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245 results about "Cryogenic temperature" patented technology

The cryogenic temperature range has been defined as from −150 °C (−238 °F) to absolute zero (−273 °C or −460 °F), the temperature at which molecular motion comes as close as theoretically possible to ceasing completely.

Multifunctional integrated gas control system for dilution refrigerator

The invention discloses a multifunctional integrated gas control system for a dilution refrigerator, and particularly relates to the field of refrigeration and low-temperature engineering, which comprises a liquid nitrogen cold trap, a gas buffer tank, an integrated valve box, a dilution refrigeration internal circulation pipeline, a diaphragm compressor, a roots pump, a turbo molecular pump and a vacuum suction pump set. According to the system, a highly-integrated valve box module is used and is responsible for implementing gas circuit control on different stages such as dilution refrigeration cycle starting, operation and shutdown rewarming; according to the invention, conductance optimization and heat loss reduction are carried out on gas paths with different temperature zones and different pressures, high air tightness of a full temperature zone from room temperature to extremely low temperature is ensured, the reliability and the automation degree of the dilution refrigerating machine are improved, and very positive significance is provided for practicability of a dilution refrigerating system.
Owner:SHANGHAI BOYUE REFRIGERATION TECH CO LTD

Installation and a method for cooling a fluid to cryogenic temperature

The invention relates to an installation for producing liquefied gas comprising a circuit for supplying feed gas, a set of heat exchangers, a refrigerator for cooling some or all of the set of heat exchangers, the supply circuit comprising, between the set of heat exchangers and the downstream end thereof, a final expansion turbine for expanding the feed gas in liquid state, the supply circuit comprising a bypass line of the final expansion turbine fitted with a first expansion valve, a second expansion valve disposed in series upstream or downstream of the first expansion valve and of the final expansion turbine, an additional heat exchange line designed to exchange heat with a heat exchanger of the set of heat exchangers when the feed gas is expanded by the first expansion valve via the bypass line, the additional heat exchange line carrying out this heat exchange with said heat exchanger between the expansion carried out by the first expansion valve and the expansion carried out by the second expansion valve, the additional heat exchange line being located upstream or respectively downstream of the expansion carried out by the first expansion valve.
Owner:LAIR LIQUIDE SA POUR LETUDE & LEXPLOITATION DES PROCEDES GEORGES CLAUDE

Cryogenic semiconductor structure and method for operating the same

PCT designated stage expiredWO2025017243A1TransistorMOSFETSemiconductor structure
The present disclosure relates to a cryogenic (MOSFET-like) semiconductor structure configured for low-dissipation high-speed operation at cryogenic temperatures. The structure is characterized by an overlapping multi-gate configuration in which a first gate electrode is arranged between a second gate electrode and a conductive channel formed under a surface portion of a dielectric substrate between spaced-apart n-doped and / or p-doped first and second regions. The first gate electrode is embedded in a dielectric layer covering the surface portion, while the second gate electrode may be either provided on the dielectric layer or also embedded in the dielectric layer above the first gate electrode. The first gate electrode is configured to partly overlap the surface portion, while the second gate electrode is configured to (at least partly) overlap the first gate electrode and (at least partly) overlap the surface portion on either side of the first gate electrode.
Owner:SEMIQON TECH OY

Plant and method for producing hydrogen at cryogenic temperature

Plant and method for producing hydrogen at cryogenic temperature, comprising: an electrolyzer; a hydrogen circuit to be cooled, comprising an upstream end connected to the hydrogen outlet and a downstream end to be connected to a member for collecting cooled and / or liquefied hydrogen, the plant also comprising a set of heat exchanger(s) in heat exchange with the hydrogen circuit to be cooled, the plant comprising at least one cooling device in heat exchange with at least a portion of the set of heat exchanger(s), the plant further comprising an oxygen circuit comprising an upstream end connected to the oxygen outlet and a downstream end, the oxygen circuit comprising a system for expanding the oxygen stream and at least one heat exchange between the expanded oxygen stream and the hydrogen circuit to be cooled, characterized in that the oxygen circuit comprises at least one oxygen compressor arranged upstream of the oxygen stream expansion system, the oxygen stream expansion system comprising an expansion turbine and in that said expansion turbine and said compressor are coupled to the same rotating shaft to transfer expansion work from the pressurized oxygen stream to the compressor in order to compress the oxygen stream upstream of the turbine.
Owner:LAIR LIQUIDE SA POUR LETUDE & LEXPLOITATION DES PROCEDES GEORGES CLAUDE

Systems and methods for performing response testing at low temperatures

Systems and methods are directed toward low temperature testing of motion, vibration, or force responses of test fixtures. For cryogenic shock testing, a test object can be secured on a test apparatus, such as a test fixture of a shock table. An elongated enclosure, such as a flexible tube, can be connected between the test fixture and a laser vibrometer, positioned orthogonal to a surface normal at a test region of the test fixture to enable light emitted by the vibrometer to be reflected from the test region back to the vibrometer. A flow of purge gas can be introduced into the tube, proximate the test fixture, to direct moisture away from the test fixture. The flow can prevent condensation or ice from forming on the surface of the test fixture at the cryogenic temperature. A shock event can be simulated, and the response of the test region measured by the laser vibrometer. The impact of the shock event on the test object can then be observed.
Owner:BLUE ORIGIN MANUFACTURING LLC

Temperature sensor based on negative resistance temperature coefficient film and preparation method

The invention provides a temperature sensor based on a negative resistance temperature coefficient film and a preparation method, and the method comprises the steps: depositing the negative resistance temperature coefficient film on a substrate as a temperature sensitive film of the sensor, and adjusting the stress level of the negative resistance temperature coefficient film, regulating and controlling the phase change degree and the conductivity of the negative resistance temperature coefficient thin film to realize regulation and control of the temperature sensing characteristic of the negative resistance temperature coefficient thin film so as to obtain a target negative resistance temperature coefficient thin film; and processing the negative resistance temperature coefficient film through an MEMS technology to obtain a target temperature sensor. By regulating the stress level in the negative resistance temperature coefficient thin film, the high-sensitivity temperature zone of the temperature sensor based on the negative resistance temperature coefficient thin film can be regulated in a range from deep hypothermia to room temperature, the temperature range of the high-sensitivity sensing temperature zone of the temperature sensor is widened, and the stability of the temperature sensor can be ensured.
Owner:SHANGHAI JIAOTONG UNIV

Cryogenic system including integrated cryocooler and dilution refrigerator

There is provided a regenerative cryogenic system comprising a pulse tube assembly comprising one or more stages configured to generate cryogenic temperatures below 4.2 Kelvin, one or more flanges configured to provide vacuum interface or thermalization, the one or more flanges coupled to the pulse tube assembly, and a still pumping line integrated with the one or more of the flanges, the still pumping line configured to provide a flow path for still gas of a dilution refrigerator.
Owner:MAYBELL QUANTUM IND INC

Isotope separation system and isotope separation method

The invention provides an isotope separation system and an isotope separation method.The isotope separation system comprises a cryogenic temperature and pressure swing adsorption device, the cryogenic temperature and pressure swing adsorption device comprises at least two adsorber units, each adsorber unit comprises a liquid nitrogen container and an adsorber, and in each adsorber unit, the liquid nitrogen container is communicated with the adsorber; the adsorber is soaked in the liquid nitrogen in the liquid nitrogen container; the adsorber comprises a pipe wall, the material of the pipe wall comprises a first material, the constant volume heat capacity Qvh of the unit length of the pipe wall is larger than a first preset value, and the wall thickness D of the pipe wall is 0.5-8 cm; a modified Nusselt criterion # imgabs0 # related to the material and thickness of the tube wall is controlled to be within a predetermined range. The problems of low isotope separation efficiency, poor regeneration effect, high liquid nitrogen consumption and high energy consumption in the prior art are solved, and the cyclic utilization rate of the adsorbent and the heavy component isotope recovery rate are remarkably increased.
Owner:SHANGHAI MORISEAL NEW MATERIAL TECHNOLOGY CO LTD

Microsecond melting and revitrification of cryo samples with a correlative light electron microscopy setup

PendingUS20250052992A1Electric discharge tubesMicroscopesMicroscopic observationPhotoelectron microscopy
An apparatus for observing dynamic systems by time-resolved microscopy has an optical microscope including a cryo stage for receiving a cryo sample and maintaining the cryo sample at a cryogenic temperature, a heating system configured to temporarily heat at least a portion of the cryo sample such that the portion of the cryo sample melts to a liquid state, temporarily resides in the liquid state, and then revitrifies, and an image detector associated with the optical microscope for detecting magnified images of the cryo sample generated by the optical microscope. Detected images may be recorded and analyzed to inform on-the-fly adjustment of heating power level delivered to the cryo sample. In a correlative light-electron microscopy method, the revitrified cryo sample is observed using an electron microscope.
Owner:ECOLE POLYTECHNIQUE FEDERALE DE LAUSANNE (EPFL)

Cryogenic system including integrated cryocooler and dilution refrigerator

There is provided a regenerative cryogenic system comprising a pulse tube assembly comprising one or more stages configured to generate cryogenic temperatures below 4.2 Kelvin, one or more flanges configured to provide vacuum interface or thermalization, the one or more flanges coupled to the pulse tube assembly, and a still pumping line integrated with the one or more of the flanges, the still pumping line configured to provide a flow path for still gas of a dilution refrigerator.
Owner:MAYBELL QUANTUM IND INC

Wearable thermal conditioning systems

A wearable garment, such as a vest, for providing thermal conditioning, for example cooling and / or heating, to a user. The vest may be used with cryogenic temperatures. Peltier devices, pre-charged nitrogen canisters, or miniature Stirling cryocoolers may be mounted and built into the wearable or externally carried or mounted thereto. A pump, such as a vacuum diaphragm pump, causes thermally conditioned air to flow through a series of porous regenerative tubing and / or porous panels to supply conditioned air to a user of the garment. The system may use a cryocooler having a pulsating cold finger. The cryo embodiments may supply −200° C. gas through the panels or tubing. Portable systems can be carried or attached, such as HVAC, refrigeration, heating or the like. Control systems may regulate the temperature and may be adjusted by a user, for example using an input pad or a mobile device.
Owner:WEARABLE THERMAL CONDITIONING SYSTEMS LLC

Method for the manipulation of halogen perovskite microstructures with laser and electric field at cryogenic temperatures

The application provides a method for regulating halogen perovskite microstructure at a frozen temperature by using a laser and an electric field, and relates to a device, which is a customized TEM in-situ sample rod equipped with a laser optical fiber and a liquid nitrogen Dewar bottle, and a Nd:YAG pulse laser system with a wavelength of 532 nm, adjustable pulse frequency and a pulse duration of 7 ns coupled into a transmission electron microscope through the optical fiber; first, at a frozen temperature, perovskite nanocrystals are etched by controlling the energy, frequency and action time of the pulse laser, then at the frozen temperature, the small crystal nucleus rotation of the perovskite nanocrystals is controlled by using a low-energy pulse laser and applying an electric field, and the perovskite nanocrystals are recrystallized along specific crystal faces, so that perovskite nanocrystals with specific exposed surfaces, reduced microstructure defects and increased radiation resistance are obtained, and the method has great value for large-scale industrial production.
Owner:SUZHOU NANXIAOHE TECH CO LTD

Method for Thermal Processing Bullets

A method for thermal processing bullets to reduce adhesive stress, the method includes obtaining one or more bullets configured to be propelled down a gun barrel, disposing the one or more bullets within a chamber having a temperature gradient between ambient temperature and cryogenic temperature, the chamber having a plurality of temperature zones, moving the one or more bullets between the plurality of temperature zones of the chamber, and returning the one or more bullets to the ambient temperature to reduce adhesive stress between the bullets and the gun barrel.
Owner:LAW OFFICE OF JERRY JOSEPH PLC

Apparatus and method for generating cryogenic temperatures and use thereof

The invention relates to an apparatus (112) and to a method (210) for generating cryogenic temperatures. The apparatus (112) comprises at least one cooling stage (111) which has a cold region (110) and a warm region (116), and a refrigerant mixture designed specifically for the cooling stage (111) is provided in the warm region (116), the refrigerant mixture having at least two components each having a different boiling temperature, and the cold region (110) comprises at least one cooling stage (111): —a first heat exchanger (122), which has a high-pressure side (120) to receive the refrigerant mixture at a high-pressure level from the warm region (116) of the cooling stage (111) and a low-pressure side (126) to deliver the refrigerant mixture to the warm region (116) of the cooling stage (111); —a first expansion device (136), which is designed for expansion and for cooling of the refrigerant mixture at a low-pressure level; —a second heat exchanger (148), which is designed for cooling and for partial condensation of a proportion of the refrigerant mixture located in a buffer volume (140), the buffer volume (140) being designed to limit the pressure exerted by the refrigerant mixture; and —a second expansion device (150), which is designed for separation of the buffer volume (140) from the low-pressure level of the cooling stage (111) or connection of the buffer volume (140) to said low-pressure level. The invention enables autonomous operation of the apparatus (112) and of the method (210) for generating cryogenic temperatures, in which each cooling stage (111) of the apparatus (112) can be filled with a pre-defined refrigerant mixture and can be permanently operated, and in particular in the cooling phase the refrigerating capacity can be increased, while incorrect distribution of the refrigerant of the relevant cooling stage (111) among parallel flow channels at the cold end of the first heat exchanger (122) can be prevented.
Owner:KARLSRUHER INST FUR TECH

Cryogenic heat treatment method for reducing elastic hysteresis of 40CrNiMo alloy

The invention discloses a cryogenic heat treatment method for reducing elastic hysteresis of 40CrNiMo alloy, which comprises the following steps of: (1) quenching the 40CrNiMo alloy at the quenching temperature of 850 DEG C, preserving heat for 1 hour, and cooling to room temperature by adopting a 10% PAG solution; (2) the quenched 40CrNiMo alloy is subjected to tempering treatment, the tempering temperature ranges from 400 DEG C to 600 DEG C, heat preservation is conducted for 3 h, and after heat preservation is completed, air cooling is conducted to the room temperature; and (3) the tempered 40CrNiMo alloy is subjected to subzero treatment, the subzero temperature ranges from-180 DEG C to-196 DEG C, the heat preservation time ranges from 12 h to 24 h, and then the temperature is naturally increased to the room temperature. According to the method, conventional quenching and tempering processes are combined with subzero treatment, so that the elastic lag of the 40CrNiMo alloy steel is effectively reduced.
Owner:THE 704TH RES INST OF CHINA STATE SHIPBUILDING CORP

Method and device for storing human DNA using the minus 196° temperature in space

The invention relates to a vessel for the long-term storage of DNA in space at a constant temperature of -196 °C. The aim is to protect biological samples – especially DNA – for decades to centuries from the extreme environmental conditions of space, including vacuum, intense radiation, extreme temperature fluctuations and mechanical stresses. The vessel has a three-layered structure: 1. Inner chamber made of boron nitrogen nanotubes (BNNTs) that offer outstanding protection against cosmic radiation, high mechanical strength, chemical inertness and temperature resistance. 2. Middle insulating layer made of aerogel that minimizes heat exchange and keeps the cryogenic temperature constant. 3. Outer protective layer made of titanium, which protects against micrometeorites, It protects against physical impacts and corrosion. Technical advantages: • Long-term stability of DNA through consistently low temperatures. • Effective radiation protection against cosmic and solar radiation. • Excellent thermal insulation thanks to aerogel. • Mechanical robustness due to titanium. Areas of application: • Securing and archiving genetic material for research, space travel and long-term preservation. • Provision of DNA for future scientific or biological restoration projects. Special feature: The capsule is compact, space-compatible, and can be used as part of space missions, space stations, or interplanetary projects.
Owner:ALIENWORKS SA

Extremely low temperature environment obtaining device for inert mixed gas

The invention discloses an extremely low temperature environment obtaining device for inert mixed gas. Comprising a compressor, a helium pipe, a refrigerating machine, a low-temperature temperature sensor, a heat insulation sleeve, a cooling cavity, a cooling vacuum valve, a pressure measuring cavity, a full-scale vacuum gauge, a gas mixing cavity, a gas extraction vacuum valve, a ventilation vacuum valve, a gas outlet vacuum valve, a molecular pump set, a mass flow controller, a connecting pipe and a gas cylinder. The low temperature obtaining device provided by the invention is high in reliability, easy to operate and relatively low in cost. The experiment process is divided into an inflation part and a cooling part, the difficulty of obtaining the low-temperature environment of the mixed gas is simplified, and the density of the mixed gas in different proportions can be obtained at low temperature. And the heat insulation sleeve is wrapped outside the cooling cavity, so that the loss of cooling capacity can be reduced to obtain a lower mixed gas temperature.
Owner:INST OF HIGH ENERGY PHYSICS CHINESE ACAD OF SCI +1

Anti-thermal shrinkage support ring for a dynamic radial seal

Systems and methods include providing a seal for an assembly. The seal includes a jacket having a base, an inner sealing leg, and an outer sealing leg, and further includes a spring disposed within the jacket between and in contact with the inner sealing leg and the outer sealing leg. The spring includes an annular support ring disposed within the spring. The support ring biases an outer diameter (OD) of the spring towards the outer sealing leg of the jacket to maintain contact pressure between the inner sealing leg of the jacket and the shaft of the assembly. The support ring controls thermal shrinkage of the spring and the outer sealing leg to maintain a seal between a housing and a shaft of the assembly when the assembly is operated at cryogenic temperatures.
Owner:SAINT GOBAIN PERFORMANCE PLASTICS CORP

Thermalization arrangement at cryogenic temperatures

A thermalization arrangement at cryogenic temperatures is dislcosed. The arrangement comprises a dielectric substrate layer on which substrate a device / s or component / s are positionable, and a heat sink component is attached on another side of the substrate. The arrangement further comprises a conductive layer between the substrate layer and the heat sink component. A joint between the substrate layer and the conductive layer has minimal phonon thermal boundary resistance. Energy of conductive layer phonons are arranged to be absorbed by electrons. Another joint between the conductive layer and the heat sink component is electrically conductive. The substrate layer and the conductive layer have similar acoustic properties.
Owner:TEKNOLOGIAN TUTKIMUSKESKUS VTT OY

Cryogenic refrigeration installation and process

The invention relates to a cryogenic refrigeration installation comprising an enclosure housing at least two thermally conductive trays (4, 5, 6, 7) forming thermal stages, the installation (1) comprising a cryogenic temperature cooling system for the trays (4, 5, 6, 7) and / or one or more plates (24, 25, 26) connected (30) to the trays (4, 5, 6, 7), the cooling system comprising a refrigerator (70) with a cycle refrigeration system for a cycle fluid and a cycle circuit (8) comprising a storage pot (17) for a reserve of liquefied cycle fluid, the cycle circuit (8) comprising a bypass line (18) diverting at least a portion of the cycle fluid flow to the first storage pot (17), the bypass line (18) comprising an expansion device (19) configured to expand the cycle gas before feeding the pot (17) storage, the cycle circuit (8) includes,upstream of the heat exchange with at least a portion of trays (4, 5, 6) and / or plates (24, 25, 26), a portion in heat exchange with the liquefied cycle fluid contained in the storage pot (17) and a bypass line (308) located in the enclosure (2) and equipped with an expansion device (408) configured to ensure expansion of the cycle fluid that has exchanged heat in the pot (17) to produce a cooler bypass cycle fluid flow, said bypass cycle fluid being put in heat exchange with at least one additional tray or plate (27) of the installation (1). Abbreviated figure: Fig. 1,
Owner:LAIR LIQUIDE SA POUR LETUDE & LEXPLOITATION DES PROCEDES GEORGES CLAUDE

Plasma etching with reduced power and ETCH chemistry

An apparatus includes a substrate support for holding a substrate at a cryogenic temperature during etching, a plasma source configured to generate a plasma located above the substrate support, an ion acceleration grid located between the plasma source and the substrate support, wherein the ion acceleration grid is configured to apply a potential difference that, during etching, accelerates ions from the plasma toward the substrate support, and an inlet for an etchant process gas, wherein the inlet is located between the ion acceleration grid and the substrate support.
Owner:LAM RES CORP

Small volume uhm ion trap package and method of forming

Aspects of the present disclosure describe systems, methods, and structures that implement compact UHV ion trap systems that can operate at temperatures higher than cryogenic temperatures. Ion trap systems according to the present disclosure are surface treated and sealed while held in a UHV environment, with different components joined via UHV seals, such as welded joints, compressible metal flanges, and UHV compatible welded joints. As a result, no cryogenic pumps are needed, thereby enabling a very small volume system.
Owner:DUKE UNIV +1

Charge locking circuit and control system for qubit

Systems and methods related to charge locking circuits and control systems for qubits are provided. A system for controlling qubit gates includes a first packaging device including a quantum device including a plurality of qubit gates, where the quantum device is configured to operate at a low temperature. The system also includes a second packaged device including a control circuit configured to operate at a low temperature, where the first packaged device is coupled to the second packaged device, and where the control circuit includes a plurality of charge locking circuits configured to lock the charge of the first packaged device to the second packaged device. Wherein each charge locking circuit of the plurality of charge locking circuits is coupled to at least one qubit gate of the plurality of qubit gates via an interconnect such that each charge locking circuit of the plurality of charge locking circuits is configured to provide a voltage signal to the at least one qubit gate.
Owner:MICROSOFT TECHNOLOGY LICENSING LLC

Charge locking circuit and control system for a qubit

Systems and methods related to charge locking circuits and control systems for qubits are provided. A system for controlling qubit gates includes a first packaging device including a quantum device, the quantum device including a plurality of qubit gates, wherein the quantum device is configured to operate at cryogenic temperatures. The system further includes a second packaging device including a control circuit configured to operate at cryogenic temperatures, wherein the first packaging device is coupled to the second packaging device, and wherein the control circuit includes a plurality of charge locking circuits, wherein each charge locking circuit of the plurality of charge locking circuits is coupled to at least one qubit gate of the plurality of qubit gates via an interconnect, such that each charge locking circuit of the plurality of charge locking circuits is configured to provide a voltage signal to the at least one qubit gate.
Owner:MICROSOFT TECHNOLOGY LICENSING LLC

Flexible member and method of manufacturing the same

To provide a flexible member in which thermal conductivity at an extremely low temperature is improved more than before, and to provide a method for producing the same.SOLUTION: A flexible member, which is a stranded wire or a braided wire comprising a plurality of aluminum wires satisfying the following formulae (1) and (2): 0.04 ≤ X ≤ 50 (1) Y ≥ 4.9 * 10 - 4 * X2 + 6.8 * 10 - 2 * X + 1.6 * 10 - 1 (2) In Expressions (1) and (2), X is an arithmetic average (mass ppm) of a total content of Fe, Si, Cu, Mg, Ti, Mn, Zn, and Ga that are each a main impurity in the plurality of aluminum wires, and Y is an arithmetic average wire diameter (mm) of the plurality of aluminum wires.SELECTED DRAWING: Figure 1
Owner:SUMITOMO CHEM CO LTD

Method for operating cryocooler and cryocooler

An initial cooling time of a cryocooler (10) is shortened. A method for operating a cryocooler 10 includes: connecting a second compressor 80 in series with a first compressor 12 on a high pressure line 63 or a low pressure line 64; connecting a buffer volume 70 to the low pressure line 64 via a supply valve 72; executing initial cooling for cooling an expander 14 from an initial temperature to a cryogenic temperature in a state where the second compressor 80 and the buffer volume 70 are connected to the cryocooler 10; and executing a steady operation of maintaining the expander 14 at the cryogenic temperature after the initial cooling. The execution of the initial cooling includes supplying a working gas to the expander 14 by using the first compressor 12 and the second compressor 80, and controlling the supply valve 72 to keep a pressure of the high pressure line 63 within a preset appropriate pressure range based on the measured pressure of the high pressure line 63.
Owner:SUMITOMO HEAVY IND LTD

Mitigation of vibration in pipe systems

A liquid flow-induced vibration suppression device, system, and method are disclosed. In an embodiment, the device is a mounting ring or hoop to which fin-shaped strakes are secured. The hoop is affixable to an interior wall of a first pipe positioned upstream of, and connected by a flexible joint to, a second pipe. The strakes are angled inwardly from the interior wall, and are positioned adjacent to an interface of the first pipe and the flexible joint. In one fluid dynamics modeled example involving rocket motor thrust vectoring, liquid fuel is conveyed in 16-inch diameter pipes at cryogenic temperatures. The strakes are one inch long, spaced apart approximately 0.1 inch, and extend radially from the interior wall in a 10-to-30-degree angle range. The device is brazed to the interior wall of the first pipe, and can be formed of Inconel or titanium alloy to optimize fatigue life.
Owner:THE BOEING CO

Cryogenic susceptor and electric connector assembly used therein

Disclosed is a susceptor which can operate with durability, even at a low or cryogenic temperature. The present invention provides a susceptor characterized by comprising: a base member; a ceramic plate having electrodes on the base member; and an electrode connector assembly for applying power to the electrodes of the ceramic plate through the base member. The electrode connector assembly comprises: a first connector terminal which is the end in contact with the electrodes; a second connector terminal which is the end where power is input; and a connector rod connecting the first connector terminal and the second connector terminal.
Owner:MICOCERAMICS LTD

Low temperature manifold assembly for substrate processing systems

A manifold assembly for a processing chamber in a substrate processing system includes a manifold. The manifold includes a first valve assembly configured to flow a liquid coolant at a first temperature from a first channel of a coolant assembly to the processing chamber. The first valve assembly is configured to flow the liquid coolant at a cryogenic temperature. The manifold further includes a first weldment block including tubing associated with the first valve assembly, a second valve assembly configured to flow the liquid coolant at a second temperature greater than the first temperature from a second channel of the coolant assembly to the processing chamber, and a second weldment block including tubing associated with the second valve assembly. An insulative housing enclosing the first valve assembly, the first weldment block, and the second weldment block. The insulative housing is comprised of a plurality of layers of an insulative material.
Owner:LAM RES CORP