126results about "Vacuum gauges" patented technology

The invention discloses a dynamic calculation method based on piezoresistance-resistance composite vacuum transmitter switching, and relates to the technical field of vacuum transmitters, and the method comprises the steps: obtaining a vacuum degree trend coefficient through a piezoresistance gauge vacuum degree acceleration and a resistance gauge vacuum degree acceleration; obtaining a sensitivity compensation coefficient and a vacuum degree change coefficient based on the vacuum degree trend coefficient, then obtaining a vacuum degree change abnormal coefficient based on the vacuum degree change coefficient, and finally determining the final vacuum degree based on the vacuum degree trend coefficient, the sensitivity compensation coefficient and the vacuum degree change abnormal coefficient. The output voltage of the piezoresistance-resistance composite vacuum transmitter can be obtained through the vacuum degree, the signal output smoothness can be effectively improved, the measurement accuracy is improved, and seamless signal connection is achieved.

The invention discloses a vacuum-vertical shaft-electroosmosis combined dehydration test device for waste mud, and belongs to the technical field of geotechnical tests. The device is composed of a modular model cylinder, a direct-current power supply system, a measuring system, a vacuum pump and a vertical vacuum drainage body. The model cylinder is formed by connecting a top cylinder, a middle cylinder and a bottom cylinder through bolts and stacking sealing rings, the height can be flexibly adjusted, and good air tightness is kept. And the cylinder side is provided with a standard quick-plug interface, so that a vacuum meter and a pore pressure sensor can be conveniently connected. An anode electrode plate and a cathode electrode plate which are connected with a direct-current power supply are respectively arranged on the top surface and the bottom surface of the slurry, and the vertical vacuum drainage body penetrates through the bottom horizontal drainage layer and is fixed on the positioning frame to form a vacuum-vertical shaft combined drainage channel. The device effectively overcomes the problems of vacuum pressure transmission attenuation, overlong drainage path, non-uniform electroosmosis dehydration and the like through the coupling effect of vacuum, the vertical shaft and electroosmosis, can realize accurate research on different depth dehydration mechanisms of slurry, and has the advantages of rapid dehydration, simplicity and convenience in operation, environmental protection and high efficiency.

To provide a method for manufacturing a vacuum pressure sensor, a device including the vacuum pressure sensor, and / or a system including the vacuum pressure sensor.SOLUTION: The vacuum pressure sensor can comprise a weld ring and a header element welded to the weld ring. The header element may comprise one or more header pins hermetically sealed to the header element, a piezoresistive sensing element coupled to the header element and electrically coupled to the one or more header pins, a corrugated diaphragm coupled to the header element and the weld ring, the corrugated diaphragm defining, with the header element, a cavity configured to contain a material, and a plastic spacer disposed within the cavity. The vacuum pressure sensor may comprise a protruding sharp edge or a substantially flat edge without corner breaks of at least a portion of the header element in physical contact with the metal plate.SELECTED DRAWING: Figure 1

A single vacuum source is used for multiple high flow rate subsystems in an inkjet printer to control the dispersal of satellite droplets during ink ejection while printing and ensuring that the substrates are sufficiently flat for the printing process. This reduces cost and layout requirements, provides a simplified control structure, and allows integration of a centralized liquid removal system and a single vacuum source. Accordingly the printing quality, robustness, and versatility of inkjet printers is improved.

The utility model discloses a cup body temperature measuring table which comprises a table frame, a rotatable rotating disc is arranged on the table frame, the rotating disc is connected with a rotation driving mechanism, a plurality of temperature measuring mechanisms are arranged on the rotating disc, each temperature measuring mechanism comprises a fixing frame, a plurality of temperature measuring rings are arranged in the fixing frame, and a plurality of temperature sensors are arranged on the inner wall of each temperature measuring ring. And the temperature measuring mechanisms are uniformly arranged on the rotating disc at intervals, so that the angles between the fixing frames are the same. The rotation driving mechanism can drive the rotating disc to rotate, so that the temperature measuring mechanisms at different positions of the rotating disc can rotate to the feeding position. And the temperature measuring mechanisms are uniformly distributed, and the moving time of each temperature measuring mechanism is the same, so that uniform operation of feeding operation is facilitated, and the feeding process of temperature measurement is more automatic and more intelligent. When the vacuum cup is placed in the temperature measuring device, the temperature can be measured, the temperature can be measured after the rotating disc rotates by one circle, and the time in the transferring and feeding process can be shortened.

The utility model discloses a formation and capacity grading negative pressure device which comprises an argon bottle, a vacuum generator and a gas washing bottle, the argon bottle is communicated with the vacuum generator through a first pipeline, and the vacuum generator is communicated with the gas washing bottle through a second pipeline. And the vacuum generator is used for converting gas in the argon bottle from positive pressure to negative pressure. And a second gas valve is mounted on the first pipeline between the argon bottle and the vacuum generator. And an air filter is arranged on the second pipeline between the vacuum generator and the gas washing bottle. The argon bottle provides a gas source, the gas source is converted into negative pressure through the vacuum generator, and waste gas generated during formation and capacity grading of the sodium-ion battery is pumped out. Meanwhile, argon is used as protective gas to effectively prevent waste gas of the battery cell from polluting an interface, so that various properties of the battery cell are improved. And the whole module is simple in structure, modular operation can be realized, and the cost is relatively low while the production efficiency of the battery cell is improved.

The invention relates to the technical field of petroleum pipes in the water and petroleum industry, in particular to a U-shaped thermos bottle type petroleum casing pipe for a geothermal well, which comprises an inner-layer casing pipe, an outer-layer casing pipe and a vacuum module. The inner-layer sleeve and the outer-layer sleeve are both of a hollow cylindrical structure, the outer-layer sleeve is connected with the inner-layer sleeve through two annular connecting pieces to form a vacuum interlayer, the outer wall of the outer-layer sleeve is provided with a through hole and an NPT bolt, the NPT bolt is used for vacuumizing the vacuum interlayer, the outer wall of the outer-layer sleeve is provided with a vacuum degree module, and the vacuum degree module is connected with the outer-layer sleeve. The vacuum degree module comprises a shell, an air bag, a sealing ring, a spring and a vacuum ruler and is used for monitoring the vacuum degree of the vacuum interlayer in real time. According to the thermos bottle type petroleum casing pipe for the U-shaped geothermal well, the design is similar to a thermos bottle, heat conduction can be effectively reduced, the heat preservation effect of the inner-layer casing pipe is improved, meanwhile, the monitoring module is arranged, the thermos bottle type petroleum casing pipe is suitable for the high-temperature geothermal environment, and the exploitation efficiency and safety of the geothermal well are improved.

The invention provides a capacitive vacuum gauge and a semiconductor device, and the capacitive vacuum gauge comprises a detection cavity, one side of which is provided with a through hole; the first end of the air inlet pipe is communicated with the through hole, and the second end of the air inlet pipe is communicated with a cavity to be measured; and the insulating pipe is connected to any position of the air inlet pipe, so that the detection cavity is grounded without passing through the air inlet pipe. According to the capacitive vacuum gauge and the semiconductor equipment provided by the embodiment of the invention, the detection cavity is not electrically connected with the outside through the air inlet pipe by virtue of the insulating pipe, so that the precision of a capacitance acquisition circuit is improved, and the precision of air pressure measurement is improved.

This application relates to a vacuum monitoring device for connection to a vacuum pipeline. It includes a first storage body forming a vacuum cavity; a second storage body connected to the first storage body; an indicator block disposed within the second storage body, one end of which is movably connected to the outer wall of the first storage body, and the other end of which is elastically connected to the inner wall of the second storage body; a through hole is formed in the wall of the first storage body, communicating with the vacuum pipeline. Changes in the vacuum level within the vacuum cavity cause the indicator block to reciprocate. The device also includes a vacuum toilet connected to the vacuum monitoring device. This vacuum monitoring device has a simple structure and is easy to install. More importantly, it can determine the vacuum level in the vacuum pipeline in real time, thus facilitating better use of the vacuum toilet.

The invention relates to a cross-platform high-vacuum sample transfer device, which comprises a vacuum sealed cabin in which a cross-shaped channel formed by connecting a front channel, a rear channel, a left channel and a right channel is arranged; the quick connector is arranged at the port of the front channel and can be connected with external equipment; and the magnetic coupling transmission rod is arranged at the rear channel and is used for realizing the transfer of the sample carrying table. Compared with the prior art, through high-precision structural design, high-vacuum transfer of a sample among different platforms such as a glove box, a scanning electron microscope, a double-beam electron microscope or a micro-nano laser processing system is realized, pollution sources such as water and air are effectively isolated, intrinsic characteristics of the sample are ensured not to be interfered, and the sample quality is improved. And the accuracy and success rate of sample analysis and processing are obviously improved.

The invention discloses a vacuum measuring tool and a vacuum degree measuring method, and the vacuum measuring tool comprises a measuring circuit which comprises a power supply which is a constant-voltage constant-frequency AC power supply; a resistive element; the current detection element is connected in series with the resistance element and is used for acquiring a current measurement value of the measurement circuit; the capacitor assembly is connected with the resistor element in series; a medium space between polar plates of the capacitor assembly is used for being communicated with a to-be-measured space, a current measurement value collected by the current detection element is in positive correlation with a capacitance value of the capacitor assembly, and the capacitance value of the capacitor assembly is in positive correlation with the vacuum degree of the to-be-measured space. According to the invention, the capacitor assembly is adopted to form the measurement circuit, the conversion from the collected current measurement value to the vacuum degree is realized, the device can be suitable for the measurement in different vacuum states, the precision is high, the integration degree is high, the space is saved, and the system complexity and the maintenance cost are reduced; and the technical barrier that a hot cathode vacuum gauge receives hot electrons is effectively avoided, and the problem that a high-vacuum measuring tool is short in service life is fundamentally solved.

The vacuum synchronism measurement system, method and control method of the SPERF device relate to the technical field of space plasma environment simulation.The present application is to solve the problem that the time delay from the inflation start to the vacuum meeting the condition cannot be accurately measured when the existing SPERF device is experimented, and the experimental requirements are not met.The present application provides a vacuum synchronism measurement system, method and control method suitable for the SPERF device, which can measure the high synchronism of the inflation system and the vacuum gauge measurement value, according to the inflation system and the vacuum gauge characteristics, the vacuum curve requirements meeting the experimental requirements are given, and the control method of the vacuum pressure and the vacuum curve meeting the experimental requirements is provided.

The application discloses a ceramic-metal low-stress welded capacitive vacuum gauge, which comprises a metal shell and a ceramic base connected to the metal shell, and a metal transition layer is arranged at the connecting interface of the ceramic base and the metal shell; the metal transition layer is a copper-nickel composite structure with a copper layer and a nickel layer, the nickel layer is connected with the ceramic base, and the copper layer is connected with the metal shell. A gradient layer with a gradually changing thermal expansion coefficient from the ceramic side to the metal shell side is constructed. The thermal performance of the nickel layer is relatively close to that of the ceramic base, which is beneficial to the interface combination; the copper layer is more matched with the metal shell, and the good plasticity of the copper layer can be used as stress buffering. In the welding heat cycle process, the metal transition layer can effectively absorb and disperse the thermal stress generated due to the uneven shrinkage of the base metals on both sides, so that the risk of ceramic cracking is reduced, and the low-leakage-rate weld is ensured.

The application discloses a kind of capacitive thin film vacuum gauge tuning measuring devices, can complete the debugging work of batch before vacuum gauge completes packaging, and efficiency is high, cost controllable.The device, main vacuum chamber pumping assembly is connected main vacuum chamber by first pumping connection pipeline, for maintaining the pressure of main vacuum chamber at background state;Test chamber pumping assembly is connected each test chamber by second pumping connection pipeline, for maintaining the pressure of test chamber at background state;Gas distribution assembly is connected each test chamber by gas supply pipeline, for supplying gas to test chamber;Test chamber is divided into different groups according to the range of measured vacuum gauge, and the pressure sensor of corresponding range is connected;Each test chamber provides more than one vacuum gauge connection end;The reference cavity of each measured vacuum gauge is connected bellows by first connecting piece, and the bellows corresponding to all measured vacuum gauges are connected into the main vacuum chamber;The measuring cavity of measured vacuum gauge is connected the test chamber of corresponding range by second connecting piece.

A dynamic display 11 for an apparatus comprising a vacuum pump, vacuum pressure gauge or gas abatement system. The display comprises an input 19 to receive a signal from the apparatus indicative of it

The invention provides a metalized vacuum sensor, which comprises a first silicon wafer, a metalized glass sheet, a second silicon wafer and a metal electrode, and is characterized in that the second silicon wafer, the metalized glass sheet and the second silicon wafer are sequentially arranged; the metal electrode is arranged on the surface of the first silicon wafer, one side surface, close to the glass layer, of the second silicon wafer is provided with a capacitor cavity, and the other side surface is provided with a reference cavity; the metalized glass sheet comprises a glass layer and a metal layer arranged on the glass layer, and the metal layer and the metal electrode are located on the two surfaces of the glass layer respectively; the vacuum sensor is also provided with a connecting part which is communicated with the metal layer and the metal electrode. According to the vacuum sensor, the capacitance cavity and the medium cavity are separated, so that measurement values are not affected when different media are measured; the invention also provides a preparation process of the metallized vacuum sensor.

The invention provides a vacuum gauge and semiconductor equipment, the vacuum gauge comprises a shell and a diaphragm, the diaphragm divides the interior of the shell into a vacuum cavity and a test cavity, the shell is provided with a connecting pipe used for connecting the test cavity and a tested space, the test cavity is internally provided with a separation blade, the separation blade divides the test cavity into a first chamber and a second chamber, and the first chamber and the second chamber are communicated with each other. The first cavity is located on the side, opposite to the vacuum cavity, of the second cavity, and containing grooves are formed in the face, facing the diaphragm, of the first cavity and / or the wall face, facing the diaphragm, of the second cavity. The width of at least one position of the containing groove is smaller than the width of the bottom of the containing groove. According to the invention, the part of pollutants, such as particle impurities, entering the test cavity can be deposited in the accommodating groove and restrained by the accommodating groove, so that the part of pollutants can be prevented from being disturbed by gas entering and exiting the test cavity back and forth to be attached to the diaphragm or flowing back to the tested space along with the gas.

The application provides a high-vacuum measuring device based on a squeeze-film damping effect, and belongs to the technical field of vacuum pressure measurement. The upper and lower ends of a pendulum plate are respectively connected to one end of a low-loss flexible support structure. The two low-loss flexible support structures are used to suppress the pendulum effect of the pendulum plate, and only the rotational movement of the pendulum plate around the low-loss flexible support structure is reserved. An air-wall device is located in the vibration direction of the pendulum plate and has a preset interval with the pendulum plate, and is used to increase the squeeze-film damping when the pendulum plate vibrates. A vibration starting device is used to apply a driving force to the pendulum plate, so that the pendulum plate swings. The damping effect of residual gas in the environment to be measured makes the vibration of the pendulum plate gradually attenuate. An angle detector is used to obtain the amplitude attenuation factor of the pendulum plate vibration, and the total pressure of the environment to be measured is obtained by combining the pressure and damping relationship. The application can realize the measurement of extremely high vacuum.

The utility model relates to the technical field of vacuum generators, and discloses an energy-saving high-vacuum-degree vacuum generator which comprises a vacuum generator shell, two connecting rings and an adsorption head, the two connecting rings are fixedly connected to the two ends of the vacuum generator shell respectively, and the adsorption head is fixedly connected to the side wall of the vacuum generator shell. A through hole is formed in the position, located on the side wall of the adsorption head, of the vacuum generator shell, a fixing ring is fixedly connected to the inner wall of the vacuum generator shell, and a rectangular opening is formed in the inner wall of the fixing ring. Gas enters the shell from the connecting ring at one end and then flows out of the shell from the connecting ring at the other end, the end, away from the shell, of the adsorption head is tightly attached to the surface of an adsorbed object through the sealing rubber ring to form a sealed space, and when the flow speed of airflow in the shell of the vacuum generator is increased, negative pressure local vacuum is generated at the through hole of the adsorption head; and the object is adsorbed and fixed.

The invention relates to semiconductor manufacturing equipment which comprises an equipment body, a vacuum pressure gauge and a heat dissipation piece, a vacuum cavity is formed in the equipment body, the vacuum pressure gauge is used for measuring the pressure of the vacuum cavity and is provided with a measuring cavity, the heat dissipation piece comprises a shell connected between the equipment body and the vacuum pressure gauge, and a heat dissipation cavity is formed in the shell. And the heat dissipation cavity is used for communicating the vacuum cavity with the measurement cavity so as to dissipate heat of the polymer entering the measurement cavity from the vacuum cavity. According to the semiconductor manufacturing equipment disclosed by the invention, the polymer entering the vacuum pressure gauge is subjected to heat dissipation through the heat dissipation piece, so that the polymer is gathered in the heat dissipation cavity after entering the heat dissipation cavity by utilizing the characteristic that the gathering speed of the polymer in a low-temperature environment is higher than that in a high-temperature environment; the polymer entering the measuring cavity of the vacuum pressure gauge can be reduced to a great extent, it is guaranteed that the polymer does not cause reduction of the precision and sensitivity of the vacuum pressure gauge, the service life of the vacuum pressure gauge is prolonged, and the frequency of maintaining the vacuum pressure gauge is reduced.

The invention discloses a high-precision film capacitor vacuum gauge, and relates to the technical field of sensors, the high-precision film capacitor vacuum gauge comprises an IO connector, an upper shell and a lower shell, the upper shell and the lower shell are connected through a shell locking screw, the upper shell is connected with the IO connector through a panel locking screw, the lower part of the IO connector is connected with a panel PCB, and the panel PCB is connected with the lower part of the upper shell. The panel PCB is connected with the transfer PCB through the first connecting stud, the transfer PCB is connected with the signal acquisition PCB through the second connecting stud, and the signal acquisition PCB is connected with the Sensor through the third connecting stud. According to the high-precision thin-film capacitor vacuum gauge, the temperature matching structure of the product is designed on the shell of the product Sensor, independent temperature matching parts do not need to be independently designed, the number of functional dimension chains can be reduced, the processing technology requirement of the product parts is lowered, and the problem that the product drifts seriously is solved.

The invention discloses a capacitor film vacuum gauge diaphragm aging device, and relates to the technical field of diaphragm aging, the capacitor film vacuum gauge diaphragm aging device comprises a support frame body, a pipe body and a placing frame, the pipe body is fixedly arranged above the support frame body, the two ends of the pipe body are provided with air supply mechanisms, the placing frame is arranged at the top end of the pipe body, and a clamping mechanism for fixing a diaphragm is arranged in the placing frame. And a butt joint mechanism is arranged between the pipe body and the placing frame. According to the invention, the membrane is fixed in the placing frame through the clamping mechanism, then the placing frame is connected with the pipe body, and the air supply mechanism is used for pressurizing the interior of the placing frame, so that the membrane fixed in the placing frame is aged under the pressure required by the process, and the convenience of membrane aging treatment is improved.

The invention relates to the technical field of medical instruments, and provides a hemostix detection device which comprises a vacuum box, a vacuum pump, a tray mechanism and an elastic force detection mechanism, a detection window is formed in the top of the vacuum box, the vacuum pump is fixedly connected to the vacuum box, and an air inlet pipe of the vacuum pump communicates with the vacuum box; the plurality of tray mechanisms are fixedly connected in the vacuum box at equal intervals, each tray mechanism can be used for placing one blood collection tube, the tray mechanisms are used for placing the blood collection tubes and classifying the plurality of blood collection tubes, the plurality of elastic force detection mechanisms are arranged in the vacuum box in a sliding manner, and the elastic force detection mechanisms are in one-to-one correspondence with the tray mechanisms; the elastic force detection mechanism can be in contact with the sealing cover arranged on the tray mechanism, and the elastic force detection mechanism is used for detecting the elastic force of the rubber plug under different air pressures, so that the technical problem that the detected vacuum hemostix is difficult to reuse when the vacuum degree of the vacuum hemostix is detected in the prior art is solved.

According to the electrostatic force balance type MEMS capacitor film vacuum gauge based on the single capacitor structure, firstly, the single capacitor structure is adopted, so that the process complexity and the processing difficulty are greatly reduced, large-scale industrial production is facilitated, and the cost is effectively reduced; secondly, the pressure sensing film is always in a balanced position through an electrostatic force balance type working principle, so that the overload damage risk of the pressure sensing film is eliminated, the robustness of the sensor is improved, and the service life is prolonged; and finally, based on a pressure measurement principle of an electrostatic force balance type structure, a pressure-voltage relationship is obtained, the linearity, stability and precision of a product output signal are greatly improved, and the method can be applied to occasions such as deep space exploration, wind tunnel experiments, biomedicine and the like which have strict requirements on miniaturization of a vacuum measurement instrument and strict requirements on environment temperature.

The present application relates to the technical field of vacuum metrology, and in particular to a dual-capacitor differential MEMS vacuum gauge, comprising a glass substrate, a silicon substrate, a pressure-sensitive diaphragm, a silicon upper electrode, a metal lower electrode, and a glass cover. The glass substrate is arranged at the lower position, and the metal lower electrode is arranged on the glass substrate; the silicon substrate is arranged on the glass substrate and bonded to the glass substrate; the pressure-sensitive diaphragm and the silicon upper electrode are arranged on the silicon substrate; the pressure-sensitive diaphragm is arranged between the silicon upper electrode and the metal lower electrode; the pressure-sensitive diaphragm, the silicon upper electrode, and a gap therebetween form an upper sensitive capacitor; the pressure-sensitive diaphragm, the metal lower electrode, and a gap therebetween form a lower sensitive capacitor; and the glass cover is arranged above the silicon substrate and anodically bonded to the silicon substrate. The present application employs a dual-capacitor differential structure, eliminating the impact of ambient temperature on a measurement result of the vacuum gauge, achieving higher measurement accuracy and higher sensitivity, and also enabling real-time monitoring of the ambient temperature of the vacuum gauge.

The application relates to the technical field of liquid hydrogen cylinder detection, in particular to a fire post-liquid hydrogen cylinder detection management method and system, wherein the method comprises the following steps: a preliminary judgment step, a fire-affected part detection step, a toughness prediction step, an adiabatic evaluation step, a safety determination step and a traceability archiving step; wherein the system comprises a processor and a memory in communication connection with the processor. The application realizes independent monitoring in three dimensions and dangerous determination based on a logical or relationship, so that the detection result can comprehensively reflect the real safety state of the cylinder in a super-low-temperature service environment.

The invention discloses a shielding sheet state detection method and device and a high-energy pat-watt laser terminal system, and relates to the technical field of high-energy pat-watt laser. An isolation valve is arranged between a shielding sheet of a high-field laser device and a target chamber, the isolation valve is closed, and a sealed cavity is formed between the shielding sheet and the isolation valve; a vacuum gauge I is arranged to measure the vacuum degree in the sealed cavity; vacuumizing a terminal focusing vacuum chamber of the high-field laser device to a working vacuum degree; the sealed cavity is vacuumized, so that the vacuum degree of the focusing vacuum cavity of the terminal is superior to that of the sealed cavity; first vacuum degree information of the sealed cavity is obtained, the first vacuum degree information is compared with theoretical vacuum degree information, and if the vacuum degree of the sealed cavity is superior to the theoretical vacuum degree, it is judged that the shielding piece is damaged. According to the invention, resource occupation is reduced, and detection efficiency is improved; the exposure time of the shielding sheet under unknown substances in the target chamber can be shortened, pollution is reduced, the service life is ensured, and the maintenance difficulty is reduced.

The invention provides a supporting frame for vacuum arc-extinguishing chamber detection, a combined mold and a detection method, and relates to the technical field of vacuum arc-extinguishing chamber detection, and the supporting frame comprises a supporting plate which is of a U-shaped structure and sleeves the outer side of a vacuum arc-extinguishing chamber from the side surface; the bracket is opened at a position corresponding to the U-shaped opening side of the supporting plate; the detector is of a hollow structure, and when the detector is used, the detector is connected to the outer side of the vacuum arc-extinguishing chamber in a sleeving mode to detect vacuum degree data of the vacuum arc-extinguishing chamber. According to the technical scheme, convenient detection of the vacuum arc-extinguishing chamber is achieved, manual carrying and tools are not needed, the labor cost is reduced, the supporting frame, the lifting mechanism, the rotating platform, the positioning assembly and the transport vehicle are combined through the combined die, the vacuum arc-extinguishing chamber is fixedly placed on the transport vehicle to be detected, the detection efficiency is effectively improved, and the detection cost is reduced. According to the vacuum arc-extinguishing chamber intelligent detection system, the vacuum degree data is acquired and then stored and intelligently analyzed, and the abnormal vacuum degree data is alarmed and prompted to remind a worker of handling, so that intelligent detection of the vacuum arc-extinguishing chamber is realized.

The utility model relates to the technical field of semiconductor process cavity vacuum detectors, and discloses a semiconductor process cavity vacuum detector with an early warning mechanism, which comprises a vacuum detection instrument and a detection probe, a mounting seat is fixed at the top of the vacuum detection instrument, and a mounting bolt for connection is fixed between a clamping block and a side clamping plate. Arc-shaped grooves are formed in the clamping blocks, and protective pads are fixed to the arc-shaped grooves. According to the utility model, the mounting seat is fixed at the top position of the vacuum detection instrument, and the internal thread groove is formed in the mounting seat, so that the threaded column and the internal thread groove can be in threaded connection in a rotating manner during working, position limitation is formed by the limiting plate after assembly, and the warning lamp is fixed at the top position of the limiting plate; therefore, when the detection probe is used for detection and air leakage occurs, the warning lamp can give an alarm for early warning, so that a worker can conveniently know warning information in time, and the overall early warning capability is well improved in the working process.

The utility model discloses an energy-saving vacuum cup vacuum degree detection device which comprises a rack and a manipulator, and further comprises a heating water tank arranged in the rack and a test unit arranged on the rack, a temperature sensor is arranged on the manipulator, the test unit comprises a base and an expansion bag, the base is fixedly installed on the rack, and the expansion bag is fixedly installed on the rack. The expansion bag is fixedly connected to the base which is communicated with the heating water tank, and a water pump is arranged between the base and the heating water tank. According to the energy-saving vacuum degree detection equipment for the vacuum cup, hot water in the heating water tank is conveyed to the base through the water pump and conveyed to the interior of the expansion bag through the base, so that the expansion bag expands and is attached to the inner wall of the vacuum cup, the function of heating the vacuum cup is further achieved, the hot water can be recycled after heating, energy consumption can be greatly reduced, and the service life of the vacuum cup is prolonged. The temperature of the outer wall of the vacuum cup can be detected through the temperature sensor on the manipulator, so that the thermal insulation performance of the vacuum cup can be detected while the manipulator takes a piece, and the detection efficiency of the vacuum cup can be improved.