228results about How to "Eliminate concerns" patented technology

This invention relates to substrate supports, e.g., coated electrostatic chucks, having a dielectric multilayer formed thereon; dielectric multilayers that provide erosive and corrosive barrier protection in harsh environments such as plasma treating vessels used in semiconductor device manufacture; process chambers, e.g., deposition chambers, for processing substrates; methods for protecting substrate supports; and methods for producing substrate supports and electronic devices. The dielectric multilayer comprises (a) an undercoat dielectric layer comprising a metal oxide or metal nitride formed on a surface; and (b) a topcoat dielectric layer comprising a metal oxide formed on the undercoat dielectric layer. The topcoat dielectric layer has an aluminum oxide content of less than about 1 weight percent. The topcoat dielectric layer has a corrosion resistance and / or plasma erosion resistance greater than the corrosion resistance and / or plasma erosion resistance of the undercoat dielectric layer. The undercoat dielectric layer can have a resistivity greater than the resistivity of the topcoat dielectric layer. The topcoat dielectric layer can have a dielectric constant greater than the dielectric constant of the undercoat dielectric layer. The undercoat dielectric layer can have a porosity greater than the porosity of the topcoat dielectric layer. The invention is useful, for example, in the manufacture and protection of electrostatic chucks used in semiconductor device manufacture.

In the past, “compensated” salt caverns have operated with a compensating liquid, such as brine to displace a stored liquid, such as crude oil, when the stored liquid is needed on the surface. Virtually all of the stored liquid in a compensated salt cavern can be expelled from the salt cavern when it is filled with the compensating liquid. In the past, “uncompensated” salt caverns have been used to store gases, such as natural gas. Uncompensated caverns operate without any compensating liquid; instead they rely on pressure. Some of the stored gas (cushion gas) must always be left in an uncompensated salt cavern. This invention breaks with convention and uses a compensating liquid in a salt cavern to store gases which is a technique believed to be previously unknown. “Cushion gas” is not required because the compensating liquid displaces virtually all of the gas in the salt cavern.

A method and apparatus for storing and retrieving program material for subsequent replay is disclosed. The apparatus comprises a tuner, for receiving a data stream comprising encrypted access control information and the program material encrypted according to a first encryption key, the access control information including the first encryption key; a first encryption module, communicatively coupled to the tuner and communicatively coupleable to a media storage device, for further encrypting the encrypted program material according to a second encryption key and for encrypting the second encryption key according to a third encryption key to produce a fourth encryption key; a first decryption module communicatively coupleable to the media storage device, for decrypting the fourth encryption key retrieved from the media storage device using the third encryption key to produce the second encryption key, and for decrypting the further encrypted program material retrieved from the media program device to produce the encrypted program material; a conditional access module communicatively coupled to the first decryption module, for decrypting the encrypted access control information to produce the first encryption key; and a second decryption module, for decrypting the program material using the first encryption key