The utility model provides a
wafer cassette internal
pollution detection device, and relates to the
wafer cassette detection device field, the
wafer cassette internal
pollution detection device comprises a pedestal, the upper end of the pedestal is connected with a side plate, the upper side of the pedestal is provided with a detection rack, the inner side of the side plate is slidingly connected with a detection
assembly, the detection rack comprises a fixed rack, the inner side wall of the fixed rack is provided with a limiting strip, and the limiting strip is connected with the detection
assembly. A groove plate is arranged on the upper side of the fixing frame, a measuring plate is slidably inserted into the upper end of the groove plate, a limiting plate is arranged at the top of the measuring plate, the detection
assembly comprises a lifting plate, the outer end of the lifting plate is connected with a mounting plate, and a dust
detector is mounted on the upper side of the mounting plate. And the outer end of the dust
detector is connected with a detection probe through a wire. According to the utility model,
pollution detection can be conveniently carried out on the surface of the slot on the inner side of the wafer box, and meanwhile, the appearance of the wafer box can be conveniently detected.