69 results about "Optical flat" patented technology

The invention discloses a method and a device for measuring orthogonality of an orthogonal rotary shaft system, and belongs to the technical field of orthogonal rotary shaft system detection. The orthogonal rotary shaft system comprises a first rotary shaft system and a second rotary shaft system; the method comprises the following steps: carrying out axis inclination angle rotation error measurement and attitude fine adjustment by using a CCD (Charge Coupled Device) double-axis autocollimator, and a cubic reference prism and a double-sided optical flat which are respectively fixed with a first rotation shaft system and a second rotation shaft system; setting a reference cross line XY through the double-sided optical flat by using a second rotary shaft system; the cross curve of the reflected light beam of the cubic reference prism is overlapped with the reference cross curve XY by adjusting the mounting positions of the two rotary shaft systems; and rotating the first rotating shaft system, recording an angular deviation value and calculating an orthogonality value of the two rotating shaft systems. According to the invention, the reference drift error of mutual aiming of the two autocollimators is eliminated, the interference of the rotation error of the shaft system on orthogonality measurement is eliminated, and the precision and reliability of the orthogonality measurement of the shaft system are improved on the whole.

A visualization system for dynamically visualizing an eye includes a laser module operable for outputting a primary laser beam along a beam axis, a beam splitter positioned in the beam axis and configured to direct a first beam portion along the beam axis and a second beam portion along a detection axis that is orthogonal to the beam axis. A microelectromechanical system (MEMS) scanner is arranged on the beam axis and configured, in response to the first beam portion, to output a scanning laser along a visualization path. An avalanche photodiode (APD) detector receives the second beam portion. A 4F correlator optical system has a spatial filter arranged along the visualization path. An optional optical flat may be disposed between the eye and the 4F correlator optical system to achieve stereo parallax.

The invention relates to a large-aperture anti-interference interference detection device based on a Michelson interference architecture. The large-aperture anti-interference interference detection device comprises a light beam shaping module, an interference assembly and an imaging assembly, the interference assembly comprises a first quarter-wave plate, a first polarization splitting prism, a second quarter-wave plate, a second polarization splitting prism, a third quarter-wave plate and a concave reflector which are arranged on a main light path; a fourth quarter-wave plate and an optical flat are arranged on a sample arm light path of the second polarization splitting prism; and a plane mirror is arranged on a reference arm light path of the second polarization splitting prism. According to the invention, interference detection data of a to-be-detected sample in a high-dynamic environment is obtained in a dynamic self-compensation mode; interference fringe information is obtained through transmission of the large-aperture imaging assembly; the problems of phase noise and interference contrast reduction induced by environmental disturbance are eliminated; the method can be used for high-precision surface type detection of a to-be-detected sample with a reflecting surface characteristic, and is particularly suitable for resonant cavities such as a disc laser with a jitter air wedge characteristic and the like.

The invention discloses a micro-fluidic chip flatness detection device and method based on an optical system, and relates to the field of optical instruments. The problems that in the prior art, the plane flatness of an internal flow channel and a detection cavity of a micro-fluidic chip cannot be detected, and consequently the stability of a detection result is insufficient are solved. An existing device needs to depend on technologies such as optical interference and microscopic imaging. The device comprises a lever dial indicator, a micro-fluidic chip, a hollow shaft rotating platform and the like. The lever dial indicator is arranged above the micro-fluidic chip, and an observation value is set, so that the lever dial indicator is in contact with the surface of the micro-fluidic chip; the lever dial indicator and the hollow shaft rotating platform are respectively arranged on the optical flat plate; the optical adjusting frame and all mirror surfaces in the mirror surface module are respectively mounted; a spectroscope, a compensation plate, a reflector and a light source of the mirror module are arranged on the same horizontal plane; the observation screen is mounted on the optical adjusting frame; meanwhile, all the optical adjusting frames are respectively arranged on the optical flat plate; the method is also suitable for the application fields of medical treatment, environmental monitoring and the like.

The invention provides an intersecting line cutting device which is characterized in that a plurality of optical plane mirrors are arranged in an observation connecting box to form a light path system, and the light path system is used for refracting a cutting point image to an external observation window; the driving end assembly comprises a double-shaft output motor, a right output shaft of the double-shaft output motor is in transmission connection with the driven end assembly through a synchronous belt, and synchronous rotation of the driving end assembly and the driven end assembly is achieved. A vertical plate of the driven end assembly is composed of two adjusting plates capable of moving relatively, and centering adjustment of a workpiece is achieved through locking and fixing of screws.

The application discloses a kind of spectrometer performance calibration devices for frequency domain OCT system, include: two groups of calibration light path components, light source drive board and fiber coupler;Two groups of calibration light path components are connected to fiber coupler;Fiber coupler is connected to light source drive board;Calibration light path component includes: six-dimensional adjustment frame, installation lens barrel, corner cube, optical flat, two-dimensional adjustment frame, collimating lens and collimating adjustment frame;Corner cube is installed to installation lens barrel;Installation lens barrel is connected to six-dimensional adjustment frame;Optical flat is installed to two-dimensional adjustment frame;Collimating lens is installed to collimating adjustment frame;Collimating adjustment frame is equipped with fiber connection part;Two-dimensional adjustment frame is between installation lens barrel and collimating adjustment frame.This application's spectrometer performance calibration device for frequency domain OCT system, simple structure can obtain signal-to-noise ratio with depth variation curve and other performance indicators, judge spectrometer assembly and debugging result, improve instrument consistency.

The invention discloses a PSD-based light beam direction change detection system and method in the technical field of intelligent detection, and the system comprises a light beam sensing module which is installed on the surface of an optical flat plate through a translation and lifting adjustment mechanism, a laser which is installed on the surface of the optical flat plate through an adjustable clamp, and a light beam detection module which is installed on the surface of the optical flat plate through an adjustable clamp. The reflector is fixed on the surface of a to-be-detected platform, the optical flat plate is fixed on the surface of the air floating platform, a PSD position sensitive detector in the light beam sensing module is electrically connected with a software processing end through a driving circuit, and a light beam emitted by the laser is reflected by the reflector to enter the PSD position sensitive detector in the light beam sensing module. The software processing end calculates the vibration angles of the platform to be detected in the vertical direction, the horizontal direction and the two-dimensional direction by collecting the change data of the light spot position in the PSD position sensitive detector. According to the invention, the vibration of an object can be rapidly measured, data recording can be carried out, and the change of reflected light beam pointing caused by various micro-vibrations of the optical reflector can be detected.

The present application relates to a kind of equal optical path adjustment and detection system and method for unpolarized light splitting prism, equal optical path adjustment and detection system includes adjusting mechanism, fixed base, wide spectrum light source, first wedge optical flat, second wedge optical flat, first confocal distance measuring module, second confocal distance measuring module and interference detection component;The plane of first wedge optical flat is towards the first exit surface of first half prism;The plane of second wedge optical flat is towards the exit surface of second half prism;The measuring end of first confocal distance measuring module is towards the inclined plane of first wedge optical flat;The measuring end of second confocal distance measuring module is towards the inclined plane of second wedge optical flat.The present application establishes external optical reference surface by two pieces of wedge optical flat, independently measures air gap of wedge optical flat and corresponding half prism by combining first confocal distance measuring module and second confocal distance measuring module respectively, makes air optical path difference zero, eliminates group velocity dispersion mismatch.

The application provides a test device for simulating armature-rail force electric transient impact scratch, wherein the test device comprises an optical flat, a rotating disc mechanism, a driving mechanism and a scratch rod mechanism arranged on the optical flat, the driving mechanism is used for driving the scratch rod mechanism to scratch on the rotating disc mechanism, the scratch rod mechanism comprises a rod, an elastic component, a three-dimensional force sensor, an insulated double-end flange, a connecting flange, a lock nut, a first copper nose, a ball clamp and a ball sample which are sequentially connected, one end of the rod is connected with the driving mechanism, and the rotating disc mechanism comprises a rotating disc sample, a rotating shaft, an insulating disc, an insulating cylindrical pin and an insulating rhombic pin. The application can simulate single and continuous multiple scratches of the armature-rail, and can in-situ observe the state of the friction pair and measure the friction force, the friction coefficient, the current, the voltage and the contact resistance signal.

The invention relates to the technical field of X-ray focus lens assembly, in particular to a large-diameter tool horizontal adjusting device and an alignment detection method thereof.The large-diameter tool horizontal adjusting device comprises a parallel light source, a supporting hub, a horizontal guide rail, a reflecting prism and an autocollimator, the parallel light source outputs parallel light beams upwards, a plane optical flat is arranged on the supporting hub, and the horizontal guide rail is arranged on the supporting hub; the horizontal guide rail is arranged above the parallel light source and the supporting hub, the reflecting prism is suitable for conducting position conversion among working positions on the horizontal guide rail, the autocollimator is installed on the horizontal guide rail, and the outlet end of the autocollimator faces the reflecting prism. The device for adjusting the posture of the supporting hub based on the light emitting direction of the parallel light source is established, it is guaranteed that the axis of the supporting hub is parallel to the optical axis of the focus lens to be assembled, a hardware foundation is provided for assembling and adjusting of the focus lens, and the large-diameter tool horizontal adjusting device is high in testing precision and high in precision. Leveling of the supporting hub can be completed through simple calibration and adjustment, and the device is light, convenient, stable and easy to operate.

The invention relates to the field of optics, and provides a device and a method for adjusting pointing and radial positions of light. The device for adjusting the pointing and radial positions of the light comprises a first driving part; the first optical wedge prism is mounted on the first driving part, and the first driving part is suitable for driving the first optical wedge prism to rotate in a plane perpendicular to the optical axis; the second driving part is arranged at the emergent end of the first optical wedge prism; the second optical wedge prism is installed on a second driving piece, the deflection angle of the second optical wedge prism is the same as that of the first optical wedge prism, and the second driving piece is suitable for driving the second optical wedge prism to rotate in the plane perpendicular to the optical axis; the third driving part is arranged at the emergent end of the second optical wedge prism; the optical flat plate is mounted on the third driving part, the third driving part is suitable for driving the optical flat plate to rotate in a plane parallel to the optical axis, and the optical axis penetrates through the optical flat plate all the time. The pointing and radial position adjusting device for light effectively decouples the adjustment of pointing and radial positions.

There is disclosed herein a waveguide including an optical slab and an optical wedge. The optical slab has a first refractive index, n1>1. The optical slab includes: a pair of opposing surfaces and an input port. The pair of opposing surfaces are arranged in a parallel configuration. The input port is arranged to receive light into the optical slab at an angle such that the light is guided between the first and second opposing surfaces. The optical wedge has a second refractive index, n2, wherein 1<n2<n1. The optical wedge includes a pair of opposing surfaces arranged in a wedge configuration. A first surface of the optical wedge abuts the second surface of the optical slab to form an interface. The angle of the wedge allows light received at the interface to escape through the second surface of the optical wedge such that the exit pupil of the waveguide is expanded.

A device and method for detecting the flatness of a microfluidic chip based on an optical system relates to the field of optical instruments. The device solves the problem that the existing technology cannot detect the flatness of the internal flow channel and detection cavity of the microfluidic chip, resulting in insufficient stability of the detection results. Furthermore, the existing device relies on optical interference, microscopic imaging and other technologies to implement. The device includes a lever micrometer, a microfluidic chip, a hollow shaft rotating platform, etc.; the lever micrometer is placed above the microfluidic chip and an observation value is set so that the lever micrometer contacts the surface of the microfluidic chip; the lever micrometer and the hollow shaft rotating platform are respectively mounted on an optical flat plate; the optical adjustment frame and all mirrors in the mirror module are respectively mounted; the spectrometer, compensation plate and reflector of the mirror module are mounted on the same horizontal plane as the light source; the observation screen is mounted on the optical adjustment frame; and all optical adjustment frames are respectively mounted on the optical flat plate. The present invention is also suitable for application fields such as medical treatment and environmental monitoring.

The invention discloses an X-ray imaging motion control system based on a carbon nano tube. The X-ray imaging motion control system comprises a carbon nano tube cold cathode X-ray source, a flat panel detector, a sliding table module, a rotary table, a short sliding table, an optical flat panel, an aluminum alloy frame and an upper computer, a ball screw of each sliding table module is provided with a driving sliding block and a driven sliding block, the driving sliding blocks drive the driven sliding blocks to operate within the full range of the effective stroke of the lead screws under driving of a motor, a flat panel detector and a short sliding table are fixed to the two sliding table modules, a carrying rotary table is fixed to the short sliding table, and a four-axis motion platform is formed. The motion controller controls the output pulse of the motor driver to adjust the running state of the four-axis motor in real time, and the upper computer can achieve the functions of starting, stopping, running distance, running speed, running direction, state display and the like of each axis. The carbon nanotube cold cathode X-ray source can generate continuous and pulse X-rays, and high-efficiency and low-artifact real-time nondestructive inspection of a dynamic object is integrally realized by combining a four-axis motion platform.

The present application relates to the technical field of micro angle-resolved spectroscopy measurement, and more particularly to a three-dimensional angle-resolved spectral imaging device and method, comprising an excitation light module, a microscopic imaging module and a collection module; the excitation light module comprises a laser light source, a first convex lens, a pinhole filter, a second convex lens, a first mirror and a third convex lens; the microscopic imaging module comprises a second half-transmission half-reflection mirror, a 4f system, an objective lens and a sample stage; the focal point of the light beam focused by the third convex lens and then reflected by the second half-transmission half-reflection mirror is located at the rear focal plane of the 4f system, the front focal plane of the 4f system coincides with the rear focal plane of the objective lens, and the sample stage is located at the front focal plane of the objective lens; the collection module comprises a slit, a second mirror, an optical flat structure, an aspheric mirror and a photoelectric array detector; the rear focal point of the 4f system is located at the slit, and the first mirror, the slit, the optical flat structure, the aspheric mirror and the photoelectric array detector can rotate, so that the three-dimensional angle-resolved spectrum can be quickly reconstructed.

The application relates to the technical field of optical assembly and testing, in particular to a high-precision rotating mirror position degree adjustment system and method relative to a folding mirror component, which comprises a four-dimensional angle adjustment table, a self-collimating instrument and a scanning mechanism, the four-dimensional angle adjustment table is provided with an optical flat arranged horizontally; the self-collimating instrument is arranged directly above the optical flat and has a downward output end; the scanning mechanism comprises a mounting seat, the mounting seat is provided with a high-precision rotating mirror, a folding mirror component and an adjustment assembly, the high-precision rotating mirror is arranged below the self-collimating instrument and has a mirror surface facing the self-collimating instrument; the folding mirror component is used for converting a horizontal light beam output by the high-precision rotating mirror into a vertical light beam; and the adjustment assembly is used for adjusting the pitch angle and azimuth angle of the high-precision rotating mirror and adjusting the pitch angle and azimuth angle of the folding mirror component. The application guarantees the position precision of the high-precision rotating mirror and the folding mirror component.

The application discloses a method for measuring super-large curvature radius, and relates to the field of optical measurement, which comprises the following steps: placing two autocollimators in parallel on one side of an optical element to be measured, calibrating the parallel state by using optical flat crystals; then placing the autocollimators near the curved surface to be measured, synchronously adjusting the pitch angle and position to make the light spots on the same CCD axis; calculating the centroid offset of the reflected light spots, and reducing the noise influence by combining with a denoising algorithm; finally, calculating the curvature radius according to the distance between the two autocollimators and the centroid offset distance of the light spots; the method is compatible with concave-convex mirror measurement, does not need to replace equipment or adjust the optical path, has a simple optical path structure, and the algorithm is easy to realize; the method does not depend on a high-precision optical platform, can be applied in an optical workshop, compared with the traditional autocollimation method, does not need a large-stroke displacement table, and can realize the measurement of the super-large curvature radius only by fine adjustment, so that the operation is simplified, the repeatability is good, and the precision is high.

Apparatuses and methods for investigating the inside of a tissue cell are disclosed. Embodiments include diffusely scattering light off a target sample, producing two crossing beams from the scattered light, and using a camera to create an image from the light. Some embodiments utilize a Fourier lens and a Fresnel biprism, and optionally include a long-coherence light source, a delay plate (which can be a polarization rotator or an optical flat), and / or a beam expander. Still further embodiments utilize a diffraction grating, a spatial filter (which may include two differently sized apertures), and a Fourier lens, and optionally include differently sized apertures in the spatial filter. Some embodiments include a transparent support and illuminating the target at an oblique angle through the transparent support. Still further embodiments utilize a low-coherence light source and / or immobilizing the sample tissue using surface bonding chemistry.

The utility model discloses a safety valve detection device convenient for placing an optical flat, which comprises a positioning assembly, a placing assembly, an adjusting mechanism and a lamp panel, and is characterized in that the positioning assembly comprises a spring and a clamping block arranged at the front end of the spring; the placing assembly comprises a mounting plate, an air cylinder arranged on the side wall of the mounting plate, a traction rod movably matched with the telescopic end of the air cylinder, a movable arm movably matched with the traction rod and a clamping plate arranged on the side wall of the movable arm, the movable arm is movably matched with the side wall of the mounting plate through a rotating shaft, and the adjusting mechanism is used for adjusting the height and the horizontal position of the placing assembly. The spring pushes the clamping plate to clamp, position and keep the safety valve workpiece stable, the air cylinder is externally connected with air supply equipment, the traction rod is controlled to pull the movable arm to drive the clamping plate to clamp and place the optical flat, the placing assembly is driven by the servo motor to move the optical flat to the position above the safety valve workpiece, and the electric telescopic rod is used for slowly controlling the optical flat to fall off. And stable lowering of the optical flat is kept, and violent collision is avoided.

The utility model discloses an image sensing module. The image sensing module comprises a circuit substrate, an optical flat plate element, a photosensitive element, a metal bump and an anti-reflection layer, the circuit substrate has an upper surface and a lower surface opposite to each other, an opening surface connecting the upper surface and the lower surface, and an opening located at the opening surface. The optical flat element is fixed on the upper surface. The photosensitive element is arranged on the lower surface. The opening is located between the photosensitive element and the optical flat element. An air gap is formed between the photosensitive element and the optical flat element. The opening surface surrounds the air gap. The metal bump is arranged between the circuit substrate and the photosensitive element, and is electrically connected with the circuit substrate and the photosensitive element. The anti-reflection layer is arranged on the surface of the air gap. The anti-reflection layer comprises a nanometer ridge-shaped structure. The nanometer ridge-shaped structures extend towards the air gaps and are arranged in an irregular mode. The utility model also discloses a camera module with the image sensing module and an electronic device with the camera module.

The application discloses a kind of based on optical flat panel cone beam CT imaging component precision installation and method, including horizontal plate, the upper and lower ends of the inside of the horizontal plate are fixedly installed with mark card plate, the right end of the inside of the horizontal plate is fixedly installed with fixed plate, the upper and lower ends of the inside of the fixed plate are fixedly installed with driving rod, the inside of the driving rod is fixedly installed with light projector, the left end of the fixed plate is fixedly installed with detection plate, the upper and lower ends of the inside of the detection plate are fixedly installed with electric capacity device.One kind of based on optical flat panel cone beam CT imaging component precision installation and method, by being fixedly installed in the inside of fixed plate before installation and adjustment with light projector, then again fixedly installing detection plate in the inside of horizontal plate, finally cooperate with the light of light projector and judge whether it can be from one end of detection plate to the other end, to judge whether light projector is located on the center line of horizontal plate, to reach the effect of convenient adjustment level.

The utility model relates to a kind of for detecting glass curtain wall abnormal motion instrument limit state's micro-motion device, belongs to abnormal motion instrument limit state detection equipment technical field, including optical flat, the optical flat is equipped with three-axis micro-motion stage, the side of three-axis micro-motion stage is equipped with fixed platform, the fixed platform and three-axis micro-motion stage between be equipped with with fixed platform fixed magnetic induction sensor fixed block, the upper end of the magnetic induction sensor fixed block is equipped with sensor fixed groove, the fixed platform and three-axis micro-motion stage between be equipped with with three-axis micro-motion stage fixed magnetic induction receiver fixed block, the upper end of the magnetic induction receiver fixed block is equipped with receiver fixed groove.Simulate the small displacement that glass curtain wall can occur, and observe whether the abnormal motion instrument of measured can accurately capture and measure these changes, to verify its performance limit, realize the calibration and test of glass curtain wall abnormal motion instrument, to accurately calibrate or detect the limit working condition and measurement accuracy of the instrument in different directions.

An image sensing module includes a circuit substrate, an optical flat element, a sensing element, metal protrusions and an anti-reflection layer. The circuit substrate has an upper surface, a lower surface opposite to the upper surface, an opening surface connected to the upper and lower surfaces, and an opening located at the opening surface. The optical flat element is fixed on the upper surface. The sensing element is disposed on the lower surface. The opening is located between the sensing element and the optical flat element. The sensing element and the optical flat element form an air gap therebetween. The opening surface surrounds the air gap. The metal protrusions are disposed between and electrically connected to the circuit substrate and the sensing element. The anti-reflection layer is disposed on a surface at the air gap and includes nano-ridge structures extending towards the air gap and irregularly arranged.

This application relates to the technical field of measurement devices, and in particular to a large-size wafer surface topography interferometric measurement system and method based on partitioned exposure. The system includes a laser collimated light source system, a two-dimensional motion platform, a beam splitter assembly, an interferometric detection assembly, an imaging acquisition assembly, and a data processing unit. A collimated laser beam is incident perpendicularly, generating equal-thickness interference fringes through a wedge-shaped air film between the lower surface of the optical flat and the wafer under test. The two-dimensional motion platform drives the light source to move according to a partitioned array, achieving partitioned exposure acquisition. The beam splitter refracts the reflected interference beam to the lateral imaging assembly for image acquisition. The data processing unit calibrates, corrects, and fuses the partitioned images to reconstruct the full-field three-dimensional topography. This application significantly simplifies the system structure and reduces costs, achieving high-precision full-field measurement of large-size wafers while effectively suppressing the interference of motion errors on measurement accuracy and significantly improving detection efficiency.

The invention relates to the technical field of high-power optical fiber laser, and provides a high-power optical fiber laser array light beam tilt aberration detection and correction system which comprises a main laser, a tilt aberration correction and collimation module, a spectroscope, a probe laser, an optical fiber beam splitter, a (6 + 1) * 1 optical fiber beam combiner, an optical fiber wavelength division multiplexer, a self-adaptive optical fiber collimator and an optical flat plate. The device comprises a photoelectric detector, a control module, a dual-wavelength design of a main laser with a wavelength of lambda1 and a probe laser with a wavelength of lambda2, an internal parallel reference is established and maintained on line by using the probe laser with the wavelength of lambda2, and the inclination deviation of the main laser is detected by using the reference. The system is simple in structure, high in stability and better in operability, and an existing fiber laser array does not need to be modified.

The application belongs to the field of optical measurement, and relates to a high-precision solution refractive index measurement system and method, the system comprising a light source, an optical flat, a fiber collimator, a beam splitter, a correction glass, a mirror, a cuvette, a transparent solution sample holder, an adjustable diaphragm and a demodulation module. The application proposes using the correction glass as the optical path adjustment mode of the cage type Mach-Zehnder structure, solves the displacement limitation problem caused by the cage type structure, adjusts the optical path without displacement, and can replace the correction glass with different thickness according to different samples, thereby expanding the measurement range of the sample; the sample loading device used can meet the clamping of transparent solid samples and transparent solution samples, the measurement structure does not need to be modified for different measurement samples, and the measurement efficiency is improved; the solution refractive index measurement standard deviation can reach 1.5*10 ‑5 , about 0.001% of the average value of the measurement, the measurement system has a simple structure and high measurement precision.

The embodiment of the application provides a design method and device of an intraocular lens, and belongs to the technical field of lens design. The method comprises the following steps: obtaining a curved surface design parameter of a to-be-designed lens, and generating an initial aspheric surface design function of the to-be-designed lens according to the curved surface design parameter; obtaining an optical power influence parameter and an optical flat area influence parameter corresponding to the to-be-designed lens; generating a function based on the optical power influence parameter, the optical flat area influence parameter and the curved surface design parameter to obtain an optical power distribution function; performing a sag modulation on the initial aspheric surface design function according to the optical power distribution function to obtain a target aspheric surface design function; and generating an intraocular lens based on the target aspheric surface design function. The embodiment of the application can improve the flexibility of the intraocular lens in different use scenarios.

The invention discloses a fluorescence lifetime measuring device and method for a rare earth material. The device comprises an optical flat plate, an adjustable sample table, an optical fiber tail end focuser, an optical fiber tail end recoverer, a laser, a signal generator, an oscilloscope and a photoelectric detector. The device has the advantages that accurate focusing of exciting light and efficient collection of fluorescence can be achieved, and signal loss is reduced; interference of front and back excitation signals is avoided; the whole fluorescence attenuation process can be accurately captured, and the measurement error is small. The structure is designed in a modular mode, and all parts are convenient to install and adjust; the measurement method has clear steps. The output wavelength of the laser can be flexibly replaced according to the characteristic absorption band of a material to be measured, the wavelength response range of the photoelectric detector covers the characteristic fluorescence wavelength of a mainstream rare earth material, and the photoelectric detector can be adapted to measurement of rare earth materials with nanosecond-level to millisecond-level fluorescence lifetime, including various samples such as rare earth simple substances, rare earth oxides, rare earth doped fluorescent powder and the like. The measurement process does not need a complex data analysis algorithm, and is suitable for rapid detection of batch samples.

The application discloses a kind of six-degree-of-freedom error correction three-dimensional motion measurement system and measurement method, including optical air floatation platform, six-degree-of-freedom error correction three-dimensional motion measurement system, two-dimensional motion machine table, reference optical flat, color confocal measurement bridge component, camera measurement bridge component and thin film interference component;Camera measurement bridge frame module in the application acquires the image of concentric circle in the image grid sensor system, the concentric circle image is based on subpixel processing and concentric circle identification to obtain high-precision transverse displacement, based on linear interpolation calculation mode forms two virtual measurement lines in X, Y two directions, the intersection of measurement line is the placement position of color confocal head, the thin film interference component is placed directly below the head, the thin film interference component uses super-precision optical flat as measurement reference, so that the application satisfies three-dimensional zero Abbe error, three-axis zero coupling error, improve the measurement accuracy of three-dimensional motion measurement platform.