130 results about "Confocal" patented technology

According to the multi-beam confocal mask defect detection system and method based on the fiber laser array, a multi-point scanning light field is obtained on the basis of the fiber laser array to serve as an illumination light source, the scanning light field can be regulated and controlled on the basis of arrangement of the laser array, and through the combined action of a motion table and a multi-face rotating mirror, the defect of the multi-beam confocal mask is detected. Rapid and accurate mask two-dimensional scanning imaging is achieved, and high-resolution detection of mask defects is achieved on the basis of a confocal microscopic imaging method in cooperation with a high-power microscope objective and a photomultiplier. Compared with a traditional point scanning type mask defect detection system, the system has the advantages that the detection resolution is high, the scanning speed is high, a multi-point scanning light field can be freely regulated and controlled, and no extra diffraction optical element needs to be introduced.

The invention discloses a feeler gauge calibration method and device based on non-contact optics, and the method comprises the steps: arranging a to-be-calibrated feeler gauge between an upper measuring head and a lower measuring head of a confocal laser displacement sensor, and enabling the lasers of the two measuring heads to be coaxial for differential measurement; placing a standard gauge block between the upper measuring head and the lower measuring head, inputting a correction value of the standard gauge block, and reading the distance between the upper measuring head and the lower measuring head; measuring points of the filler gauge pieces are determined, the upper measuring head and the lower measuring head respectively read data of the central origin of each filler gauge piece measuring point, the filler gauge is moved, infinitesimal displacement is carried out in the measuring area range in the x-axis plane direction and the y-axis plane direction of each filler gauge piece measuring point, n coordinates are formed by combining reading values of the upper measuring head and the lower measuring head, and an upper plane S1 and a lower plane S2 are fitted respectively; and the thickness deviation and the curvature of the feeler gauge are respectively calculated. The feeler gauge verification method and device based on non-contact optics are high in precision, convenient and efficient to operate, automatic and capable of achieving batch detection.

The invention belongs to the technical field of objective lens optical systems, and provides a large-aperture distortionless fixed-focus objective lens optical system which is adaptive to a low-light CMOS (complementary metal oxide semiconductor) or CCD (charge coupled device) with the image surface size of 1 inch. The first lens group, the diaphragm and the second lens group are arranged in sequence; the first lens group comprises a first lens, a second lens and a third lens; the second lens group comprises a fourth lens, a fifth lens, a sixth lens and a seventh lens; the optical indexes that the wave band ranges from 480 nm to 1000 nm, the maximum distortion is not larger than 0.5%, the pixel is 800 px * 600 px, and the view field range is 35.5 degrees * 27 degrees are achieved. The invention aims to solve the problem that the overall imaging quality of the lens is poor due to the deformation of an imaged picture caused by the large distortion index of the existing large-aperture objective lens optical system, and has the advantages of high resolution, large relative aperture and broadband design, realization of day and night confocal, and good imaging quality in an extreme environment.

According to the laser confocal scanning microscope, the scanning image distortion correction method and the acquisition card provided by the invention, the transflective mirror is fixedly arranged between the resonance galvanometer and the galvanometer galvanometer, and the monitoring light path and the second detector are arranged in the transmission direction of the transflective mirror. The acquisition card is respectively connected with the first detector and the second detector; the confocal signal and the grating signal which are synchronously acquired by the acquisition card in an isochronous manner are twin images in time and space, and the grating image formed by the grating signal depicts the movement of the resonance galvanometer in the scanning process, so that distortion correction can be performed on the twin object plane image of the grating image through distortion analysis on the grating image, and the distortion correction accuracy is improved. Therefore, the correction accuracy is effectively improved, and the method is not easily influenced by factors such as environment, service life and optical path deviation. Moreover, in the distortion correction process, correction is carried out through the odd-numbered line sub-graphs and the even-numbered line sub-graphs, so that the distortion correction accuracy is further improved.

The invention discloses a method for measuring the thickness of a spectral confocal sensor when optical axes are uneven and a measured material is inclined, and relates to the technical field of displacement or thickness measurement. The method comprises the following steps: calibrating a confocal distance with a relative inclination angle of a standard material by using the standard material with known thickness, establishing a relationship between the thickness of the measured material with the relative inclination angle of the measured material and the thickness of the standard material with the relative inclination angle of the standard material, and establishing a relationship between the relative inclination angle of the standard material and the relative inclination angle of the measured material; and establishing a relationship between the light spot distance and the thickness of the measured material, and finally establishing a thickness measurement model under the conditions that the optical axes of the spectrum confocal sensors are inclined relative to the measured material and the optical axes of the two spectrum confocal sensors are not aligned at the same time. According to the measurement method, models under two conditions are considered at the same time, the measurement method is more suitable for the actual condition, and the measurement precision is improved.

The invention discloses a large-light-transmission medium-long-focal-length day and night confocal lens and electronic equipment. The lens sequentially comprises a first lens, a second lens, a diaphragm, a third lens, a fourth lens, a fifth lens, a sixth lens and a seventh lens from an object side to an image side. Wherein the first lens has positive focal power and is provided with an object side surface facing the object side and an image side surface facing the object side, the object side surface is a convex surface, and the image side surface is a concave surface; the range of the ratio of the first lens to the focal length of the lens is 0.961-1.280: 1. The second lens has positive focal power and is provided with an object side surface facing the object side and an image side surface facing the object side, the object side surface is a convex surface, and the image side surface is a concave surface; the range of the ratio of the second lens to the focal length of the lens is 0.719-1.514: 1. According to the invention, through arrangement of the lens and reasonable focal power distribution, the problem of confocal difference of medium and long-focus lenses in day and night use is solved.

The invention relates to the technical field of optical detection, and particularly provides a mirror surface detection method for a large-aperture spliced telescope, which comprises the following steps of: emitting light from a focus position by using a light source, reflecting the light through a mirror surface of the large-aperture spliced telescope to enter a discrete lens arranged at the rear end, and splitting the light by using a spectroscope to obtain a split light beam; the first light beam enters the camera to obtain interference fringes of the splicing seams, the second light beam enters the optical switch to carry out aperture coding, and the mirror surface precision of the large-aperture spliced telescope can be determined according to the code of each splicing seam and the confocal and co-phase information of the sub-reflectors on the two sides of the splicing seam. According to the invention, splicing seam detection is carried out through focus reverse auto-collimation, the problem that an oversized collimator is needed traditionally is avoided, point-by-point detection is carried out on the sub-reflectors according to the splicing seam, and confocal and co-phase detection of the adjacent sub-reflectors is realized according to interference fringes.

The present invention relates to an optical system and a method for chromatic confocal spectral-domain optical coherence tomography or for chromatic confocal two-beam interferometry. The optical system comprises a multispectral light source unit configured to generate a plurality of spatially coherent multispectral light beams with spectra having a respective centroid wavenumbers, an achromatic focusing unit configured such that in at least a paraxial region around a common point located on an optical axis at the output of the achromatic focusing unit, the wavefronts of the respective spatially coherent multispectral light beams have different radii of curvatures, a chromatic confocal dual-beam interferometer having an non-zero optical path difference arranged downstream of the multispectral light source unit and a detection unit for detecting light returned from the dual-beam interferometer. The reference arm of the double-beam interferometer is configured to be achromatic and the object arm to have chromatic depth slitting of foci. In the reference arm, a plurality of depth separated reference light spots are formed. In the object arm, a plurality of at least partially colinear and overlapping multispectral stretches of diffraction limited light spots extended in a depth direction of the object arm is formed. The light reflected by a current sharply focused diffraction limited object light spot of each of the multispectral stretches of diffraction limited light spots is combined with a respective reference light spot, is confocally discriminated by a confocal discrimination unit of the detection unit and subsequently detected by at least one spectrometer, evaluation dual-beam interferometer or fast detector detects the confocally discriminated light.

The invention provides a multi-focus excitation confocal fluorescence microscopic imaging flow cytometry screening method. The method is characterized in that a laser beam generates three laser beams through a spatial light modulator, and the three laser beams are coherently superposed in a focal plane of a microscope objective to generate a two-dimensional optical lattice light field. And after the other laser beam is shaped by the cylindrical lens, linear laser optical tweezers are realized through the microscope objective, cells to be detected in an imaging detection area of the micro-flow chip are captured, and accurate active optical control on the rotation angle of the cells to be detected is realized. In a cell rotation process, a two-dimensional optical lattice light field rapidly scans in a focal plane at different angles, and a fluorophore in the cell is excited to generate a fluorescence signal. The confocal pinhole array installed at the position conjugate with the focal plane eliminates background fluorescence, a high-spatial-resolution fluorescence image of a three-dimensional structure in the cell is obtained, and cell screening is achieved. The method provided by the invention has the characteristics of high detection rate, high accuracy and the like, and has wide application prospects in the research fields of biology, medicine and life science.

The invention discloses a phase modulation method of an achromatic liquid crystal holographic lens, and belongs to the technical field of holographic optics. According to the method, the spatial orientation distribution of liquid crystal molecules is regulated and controlled, a multi-wavelength phase modulation model is constructed, and synchronous focusing of red light, green light and blue light is achieved. The method specifically comprises the following steps: calculating a liquid crystal molecule deflection angle according to an incident light wavelength and a lens position to form refractive index gradient distribution; holographic phase distribution is generated based on molecular orientation, and light rays with different wavelengths are focused to the same focus; the three-wavelength focus light intensity deviation is controlled by dynamically optimizing the phase intensity coefficient and combining finite element simulation iteration adjustment. According to the invention, the chromatic aberration phenomenon of a traditional lens is eliminated, confocal plane focusing of light with different wavelengths within a certain focal length range is realized, and the focus intensity consistency is improved. The prepared ultrathin liquid crystal lens is low in thickness, obviously improves the light focusing efficiency, and is suitable for a high-precision imaging system and display equipment.

This invention discloses a large-aperture medium-long focal length day-night confocal lens and electronic device. The lens comprises, from object side to image side, a first lens, a second lens, an aperture stop, a third lens, a fourth lens, a fifth lens, a sixth lens, and a seventh lens. The first lens has positive optical power and has an object-side surface facing the object side and an image-side surface facing the object side; the object-side surface is convex, and the image-side surface is concave. The ratio of the first lens to the lens focal length ranges from 0.961 to 1.280:1. The second lens also has positive optical power and has an object-side surface facing the object side and an image-side surface facing the object side; the object-side surface is convex, and the image-side surface is concave. The ratio of the second lens to the lens focal length ranges from 0.719 to 1.514:1, etc. This invention solves the confocal difference problem of medium-long focal length lenses during day and night use through lens configuration and reasonable optical power distribution.

The invention belongs to the technical field of spectral measurement, and particularly relates to linear confocal spectral measurement equipment. The system comprises an object-side lens group, a half-reflecting mirror, a relay lens group, a confocal group, an image-side lens group and an image sensor. The confocal group comprises a light source; the light source emits a light beam to the relay lens group; a relay lens group which emits the light beam emitted by the light source to the half-reflecting mirror; a half mirror that emits the light beam that has passed through the relay lens group toward the object-side lens group; an object-side lens group that emits the light beam that has passed through the object-side lens group toward an object-side region; and the half-reflecting mirror, the image space lens group and the image sensor form an image acquisition system. The method has the advantages that equipment cost is saved, the position of the measured object can be accurately judged, and then three-dimensional information of the surface of the measured object is accurately scanned.

The invention provides a spliced detector flatness large-flux in-situ detection method which comprises the following steps: a light source emits a light beam which is compressed by a cylindrical lens, then is dispersed by a dispersion prism and respectively enters the edges of two adjacent detectors, and the two light beams are reflected by the surfaces of the detectors and then converge to generate dispersion stripes; a fixed difference calibration mode is adopted to calibrate stripe slope singularity caused by edge stripe variation in the dispersion stripe forming process; a band elimination filter is used for generating band elimination of a specific wave band in the dispersion fringes, and the channel spectrum is tested by analyzing the characteristics of the band elimination; the edge position of each detector is finely adjusted by using a dispersion prism, and the edge position of each detector is adjusted through deviation of a pupil position in combination with multi-point light emitted from one side of a wide-angle optical system by using an optical fiber interconnection system. According to the invention, the confocal and co-phase adjustment speed and precision of the spliced detector are greatly improved, and the regulation and control requirements of extremely high information flux and rapid convergence of a large-aperture system are met.

The invention discloses a long-focal-length low-light night vision optical lens and electronic equipment. The lens sequentially comprises a first lens, a second lens, a third lens, a fourth lens, a fifth lens, a sixth lens and a seventh lens from the object side to the image side. The second lens and the third lens are mutually glued to form a first doublet lens, and the fourth lens and the fifth lens are mutually glued to form a second doublet lens; the first lens has positive diopter, and the object side surface is a convex surface; the second lens has positive diopter, the object side surface is a convex surface, and the image side surface is a convex surface; the third lens has negative diopter, the object side surface is a concave surface, and the image side surface is a concave surface; the fourth lens has positive diopter; the fifth lens has negative diopter, the object side surface is a concave surface, and the image side surface is a concave surface; the sixth lens has positive diopter, the object side surface is a convex surface, and the image side surface is a convex surface; the seventh lens has negative diopter, the object side surface is a concave surface, and the image side surface is a convex surface. According to the scheme, the positive and negative diopter lenses are reasonably matched, and the doublet lens is arranged, so that chromatic aberration is effectively corrected, and confocal of visible light and infrared light is realized.

The invention relates to the technical field of ultrafast laser spectrum technology and precision optical design, in particular to a flat-topped homogenization pumping light spot generation system and method for transient absorption spectrum, and the system sequentially comprises a micro lens array, a field lens, a soft-edge diaphragm, a spatial filter and a focusing lens along the light path propagation direction. After incident irregular pump light is homogenized by the micro-lens array and collimated by the field lens, soft edge cutting is carried out by the soft edge diaphragm, and a circular flat-topped light spot is output; residual periodic intensity noise in the light field is filtered through a spatial filter formed by a confocal lens group and a pinhole diaphragm; and finally, a flat-topped light spot which is highly uniform in energy density, free of internal modulation and smooth in edge is obtained and is focused to a sample. According to the invention, the problem that the light spot shape, uniformity, edge smoothness and internal noise are difficult to consider at the same time in the prior art is solved, and the spatial overlapping quality of the pump light and the probe light and the signal-to-noise ratio of transient absorption spectrum measurement are remarkably improved.

The invention discloses a measuring device and a measuring method for key parameters of a sheet. The device comprises a frame main body, a mounting bottom plate, a two-dimensional hollow moving platform, a confocal laser displacement sensor, a clamp assembly, a mounting bracket, a dip angle adjusting structure assembly and a control system. Two pieces of parallel glass are respectively arranged between an upper measuring head and a lower measuring head of the confocal laser sensor, and a detected sheet on the clamp assembly is located between the two pieces of parallel glass. During measurement, the two pieces of parallel glass are adjusted to be at different beta small angles n times, distance data from the upper measuring head and the lower measuring head to the upper surface and the lower surface of the detected sheet are read respectively, vertical distances are converted, and key parameters such as thickness deviation and curvature of the detected sheet are calculated respectively. The invention provides the sheet key parameter measuring device which is high in precision, convenient and efficient to operate, automatic and capable of realizing batch detection and the measuring method thereof.

A method and a microscope determine flow properties in a sample chamber through which a medium flows. The method includes detecting detection radiation from a confocal volume generated in the sample chamber with a plurality of detector elements of a detector in the form of a detector array at a plurality of points in time. The detector is arranged in a plane conjugate to the rear-side image plane of an objective. The measurement values from the detector elements can be analyzed individually. Cross correlations of the acquired measurement values from the detector elements of at least one pair are generated in two directions and analyzed. The confocal volume is generated at at least two mutually different locations of the sample chamber. At each location, a speed and optionally a movement direction of the medium are determined to create a flow profile over at least one region of the sample chamber.

The present invention belongs to the technical field of objective optical systems and provides a large-aperture, non-distortion, fixed-focus objective optical system adapted for a 1-inch low-light-level CMOS or CCD image plane. The system comprises a first lens group, an aperture, and a second lens group, arranged in sequence. The first lens group comprises a first lens, a second lens, and a third lens; and the second lens group comprises a fourth lens, a fifth lens, a sixth lens, and a seventh lens. The optical specifications achieved by the system are: a wavelength band of 480nm to 1000nm, a maximum distortion of no more than 0.5%, a pixel size of 800px × 600px, and a field of view of 35.5° × 27°. The present invention aims to address the problem of existing large-aperture objective optical systems, which suffers from large distortion indexes that cause image distortion and poor overall imaging quality. The system features high resolution, a large relative aperture, and a wide wavelength band design, achieving day and night confocality, and excellent imaging quality in extreme environments.

The invention discloses an objective optical system for a paranasal sinus endoscope, which comprises a first lens group with negative focal power, a second lens group with positive focal power, a diaphragm, a third lens group with negative focal power and a fourth lens group with positive focal power in sequence from an object side, and meets the following conditional expressions: (1) 14.0 lt; vd (RN) lt; 19.6, 19.6; (2) 18.0 lt; vd (RN) lt; 23.3, 23.3; (3) 380 lt; vd (RN) / (ng-nF) lt; 1080, 1080; (4) vd (RP) + vd (RN) lt; 79); (5) f1 / flt; -1.1,...,-1.1; (6) f2 / flt; -2.2,-2.2; (7) 1.92 lt; f < 2 > is 6 / f < lt >; 3; the effect of inhibiting magnification chromatic aberration is achieved, the requirement for a large clear range can be met, and confocal of white light and fluorescent light is achieved; meanwhile, optical shooting guarantee is provided for the paranasal sinus endoscopic medical imaging technology, the completeness and authenticity of optical data are guaranteed, and the effectiveness of the optical data is improved for imaging medical treatment and remote medical treatment.

The present invention provides a method for constructing the light field distribution of the exit pupil plane of a confocal microscope system. By using geometric optics and reasonable mathematical approximation to analyze the information of the confocal microscope system parameters facing any two-dimensional tilt angle, the light field distribution of the exit pupil plane of the objective lens of the confocal microscope system is constructed, which not only avoids the complexity of the construction method based on diffraction theory and the huge amount of calculation when simulating the distribution, but also avoids the large error caused by approximating the reflected light as a circle in the construction method based on geometric optics, which cannot truly reflect the actual distribution. The method for constructing the light field distribution of the exit pupil plane of the confocal microscope system provided by the present invention takes into account the physical phenomena under actual conditions, and constructs the light field distribution of the exit pupil plane of the objective lens of the confocal microscope system that is more in line with the actual situation.

The invention relates to a device for confocal coloured, preferably one-dimensional distance and / or thickness measurement, comprising an illumination diaphragm (10) and a confocal coloured optical device, an optical device (21) being arranged between the illumination diaphragm (10) and the confocal coloured optical device, the optical device (21) divides the measurement light emitted from the illumination diaphragm (10) into a plurality of measurement light partial light beams (3, 4), the measurement light partial light beams (3, 4), after passing through the confocal color optical device, are projected on the measurement object at transversely offset measurement points, the probe light partial beam reflected by the measuring point is irradiated onto the receiving diaphragm via a confocal color optical device (1) and an optical device (21), and wherein a common probe light beam is present after passing through the receiving diaphragm. The invention further relates to a device and to a method for confocal colored, preferably one-dimensional, distance and / or thickness measurement.

The application discloses a kind of multi-beam confocal mask defect detection system and method based on fiber laser array, the present application obtains multi-point scanning light field as illumination light source based on fiber laser array, and can be based on the arrangement of laser array Realize the regulation and control of scanning light field, through the joint action of motion platform and multi-surface rotating mirror, realize fast and accurate mask two-dimensional scanning imaging, and based on confocal microscopic imaging method, with high-power microscope objective and photomultiplier tube Realize high-resolution detection of mask defect.Compared with the traditional point scanning type mask defect detection system, the present application has the advantages of high detection resolution, fast scanning speed, multi-point scanning light field can be freely regulated and controlled, and does not need to introduce additional diffractive optical element.

The line spectrum confocal measuring head comprises a slit and a lens barrel, the slit is arranged at one end of the lens barrel and is used for introducing a complex-color line light source with a fixed bandwidth into the lens barrel, a dispersion lens group is distributed in the lens barrel and along an emission light path of the slit, so that the complex-color light is separated and focused through the dispersion lens group; and the light with different wavelengths is focused at different positions in the optical axis direction and is sequentially distributed along with increasing of the wavelengths, so that a measured object is placed in a measuring head dispersion area, and the current position of the measured object relative to the dispersion lens group is obtained according to peak information of a reflected light spectrum on the surface of the measured object. The linear light source of the measuring head can realize linear field-of-view detection and obtain field-of-view position information on the axis and outside the axis of a measured object at the same time, the transverse measurement efficiency is improved while the longitudinal measurement range is ensured, the longitudinal measurement range can reach + / -3.6 mm, and the transverse measurement range can reach + / -8.5 mm.

The invention discloses a starlight-level high-definition optical lens, which belongs to the technical field of optical lenses and comprises a first lens, a diaphragm, a second lens, a third lens, a fourth lens and a photosensitive chip which are sequentially arranged along an optical axis from an object plane to an image plane, and the first lens, the third lens and the fourth lens are plastic aspheric lenses. The second lens is a glass spherical lens; the focal lengths of the first lens, the second lens, the third lens and the fourth lens are negative, positive, positive and negative in sequence. According to the optical lens, the FNo. is 1.6, the resolution reaches more than 4 million pixels by 80%, night vision confocal and purple halo weakening are achieved, and the cost is low.

The invention provides an on-machine space pose calibration compensation method for a spectrum confocal sensor, and the method comprises the steps: carrying out the mobile distance measurement of a target plane of the spectrum confocal sensor, and determining the pitch angle offset of the spectrum confocal sensor; determining the eccentric offset of the spectrum confocal sensor and the geometrical relationship among a probe coordinate system, a reference coordinate system and a workpiece coordinate system according to the confocal data of the optical axis of the spectrum confocal sensor and the C axis of the three-axis horizontal centering vehicle during centering; when the spectral confocal sensor scans and measures a measured curved surface of a measured workpiece, measuring point coordinates of the spectral confocal sensor in a probe coordinate system are converted into target coordinates in a workpiece coordinate system, so that the system structure and the calibration process are greatly simplified on the premise of ensuring the measurement precision; and the implementability, the stability and the measurement consistency in the on-machine environment are improved.

The present invention discloses a system and method for measuring the rotation accuracy of a hydrostatic bearing spindle. The system includes: a standard ball, which is fixed on a hydrostatic bearing spindle to achieve coaxial motion with the hydrostatic bearing spindle; an optical measurement system; and a data processing system. When the hydrostatic bearing spindle rotates, the optical measurement system simultaneously collects the displacement of the outer contour of the standard ball, and the collected displacement data is transmitted to the data processing system for error separation calculation. The present invention measures the rotation error of the hydrostatic bearing spindle by combining laser heterodyne interference with a confocal microscope system, and achieves error separation by a three-point method. Not only does it collect a higher-precision rotation displacement through a highly sensitive optical measurement system, but it also improves the rotation measurement accuracy of the hydrostatic bearing spindle.

The invention discloses a super-starlight-level high-definition optical lens, and relates to the technical field of optical lenses. The invention relates to a super-starlight-level high-definition optical lens. The number of lenses with focal power in the super-starlight-level high-definition optical lens is eight. The optical lens is sequentially provided with a first lens, a second lens, a third lens, a fourth lens, a fifth lens, a sixth lens, a seventh lens and an eighth lens from an object plane to an image plane in the light direction. The second lens and the third lens are combined to form a balsaming lens, and the fourth lens and the fifth lens are combined to form a balsaming lens; the first lens, the fourth lens and the fifth lens are all glass spherical lenses, and the others are all plastic aspheric lenses. The super-starlight-level high-definition optical lens provided by the embodiment of the invention meets the requirements of a lens starlight function, no out-of-focus at high and low temperatures, high resolution, night vision confocal and purple halo.

The invention discloses a structure and a method for wavelength modulation longitudinal polarization confocal vortex generation and topological charge, and belongs to the technical field of scattered field regulation and control of a surface plasmon field, and the structure comprises a plurality of bowknot type slit element atoms which are etched on a substrate and have the same shape and size, and a circular grating, the bowknot type element atoms are uniformly arranged on the circular contour according to different rotation angles theta and share the same circle center with the circular grating. The structure constructed by the invention can realize generation, disappearance and topological charge of wavelength-controlled non-double-wave longitudinal polarization confocal vortex light spots, and can realize confocal of dual-wavelength longitudinal polarization hollow light spots. Based on the above properties, the device can be applied to a hybrid multi-wavelength far field system.

This invention provides an electrically controlled microsphere-enhanced liquid crystal layer, a differential confocal microscopy imaging method and system. The electrically controlled microsphere-enhanced liquid crystal layer includes an electrically controlled liquid crystal layer and a microsphere array disposed on the electrically controlled liquid crystal layer. The method includes the following steps: converting a single-wavelength parallel beam into circularly polarized light, focusing it through an objective lens and an objective lens driver, and scanning the sample through the electrically controlled microsphere-enhanced liquid crystal layer; applying a voltage to the electrically controlled microsphere-enhanced liquid crystal layer; collecting the reflected or scattered return beam from the sample, splitting it into two probe beam paths, and generating corresponding first and second images; calculating the image quality evaluation value of the two-dimensional lateral image based on this, and using this as a feedback signal to apply a voltage to the electrically controlled microsphere-enhanced liquid crystal layer. This invention introduces an electrically controlled microsphere-enhanced liquid crystal layer into the imaging path of a confocal microscope, achieving a significant enhancement in lateral resolution. By controlling the liquid crystal with an applied voltage, the equivalent refractive index can be dynamically adjusted.

The invention relates to the technical field of optical microscopic imaging, and discloses a micro electro mechanical system scanning confocal fluorescence super-resolution microscopic endoscopic imaging system and method. Exciting light emitted by the laser light source sequentially passes through the electrooptical modulator, the dichroic mirror, the pinhole light filter, the reflector, the objective lens, the optical fiber bundle, the achromatic lens, the MEMS two-dimensional scanning mirror and the lens group and then is focused on a sample, and the exciting light interacts with a fluorescent marker in the sample to excite the sample to generate fluorescent light; fluorescent light generated by the sample is reversely transmitted to the dichroic mirror according to the principle of light path reversibility and then is collected by the PMT detector. The SIM technology and the MEMS confocal fluorescence microendoscope imaging technology are combined, super-resolution images are obtained while in-vivo peeping is achieved, the imaging resolution is improved, more accurate and comprehensive iconography information can be provided for clinicians, and a more accurate and reliable tool is provided for the fields of scientific research and medical diagnosis.