The invention relates to an
electron cyclotron resonance (ECR)
plasma source having a linear
plasma discharge opening ( 9, 27, 28, 30 ), comprised of a
plasma chamber, inside of which a centered wave
distributor is provided, and having a multi-pole
magnetic field arrangement in the area of the linear plasma
discharge opening. The centered wave
distributor consists of at least two separate wave distributors ( 3, 4 ) that are placed inside a respective partial
plasma chamber ( 1, 2, 21, 22, 32, 23 ). A linear partial plasma
discharge opening ( 7, 8, 23, 24, 34, 35 ) and multi-pole
magnetic field arrangements ( 10, 11, 38, 39 ) are provided on each partial
plasma chamber ( 1, 2, 21, 22, 32, 23 ). The at least two linear plasma discharge openings ( 7, 8, 23, 24, 34, 35 ) are arranged with regard to one another in such a manner that, together, they form at least one plasma discharge opening ( 9, 27, 28, 30 ) of the ECR plasma source.