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1653 results about "Liquid hydrocarbons" patented technology

Method of forming amorphous carbon film and method of manufacturing semiconductor device using the same

InactiveUS20080293248A1Better controllableLight absorption coefficient is lowSemiconductor/solid-state device manufacturingChemical vapor deposition coatingRefractive indexDiffuse reflection
The present invention relates to a method of forming an amorphous carbon film and a method of manufacturing a semiconductor device using the method. An amorphous carbon film is formed on a substrate by vaporizing a liquid hydrocarbon compound, which has chain structure and one double bond, and supplying the compound to a chamber, and ionizing the compound. The amorphous carbon film is used as a hard mask film.
It is possible to easily control characteristics of the amorphous carbon film, such as a deposition rate, an etching selectivity, a refractive index (n), a light absorption coefficient (k) and stress, so as to satisfy user's requirements. In particular, it is possible to lower the refractive index (n) and the light absorption coefficient (k). As a result, it is possible to perform a photolithography process without an antireflection film that prevents the diffuse reflection of a lower material layer.
Further, a small amount of reaction by-product is generated during a deposition process, and it is possible to easily remove reaction by-products that are attached on the inner wall of a chamber. For this reason, it is possible to increase a cycle of a process for cleaning a chamber, and to increase parts changing cycles of a chamber. As a result, it is possible to save time and cost.
Owner:TES CO LTD

System and method for extraction of hydrocarbons by in-situ radio frequency heating of carbon bearing geological formations

A method of producing liquid hydrocarbons from a hydrocarbon-bearing rock in situ in a geological formation begins with exploring the formation by drilling a plurality of boreholes into the formation and taking core samples of the hydrocarbon-bearing rock and at least one overburden layer. Electrical parameters of the hydrocarbon-bearing rock and the overburden layer are determined, as well as a roughness of a boundary between the hydrocarbon-bearing rock and the at least one overburden layer. These electrical parameters are used to construct a computer model of a portion of the hydrocarbon-bearing rock and at least one overburden layer, the computer model based upon modeling the formation as a rough-walled waveguide. This computer model is used to simulate propagation of radio frequency energy within the hydrocarbon-bearing rock, including simulation of radio frequency wave confinement within the hydrocarbon-bearing rock, at several frequencies and temperatures. A frequency for retorting is selected based upon simulation results. Radio frequency couplers are installed into at least one borehole in the hydrocarbon-bearing rock and driven with radio frequency energy to heat the hydrocarbon-bearing rock. As the rock heats, it releases carbon compounds and these are collected.
Owner:PAO HSUEH YUAN
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