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92 results about "Radial waveguide" patented technology

Millimeter wave radial waveguide space power allocation/synthesizer

The invention discloses a millimeter wave radial waveguide space power allocation / synthesizer which comprises an upper cavity, a middle cavity and a lower cavity which are assembled sequentially from top to bottom. A standard waveguide cavity is formed in the upper cavity, one end of the standard waveguide cavity is located in the center of the upper cavity, and the other end of the standard waveguide cavity is located in the edge of the upper cavity. A plurality of radial waveguide cavities which are evenly distributed are formed in the lower cavity, and the center of the lower cavity is provided with a multistage ladder matching pin. The center of the middle cavity is provided with a circular hole. The free end of the multistage ladder matching pin penetrates through the circular hole and is located in the standard waveguide cavity in the center of the upper cavity. A gap is reserved between the multistage ladder matching pin and the circular hole. According to the millimeter wave radial waveguide space power allocation / synthesizer, the operation bandwidth of the radial waveguide power allocation / synthesizer is broadened through the multistage ladder matching pin, and the synthetic efficiency in multiplex synthesis is greatly improved compared with that of a traditional technology.
Owner:NO 54 INST OF CHINA ELECTRONICS SCI & TECH GRP

Apparatus for plasma processing

A plasma processing apparatus is provided. The plasma processing apparatus can generate a uniform plasma in a processing container to perform a uniform processing on even a large-diameter wafer. The apparatus includes a processing container 4 shaped to be a cylinder with a bottom and accommodating amounting table 10 for mounting a wafer W thereon, a silica plate 8 for covering an upper opening of the processing container 4 in an airtight manner, a microwave supplier 50 for supplying a microwave in TE11 mode and a cylindrical waveguide 52 having one end connected to the microwave supplier 50 to extend toward the silica plate 8 and also having an interior waveguide space. The apparatus further includes a radial waveguide box 54 connected to the other end of the cylindrical waveguide 52. The radial waveguide box 54 is shaped to extend from the other end of the cylindrical waveguide 52 radially outward in the form of a flange and successively extend toward a lid body downward as a sidewall to define an interior waveguide space. The apparatus further includes a disc-shaped slot antenna 60 arranged along the silica plate 8 to cover an opening at the lower end of the radial waveguide box 54 and have a plurality of slots 101, a circularly polarized wave converter 56 disposed in the cylindrical waveguide 52 between the microwave supplier 50 and the radial waveguide box 54 to rotate the TE11-mode microwave provided from the supplier 50 about an axis of the cylindrical waveguide 52 and send the rotating microwave to the radial waveguide box 54.
Owner:TOKYO ELECTRON LTD +3

Inward zero-order Hankel leaky-wave antenna for near-field focusing

The invention provides an inward zero-order Hankel leaky-wave antenna for near-field focusing. The inward zero-order Hankel leaky-wave antenna comprises a radial waveguide. A circular metal plate is arranged inside the radial waveguide and divides the radial waveguide into upper and lower dielectric layers. The antenna feeds by means of a feed coaxial connector. The inner core of the feed coaxial connector supports the metal plate. The top of the inner core does not exceed the lower surface of the metal plate. A gap is arranged between the edge of the circular metal plate and the inner wall of the radial waveguide and forms an annular slit along the circumference of the radial waveguide. The surface of the upper dielectric layer of the radial waveguide is provided with an impedance surface structure. The inward zero-order Hankel leaky-wave antenna, by utilizing annular slit coupling, obtains an inwardly-propagated zero-order Hankel wave from a zero-order Bessel standing wave, and achieves radiation by using a leaky-wave mode. The designed Hankel leaky-wave antenna is small in size, can achieve design of any radial wave number k[rho] < k0, and has adjustable frequency so as to be changed in characteristic by adjusting the frequency.
Owner:UNIV OF ELECTRONICS SCI & TECH OF CHINA

Ku-frequency-range four-path radial waveguide power combiner

The invention discloses a Ku-frequency-range four-path radial waveguide power combiner which comprises a body, a base, a cover board and a probe. Four first waveguide ports are equidistantly arranged on the base in a circumferential direction. The top surface cover of the base is arranged on the base so that a first waveguide chamber is formed between the body and the base and the first waveguide ports can be communicated with the first waveguide chamber. The cover board covers the bottom surface of the body so that a second waveguide chamber is formed between the body and the cover board. The cover board is provided with a second waveguide port which is communicated with the second waveguide chamber. The bottom end of the probe is fixedly connected with the top surface of the base, and the bottom end successively penetrates through the first waveguide chamber and a central through hole on the body and extends into the second waveguide chamber. The probe is provided with a multi-step impedance conversion structure. The first waveguide ports and the second waveguide port are BJ140 standard waveguide ports. The Ku-frequency-range four-path radial waveguide power combiner has advantages of wide working frequency band, small insertion loss, high amplitude phase consistency, etc.
Owner:HUADONG PHOTOELECTRIC TECHN INST OF ANHUI PROVINCE

Non-diffractive beam direction adjustable reconfigurable Bessel antenna

The invention relates to the field of microwave antennas, solves the problem in the prior art that the beseel beam direction cannot be effectively regulated in real time under the fixed microwave frequency, and discloses a non-diffractive beam direction adjustable reconfigurable bessel antenna which comprises a radial waveguide, a coaxial feeder and a reconfigurable impedance surface structure andalso comprises adjustable devices arranged in the reconfigurable impedance surface structure. The reconfigurable impedance surface structure is a periodic patch structure. The reconfigurable impedance surface structure is divided into four reconfiguration quadrants. The adjustable devices are arranged between patch slots on the non-axis in the reconfiguration quadrants. The state of the adjustable device switches of different quadrants of the reconfigurable impedance surface structure is changed by designing the reconfigurable impedance surface structure and setting different bias voltage ofthe reconfiguration quadrants so as to realize real-time deflection of the beam direction. The reconfigurable impedance surface structure is simple and suitable for non-diffractive beam transmission in different directions of the near field so that the antenna can be widely used in wireless energy transmission, near-field detection, medical imaging, secret communication and other fields.
Owner:SICHUAN UNIV
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