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Slotting-type freezing and solidifying grinding material polishing pad and preparation method thereof

A technology of consolidating abrasives and polishing pads, applied in the direction of grinding/polishing equipment, abrasives, grinding devices, etc., can solve the problems of uneven distribution of polishing stress, low removal rate, unsatisfactory polishing effect, etc., to overcome abrasive Spill, high utilization rate of abrasive, beneficial to environmental protection

Inactive Publication Date: 2012-02-01
NANJING UNIV OF AERONAUTICS & ASTRONAUTICS
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] The purpose of the present invention is to provide a slotted frozen fixed abrasive polishing pad and Its preparation method is to meet the current requirements of ensuring the polishing quality of workpieces and improving economic benefits.

Method used

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  • Slotting-type freezing and solidifying grinding material polishing pad and preparation method thereof
  • Slotting-type freezing and solidifying grinding material polishing pad and preparation method thereof
  • Slotting-type freezing and solidifying grinding material polishing pad and preparation method thereof

Examples

Experimental program
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Effect test

Embodiment 1

[0045] Such as figure 1 , 2 , 3, 4 shown.

[0046] A slotted frozen solidified abrasive polishing pad for polishing ultra-thin materials, made of 10kg nanometer CeO 2 (or nano-SiO 2 ) abrasive, 5kg of additives and 85kg of water (or hydrous ethanol) frozen. Before preparation, the three are mixed to form a polishing liquid with uniform dispersion and good suspension. It is then poured into polishing pad preparation molds and Figure 4The metal slotted mold shown was placed on top of the polishing solution in the polishing pad preparation mold, and then placed in a cryogenic chamber with the polishing pad preparation mold for 50 minutes and kept at -30° C. for 30 minutes. Then pour hot water on the bottom of the grooved mold to make it slightly heated and then pull it out gently, that is, to form a figure 1 The blind holes shown are 105 cm in diameter and 3 cm deep, the radial grooves are 20 mm deep and 5 mm wide, and the polishing pad is shaped like figure 1 , 2 sho...

Embodiment 2

[0053] A slotted frozen solidified abrasive polishing pad for polishing ultra-thin materials, made of 50kg nanometer CeO 2 (or nano-SiO 2 ) abrasive, 8kg of additives and 42kg of water (or hydrous ethanol) frozen. All the other are the same as the first embodiment.

Embodiment 3

[0055] A grooved frozen solidified abrasive polishing pad for polishing ultra-thin materials, made of 70kg nanometer CeO 2 (or nano-SiO 2 ) abrasive, 9kg of additives and 21kg of water (or hydrous ethanol) frozen. All the other are the same as the first embodiment.

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Abstract

The invention discloses a slotting-type freezing and solidifying grinding material polishing pad, which is characterized in that the center of one surface of a polishing pad, which is opposite to a processed workpiece, is provided with a blind hole (1); the periphery of the blind hole (1) is provided with a groove (2); the diameter d of the blind hole (1) is equal to e-r, wherein e in the formula is the eccentricity of the polishing pad, r is the radius of the polished workpiece, the value of the eccentricity is always 20-105mm, the depth of the blind hole (1) is 10-20mm, the depth of the groove (2) is 50-70% of the depth of the blind hole (1), and the width of the groove (2) is 5-10mm. In the slotting-type freezing and solidifying grinding material polishing pad, different types of grooves of different shapes are manufactured on the traditional freezing and solidifying grinding material polishing pad. Various groove shapes are formed mainly by the action of a slotting die. The polishing pad can be used for polishing and machining various thin workpieces, and is especially suitable for machining heat sensitive materials, soft materials, crystal materials and the like, has the advantages of low machining cost, high machining efficiency, strong technical control capability and the like, is simple to manufacture, is environmentally-friendly.

Description

[0001] This case is a divisional application filed on October 11, 2010 with the application number 2010105027820 and the title of the invention as "Slotted Frozen Solidified Abrasive Polishing Pad and Preparation Method thereof". technical field [0002] The invention relates to a frozen solidified abrasive polishing pad, in particular to a polishing pad with high polishing efficiency and good uniformity, specifically a grooved frozen solidified abrasive polishing pad and a preparation method thereof. Background technique [0003] As we all know, the traditional CMP (Chemical Mechanical Polishing) system is composed of three parts: a rotating workpiece holding device, a table carrying a polishing pad, and a polishing liquid (slurry) supply system. During polishing, the rotating workpiece is pressed against the polishing pad that rotates with the worktable with a certain pressure, while the polishing liquid composed of submicron or nanometer abrasives and chemical liquid flow...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B24D13/00B24D18/00
Inventor 左敦稳孙玉利祝晓亮朱永伟卢文壮李军曹连静张国家史晨红
Owner NANJING UNIV OF AERONAUTICS & ASTRONAUTICS
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