49 results about "Optical flat" patented technology

A visualization system for dynamically visualizing an eye includes a laser module operable for outputting a primary laser beam along a beam axis, a beam splitter positioned in the beam axis and configured to direct a first beam portion along the beam axis and a second beam portion along a detection axis that is orthogonal to the beam axis. A microelectromechanical system (MEMS) scanner is arranged on the beam axis and configured, in response to the first beam portion, to output a scanning laser along a visualization path. An avalanche photodiode (APD) detector receives the second beam portion. A 4F correlator optical system has a spatial filter arranged along the visualization path. An optional optical flat may be disposed between the eye and the 4F correlator optical system to achieve stereo parallax.

The invention provides an intersecting line cutting device which is characterized in that a plurality of optical plane mirrors are arranged in an observation connecting box to form a light path system, and the light path system is used for refracting a cutting point image to an external observation window; the driving end assembly comprises a double-shaft output motor, a right output shaft of the double-shaft output motor is in transmission connection with the driven end assembly through a synchronous belt, and synchronous rotation of the driving end assembly and the driven end assembly is achieved. A vertical plate of the driven end assembly is composed of two adjusting plates capable of moving relatively, and centering adjustment of a workpiece is achieved through locking and fixing of screws.

The application discloses a kind of spectrometer performance calibration devices for frequency domain OCT system, include: two groups of calibration light path components, light source drive board and fiber coupler;Two groups of calibration light path components are connected to fiber coupler;Fiber coupler is connected to light source drive board;Calibration light path component includes: six-dimensional adjustment frame, installation lens barrel, corner cube, optical flat, two-dimensional adjustment frame, collimating lens and collimating adjustment frame;Corner cube is installed to installation lens barrel;Installation lens barrel is connected to six-dimensional adjustment frame;Optical flat is installed to two-dimensional adjustment frame;Collimating lens is installed to collimating adjustment frame;Collimating adjustment frame is equipped with fiber connection part;Two-dimensional adjustment frame is between installation lens barrel and collimating adjustment frame.This application's spectrometer performance calibration device for frequency domain OCT system, simple structure can obtain signal-to-noise ratio with depth variation curve and other performance indicators, judge spectrometer assembly and debugging result, improve instrument consistency.

The present application relates to a kind of equal optical path adjustment and detection system and method for unpolarized light splitting prism, equal optical path adjustment and detection system includes adjusting mechanism, fixed base, wide spectrum light source, first wedge optical flat, second wedge optical flat, first confocal distance measuring module, second confocal distance measuring module and interference detection component;The plane of first wedge optical flat is towards the first exit surface of first half prism;The plane of second wedge optical flat is towards the exit surface of second half prism;The measuring end of first confocal distance measuring module is towards the inclined plane of first wedge optical flat;The measuring end of second confocal distance measuring module is towards the inclined plane of second wedge optical flat.The present application establishes external optical reference surface by two pieces of wedge optical flat, independently measures air gap of wedge optical flat and corresponding half prism by combining first confocal distance measuring module and second confocal distance measuring module respectively, makes air optical path difference zero, eliminates group velocity dispersion mismatch.

The application provides a test device for simulating armature-rail force electric transient impact scratch, wherein the test device comprises an optical flat, a rotating disc mechanism, a driving mechanism and a scratch rod mechanism arranged on the optical flat, the driving mechanism is used for driving the scratch rod mechanism to scratch on the rotating disc mechanism, the scratch rod mechanism comprises a rod, an elastic component, a three-dimensional force sensor, an insulated double-end flange, a connecting flange, a lock nut, a first copper nose, a ball clamp and a ball sample which are sequentially connected, one end of the rod is connected with the driving mechanism, and the rotating disc mechanism comprises a rotating disc sample, a rotating shaft, an insulating disc, an insulating cylindrical pin and an insulating rhombic pin. The application can simulate single and continuous multiple scratches of the armature-rail, and can in-situ observe the state of the friction pair and measure the friction force, the friction coefficient, the current, the voltage and the contact resistance signal.

The present application relates to the technical field of micro angle-resolved spectroscopy measurement, and more particularly to a three-dimensional angle-resolved spectral imaging device and method, comprising an excitation light module, a microscopic imaging module and a collection module; the excitation light module comprises a laser light source, a first convex lens, a pinhole filter, a second convex lens, a first mirror and a third convex lens; the microscopic imaging module comprises a second half-transmission half-reflection mirror, a 4f system, an objective lens and a sample stage; the focal point of the light beam focused by the third convex lens and then reflected by the second half-transmission half-reflection mirror is located at the rear focal plane of the 4f system, the front focal plane of the 4f system coincides with the rear focal plane of the objective lens, and the sample stage is located at the front focal plane of the objective lens; the collection module comprises a slit, a second mirror, an optical flat structure, an aspheric mirror and a photoelectric array detector; the rear focal point of the 4f system is located at the slit, and the first mirror, the slit, the optical flat structure, the aspheric mirror and the photoelectric array detector can rotate, so that the three-dimensional angle-resolved spectrum can be quickly reconstructed.

The application relates to the technical field of optical assembly and testing, in particular to a high-precision rotating mirror position degree adjustment system and method relative to a folding mirror component, which comprises a four-dimensional angle adjustment table, a self-collimating instrument and a scanning mechanism, the four-dimensional angle adjustment table is provided with an optical flat arranged horizontally; the self-collimating instrument is arranged directly above the optical flat and has a downward output end; the scanning mechanism comprises a mounting seat, the mounting seat is provided with a high-precision rotating mirror, a folding mirror component and an adjustment assembly, the high-precision rotating mirror is arranged below the self-collimating instrument and has a mirror surface facing the self-collimating instrument; the folding mirror component is used for converting a horizontal light beam output by the high-precision rotating mirror into a vertical light beam; and the adjustment assembly is used for adjusting the pitch angle and azimuth angle of the high-precision rotating mirror and adjusting the pitch angle and azimuth angle of the folding mirror component. The application guarantees the position precision of the high-precision rotating mirror and the folding mirror component.

The application discloses a method for measuring super-large curvature radius, and relates to the field of optical measurement, which comprises the following steps: placing two autocollimators in parallel on one side of an optical element to be measured, calibrating the parallel state by using optical flat crystals; then placing the autocollimators near the curved surface to be measured, synchronously adjusting the pitch angle and position to make the light spots on the same CCD axis; calculating the centroid offset of the reflected light spots, and reducing the noise influence by combining with a denoising algorithm; finally, calculating the curvature radius according to the distance between the two autocollimators and the centroid offset distance of the light spots; the method is compatible with concave-convex mirror measurement, does not need to replace equipment or adjust the optical path, has a simple optical path structure, and the algorithm is easy to realize; the method does not depend on a high-precision optical platform, can be applied in an optical workshop, compared with the traditional autocollimation method, does not need a large-stroke displacement table, and can realize the measurement of the super-large curvature radius only by fine adjustment, so that the operation is simplified, the repeatability is good, and the precision is high.

Apparatuses and methods for investigating the inside of a tissue cell are disclosed. Embodiments include diffusely scattering light off a target sample, producing two crossing beams from the scattered light, and using a camera to create an image from the light. Some embodiments utilize a Fourier lens and a Fresnel biprism, and optionally include a long-coherence light source, a delay plate (which can be a polarization rotator or an optical flat), and / or a beam expander. Still further embodiments utilize a diffraction grating, a spatial filter (which may include two differently sized apertures), and a Fourier lens, and optionally include differently sized apertures in the spatial filter. Some embodiments include a transparent support and illuminating the target at an oblique angle through the transparent support. Still further embodiments utilize a low-coherence light source and / or immobilizing the sample tissue using surface bonding chemistry.

The application discloses a kind of based on optical flat panel cone beam CT imaging component precision installation and method, including horizontal plate, the upper and lower ends of the inside of the horizontal plate are fixedly installed with mark card plate, the right end of the inside of the horizontal plate is fixedly installed with fixed plate, the upper and lower ends of the inside of the fixed plate are fixedly installed with driving rod, the inside of the driving rod is fixedly installed with light projector, the left end of the fixed plate is fixedly installed with detection plate, the upper and lower ends of the inside of the detection plate are fixedly installed with electric capacity device.One kind of based on optical flat panel cone beam CT imaging component precision installation and method, by being fixedly installed in the inside of fixed plate before installation and adjustment with light projector, then again fixedly installing detection plate in the inside of horizontal plate, finally cooperate with the light of light projector and judge whether it can be from one end of detection plate to the other end, to judge whether light projector is located on the center line of horizontal plate, to reach the effect of convenient adjustment level.

The utility model relates to a kind of for detecting glass curtain wall abnormal motion instrument limit state's micro-motion device, belongs to abnormal motion instrument limit state detection equipment technical field, including optical flat, the optical flat is equipped with three-axis micro-motion stage, the side of three-axis micro-motion stage is equipped with fixed platform, the fixed platform and three-axis micro-motion stage between be equipped with with fixed platform fixed magnetic induction sensor fixed block, the upper end of the magnetic induction sensor fixed block is equipped with sensor fixed groove, the fixed platform and three-axis micro-motion stage between be equipped with with three-axis micro-motion stage fixed magnetic induction receiver fixed block, the upper end of the magnetic induction receiver fixed block is equipped with receiver fixed groove.Simulate the small displacement that glass curtain wall can occur, and observe whether the abnormal motion instrument of measured can accurately capture and measure these changes, to verify its performance limit, realize the calibration and test of glass curtain wall abnormal motion instrument, to accurately calibrate or detect the limit working condition and measurement accuracy of the instrument in different directions.

An image sensing module includes a circuit substrate, an optical flat element, a sensing element, metal protrusions and an anti-reflection layer. The circuit substrate has an upper surface, a lower surface opposite to the upper surface, an opening surface connected to the upper and lower surfaces, and an opening located at the opening surface. The optical flat element is fixed on the upper surface. The sensing element is disposed on the lower surface. The opening is located between the sensing element and the optical flat element. The sensing element and the optical flat element form an air gap therebetween. The opening surface surrounds the air gap. The metal protrusions are disposed between and electrically connected to the circuit substrate and the sensing element. The anti-reflection layer is disposed on a surface at the air gap and includes nano-ridge structures extending towards the air gap and irregularly arranged.

This application relates to the technical field of measurement devices, and in particular to a large-size wafer surface topography interferometric measurement system and method based on partitioned exposure. The system includes a laser collimated light source system, a two-dimensional motion platform, a beam splitter assembly, an interferometric detection assembly, an imaging acquisition assembly, and a data processing unit. A collimated laser beam is incident perpendicularly, generating equal-thickness interference fringes through a wedge-shaped air film between the lower surface of the optical flat and the wafer under test. The two-dimensional motion platform drives the light source to move according to a partitioned array, achieving partitioned exposure acquisition. The beam splitter refracts the reflected interference beam to the lateral imaging assembly for image acquisition. The data processing unit calibrates, corrects, and fuses the partitioned images to reconstruct the full-field three-dimensional topography. This application significantly simplifies the system structure and reduces costs, achieving high-precision full-field measurement of large-size wafers while effectively suppressing the interference of motion errors on measurement accuracy and significantly improving detection efficiency.

The invention relates to the technical field of high-power optical fiber laser, and provides a high-power optical fiber laser array light beam tilt aberration detection and correction system which comprises a main laser, a tilt aberration correction and collimation module, a spectroscope, a probe laser, an optical fiber beam splitter, a (6 + 1) * 1 optical fiber beam combiner, an optical fiber wavelength division multiplexer, a self-adaptive optical fiber collimator and an optical flat plate. The device comprises a photoelectric detector, a control module, a dual-wavelength design of a main laser with a wavelength of lambda1 and a probe laser with a wavelength of lambda2, an internal parallel reference is established and maintained on line by using the probe laser with the wavelength of lambda2, and the inclination deviation of the main laser is detected by using the reference. The system is simple in structure, high in stability and better in operability, and an existing fiber laser array does not need to be modified.

The application belongs to the field of optical measurement, and relates to a high-precision solution refractive index measurement system and method, the system comprising a light source, an optical flat, a fiber collimator, a beam splitter, a correction glass, a mirror, a cuvette, a transparent solution sample holder, an adjustable diaphragm and a demodulation module. The application proposes using the correction glass as the optical path adjustment mode of the cage type Mach-Zehnder structure, solves the displacement limitation problem caused by the cage type structure, adjusts the optical path without displacement, and can replace the correction glass with different thickness according to different samples, thereby expanding the measurement range of the sample; the sample loading device used can meet the clamping of transparent solid samples and transparent solution samples, the measurement structure does not need to be modified for different measurement samples, and the measurement efficiency is improved; the solution refractive index measurement standard deviation can reach 1.5*10 ‑5 , about 0.001% of the average value of the measurement, the measurement system has a simple structure and high measurement precision.

The embodiment of the application provides a design method and device of an intraocular lens, and belongs to the technical field of lens design. The method comprises the following steps: obtaining a curved surface design parameter of a to-be-designed lens, and generating an initial aspheric surface design function of the to-be-designed lens according to the curved surface design parameter; obtaining an optical power influence parameter and an optical flat area influence parameter corresponding to the to-be-designed lens; generating a function based on the optical power influence parameter, the optical flat area influence parameter and the curved surface design parameter to obtain an optical power distribution function; performing a sag modulation on the initial aspheric surface design function according to the optical power distribution function to obtain a target aspheric surface design function; and generating an intraocular lens based on the target aspheric surface design function. The embodiment of the application can improve the flexibility of the intraocular lens in different use scenarios.

The invention discloses a fluorescence lifetime measuring device and method for a rare earth material. The device comprises an optical flat plate, an adjustable sample table, an optical fiber tail end focuser, an optical fiber tail end recoverer, a laser, a signal generator, an oscilloscope and a photoelectric detector. The device has the advantages that accurate focusing of exciting light and efficient collection of fluorescence can be achieved, and signal loss is reduced; interference of front and back excitation signals is avoided; the whole fluorescence attenuation process can be accurately captured, and the measurement error is small. The structure is designed in a modular mode, and all parts are convenient to install and adjust; the measurement method has clear steps. The output wavelength of the laser can be flexibly replaced according to the characteristic absorption band of a material to be measured, the wavelength response range of the photoelectric detector covers the characteristic fluorescence wavelength of a mainstream rare earth material, and the photoelectric detector can be adapted to measurement of rare earth materials with nanosecond-level to millisecond-level fluorescence lifetime, including various samples such as rare earth simple substances, rare earth oxides, rare earth doped fluorescent powder and the like. The measurement process does not need a complex data analysis algorithm, and is suitable for rapid detection of batch samples.

The application discloses a kind of six-degree-of-freedom error correction three-dimensional motion measurement system and measurement method, including optical air floatation platform, six-degree-of-freedom error correction three-dimensional motion measurement system, two-dimensional motion machine table, reference optical flat, color confocal measurement bridge component, camera measurement bridge component and thin film interference component;Camera measurement bridge frame module in the application acquires the image of concentric circle in the image grid sensor system, the concentric circle image is based on subpixel processing and concentric circle identification to obtain high-precision transverse displacement, based on linear interpolation calculation mode forms two virtual measurement lines in X, Y two directions, the intersection of measurement line is the placement position of color confocal head, the thin film interference component is placed directly below the head, the thin film interference component uses super-precision optical flat as measurement reference, so that the application satisfies three-dimensional zero Abbe error, three-axis zero coupling error, improve the measurement accuracy of three-dimensional motion measurement platform.

The invention relates to the technical field of integrated photonic devices and laser radiation regulation and control, in particular to a far-field directional tunable laser based on a magneto-optical medium and an optical flat band and a method of the far-field directional tunable laser based on the magneto-optical medium and the optical flat band. The dielectric layer is used for providing negative dielectric response and providing non-reciprocal optical response under the action of an external magnetic field; the silicon waveguide layer is deposited on the magneto-optical medium substrate layer, gain medium areas are discontinuously embedded in the silicon waveguide layer in the axial direction, and the silicon waveguide layer is used for providing the energy flow direction opposite to the magneto-optical substrate; and the transparent conductive oxide covering layer covers the silicon waveguide layer and the gain medium region and is used for adjusting the optical environment of the upper cladding. A remarkable nonreciprocal characteristic is shown under the action of an external magnetic field, a dispersion curve can be overturned by changing the direction of the magnetic field, then the far-field radiation direction of laser is driven to deflect, and dynamic regulation and control of the laser direction can be achieved without mechanical parts.

Optical device (10), comprising: an optical slab waveguide (12), an optical coupling element (14), a transmission channel (16) for transmitting an optical signal comprising a multitude of signal modes onto the coupling element (14) with an angle of incidence of 75° or less, and an SNSPD-system, wherein the coupling element (14) is designed to couple the optical signal transmitted by the transmission channel (16) into the plane of the slab waveguide (12), wherein the one or more nanowires (18) of the SNSPD-system are arranged around the coupling element (14) so that that the coupled parts of the optical signal that are guided away from the coupling element (14) through the slab waveguide (12) can interact with the SNSPD-system in a plurality of different detection directions.

The present application relates to the technical fields of high-power fiber laser, and provides a kind of high-power fiber laser array beam tilt aberration detection and correction system, including main laser, tilt aberration correction and collimation module, beam splitter, probe laser, fiber beam splitter, (6+1) fiber combiner, fiber wavelength division multiplexer, adaptive fiber collimator, optical flat, photoelectric detector, control module, using the dual-wavelength design of main laser with wavelength λ1 and probe laser with wavelength λ2, using probe laser with wavelength λ2 to establish and maintain internal parallel reference online, and using this reference to detect the tilt deviation of main laser.The system has simple structure, strong stability, does not need to modify existing fiber laser array, and is more operable.

A system and method for testing an optical plate for defects. The optical plate has first and second end faces and a pair of parallel main outer surfaces for supporting the propagation of light through the optical plate by internal reflection at the main outer surfaces. A light source is a light source that generates light and is positioned close to the optical plate such that the light generated by the light source enters the optical plate close to the first end face and propagates through the optical plate toward the second end face by internal reflection at the main outer surfaces. A detector configuration has at least a first detector positioned in association with the first main outer surface and configured to detect light that exits the optical plate through the first main outer surface due to scattering induced by a defect in the light generated by the light source and propagating through the optical plate by internal reflection.

The invention discloses a silicon wafer or wafer surface auxiliary focusing method in a semiconductor detection process. The method comprises the following steps that a standard optical flat is placed above a microporous ceramic chuck to be adsorbed and fixed; obtaining reflected light spot signal intensity values of the standard optical flat at different positions; adjusting the levelness of the chuck according to the signal intensity values of the reflected light spots at different positions; black and white checkerboard mark sheet images at different positions are collected, corresponding transition pixel values are obtained, and it is analyzed that the adjusted levelness of the chuck meets set conditions; placing a silicon wafer or a wafer on a chuck meeting a set condition, and obtaining a focus mapping graph formed by height points; and drawing a scanning path, formulating a segmented midpoint auxiliary focusing strategy based on the scanning path, and performing auxiliary focusing on the surface of the silicon wafer or the wafer to obtain a clear image. According to the invention, high-precision, high-speed and low-cost auxiliary focusing can be realized.

The invention belongs to the technical field of morphology and film thickness detection, and provides a double-telecentric array optical fiber optical path system for wafer morphology and film thickness detection, which comprises a white light source, a multi-core optical fiber light splitting module, a first array optical fiber connector, a double-telecentric light splitting optical path, a second array optical fiber connector and a spectrograph, the multi-core optical fiber light splitting module comprises a plurality of inverse 1 * 2 couplers; second output ports of the plurality of couplers are connected with a plurality of input channels of the spectrograph through second array optical fiber joints; the white light source is connected with first output ports of the plurality of couplers through a multi-core optical fiber; the input ports of the plurality of couplers are connected with the first array optical fiber connector and output array optical signals which are uniformly arranged into a preset shape; the double telecentric light splitting optical path comprises a first lens, a first diaphragm, an optical element passing through the reflection turning optical path, a second lens and an optical flat, and the optical flat forms a detection reference surface. According to the invention, one-time imaging and rapid measurement of wafer morphology film thickness detection are realized.

This invention discloses an online measurement device and method for polishing pad thickness and flatness. The measurement device includes a laser rangefinder, n eddy current rangefinders, n measuring wafer units, and a feed unit. This invention uses the laser rangefinder to obtain the distance between the laser rangefinder probe and the upper and lower surfaces of the measuring wafer in real time. The distance between the laser rangefinder probe and the lower surface of the measuring wafer reflects the height of various points on the polishing pad surface, and the flatness of the polishing pad can be calculated. The difference between the distance between the laser rangefinder probe and the upper and lower surfaces of the measuring wafer is the measuring wafer thickness. This invention uses an indirect measurement method, eliminating the influence of measurement on the polishing process, avoiding probe wear, and the measurement process is not affected by the polishing fluid. It overcomes the problem of low measurement accuracy caused by the porous material and slotted design of the polishing pad. This invention uses standard optical flat calibration to compensate for motion errors and assembly errors. The measuring wafer unit uses a weight loading method, which is simple, reliable, and has high loading accuracy.

The application discloses an ultrasonic phased array multi-droplet automatic control and detection system and method, which comprises an ultrasonic phased array driving device, an optical flat, a phased array circuit board and a droplet detection platform which are fixed and installed on the optical flat in sequence from top to bottom; the droplet detection platform comprises a super-hydrophobic surface; the phased array circuit board is used for capturing droplets on the super-hydrophobic surface and moving the droplets to a required position; a multi-droplet automatic titration device is fixed and installed on the optical flat and is used for generating droplets with a required volume; the ultrasonic phased array driving device further comprises an acquisition module which is used for acquiring droplet related information to perform droplet detection; a plurality of acoustic field focal points are generated by a computer to realize non-contact control of a plurality of droplets; the droplets are generated in an automatic control mode, the accuracy of droplet control is improved, and high-throughput detection of droplet samples is realized by cooperating with a fluorescence detection sensor and a biological probe.

The invention discloses a polaroid extinction ratio test station in the technical field of polaroid detection, which comprises an optical flat plate and a light source, and the light source is used for providing light for polaroid extinction ratio test. An upper collimator, a lower collimator, a polarizer and a rotating table are fixed on the optical flat plate, and an optical power meter is arranged at the bottom of the optical flat plate. Light emitted by the light source is transmitted by the optical fiber, sequentially passes through the polarizer, the upper collimator, the polaroid to be detected and the lower collimator, and enters the optical power meter. The rotating table is arranged between the upper collimator and the lower collimator, and a detection groove used for containing a polaroid to be detected is formed in the rotating table. According to the invention, through automatic rotation control, light intensity synchronous detection and light path coaxial calibration, efficient, accurate and stable detection of the extinction ratio of the polaroid is realized.

The utility model discloses a high-definition level gauge for a built-in micrometer device, relates to the technical field of level gauges, and aims to solve the problems that the center of a telescopic system is not in the dead center of a light path, measurement errors are easy to generate, and the measurement precision is high due to the fact that a body of an existing automatic leveling level gauge and an optical flat of an external micrometer are not on the same optical axis. According to the technical scheme, the leveling instrument comprises a base, a leveling instrument body is installed on the outer side of the base, and one end of the outer side of the leveling instrument body is fixedly connected with protective glass; the other end of the outer side of the level gauge body is detachably connected with an eyepiece assembly through a bolt, a toothed bar is arranged in the level gauge body, a limiting block is fixedly connected in the level gauge body, and a swing frame is arranged on the outer side of the level gauge body. And the effect of convenient use is achieved.

The invention provides a fluorescence imaging detection system for ion trap quantum calculation, and the system comprises a fluorescence imaging collection module which is used for collecting fluorescence imaging and comprises a first optical flat plate, a three-dimensional displacement adjustment mechanism, an objective lens system, a sub-adjustment mechanism of the objective lens system, and a secondary imaging amplification structure; the fluorescence detection module is used for detecting fluorescence images collected by the fluorescence image collection assembly and comprises a second optical flat plate provided with a sliding rail, an electric overturning mirror, a photomultiplier detection device and a high-sensitivity camera, and the electric overturning mirror, the photomultiplier detection device and the high-sensitivity camera are provided with dovetail groove sliding block mechanisms corresponding to the sliding rail; the secondary imaging amplification structure is arranged at one end, close to the fluorescence detection assembly, of the objective lens system and the sub-adjusting mechanism of the objective lens system, and the mirror surface center of the electric overturning mirror, the high-sensitivity camera and the secondary imaging amplification structure are coaxially arranged. According to the embodiment, by integrating the sliding rail and sliding block mechanism, the problem that the establishment process of an existing fluorescence imaging detection system is extremely tedious is solved.