336results about "Vacuum gauges" patented technology

To measure a capacitance between electrodes of a sensor chip without influencing a parasitic capacitance or stray capacitance of a cable.SOLUTION: A diaphragm vacuum gauge comprises: a sensor chip 1 that comprises a first electrode formed on a pedestal, and a second electrode formed so as to face the first electrode on a diaphragm arranged across a gap from the pedestal, and in which an interval between the first and second electrodes changes according to the displacement of the diaphragm due to the pressure of a medium to be measured; an operational amplifier A1 that converts a current output from the first electrode into a voltage and amplifies it; and a coaxial cable 21 that connects the first electrode and the operational amplifier A1. The first electrode is connected to a virtual ground of the operational amplifier A1 through a core wire 22 of the coaxial cable 21.SELECTED DRAWING: Figure 3

The invention discloses a metal diaphragm capacitor composite vacuum gauge, and relates to the technical field of vacuum gauges, the metal diaphragm capacitor composite vacuum gauge comprises a vacuum gauge body and a control module, the lower side of the vacuum gauge body is fixedly connected with a lower sealing block, the lower side of the lower sealing block is fixedly connected with a connecting pipe, and the connecting pipe is communicated with the interior of the vacuum gauge body. The upper side of the inner wall of the vacuum gauge body is fixedly connected with an electrode, the lower side of the electrode is provided with a capacitor diaphragm, the electrode is not in contact with the capacitor diaphragm, a buffer cavity is formed in the connecting pipe, a buffer mechanism is arranged in the buffer cavity, and a detection mechanism is arranged on the outer side of the connecting pipe. According to the invention, through the arrangement of the connecting pipe, the gas channel and the stop block, high-speed gas upwelling can be effectively blocked when gas flow recoil occurs, instantaneous impact on the capacitor diaphragm is relieved, reading deviation or device damage caused by diaphragm deformation quantity overrun is avoided, and the system has the characteristics of high practicability and improvement of the adaptability of the system to complex working conditions.

The invention relates to the technical field of vacuum measurement, in particular to a multi-sealing-cavity MEMS capacitor thin film vacuum gauge, and is characterized in that a silicon substrate is arranged above substrate glass and is bonded with the substrate glass; a pressure sensing film is obtained in the middle of the silicon substrate in a photoetching and dry etching mode; a fixed metal electrode is obtained in the middle of the substrate glass in a photoetching and sputter coating mode; a capacitance gap is formed between the fixed metal electrode and the pressure sensing film; photoetching and corroding the silicon substrate, forming a working sealing cavity above the pressure sensing film, and respectively forming a first cavity and a second cavity above two sides of the pressure sensing film; getter blocks are arranged in the first chamber and the second chamber; and the sealing glass is arranged above the silicon substrate. On the premise that the size of the vacuum gauge is not obviously increased, the multiple chambers are arranged to form the sealing cavity, the air suction capacity is improved, high vacuum obtaining and long-term maintaining performance of the sealing cavity of the vacuum gauge are ensured, and the long-term stability of the vacuum gauge is greatly improved.

The invention relates to the technical field of pressure detection, in particular to a single crystal furnace vacuum pipeline pressure measuring method and device. The method comprises the following steps: quantifying temperature deviation of a vacuum pipeline in a crystal growth process; carrying out matching analysis on the temperature data and the growth trend of the growth rate, and carrying out time delay identification on the temperature data and the growth rate through a matching section group; dynamic compensation of temperature lag is analyzed according to the relation between temperature data in the crystal growth process and the time delay change of the growth rate and the deviation change of pressure, and a delay compensation index is determined; and performing temperature data compensation according to the delay compensation index and the temperature offset to obtain current adjustment pressure measurement data. The dynamic accompanying condition of the temperature and the crystal growth is analyzed, the time delay compensation is determined through the accompanying time delay degree, the temperature data is compensated in combination with the temperature deviation, and the pressure is adjusted, so that the measured pressure data can more truly reflect the pressure condition in the crystal growth process, and the pressure measurement precision is improved.

The invention relates to a vacuum switch arc extinguish chamber vacuum degree on-line detection system and method. The system comprises a laser induction module which comprises a laser, a dichroscope, a coupling lens, a conduction optical fiber and an LIBS probe which are arranged in sequence; the plasma light collection module comprises a collection optical fiber, a collection lens, a dichroscope, a conduction optical fiber and an LIBS probe which are arranged in sequence, and the collection optical fiber is connected with the collection and detection module; the acquisition and detection module comprises a spectral measurement unit and a PC end, and the spectral measurement unit is connected with the collection optical fiber and the PC end; and the delay subsystem is respectively connected with the spectral measurement unit and the laser. Compared with the prior art, the online vacuum degree detection device has the advantages of online vacuum degree detection and the like.

The invention discloses an overpressure protection device for a vacuum gauge, and relates to the technical field of overpressure protection of vacuum gauges.The overpressure protection device comprises a main pipe and a control module, a sealing cover is fixedly connected to the right side of the main pipe, three openings are formed in the right side of the sealing cover, and a first fixing pipe is fixedly connected to the inner wall of the opening in the upper portion of the right side of the sealing cover; an exhaust port is formed in the upper side of the middle of the first fixing pipe, a pressure valve is fixedly connected to the inner wall of the first fixing pipe, and a sealing mechanism and a pressure reduction mechanism are arranged in two openings in the lower portion of the right side of the sealing cover correspondingly. And by arranging a second fixing pipe, a telescopic rod and an elastic rod, when the air pressure rises, a mechanical displacement conversion mode can be used for synchronously amplifying and transmitting force to a pressing rod, the induction precision and response sensitivity of the piezoelectric module are enhanced, and the vacuum gauge has the characteristics that the practicability is high, and the use reliability of the vacuum gauge is effectively improved.

The invention relates to a device and a method for detecting the vacuum degree of a vacuum switch arc extinguish chamber based on a photomultiplier. The device comprises a plasma excitation module used for exciting a plasma signal in the vacuum switch arc extinguish chamber to be detected; the photomultiplier detection module is used for detecting a plasma signal, acquiring the plasma signal by providing focusing voltage and accelerating voltage, and converting the plasma signal into a current signal; the signal conversion module is used for converting the current signal into a voltage signal; the detection module is used for extracting characteristic parameters from the voltage signals, judging the vacuum degree interval of the arc extinguish chamber of the vacuum switch to be detected, and calculating the vacuum degree of the arc extinguish chamber of the vacuum switch to be detected according to a preset fitting relation curve; and the control module is used for controlling the plasma excitation module to perform excitation and optimizing control on the plasma excitation module according to the calculated vacuum degree result. Compared with the prior art, the method has the advantages of reducing hardware cost and use cost and the like.

Disclosed example pressure transducers include: a pressure housing comprising a first cavity; a fluid input line configured to provide a fluid to the first cavity; a first pressure measurement assembly having a first type and configured to output a first measurement signal based on a pressure of the fluid in the first cavity; a second pressure measurement assembly having a second type and configured to output a second measurement signal based on the pressure of the fluid in the first cavity; and a controller configured to determine the pressure of the fluid in the first cavity based on the first measurement signal when the pressure is within a first range and determine the pressure of the fluid in the first cavity based on the second measurement signal when the pressure is within a second range.

The invention discloses a dynamic calculation method based on piezoresistance-resistance composite vacuum transmitter switching, and relates to the technical field of vacuum transmitters, and the method comprises the steps: obtaining a vacuum degree trend coefficient through a piezoresistance gauge vacuum degree acceleration and a resistance gauge vacuum degree acceleration; obtaining a sensitivity compensation coefficient and a vacuum degree change coefficient based on the vacuum degree trend coefficient, then obtaining a vacuum degree change abnormal coefficient based on the vacuum degree change coefficient, and finally determining the final vacuum degree based on the vacuum degree trend coefficient, the sensitivity compensation coefficient and the vacuum degree change abnormal coefficient. The output voltage of the piezoresistance-resistance composite vacuum transmitter can be obtained through the vacuum degree, the signal output smoothness can be effectively improved, the measurement accuracy is improved, and seamless signal connection is achieved.

The invention discloses a capacitive semiconductor miniature vacuum gauge and a vacuum detection method, and the vacuum gauge achieves the high precision, miniaturization and low power consumption of vacuum measurement through the combination of the electrical amplification characteristic of a semiconductor device and a capacitive sensing principle, makes full use of the compatibility of a standard CMOS technology, and improves the measurement precision. The air pressure sensing module and the signal processing unit are vertically integrated, so that the manufacturing process is simplified, the production cost is reduced, the reliability and the mass production potential of the device are remarkably improved, the measurement range is further widened and the sensitivity is optimized by adjusting the geometric parameters of the electrode, and the sensor has important practical value and wide commercial prospect and is worthy of popularization and application. And an efficient and economic solution is provided for the development of the next generation of miniature vacuum gauges.

The invention discloses a vacuum-vertical shaft-electroosmosis combined dehydration test device for waste mud, and belongs to the technical field of geotechnical tests. The device is composed of a modular model cylinder, a direct-current power supply system, a measuring system, a vacuum pump and a vertical vacuum drainage body. The model cylinder is formed by connecting a top cylinder, a middle cylinder and a bottom cylinder through bolts and stacking sealing rings, the height can be flexibly adjusted, and good air tightness is kept. And the cylinder side is provided with a standard quick-plug interface, so that a vacuum meter and a pore pressure sensor can be conveniently connected. An anode electrode plate and a cathode electrode plate which are connected with a direct-current power supply are respectively arranged on the top surface and the bottom surface of the slurry, and the vertical vacuum drainage body penetrates through the bottom horizontal drainage layer and is fixed on the positioning frame to form a vacuum-vertical shaft combined drainage channel. The device effectively overcomes the problems of vacuum pressure transmission attenuation, overlong drainage path, non-uniform electroosmosis dehydration and the like through the coupling effect of vacuum, the vertical shaft and electroosmosis, can realize accurate research on different depth dehydration mechanisms of slurry, and has the advantages of rapid dehydration, simplicity and convenience in operation, environmental protection and high efficiency.

A method for inverting true mass content of water ice in lunar soil using a lunar soil water molecule analyzer (LSWMA) includes: obtaining weight data of a lunar soil sample, temperature data of a sample receiving container that receives the lunar soil sample, and duration of a transfer process of the lunar soil sample; obtaining measurement data of total pressure of the water vapor; calculating a sublimation loss based on a sublimation rate and the duration of the transfer process, and estimating a relative sublimation loss rate; correcting the measurement data of the total pressure of the water and obtaining true pressure data of the water vapor; and calculating, based on the true pressure data of the water vapor, mass of the water vapor, and further calculating mass content of water ice in lunar soil.

The utility model provides a low vacuum pressure transmitter which comprises a shell base, a sleeve and a cover body, the sleeve is installed at one end of the base, the cover body is installed at one end of the sleeve, and a ceramic capacitance sensor, a circuit board support and a transmitter circuit board are installed in a cavity formed by the base, the sleeve and the cover body. The transmitter circuit board is connected with the ceramic capacitance sensor through a wire, a signal output port of the transmitter circuit board is connected with a 15Pin / D-Sub connector located outside the cover body through a shielding wire, a detection channel is arranged in the shell base, and the detection channel is communicated with the position of the ceramic capacitance sensor. The pressure transmitter adopts the ceramic capacitance sensor, so that the product precision and stability can be ensured, and the transmitter is convenient in overall structural design and installation, low in cost and convenient to popularize and apply.

To provide a method for manufacturing a vacuum pressure sensor, a device including the vacuum pressure sensor, and / or a system including the vacuum pressure sensor.SOLUTION: The vacuum pressure sensor can comprise a weld ring and a header element welded to the weld ring. The header element may comprise one or more header pins hermetically sealed to the header element, a piezoresistive sensing element coupled to the header element and electrically coupled to the one or more header pins, a corrugated diaphragm coupled to the header element and the weld ring, the corrugated diaphragm defining, with the header element, a cavity configured to contain a material, and a plastic spacer disposed within the cavity. The vacuum pressure sensor may comprise a protruding sharp edge or a substantially flat edge without corner breaks of at least a portion of the header element in physical contact with the metal plate.SELECTED DRAWING: Figure 1

A single vacuum source is used for multiple high flow rate subsystems in an inkjet printer to control the dispersal of satellite droplets during ink ejection while printing and ensuring that the substrates are sufficiently flat for the printing process. This reduces cost and layout requirements, provides a simplified control structure, and allows integration of a centralized liquid removal system and a single vacuum source. Accordingly the printing quality, robustness, and versatility of inkjet printers is improved.

The present invention discloses a metal diaphragm capacitor compound vacuum gauge, which includes a first housing, a second housing and an external connection pipe. The external connection pipe is fixedly connected to the bottoms of the first housing and the second housing, and an inner housing is inserted between the first housing and the second housing; a metal pipe is fixedly inserted at the top of the inner housing, and a first diaphragm and a second diaphragm are respectively arranged on both sides of the inner housing. A first electrode is attached to the side of the first diaphragm away from the metal pipe, and a first electrode tube is fixedly connected to the side of the first electrode close to the first housing. The present invention utilizes the principle of pure mechanical properties to achieve full-range, medium-high vacuum degree and high-precision measurement with the cooperation of two metal diaphragm capacitor sensor cores. The product adopts the principle of metal diaphragm capacitor, featuring high precision and fast response; it uses stainless steel material, has good corrosion resistance, can meet the use under different gases and different working conditions, does not require preheating, can directly measure different gases, is simple to maintain and has good repeatability of the product.

The utility model discloses a cup body temperature measuring table which comprises a table frame, a rotatable rotating disc is arranged on the table frame, the rotating disc is connected with a rotation driving mechanism, a plurality of temperature measuring mechanisms are arranged on the rotating disc, each temperature measuring mechanism comprises a fixing frame, a plurality of temperature measuring rings are arranged in the fixing frame, and a plurality of temperature sensors are arranged on the inner wall of each temperature measuring ring. And the temperature measuring mechanisms are uniformly arranged on the rotating disc at intervals, so that the angles between the fixing frames are the same. The rotation driving mechanism can drive the rotating disc to rotate, so that the temperature measuring mechanisms at different positions of the rotating disc can rotate to the feeding position. And the temperature measuring mechanisms are uniformly distributed, and the moving time of each temperature measuring mechanism is the same, so that uniform operation of feeding operation is facilitated, and the feeding process of temperature measurement is more automatic and more intelligent. When the vacuum cup is placed in the temperature measuring device, the temperature can be measured, the temperature can be measured after the rotating disc rotates by one circle, and the time in the transferring and feeding process can be shortened.

The utility model discloses an automatic monitoring device which comprises an acquisition base, a communication base and a locking assembly. An acquisition plate is arranged in the acquisition base, and at least one probe assembly is connected to the acquisition plate; a forwarding module is arranged in the communication base, and the forwarding module is in data connection with the acquisition board; the locking assembly is used for locking the communication base on the acquisition base and comprises a fixed disc and a limiting plate, the fixed disc is connected with the acquisition base, and the limiting plate is movably arranged on the communication base; wherein a limiting groove with a side opening is formed in the fixing disc, the limiting plate can move between a locking position where the limiting plate stretches into the limiting groove and an avoiding position where the limiting plate is in avoiding with the limiting groove, and the limiting plate is limited by the limiting groove in the vertical direction when stretching into the limiting groove through the side opening. According to the utility model, the communication base can be locked on the fixed disc, and the communication base has the advantages of convenient assembly and strong practicability.

This invention discloses a vacuum glass, relating to the field of glass product technology. The vacuum glass includes a glass body and a vacuum sensing probe. The glass body includes a first glass layer, a second glass layer, and a sealing edge. A gap is provided between the first and second glass layers, and the sealing edge seals the periphery of the gap, forming a vacuum cavity. The vacuum cavity is formed by welding solder in a vacuum environment. The vacuum sensor probe is disposed within the vacuum cavity and is used to detect the vacuum level of the vacuum cavity. A data processor is disposed outside the vacuum cavity and is wired or wirelessly connected to the sensing probe to receive data transmitted by the vacuum sensing probe. By placing a vacuum sensing probe within the vacuum cavity inside the vacuum glass, the vacuum level inside the vacuum glass can be detected conveniently and quickly, enabling efficient detection of the vacuum glass.

The utility model discloses a performance detection device for a vacuum arc-extinguishing chamber, which comprises a supporting plate, a supporting plate and an insulation detection transformer, the supporting plate is arranged at the top of the supporting plate, the insulation detection transformer is arranged at the bottom of the supporting plate, the supporting plate is movably provided with a vertical clamping plate, the vertical clamping plate is provided with a horizontal slot, and the vertical clamping plate is provided with a horizontal slot. The top of the clamping plate is provided with a fastener which extends downwards into the slot, and the supporting plate is provided with a moving contact reciprocating pulling member which is located at the upper part of the supporting plate. The utility model belongs to the technical field of vacuum arc-extinguishing chamber performance detection devices, and particularly relates to a performance detection device for a vacuum arc-extinguishing chamber.

The utility model discloses a formation and capacity grading negative pressure device which comprises an argon bottle, a vacuum generator and a gas washing bottle, the argon bottle is communicated with the vacuum generator through a first pipeline, and the vacuum generator is communicated with the gas washing bottle through a second pipeline. And the vacuum generator is used for converting gas in the argon bottle from positive pressure to negative pressure. And a second gas valve is mounted on the first pipeline between the argon bottle and the vacuum generator. And an air filter is arranged on the second pipeline between the vacuum generator and the gas washing bottle. The argon bottle provides a gas source, the gas source is converted into negative pressure through the vacuum generator, and waste gas generated during formation and capacity grading of the sodium-ion battery is pumped out. Meanwhile, argon is used as protective gas to effectively prevent waste gas of the battery cell from polluting an interface, so that various properties of the battery cell are improved. And the whole module is simple in structure, modular operation can be realized, and the cost is relatively low while the production efficiency of the battery cell is improved.

The invention relates to the technical field of petroleum pipes in the water and petroleum industry, in particular to a U-shaped thermos bottle type petroleum casing pipe for a geothermal well, which comprises an inner-layer casing pipe, an outer-layer casing pipe and a vacuum module. The inner-layer sleeve and the outer-layer sleeve are both of a hollow cylindrical structure, the outer-layer sleeve is connected with the inner-layer sleeve through two annular connecting pieces to form a vacuum interlayer, the outer wall of the outer-layer sleeve is provided with a through hole and an NPT bolt, the NPT bolt is used for vacuumizing the vacuum interlayer, the outer wall of the outer-layer sleeve is provided with a vacuum degree module, and the vacuum degree module is connected with the outer-layer sleeve. The vacuum degree module comprises a shell, an air bag, a sealing ring, a spring and a vacuum ruler and is used for monitoring the vacuum degree of the vacuum interlayer in real time. According to the thermos bottle type petroleum casing pipe for the U-shaped geothermal well, the design is similar to a thermos bottle, heat conduction can be effectively reduced, the heat preservation effect of the inner-layer casing pipe is improved, meanwhile, the monitoring module is arranged, the thermos bottle type petroleum casing pipe is suitable for the high-temperature geothermal environment, and the exploitation efficiency and safety of the geothermal well are improved.

The utility model relates to the technical field of capacitance film vacuum gauges, and discloses a capacitance film vacuum gauge for high-temperature gas, which comprises a capacitance film vacuum gauge, the bottom surface of the capacitance film vacuum gauge is fixedly communicated with a gas inlet pipe, and a cooling mechanism is arranged outside the capacitance film vacuum gauge; the cooling mechanism comprises a heat preservation cylinder, the inner wall of the heat preservation cylinder is fixedly connected with the outer surface of the capacitance film vacuum gauge, the outer surface of the heat preservation cylinder is fixedly connected with a fixing cover, the outer surface of the heat preservation cylinder is sleeved with a heat dissipation copper pipe, and the air inlet end of the heat dissipation copper pipe fixedly communicates with an air supply pipe. The end, away from the heat dissipation copper pipe, of the air feeding pipe penetrates through the fixing cover and fixedly communicates with the outer surface of the air inlet pipe, and the air outlet end of the heat dissipation copper pipe fixedly communicates with a backflow pipe. According to the capacitance film vacuum gauge for the high-temperature gas, when the capacitance film vacuum gauge is used for carrying out vacuum pressure detection on the high-temperature gas, the temperature of the high-temperature gas can be well balanced, and the pressure detection precision of the capacitance film vacuum gauge is ensured.

The invention provides a capacitive vacuum gauge and a semiconductor device, and the capacitive vacuum gauge comprises a detection cavity, one side of which is provided with a through hole; the first end of the air inlet pipe is communicated with the through hole, and the second end of the air inlet pipe is communicated with a cavity to be measured; and the insulating pipe is connected to any position of the air inlet pipe, so that the detection cavity is grounded without passing through the air inlet pipe. According to the capacitive vacuum gauge and the semiconductor equipment provided by the embodiment of the invention, the detection cavity is not electrically connected with the outside through the air inlet pipe by virtue of the insulating pipe, so that the precision of a capacitance acquisition circuit is improved, and the precision of air pressure measurement is improved.

This application relates to a vacuum monitoring device for connection to a vacuum pipeline. It includes a first storage body forming a vacuum cavity; a second storage body connected to the first storage body; an indicator block disposed within the second storage body, one end of which is movably connected to the outer wall of the first storage body, and the other end of which is elastically connected to the inner wall of the second storage body; a through hole is formed in the wall of the first storage body, communicating with the vacuum pipeline. Changes in the vacuum level within the vacuum cavity cause the indicator block to reciprocate. The device also includes a vacuum toilet connected to the vacuum monitoring device. This vacuum monitoring device has a simple structure and is easy to install. More importantly, it can determine the vacuum level in the vacuum pipeline in real time, thus facilitating better use of the vacuum toilet.

The invention relates to a cross-platform high-vacuum sample transfer device, which comprises a vacuum sealed cabin in which a cross-shaped channel formed by connecting a front channel, a rear channel, a left channel and a right channel is arranged; the quick connector is arranged at the port of the front channel and can be connected with external equipment; and the magnetic coupling transmission rod is arranged at the rear channel and is used for realizing the transfer of the sample carrying table. Compared with the prior art, through high-precision structural design, high-vacuum transfer of a sample among different platforms such as a glove box, a scanning electron microscope, a double-beam electron microscope or a micro-nano laser processing system is realized, pollution sources such as water and air are effectively isolated, intrinsic characteristics of the sample are ensured not to be interfered, and the sample quality is improved. And the accuracy and success rate of sample analysis and processing are obviously improved.

The invention discloses a vacuum measuring tool and a vacuum degree measuring method, and the vacuum measuring tool comprises a measuring circuit which comprises a power supply which is a constant-voltage constant-frequency AC power supply; a resistive element; the current detection element is connected in series with the resistance element and is used for acquiring a current measurement value of the measurement circuit; the capacitor assembly is connected with the resistor element in series; a medium space between polar plates of the capacitor assembly is used for being communicated with a to-be-measured space, a current measurement value collected by the current detection element is in positive correlation with a capacitance value of the capacitor assembly, and the capacitance value of the capacitor assembly is in positive correlation with the vacuum degree of the to-be-measured space. According to the invention, the capacitor assembly is adopted to form the measurement circuit, the conversion from the collected current measurement value to the vacuum degree is realized, the device can be suitable for the measurement in different vacuum states, the precision is high, the integration degree is high, the space is saved, and the system complexity and the maintenance cost are reduced; and the technical barrier that a hot cathode vacuum gauge receives hot electrons is effectively avoided, and the problem that a high-vacuum measuring tool is short in service life is fundamentally solved.

The invention discloses a circuit and a method for high-precision sampling of nanoamp-level micro-current. The circuit comprises a diode sampling unit, a parallel resistance-capacitance unit, an impedance matching unit, a differential amplification unit and a micro-current display unit, the sampling unit is composed of two diodes which are reversely connected in parallel, one end of the sampling unit is connected with a micro-current signal source to be sampled, and the other end of the sampling unit is grounded; the parallel resistance-capacitance unit is connected to two ends of the diode sampling unit in parallel; the impedance matching unit comprises two voltage followers, the input ends of the voltage followers are respectively connected to the two ends of the sampling unit, and the output ends of the two voltage followers are respectively connected to the input end of the differential amplification unit; the differential amplification unit adopts a differential amplification circuit based on a symmetric equal-length wiring principle as a secondary amplification processing unit; the output end of the differential amplification unit is connected to the display unit. According to the invention, full-range high-precision coverage from nA to mA is realized, and the technical problem of wide-range current sampling in the ion pump power supply controller is solved.

The utility model discloses a multi-probe device for monitoring the vacuum degree of a soft foundation. The multi-probe device comprises a plurality of probe assemblies which are connected with one another and a cable for supplying power to the probe assemblies, the probe assembly comprises a first pipe body, a second pipe body, a partition plate and a sensor, a threading hole is formed in the first pipe body, a plurality of vent holes are formed in the second pipe body, a mounting hole is formed in the partition plate, and the sensor is mounted in the mounting hole; wherein the partition plate is installed at the joint of the first pipe body and the second pipe body, the main body of the sensor is located in the first pipe body, the probe of the sensor is located in the second pipe body, and the electric connection end of the sensor is connected with a cable entering the first pipe body through the threading hole. According to the utility model, each probe assembly is provided with a sensor, the vacuum pressure value at the installation position of the probe assembly can be directly measured by using the sensors, the measurement belongs to direct measurement, the monitoring data is more accurate, and the construction process is more convenient.

The vacuum synchronism measurement system, method and control method of the SPERF device relate to the technical field of space plasma environment simulation.The present application is to solve the problem that the time delay from the inflation start to the vacuum meeting the condition cannot be accurately measured when the existing SPERF device is experimented, and the experimental requirements are not met.The present application provides a vacuum synchronism measurement system, method and control method suitable for the SPERF device, which can measure the high synchronism of the inflation system and the vacuum gauge measurement value, according to the inflation system and the vacuum gauge characteristics, the vacuum curve requirements meeting the experimental requirements are given, and the control method of the vacuum pressure and the vacuum curve meeting the experimental requirements is provided.