The invention provides a
radio frequency probe regulation and control
chip, a preparation method and a
radio frequency probe regulation and control method, the
radio frequency probe regulation and control
chip comprises a
wafer substrate and a GSG type
coplanar waveguide CPW structure formed on the
wafer substrate, the GSG type
coplanar waveguide CPW structure comprises a CPW
signal line and CPW ground wires located on the two sides of the CPW
signal line, the CPW
signal line and the CPW ground wires are arranged in parallel, and the GSG type
coplanar waveguide CPW structure is formed on the
wafer substrate. The two CPW ground wires are electrically communicated with the CPW signal wire and then are used for being in contact with three contacts of the radio frequency probe GSG to realize position calibration of the radio frequency probe GSG; according to the
scattering parameters of the three contacts of the GSG relative to the CPW signal line and the two CPW ground lines, the contact state of the three contacts of the GSG and the radio frequency probe regulation and control
chip is judged, and the included angle theta between the connecting line of the three contacts of the GSG and the plane where the radio frequency probe regulation and control chip is located is regulated and controlled. According to the invention, different
contact states, including complete open circuit, complete
short circuit, partial contact and the like, of the probe can be accurately identified, so that the inclination angle and the
contact position of the probe can be automatically regulated and controlled.