The application discloses a superconducting
quantum capacity
detector with large saturated power, which comprises a reference ground, a
coplanar waveguide transmission line, a superconducting
microwave resonator based on a
tantalum film and a single Cooper pair box based on aluminum, the superconducting
microwave resonator comprises a double
helix inductor and an
interdigital capacitor, the single Cooper pair box is connected to the
interdigital capacitor through
aluminum metal wires, the single Cooper pair box and the double
helix inductor are located on the same side of the
interdigital capacitor, and the single Cooper pair box is located above the double
helix inductor, so that the
detector unit is more compact, the space utilization is increased, and the number of pixels of a multi-pixel
focal plane detector array is increased; the gate
capacitor is designed in the shape of a
tuning fork, compared with an existing parallel wire structure, double
capacitance values can be obtained without increasing the volume of a superconducting island, the smaller the volume of the superconducting island is, the more significant the
quantum capacity effect of the
detector is, and the more obvious the response is, the larger the gate
capacitor is, and the larger the saturated power of the detector is, so that the saturated power can be increased without losing sensitivity.