59 results about "Cold shield" patented technology

The invention relates to the technical field of fusion devices, and discloses a flange structure of a cold shield sector of a nuclear fusion device, the cold shield device and the nuclear fusion device, and the flange structure of the cold shield sector of the nuclear fusion device comprises a first panel; the second panel and the first panel are arranged at an interval; the flanging assembly is arranged between the first panel and the second panel and comprises a first flanging and a second flanging, the first flanging is connected with the first panel, the second flanging comprises a main body part and a flat plate part which are connected, the main body part is connected with the second panel, and the flat plate part is arranged at the ends, away from the second panel, of the main body part and the first flanging; the surface, opposite to the second panel, of the flat plate part is a polished surface; the connecting piece is connected with the first flange and the second flange in a fastening manner; and the first insulating part is arranged between the first flange and the second flange in an insulating manner. According to the flange structure of the cold shield sector of the nuclear fusion device, the heat shielding effect can be improved, and the heat radiation influence on low-temperature components is reduced.

The invention discloses a through hole cold wall vector magnet structure and a strong magnetic field terahertz near field measurement system, the through hole cold wall vector magnet structure comprises a vector magnet, the vector magnet is provided with a magnet through hole penetrating through the top and the bottom of the vector magnet, the vector magnet comprises multiple layers of shells which are sequentially spaced from outside to inside and coaxially sleeved, and the multiple layers of shells are all coaxial with the axis of the magnet through hole; an outer vacuum interlayer, a liquid nitrogen interlayer, a first vacuum interlayer and a second vacuum interlayer are sequentially formed among the multiple layers of shells. According to the invention, the through hole is formed in the vector magnet, enough space is provided for the internal unit of the sample cavity, the outer vacuum interlayer, the liquid nitrogen interlayer, the first vacuum interlayer, the second vacuum interlayer and the liquid helium cavity are arranged, and a multi-layer cold shield is formed by vacuumizing and liquid nitrogen injection, so that a cold wall is formed on the inner wall of the through hole of the magnet; therefore, a low-temperature basis is provided for an optical coupling scanning probe test system under multi-field regulation and control.

The invention provides a thermal radiation shielding assembly and a thermal radiation shielding system of a star imitator, the thermal radiation shielding assembly comprises a plasma container and a Dewar tank surrounding the periphery of the plasma container, and a first thermal radiation shielding part is arranged in an annular cavity formed between the plasma container and the Dewar tank; the first heat radiation shielding part is fixedly arranged on the periphery of the plasma container in a surrounding mode and comprises a cold pipe assembly, a first heat insulation assembly, a first cold shield assembly and a first supporting assembly; the cooling pipe assembly comprises a cooling pipe which surrounds and is attached to the peripheral wall of the plasma container to extend; the first heat insulation assembly extends around the plasma container, and the inner side surface of the first heat insulation assembly is attached to the peripheral wall of the cooling pipe assembly. The first cold shield assembly and the first heat insulation assembly extend around the plasma container at an interval; the first cold shield assembly is fixed to the outer wall of the plasma container through the first supporting assembly to form multiple heat radiation shielding layers, and high-temperature heat radiation from the plasma container can be isolated.

The invention relates to the field of particle accelerators, and provides a wire drawing device and a wire drawing method for a tension wire in a cold shield of a cryostat. The wire drawing device for the tension wire in the cold screen of the cryostat comprises a first bridging pipe, a second bridging pipe and an internal guide body, and the first bridging pipe and the second bridging pipe are inserted into the cold screen from the two opposite sides of a vacuum chamber of the cryostat respectively and connected with a tension wire instrument corresponding to the interior of the cold screen in a sleeved mode; the end, close to the second bridging pipe, of the first bridging pipe is provided with a first reducing section. Due to the fact that the inner diameter of the first reducing section is gradually increased in the direction close to the second bridging pipe, the end, close to the first bridging pipe, of the second bridging pipe can be easily inserted into the first reducing section, and the interior of the first bridging pipe and the interior of the second bridging pipe are communicated to form a wire guiding channel. Therefore, under the condition that the cover plate does not need to be opened, stable and lasting stretching of the linear reference can be rapidly achieved with high precision, the accuracy of deformation monitoring of the cryostat is ensured, and the experiment efficiency is improved.

The utility model relates to a cold shield of a low-temperature container. Comprising a barrel and a plurality of supporting assemblies. The barrel is arranged between the inner shell and the outer shell in a sleeving manner; the inner shell is used for containing a low-temperature medium, and vacuum is formed between the inner shell and the outer shell; each supporting assembly is arranged on the outer wall of the cylinder body; each supporting assembly comprises a bolt, two gaskets, a locking nut and a cylinder, a groove is formed in one end of each cylinder, and an internal thread is arranged in each groove; the wall face of the barrel is provided with through holes which correspond to the supporting assemblies one to one and allow the corresponding bolts to penetrate through, the two gaskets are arranged on the two sides of the wall face of the barrel respectively and fixed through the bolts and the locking nuts, and the cylinders are installed at the outer ends of the bolts in a screwed mode through the internal threads. The outer end of the bolt faces the side where the shell is located. The fixing structure is firm in fixing and low in heat leakage rate.

The invention relates to a far infrared photoelectric detector weak signal test system, which comprises a low-temperature refrigeration system, a first-stage cold head is connected with a vacuum Dewar and a low-temperature cold screen and maintains a low-temperature environment of the vacuum Dewar and the low-temperature cold screen, and a second-stage cold head cools an objective table and a detector to reduce thermal noise of the detector; the low-temperature cold shield wraps the secondary cold head and the objective table to form a thermal isolation layer, and external thermal radiation is blocked; a broadband far infrared optical filter is integrated at the position, right facing the objective table, of the low-temperature cold screen; according to the radiation source module, a vacuum Dewar is provided with an optical window; a blackbody radiation source is arranged right opposite to the optical window, and a radiation field is formed on the photosensitive surface of the detector at the objective table after the blackbody radiation source passes through the optical window and the broadband far infrared optical filter; according to the signal transmission link, the objective table is connected with the detector through a signal transmission cable; and a signal passes through the low-temperature cold shield and the vacuum Dewar and is connected to an upper computer. According to the invention, high performance, miniaturization and universality of far infrared weak signal testing are realized, and dependence on special facilities is broken through.

According to the low-temperature device provided by the invention, the first heat exchanger and the second heat exchanger are connected in series in the flowing path of the refrigerant by utilizing the characteristics that the refrigerating effect of the refrigerant is gradually reduced and the requirements of the first heat exchanger and the second heat exchanger on the refrigerant are different, and the cavity of the second heat exchanger forms an effect similar to a cold shield; the first heat exchanger and the second heat exchanger can be roughly cooled synchronously, heat exchange between the first heat exchanger and the external environment can be effectively weakened or even isolated in the cooling process, the cooling capacity of refrigerants can be fully utilized, and heat exchange between devices in the heat exchange assembly and the external environment can be automatically weakened in time along with the cooling process. And the cooling efficiency is greatly improved, so that the cooling capacity of the refrigerant is fully utilized.

The utility model belongs to the technical field of photovoltaic power generation, and discloses an anti-corrosion cold shield of evaporation equipment for preparing perovskite materials by a full-dry method, the evaporation equipment comprises an evaporation source, and perovskite material molecules are evaporated by the evaporation source. The anti-corrosion cold shield comprises a vacuum cavity, a cold shield plate, a cold shield plate fixing column, a vapor chamber, a low-temperature pump, a refrigerant pipe, a vapor chamber fixing column and a cold trap. The cold shield plate comprises a plate main body, the edge of the cold plate main body is provided with a bending part, and the bending part is bent towards the low-temperature pump. The low-temperature pump is protected through the anti-corrosion cold shield plate, maintenance of the low-temperature pump is reduced, cost is saved, and efficiency is improved.

The application discloses a cold shielding structure, a sample bearing unit and a method for using the cold shielding structure. The cold shielding structure comprises a cold shielding structure body, the cold shielding structure body comprises a mounting portion and heat sink portions located on opposite sides of the mounting portion, the mounting portion is used for mounting a carrier net, and the heat sink portions are used for guiding cold to the mounting portion. When the carrier net is mounted on the mounting portion, the temperature of the cold shielding structure body is lower than the temperature of the carrier net. Since the temperature of the heat sink portions is lower than the temperature of the mounting portion, the heat sink portions can absorb water molecules in an electron microscope barrel, so that the sample is prevented from being polluted by the water molecules. The thickness of the mounting portion is small, and the mounting portion is located between upper and lower pole shoes of the electron microscope, so that the distance between the upper and lower pole shoes of the electron microscope is reduced, the magnetic field intensity between the upper and lower pole shoes is increased, and the imaging resolution is ensured. Meanwhile, the heat sink portions with large thickness are located on the two sides of the mounting portion, so that the space between the upper and lower pole shoes is not occupied, the distance between the upper and lower pole shoes is further reduced, and the imaging resolution is ensured.

The present application relates to surface multilayer composite coating material reinforced heat conduction refrigeration type infrared detector Dewar nickel-based thin-wall cold shield and its preparation method, belong to refrigeration type infrared detector technical field. The method is that the nickel-based thin-wall cold shield with blackened inner surface is loaded into electron beam evaporation coating fixture; the electron beam evaporation coating equipment is pumped to high vacuum; when the vacuum degree of the electron beam evaporation coating equipment is greater than 1x10 ‑3 Pa, the surface of the thin-wall cold shield to be plated is baked at 200 DEG C; when the vacuum degree of the electron beam evaporation coating equipment is greater than 5x10 ‑4 Pa, the cold shield is cleaned by argon plasma; the nickel adhesion layer, copper heat conduction layer and silver heat conduction layer are plated on the surface of the cold shield in sequence; the present application does not significantly increase the heat mass of Dewar cold head on the basis of keeping the mechanical properties and thermodynamic properties of nickel-based thin-wall cold shield unchanged, can significantly enhance the heat conduction performance of the cold shield, speed up the heat transfer, and realize the rapid start of refrigeration type infrared detector.

The utility model relates to the technical field of vacuum equipment, in particular to a vacuum end structure for a low-temperature vacuum pump, which comprises a shell, a baffle, a first cold shield, a second cold shield, a first adsorption array and a second adsorption array, a required vacuum environment can be quickly realized for the low-temperature pump, and the stability of a vacuum state is ensured; by arranging the first cold shield and the second cold shield, namely a multi-stage cold shield structure, the influence of environmental heat radiation on condensation and gas adsorption of the adsorption array structure can be reduced, and the stability of a vacuum state is ensured; the baffle plate is arranged in the cold shield, so that adsorbed gas can be primarily adsorbed and condensed, meanwhile, direct impact of the gas on an adsorption array in the baffle plate can be reduced, and the service life is prolonged; by means of two-stage adsorption of the second adsorption array and the first adsorption array, the effective contact area of gas is increased, the influence of direct radiant heat of the vacuum chamber on the vacuum state is reduced, and the needed vacuum state is rapidly achieved; and meanwhile, assembly is convenient, and machining precision is reduced.

The application relates to an arc-shaped superconducting magnet system for proton acceleration, which comprises an arc-shaped superconducting magnet, an ultralow-temperature system and a magnet suspension system, wherein the arc-shaped superconducting magnet comprises a dipole magnet, two quadrupole magnets and a magnet fastening structure; the ultralow-temperature system comprises a vacuum container, a cold shield structure, a liquid helium container, a gas return pipe, a refrigerating unit and a cold conducting structure; the magnet suspension system comprises a liquid helium container pull rod assembly and a cold shield structure pull rod assembly; the arc-shaped superconducting magnet provides a magnetic field required by proton acceleration, the ultralow-temperature system is used for providing a stable ultralow-temperature environment for the superconducting magnet, and the magnet suspension system keeps the arc-shaped superconducting magnet in a stable spatial physical position; the three are combined to form a complete arc-shaped superconducting magnet system suitable for proton acceleration; the application has the advantages of small volume, light mass, low operation cost, safer radiation protection and the like.

The application provides an online in-situ low-temperature high-pressure ultrafast spectroscopy device, a system and a method thereof. The high-pressure device comprises a cold shield with an optical window, a metal ring, a gasket, a first pressurized air bag, a second pressurized air bag, a pressurized metal column, a diamond anvil cell, a first temperature sensor, a second temperature sensor, a heat-conducting base, a cryostat and a gas pressure controller. The online in-situ pressure calibration and imaging system comprises a continuous light laser, the high-pressure device, online in-situ pressure optical components and an online in-situ pressure imaging system. The low-temperature high-pressure ultrafast pump-probe system comprises a femtosecond laser, the online in-situ pressure calibration and imaging system, pump-probe optical components and a pump-probe imaging system. The application realizes temperature regulation at 6-325K under high pressure with double air bag pressure regulation, realizes online in-situ free pressure regulation at low temperature, and realizes continuous regulation with an accuracy of 0.1GPa in the pressure range of 0-80GPa, and realizes online in-situ low-temperature high-pressure ultrafast spectroscopy and ultrafast dynamics measurement.

The invention relates to an infrared detector cold shield, a cold shield assembling device and a manufacturing method of the cold shield, and relates to the technical field of infrared detectors, the infrared detector cold shield comprises an assembling tool and a pressing block, when multiple cold shield layers are assembled, the multiple cold shield layers are arranged between the assembling tool and the pressing block, the assembling tool comprises a positioning column, a supporting block and a plurality of limiting blocks, the supporting block and the multiple limiting blocks are arranged on the positioning column in a sleeving mode, and the supporting block, the multiple limiting blocks and the positioning column are located on the same axis. When the multiple cold shield layers are assembled, the positioning columns and the multiple limiting blocks are all embedded into light through holes of the cold shield layers, and the supporting blocks are used for supporting the cold shield layers and are matched with the pressing blocks to press the multiple cold shield layers. The multiple cold shield layers are rapidly assembled through the assembly tool and the pressing blocks, and the assembly difficulty of a traditional assembly mode is reduced; each cold shield layer is integrally formed in a stamping mode, the multiple cold shield layers are connected in a fastened mode through the cold shield assembling device, and the assembling efficiency is improved.

This infrared radiation detector comprises: - a cryostat provided with a cold finger, capable of ensuring heat exchange with a cold source, and a window transparent to the infrared radiation to be detected; - a cold plane, mechanically fixed to and in a heat exchange relationship with the cold finger; - a detection block comprising at least one detection matrix sensitive to the infrared wavelength range to be detected, and in a heat exchange relationship directly or indirectly with the cold plane; - a cold shield mechanically fixed to and in a heat exchange relationship with the cold plane and capable of limiting parasitic radiation, the cold shield being provided with at least one diaphragm or baffle (9), oriented radially with respect to the overall orientation of the detector, and provided with an opening capable of allowing the transit of the optical path resulting from the incident radiation. The free edge (13) of the at least one diaphragm or baffle (9) is structured such that non-linear patterns (14) are defined.

The present invention relates to a sample chamber for a liquid helium temperature scale platform. Among them, the liquid helium temperature scale platform includes: the sample chamber, a cryogenic dewar, a cryogenic temperature control system, and a superconducting magnet system. The sample chamber is used to realize the replacement of samples without shutting down under a background magnetic field. The sample chamber includes a cavity and a sample rod. The cavity is installed at the center of the top cover and is connected to the cold shield through a heat sink thereon. The cavity extends downward to the heater. The sample rod is inserted into the sample chamber, and a sample holder is installed at the bottom. The superconducting magnet system is hoisted around the sample holder to generate a background magnetic field. Among them, the sample chamber is a closed cavity and isolates the vacuum environment of the superconducting magnet system, providing an independent vacuum space for the calibration of sensor samples, so that the replacement of samples does not affect the normal operation of the superconducting magnet system, and improves the efficiency of temperature sensor calibration.

The invention discloses a supporting device for a cold shield plate of a star imitator, a cooling shield assembly and the star imitator, the supporting device comprises a supporting assembly and a cold shield plate mounting assembly which are detachably and fixedly connected, and the cold shield plate mounting assembly is fixedly connected to the cold shield plate. The supporting assembly comprises an expansion part and a supporting part, the supporting part is fixedly installed on one side of the container wall of the heat radiation container, the inner ring of the expansion part abuts against the outer wall face of the supporting part, and the outer ring of the expansion part abuts against the inner wall face of the cold shield plate installation assembly. The expansion component can abut against the supporting component and the cold shield plate mounting assembly and is in an expansion state, when the expansion component is in the expansion state, the inner ring of the expansion component deforms and abuts against the side, facing the outer wall face of the supporting component, of the inner ring, and the outer ring of the expansion component deforms and abuts against the side, facing the inner wall face of the cold shield plate mounting assembly, of the outer ring. The supporting device can stably and conveniently fix and support the cold shield plate on one side of the wall of the heat radiation container.

The application belongs to the technical field of mechanical manufacturing, and discloses a special-shaped cold screen suitable for a low-temperature refrigerator, which comprises an outer cover, a filter is arranged on the top of the outer cover, a cold head is arranged in the inner cavity of the outer cover, a special-shaped cold screen body and a sensor chip are fixedly installed on the top surface of the cold head, a vacuum cover is arranged at the lower end of the outer cover, an air extraction interface is arranged at the lower end of the vacuum cover, and a flange and a lead ring are fixedly installed in sequence at the upper end of the outer wall of the outer cover. Through cooperation of the cold head, the sensor chip and other structures, the special-shaped cold screen is directly fixed on the cold head of the low-temperature refrigerator, part of cold energy is conducted to the special-shaped cold screen through heat transfer, the temperature of the special-shaped cold screen is reduced, the signal interference of thermal radiation on the sensor chip is reduced, the black body on the inner surface of the shell absorbs stray radiation energy reflected from the surface of the sensor chip, and the influence of stray radiation energy on the signal of the sensor chip is reduced.

The application discloses a vacuum chamber cold screen assembling method, and belongs to the technical field of fusion reactors. The assembling method comprises the following steps: conveying an inner sector to a first mounting position through a sector pre-assembly tool, pausing and detecting the appearance position of the inner sector multiple times during the conveying, and fixing the inner sector when the distance between the inner sector and a ring petal meets the standard; conveying an outer sector to a second mounting position through the sector pre-assembly tool, pausing and detecting the appearance position of the outer sector multiple times during the conveying, fixing the outer sector when the distance between the outer sector and the ring petal meets the standard, and connecting the outer sector with the inner sector, wherein the second mounting position is determined based on the first mounting position; hoisting a window section to a third mounting position and connecting the window section with the outer sector, wherein the third mounting position is determined based on the second mounting position; hoisting a cover plate to a fourth mounting position and connecting the cover plate with the outer sector and the window section, wherein the fourth mounting position is determined based on the second mounting position and the third mounting position. The design improves the assembling precision of the cold screen and reduces the risk of collapse deformation.

The invention discloses an optimal design method for a low-temperature transmission pipeline support and electronic equipment, and relates to the technical field of heat transfer. The optimization design method for the low-temperature transmission pipeline support comprises the following steps: determining a first design parameter of a support structure and a second design parameter of a heat conduction path; a three-dimensional thermosetting coupling model of the low-temperature transmission pipeline is established based on the cold shield, the first design parameters and the second design parameters, and grid encryption is conducted on the contact portions of the supporting structure and the multiple inner pipes and the multiple outer pipes; carrying out thermosetting coupling numerical simulation by taking the temperatures of the plurality of inner pipes and the temperature of the outer pipe as boundary conditions to obtain a stress result of the supporting structure and inner pipe heat leakage of the low-temperature transmission pipeline; and adjusting the first design parameter and the second design parameter according to the stress result and the heat leakage of the inner pipe until the stress result and the heat leakage of the inner pipe meet preset requirements. According to the method, the systematic design of the low-temperature transmission pipeline support is realized, the design precision is high, and the loss of the low-temperature medium in the transmission process can be reduced.

This invention provides a split-type cold screen for an infrared detector and its assembly method. The split-type cold screen for the infrared detector includes a cold screen body and matte fins. The assembly method includes: applying a black coating to both the cold screen body and the matte fins, pre-baking them, then initially assembling the pre-baked cold screen body and the matte fins, and finally baking the pre-assembled cold screen to complete the assembly. This invention places the cold screen assembly step after pre-baking and before baking, using the bonding force of the black coating to connect the cold screen body and the matte fins. This eliminates the adhesive bonding step in the split-type cold screen assembly process, solving the problem of using adhesives to bond the cold screen body and matte fins in the split-type cold screen assembly process. This ensures good mechanical reliability of the cold screen assembly in low-temperature vibration environments and also improves the performance of the detector components and the efficiency of the cold screen assembly process.

The invention relates to a vertical measurement Dewar with low heat leakage. Comprising an outer cylinder, an inner cylinder, a flange plate and a cold shield, the inner cylinder body is coaxially arranged in the outer cylinder body, the top of the inner cylinder body is connected with the top of the outer cylinder body through the flange plate, and the inner cylinder body is used for containing low-temperature liquid; the cold shield is arranged between the inner barrel and the outer barrel, and the top end of the cold shield is in sealed connection with the outer wall of the inner barrel in a preset height range through a partition assembly; the preset height range is located between the flange plate and the highest liquid level of the low-temperature liquid, and the temperature of the inner barrel at the connecting position is larger than that of the cold screen; the bottom end face of the flange plate is vertically connected with a plurality of hanging rods, the upper portions of the hanging rods are provided with a plurality of layers of radiation baffles, the bottom ends of the hanging rods are connected with an object to be measured, and the object to be measured is soaked in the low-temperature liquid. The device is low in heat leakage, and can provide a low-temperature environment for a to-be-measured object.

The invention provides a cryostat and a temperature control method thereof, and the cryostat comprises a vacuum cover which comprises a lower housing and an upper housing which are detachably connected; the cold shield comprises a first-stage cold cavity and a second-stage cold cavity which are tightly contacted from bottom to top; the cold shield is arranged in the vacuum cover; a placing table for bearing a to-be-tested product is arranged at the bottom in the second-stage cold cavity; and a refrigerating device for refrigerating the cold screen is arranged in the first-stage cold cavity. The vacuum cover is divided into the lower shell and the upper shell which are detachable, so that when a to-be-tested product is replaced, only the upper shell needs to be taken down, and the carrying weight is effectively reduced; the cold screen is divided into the first-stage cold cavity and the second-stage cold cavity, and the refrigerating device is placed in the first-stage cold cavity and refrigerates the second-stage cold cavity, so that the placing table in the second-stage cold cavity can accommodate more to-be-tested products, the temperature in the second-stage cold cavity cannot change suddenly, the to-be-tested products cannot be damaged, and the quality of the to-be-tested products is improved. The problem that the efficiency is low when a low-temperature thermostat is used for testing a photosensitive sensor chip in the prior art is solved.

The invention relates to a cold shield structure with a secondary cooling function and a low-temperature liquid pressure container, and belongs to the technical field of low-temperature liquid pressure containers. The cold shield structure is arranged in a vacuum heat insulation layer space between a shell and an inner container of the low-temperature liquid pressure container and comprises a first cold shield arranged on the outer surface of the inner container in a sleeving mode and a primary cooling pipeline, and an inlet of the primary cooling pipeline is communicated with low-temperature liquid in the inner container. The second cold screen is arranged on the outer surface of the first cold screen in a sleeving mode, and an air inlet of the vortex generator is connected with an outlet of the primary cooling pipeline through an air inlet pipe; an inlet of the secondary cooling pipeline is connected with a cold air exhaust pipe of the vortex generator through an air outlet pipe, and an outlet of the secondary cooling pipeline is communicated with the external environment or a low-pressure pipeline. The double-layer cold shield structure forms two heat insulation barriers in the vacuum space between the shell and the inner container, and radiation heat transfer between the inner barrel and the shell can be effectively reduced.

The present invenon relates to a single-photon detector (2000, 3000, 4000, 5000) comprising a package (1300) defining a closed volume (V), a cooler (1200, 1210), detecng means (1100), posioned within the closed volume (V) and configured to detect photons emied from an opcal fiber (1400), and a cold shield (2500, 3500), posioned within the closed volume (V), wherein the detecng means (1100) are posioned within the cold shield (2500, 3500).

The application discloses a support device for a cold shield plate of a star simulator, a cooling shield assembly and the star simulator. The support device comprises a support assembly and a cold shield plate mounting assembly which are detachably fixedly connected, and the cold shield plate mounting assembly is fixedly connected to the cold shield plate. The support assembly comprises an expansion component and a support component, the support component is fixedly installed on one side of a wall of a heat radiation container, the inner ring of the expansion component abuts against the outer wall surface of the support component, and the outer ring abuts against the inner wall surface of the cold shield plate mounting assembly. The expansion component can be tightly abutted against the support component and the cold shield plate mounting assembly respectively and is in an expanded state. When the expansion component is in the expanded state, the inner ring of the expansion component deforms and tightly abuts against the outer wall surface of the support component, and the outer ring of the expansion component deforms and tightly abuts against the inner wall surface of the cold shield plate mounting assembly. The support device can stably and conveniently fix and support the cold shield plate on one side of the wall of the heat radiation container.

This invention discloses a high-vacuum low-temperature chamber, including a cavity, a sample stage located within the cavity, and further including a cold source module, a heat flow distribution module, a temperature equalization module, and a vacuum and cold shield module. The cold source module includes an external liquid nitrogen tank, a gas-liquid separation buffer tank, and a multi-channel solenoid valve array. The heat flow distribution module includes a multi-channel thermal diode, multiple thermal switches, and N temperature sensors for recording temperature response curves. Each channel of the multi-channel thermal diode is composed of a high thermal conductivity graphene film, with one end connected to the cold source and the other end connected to different areas of the sample stage. Each channel has a thermal switch based on a thermally induced phase change material. The temperature equalization module uses a high thermal conductivity graphite plate to ensure that heat can rapidly diffuse laterally once it enters the sample stage. The vacuum and cold shield module is a heatable regenerable cold shield with independent temperature control. Through online identification and rolling optimization, accurate tracking of the temperature trajectory is achieved without repeated manual parameter tuning, and it has adaptive capabilities.

The present invention provides a low-temperature thermostat and its application. The low-temperature thermostat includes a liquid inlet pipe, a liquid inlet port, an air return pipe, an air outlet port, a cold head, a cold end heat exchanger, a flexible connecting wire, a sample stage, a temperature measuring and controlling instrument, a cold shield, and a vacuum shell. The liquid inlet pipe and the air return pipe are made of round tubes, and the positional relationship between the two is concentric. A gap sandwich is formed between the liquid inlet pipe and the air return pipe. At the same time, the liquid inlet pipe, the air return pipe, the cold end heat exchanger, and the cold head form a closed gas circuit. A layer of cold shield is fixed on the periphery of the return pipe to reduce heat leakage and improve heat exchange efficiency. A flexible connecting wire connects the cold head and the sample stage to ensure rapid transfer of cold and free movement of the sample stage, thereby expanding its application scenarios. An electric heating wire and thermal insulation material are arranged on the periphery of the tail end of the return pipe to prevent condensation and frost on the surface from affecting the service life and stability. The low-temperature thermostat can be used for temperature control of the sample stage of a scanning electron microscope.

The invention belongs to the technical field of semiconductor epitaxy, and particularly relates to a cold shield structure applied to molecular beam epitaxy equipment, a cold shield is provided with a cold shield inner shell and a cold shield outer shell, and liquid nitrogen is filled between the cold shield inner shell and the cold shield outer shell; an opening A communicating with the interior of the cold shield inner shell is formed in the top of the upper end closing-in structure, and an opening B communicating with the interior of the cold shield inner shell is formed in the bottom of the lower end closing-in structure; the size of the middle waisted structure is gradually increased from the middle to the upper end and the lower end, multiple sets of beam passing holes are evenly formed in the positions, above the minimum inner diameter of the middle of the middle waisted structure, in the cold shield and the outer shell in the circumferential direction, each set comprises an inner beam passing hole and an outer beam passing hole, and the beam passing holes are formed in the cold shield and the outer shell respectively. The two beam passing holes in each group are sealed; a beam source furnace is mounted on the cavity on the outer side of the middle waisted structure, and an outlet of the beam source furnace corresponds to any group of beam passing holes. The device has a larger surface area, the condensation and adsorption effects on impurities are stronger, and the vacuum degree of the device is improved.

The invention relates to the technical field of fusion equipment, and discloses a cryopump, comprising: a housing having an air inlet end and a mounting end which are oppositely arranged in the axial direction of the housing, the housing being internally provided with a cavity, the air inlet end being provided with an air inlet, the mounting end being provided with a dismounting port, the air inlet and the dismounting port being both communicated with the cavity; the adsorption assembly is detachably connected with the mounting end, the disassembly and assembly opening is sealed and covered with the adsorption assembly, and at least part of the adsorption assembly is located in the cavity; the cold screen is arranged between the adsorption assembly and the shell; the radiation baffle is arranged between the cold shield and the adsorption assembly; the cooling pipe penetrates through the mounting end and is connected with the cold shield and the radiation baffle; the valve is movably connected with the shell, the air inlet can be sealed by the valve, and the valve is suitable for being driven by a driving device outside the cavity. The adsorption assembly of the cryopump is large in adsorption area and has the advantages of being good in adsorption effect and long in service life.