The invention provides a diaphragm movement device, a scanning movement method thereof and an
exposure device, and relates to the technical field of
semiconductor equipment, the device comprises a movement
assembly and a
mass balance
assembly which are connected, the movement
assembly comprises a first guide rail, a first sliding block, a second sliding block, a first driving piece and a second driving piece, the
mass balance assembly comprises a first guide rail, a third sliding block, a fourth sliding block, a first driving piece and a second driving piece, the first driving piece and the third driving piece are electrically connected into the first
control circuit, and the second driving piece and the fourth driving piece are electrically connected into the second
control circuit. The device is simple in structure, the third sliding block and the fourth sliding block can synchronously and reversely move without
delay along with the movement of the first sliding block and the second sliding block, compared with the prior art, the design of the device reduces the requirement for a complex
control algorithm, the response speed is higher, and counter-
force balance can be achieved more timely.