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Reflection cavity type confocal measuring method of super-large radius of curvature

A technology of radius measurement and super curvature, which is applied in measurement devices, instruments, optical devices, etc., to achieve the effect of simple and compact measurement optical path, improved fixed focus sensitivity, and small moving distance

Inactive Publication Date: 2014-03-26
BEIJING INSTITUTE OF TECHNOLOGYGY
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0007] The purpose of the present invention is to solve the problem of high-precision measurement of super-large radius of curvature, and propose a method for measuring ultra-large radius of curvature with reflective cavity confocal

Method used

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  • Reflection cavity type confocal measuring method of super-large radius of curvature
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  • Reflection cavity type confocal measuring method of super-large radius of curvature

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0035] When the measured lens 7 is a concave lens with a diameter of D=150mm, the reflective cavity confocal ultra-large radius of curvature measuring device such as figure 2 As shown, the measurement steps are:

[0036] (a) Start the measurement software in the main control computer 14, turn on the laser 20, and the light emitted by the laser 20 is transmitted through the optical fiber 21 to form the point light source 1. The light emitted by the point light source 1 passes through the beam splitter 2 and the collimator lens 3 to form a parallel beam;

[0037] (b) The measured lens 7 is placed on the adjustment frame 18 , and the measured lens 7 is adjusted through the adjustment frame 18 so that it has a common optical axis with the collimator lens 3 . Parallel light is irradiated on the measured lens 7, and the measured lens 7 is converged to form a measuring beam 11 that is irradiated on the rear surface 6 of the parallel flat crystal;

[0038] (c) The measurement softw...

Embodiment 2

[0045] When the measured lens 7 is a concave lens with a diameter of D=150mm, the reflective cavity confocal ultra-large radius of curvature measuring device such as figure 2 As shown, the measurement steps are:

[0046] (a) Start the measurement software in the main control computer 14, turn on the laser 20, and the light emitted by the laser 20 is transmitted through the optical fiber 21 to form the point light source 1. The light emitted by the point light source 1 passes through the beam splitter 2 and the collimator lens 3 to form a parallel beam;

[0047] (b) The measured lens 7 is placed on the adjustment frame 18 , and the measured lens 7 is adjusted through the adjustment frame 18 so that it has a common optical axis with the collimator lens 3 . Parallel light is irradiated on the measured lens 7, and the measured lens 7 is converged to form a measuring beam 11 that is irradiated on the rear surface 6 of the parallel flat crystal;

[0048] (c) The measurement softw...

Embodiment 3

[0053] When the measured lens 7 is a concave lens with a diameter of D=150mm, the reflective cavity confocal ultra-large radius of curvature measuring device such as image 3 As shown, the measurement steps are:

[0054] (a) Start the measurement software in the main control computer 14, turn on the laser 20, and the light emitted by the laser 20 is transmitted through the optical fiber 21 to form the point light source 1. The light emitted by the point light source 1 passes through the beam splitter 2 and the collimator lens 3 to form a parallel beam;

[0055] (b) Place the lens under test 7 on the adjustment frame 27 , and adjust the lens under test 7 through the adjustment frame 27 so that it has a common optical axis with the collimator lens 3 . Parallel light is irradiated on the measured lens 7, and the measured lens 7 is converged to form a measuring beam 11 that is irradiated on the rear surface 6 of the parallel flat crystal;

[0056] (c) The measurement software in...

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Abstract

The invention belongs to the field of optical precision measurement technology and relates to a reflection cavity type confocal measuring method of super-large radius of curvature. According to the method, by a confocal focusing theory in cooperation with parallel optical flat, a focal position of a measured surface is positioned accurately so as to further realize high-precision measurement of super-large radius of curvature. The method combining the confocal focusing theory and a reflection cavity type folded optical path theory has advantages as follows: displacement distance of a measured piece is small; optical path is simple; measurement precision is high; measuring speed is fast; environmental disturbance resistance is strong; and the measured surface is not damaged. The method provided by the invention can be used in high-precision non-contact measurement of super-large radius of curvature.

Description

technical field [0001] The invention belongs to the technical field of optical precision measurement, and can be used for the detection of super-large curvature radius and the high-precision measurement of super-large curvature radius in the assembly process of an optical system. technical background [0002] High-precision spherical elements are widely used in large-scale optical systems such as lithography machines, astronomical telescopes, and laser nuclear fusion. With the advancement of these system engineering, higher requirements have been put forward for the measurement of the curvature radius of spherical optical elements, especially the large curvature radius parameters. requirements. However, the measurement of the radius of curvature of large optical components has always been one of the difficult problems in the field of optics due to its low precision of fixed-focus aiming, long measurement path, and susceptibility to interference from environmental factors. I...

Claims

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Application Information

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IPC IPC(8): G01B11/255
Inventor 赵维谦张鑫王允田继伟
Owner BEIJING INSTITUTE OF TECHNOLOGYGY
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