other end of which is elastically connected to the inner wall of the second storage body; a through hole is formed in the wall of the first storage body, communicating with the vacuum pipeline. Changes in the vacuum level within the vacuum cavity cause the indicator block to reciprocate. The device also includes a vacuum toilet connected to the vacuum monitoring device. This vacuum monitoring device has a simple structure and is easy to install. More importantly, it can determine the vacuum level in the vacuum pipeline in real time, thus facilitating better use of the vacuum toilet.

The invention relates to a cross-platform high-vacuum sample transfer device, which comprises a vacuum sealed cabin in which a cross-shaped channel formed by connecting a front channel, a rear channel, a left channel and a right channel is arranged; the quick connector is arranged at the port of the front channel and can be connected with external equipment; and the magnetic coupling transmission rod is arranged at the rear channel and is used for realizing the transfer of the sample carrying table. Compared with the prior art, through high-precision structural design, high-vacuum transfer of a sample among different platforms such as a glove box, a scanning electron microscope, a double-beam electron microscope or a micro-nano laser processing system is realized, pollution sources such as water and air are effectively isolated, intrinsic characteristics of the sample are ensured not to be interfered, and the sample quality is improved. And the accuracy and success rate of sample analysis and processing are obviously improved.

The invention discloses a vacuum measuring tool and a vacuum degree measuring method, and the vacuum measuring tool comprises a measuring circuit which comprises a power supply which is a constant-voltage constant-frequency AC power supply; a resistive element; the current detection element is connected in series with the resistance element and is used for acquiring a current measurement value of the measurement circuit; the capacitor assembly is connected with the resistor element in series; a medium space between polar plates of the capacitor assembly is used for being communicated with a to-be-measured space, a current measurement value collected by the current detection element is in positive correlation with a capacitance value of the capacitor assembly, and the capacitance value of the capacitor assembly is in positive correlation with the vacuum degree of the to-be-measured space. According to the invention, the capacitor assembly is adopted to form the measurement circuit, the conversion from the collected current measurement value to the vacuum degree is realized, the device can be suitable for the measurement in different vacuum states, the precision is high, the integration degree is high, the space is saved, and the system complexity and the maintenance cost are reduced; and the technical barrier that a hot cathode vacuum gauge receives hot electrons is effectively avoided, and the problem that a high-vacuum measuring tool is short in service life is fundamentally solved.

The utility model discloses a multi-probe device for monitoring the vacuum degree of a soft foundation. The multi-probe device comprises a plurality of probe assemblies which are connected with one another and a cable for supplying power to the probe assemblies, the probe assembly comprises a first pipe body, a second pipe body, a partition plate and a sensor, a threading hole is formed in the first pipe body, a plurality of vent holes are formed in the second pipe body, a mounting hole is formed in the partition plate, and the sensor is mounted in the mounting hole; wherein the partition plate is installed at the joint of the first pipe body and the second pipe body, the main body of the sensor is located in the first pipe body, the probe of the sensor is located in the second pipe body, and the electric connection end of the sensor is connected with a cable entering the first pipe body through the threading hole. According to the utility model, each probe assembly is provided with a sensor, the vacuum pressure value at the installation position of the probe assembly can be directly measured by using the sensors, the measurement belongs to direct measurement, the monitoring data is more accurate, and the construction process is more convenient.

The vacuum synchronism measurement system, method and control method of the SPERF device relate to the technical field of space plasma environment simulation.The present application is to solve the problem that the time delay from the inflation start to the vacuum meeting the condition cannot be accurately measured when the existing SPERF device is experimented, and the experimental requirements are not met.The present application provides a vacuum synchronism measurement system, method and control method suitable for the SPERF device, which can measure the high synchronism of the inflation system and the vacuum gauge measurement value, according to the inflation system and the vacuum gauge characteristics, the vacuum curve requirements meeting the experimental requirements are given, and the control method of the vacuum pressure and the vacuum curve meeting the experimental requirements is provided.

The application discloses a ceramic-metal low-stress welded capacitive vacuum gauge, which comprises a metal shell and a ceramic base connected to the metal shell, and a metal transition layer is arranged at the connecting interface of the ceramic base and the metal shell; the metal transition layer is a copper-nickel composite structure with a copper layer and a nickel layer, the nickel layer is connected with the ceramic base, and the copper layer is connected with the metal shell. A gradient layer with a gradually changing thermal expansion coefficient from the ceramic side to the metal shell side is constructed. The thermal performance of the nickel layer is relatively close to that of the ceramic base, which is beneficial to the interface combination; the copper layer is more matched with the metal shell, and the good plasticity of the copper layer can be used as stress buffering. In the welding heat cycle process, the metal transition layer can effectively absorb and disperse the thermal stress generated due to the uneven shrinkage of the base metals on both sides, so that the risk of ceramic cracking is reduced, and the low-leakage-rate weld is ensured.

The invention discloses a vacuum gauge, a calibration method of the vacuum gauge and a vacuum measurement method. The vacuum gauge comprises a shell, an impeller rotor, a rotation driving part and a controller. The shell is internally provided with a cavity and a connecting port formed by surrounding the edge of the shell; the connecting port is used for connecting a target cavity; the impeller rotor comprises a rotating shaft and is rotatably arranged in the cavity; one end of the rotating shaft faces the connector, and the other end of the rotating shaft is located at one end of the shell back to the connector; the rotary driving part is arranged at one end, back to the connecting port, of the shell, and a rotary output shaft of the rotary driving part is used for driving the rotary shaft to rotate through matching with the rotary shaft; and the controller is electrically connected with the rotary driving part and is configured to determine the vacuum degree of the target cavity based on the power of the rotary driving part. According to the vacuum gauge, the rotary driving part needs different powers to drive the impeller rotor to overcome resistance from gas under different vacuum degrees, the vacuum degree of the target cavity is measured, and the measuring range and accuracy of the vacuum gauge are improved.

The present invention belongs to the field of vacuum measurement technology, and in particular relates to a slave capacitance thin film vacuum gauge readout device based on an EtherCAT bus. The device comprises a slave capacitance thin film vacuum gauge readout device based on an EtherCAT bus, comprising: an excitation signal generating module, a sensor interface module, a current-voltage conversion module, a bandpass filtering module, a precision rectification and filtering module, an analog output interface module, an analog-to-digital conversion module, a control circuit module, an EtherCAT bus module, and a power supply module. The slave capacitance thin film vacuum gauge based on the EtherCAT bus can be easily connected to the EtherCAT industrial Ethernet bus and has the characteristics of accurate data collection, high transmission efficiency, and simple wiring.

The application discloses a kind of capacitive thin film vacuum gauge tuning measuring devices, can complete the debugging work of batch before vacuum gauge completes packaging, and efficiency is high, cost controllable.The device, main vacuum chamber pumping assembly is connected main vacuum chamber by first pumping connection pipeline, for maintaining the pressure of main vacuum chamber at background state;Test chamber pumping assembly is connected each test chamber by second pumping connection pipeline, for maintaining the pressure of test chamber at background state;Gas distribution assembly is connected each test chamber by gas supply pipeline, for supplying gas to test chamber;Test chamber is divided into different groups according to the range of measured vacuum gauge, and the pressure sensor of corresponding range is connected;Each test chamber provides more than one vacuum gauge connection end;The reference cavity of each measured vacuum gauge is connected bellows by first connecting piece, and the bellows corresponding to all measured vacuum gauges are connected into the main vacuum chamber;The measuring cavity of measured vacuum gauge is connected the test chamber of corresponding range by second connecting piece.

The invention relates to the technical field of heat pipe filling, and particularly discloses a vacuum degree calibration device and method for a heat pipe filling system, the actual vacuum degree of a heat pipe is obtained through a vacuum gauge on the calibration device, and calibration of the heat pipe filling system can be achieved through the relation between the vacuum degree of the heat pipe filling system and the internal vacuum degree of the heat pipe. And the heat pipe filling success rate and consistency are improved. According to the main technical scheme, the vacuum degree calibration device for the heat pipe filling system comprises a first vacuum gauge, a heat pipe shell, a first connecting pipe, a second connecting pipe and a second vacuum gauge; the first end of the heat pipe shell is in sealed connection with the first end of a first connecting pipe, the first connecting pipe is in sealed connection with a first vacuum gauge, and the second end of the first connecting pipe is used for being connected with a heat pipe filling connector of a heat pipe filling system. The second end of the heat pipe shell is hermetically connected with the first end of a second connecting pipe, and the second end of the second connecting pipe is hermetically connected with a second vacuum gauge. The method is mainly used for calibrating the vacuum degree of the heat pipe filling system.

The present application discloses a dust-filled vacuum pressure detection tool and detection device, which belongs to the technical field of floor cleaning equipment and solves the problem in the prior art that the air intake vacuum pressure value of the cleaning equipment cannot be detected when the dust cup is full. The detection tool of the present application includes a tube body and an air intake portion and a vacuum pressure sensor provided on the tube body. The air intake portion and the vacuum pressure sensor are connected to a fluid channel in the tube body, and one end of the fluid channel is connected to the suction pipe of the cleaning equipment. The detection tool and detection device of the present application can be used for dust-filled vacuum pressure detection of cleaning equipment.

A dynamic display 11 for an apparatus comprising a vacuum pump, vacuum pressure gauge or gas abatement system. The display comprises an input 19 to receive a signal from the apparatus indicative of it

The invention discloses a strain freeze-drying process which comprises the working procedures of strain inoculation amplification, split charging freeze-drying and heat sealing, according to the freeze-drying mode, the one-time library building number of strains can be effectively increased, meanwhile, a gradient temperature control freeze-drying mode is adopted, transfer operation before vacuum heat sealing is optimized, the moisture content of the strains after freeze-drying and heat sealing is reduced to 3% or below, and the yield of the strains is improved. The preservation stability of the strain is improved; the invention synchronously provides an effect evaluation method of the strain freeze-drying process, which comprises a vacuum degree detection mode and a viable bacteria counting mode, provides an evaluation basis for the long-term preservation effect of the freeze-dried strain tube, and realizes the quality control of the whole process of the strain freeze-drying process.

The invention provides a metalized vacuum sensor, which comprises a first silicon wafer, a metalized glass sheet, a second silicon wafer and a metal electrode, and is characterized in that the second silicon wafer, the metalized glass sheet and the second silicon wafer are sequentially arranged; the metal electrode is arranged on the surface of the first silicon wafer, one side surface, close to the glass layer, of the second silicon wafer is provided with a capacitor cavity, and the other side surface is provided with a reference cavity; the metalized glass sheet comprises a glass layer and a metal layer arranged on the glass layer, and the metal layer and the metal electrode are located on the two surfaces of the glass layer respectively; the vacuum sensor is also provided with a connecting part which is communicated with the metal layer and the metal electrode. According to the vacuum sensor, the capacitance cavity and the medium cavity are separated, so that measurement values are not affected when different media are measured; the invention also provides a preparation process of the metallized vacuum sensor.

The invention provides a vacuum gauge and semiconductor equipment, the vacuum gauge comprises a shell and a diaphragm, the diaphragm divides the interior of the shell into a vacuum cavity and a test cavity, the shell is provided with a connecting pipe used for connecting the test cavity and a tested space, the test cavity is internally provided with a separation blade, the separation blade divides the test cavity into a first chamber and a second chamber, and the first chamber and the second chamber are communicated with each other. The first cavity is located on the side, opposite to the vacuum cavity, of the second cavity, and containing grooves are formed in the face, facing the diaphragm, of the first cavity and / or the wall face, facing the diaphragm, of the second cavity. The width of at least one position of the containing groove is smaller than the width of the bottom of the containing groove. According to the invention, the part of pollutants, such as particle impurities, entering the test cavity can be deposited in the accommodating groove and restrained by the accommodating groove, so that the part of pollutants can be prevented from being disturbed by gas entering and exiting the test cavity back and forth to be attached to the diaphragm or flowing back to the tested space along with the gas.

The application provides a high-vacuum measuring device based on a squeeze-film damping effect, and belongs to the technical field of vacuum pressure measurement. The upper and lower ends of a pendulum plate are respectively connected to one end of a low-loss flexible support structure. The two low-loss flexible support structures are used to suppress the pendulum effect of the pendulum plate, and only the rotational movement of the pendulum plate around the low-loss flexible support structure is reserved. An air-wall device is located in the vibration direction of the pendulum plate and has a preset interval with the pendulum plate, and is used to increase the squeeze-film damping when the pendulum plate vibrates. A vibration starting device is used to apply a driving force to the pendulum plate, so that the pendulum plate swings. The damping effect of residual gas in the environment to be measured makes the vibration of the pendulum plate gradually attenuate. An angle detector is used to obtain the amplitude attenuation factor of the pendulum plate vibration, and the total pressure of the environment to be measured is obtained by combining the pressure and damping relationship. The application can realize the measurement of extremely high vacuum.