The invention relates to a
radio frequency probe alignment and pressing amount control method based on
visual feedback and
motion control, and belongs to the technical field of
semiconductor testing or module testing. The method comprises the steps that geometric parameters of a
radio frequency probe and a target bonding pad are acquired through
machine vision, the geometric parameters are mapped to a unified space coordinate
system after being preprocessed, and a three-dimensional relative position relation is generated; driving a multi-axis displacement mechanism to perform visual
servo alignment based on the relationship, and dynamically correcting motion parameters in real time; controlling the
radio frequency probe to execute stepping type grading constant-speed pressing, comparing a continuously captured contact characteristic
signal with a preset threshold value, and executing preset
overpressure amount pressing after contact is judged; according to the deviation between the contact deformation
signal and the standard value, the output torque is adjusted, and the radio frequency probe is driven to carry out micro-amplitude displacement correction. The high-precision and self-
adaptive control of the positioning and pressing process of the radio frequency probe is realized, and the
repeatability, the stability and the efficiency of the test are improved.