79 results about "Confocal" patented technology

According to the laser confocal scanning microscope, the scanning image distortion correction method and the acquisition card provided by the invention, the transflective mirror is fixedly arranged between the resonance galvanometer and the galvanometer galvanometer, and the monitoring light path and the second detector are arranged in the transmission direction of the transflective mirror. The acquisition card is respectively connected with the first detector and the second detector; the confocal signal and the grating signal which are synchronously acquired by the acquisition card in an isochronous manner are twin images in time and space, and the grating image formed by the grating signal depicts the movement of the resonance galvanometer in the scanning process, so that distortion correction can be performed on the twin object plane image of the grating image through distortion analysis on the grating image, and the distortion correction accuracy is improved. Therefore, the correction accuracy is effectively improved, and the method is not easily influenced by factors such as environment, service life and optical path deviation. Moreover, in the distortion correction process, correction is carried out through the odd-numbered line sub-graphs and the even-numbered line sub-graphs, so that the distortion correction accuracy is further improved.

The invention discloses a method for measuring the thickness of a spectral confocal sensor when optical axes are uneven and a measured material is inclined, and relates to the technical field of displacement or thickness measurement. The method comprises the following steps: calibrating a confocal distance with a relative inclination angle of a standard material by using the standard material with known thickness, establishing a relationship between the thickness of the measured material with the relative inclination angle of the measured material and the thickness of the standard material with the relative inclination angle of the standard material, and establishing a relationship between the relative inclination angle of the standard material and the relative inclination angle of the measured material; and establishing a relationship between the light spot distance and the thickness of the measured material, and finally establishing a thickness measurement model under the conditions that the optical axes of the spectrum confocal sensors are inclined relative to the measured material and the optical axes of the two spectrum confocal sensors are not aligned at the same time. According to the measurement method, models under two conditions are considered at the same time, the measurement method is more suitable for the actual condition, and the measurement precision is improved.

The invention relates to the technical field of optical detection, and particularly provides a mirror surface detection method for a large-aperture spliced telescope, which comprises the following steps of: emitting light from a focus position by using a light source, reflecting the light through a mirror surface of the large-aperture spliced telescope to enter a discrete lens arranged at the rear end, and splitting the light by using a spectroscope to obtain a split light beam; the first light beam enters the camera to obtain interference fringes of the splicing seams, the second light beam enters the optical switch to carry out aperture coding, and the mirror surface precision of the large-aperture spliced telescope can be determined according to the code of each splicing seam and the confocal and co-phase information of the sub-reflectors on the two sides of the splicing seam. According to the invention, splicing seam detection is carried out through focus reverse auto-collimation, the problem that an oversized collimator is needed traditionally is avoided, point-by-point detection is carried out on the sub-reflectors according to the splicing seam, and confocal and co-phase detection of the adjacent sub-reflectors is realized according to interference fringes.

The present invention relates to an optical system and a method for chromatic confocal spectral-domain optical coherence tomography or for chromatic confocal two-beam interferometry. The optical system comprises a multispectral light source unit configured to generate a plurality of spatially coherent multispectral light beams with spectra having a respective centroid wavenumbers, an achromatic focusing unit configured such that in at least a paraxial region around a common point located on an optical axis at the output of the achromatic focusing unit, the wavefronts of the respective spatially coherent multispectral light beams have different radii of curvatures, a chromatic confocal dual-beam interferometer having an non-zero optical path difference arranged downstream of the multispectral light source unit and a detection unit for detecting light returned from the dual-beam interferometer. The reference arm of the double-beam interferometer is configured to be achromatic and the object arm to have chromatic depth slitting of foci. In the reference arm, a plurality of depth separated reference light spots are formed. In the object arm, a plurality of at least partially colinear and overlapping multispectral stretches of diffraction limited light spots extended in a depth direction of the object arm is formed. The light reflected by a current sharply focused diffraction limited object light spot of each of the multispectral stretches of diffraction limited light spots is combined with a respective reference light spot, is confocally discriminated by a confocal discrimination unit of the detection unit and subsequently detected by at least one spectrometer, evaluation dual-beam interferometer or fast detector detects the confocally discriminated light.

The invention provides a multi-focus excitation confocal fluorescence microscopic imaging flow cytometry screening method. The method is characterized in that a laser beam generates three laser beams through a spatial light modulator, and the three laser beams are coherently superposed in a focal plane of a microscope objective to generate a two-dimensional optical lattice light field. And after the other laser beam is shaped by the cylindrical lens, linear laser optical tweezers are realized through the microscope objective, cells to be detected in an imaging detection area of the micro-flow chip are captured, and accurate active optical control on the rotation angle of the cells to be detected is realized. In a cell rotation process, a two-dimensional optical lattice light field rapidly scans in a focal plane at different angles, and a fluorophore in the cell is excited to generate a fluorescence signal. The confocal pinhole array installed at the position conjugate with the focal plane eliminates background fluorescence, a high-spatial-resolution fluorescence image of a three-dimensional structure in the cell is obtained, and cell screening is achieved. The method provided by the invention has the characteristics of high detection rate, high accuracy and the like, and has wide application prospects in the research fields of biology, medicine and life science.

The invention discloses a phase modulation method of an achromatic liquid crystal holographic lens, and belongs to the technical field of holographic optics. According to the method, the spatial orientation distribution of liquid crystal molecules is regulated and controlled, a multi-wavelength phase modulation model is constructed, and synchronous focusing of red light, green light and blue light is achieved. The method specifically comprises the following steps: calculating a liquid crystal molecule deflection angle according to an incident light wavelength and a lens position to form refractive index gradient distribution; holographic phase distribution is generated based on molecular orientation, and light rays with different wavelengths are focused to the same focus; the three-wavelength focus light intensity deviation is controlled by dynamically optimizing the phase intensity coefficient and combining finite element simulation iteration adjustment. According to the invention, the chromatic aberration phenomenon of a traditional lens is eliminated, confocal plane focusing of light with different wavelengths within a certain focal length range is realized, and the focus intensity consistency is improved. The prepared ultrathin liquid crystal lens is low in thickness, obviously improves the light focusing efficiency, and is suitable for a high-precision imaging system and display equipment.

This invention discloses a large-aperture medium-long focal length day-night confocal lens and electronic device. The lens comprises, from object side to image side, a first lens, a second lens, an aperture stop, a third lens, a fourth lens, a fifth lens, a sixth lens, and a seventh lens. The first lens has positive optical power and has an object-side surface facing the object side and an image-side surface facing the object side; the object-side surface is convex, and the image-side surface is concave. The ratio of the first lens to the lens focal length ranges from 0.961 to 1.280:1. The second lens also has positive optical power and has an object-side surface facing the object side and an image-side surface facing the object side; the object-side surface is convex, and the image-side surface is concave. The ratio of the second lens to the lens focal length ranges from 0.719 to 1.514:1, etc. This invention solves the confocal difference problem of medium-long focal length lenses during day and night use through lens configuration and reasonable optical power distribution.

The invention provides a spliced detector flatness large-flux in-situ detection method which comprises the following steps: a light source emits a light beam which is compressed by a cylindrical lens, then is dispersed by a dispersion prism and respectively enters the edges of two adjacent detectors, and the two light beams are reflected by the surfaces of the detectors and then converge to generate dispersion stripes; a fixed difference calibration mode is adopted to calibrate stripe slope singularity caused by edge stripe variation in the dispersion stripe forming process; a band elimination filter is used for generating band elimination of a specific wave band in the dispersion fringes, and the channel spectrum is tested by analyzing the characteristics of the band elimination; the edge position of each detector is finely adjusted by using a dispersion prism, and the edge position of each detector is adjusted through deviation of a pupil position in combination with multi-point light emitted from one side of a wide-angle optical system by using an optical fiber interconnection system. According to the invention, the confocal and co-phase adjustment speed and precision of the spliced detector are greatly improved, and the regulation and control requirements of extremely high information flux and rapid convergence of a large-aperture system are met.

The invention relates to the technical field of ultrafast laser spectrum technology and precision optical design, in particular to a flat-topped homogenization pumping light spot generation system and method for transient absorption spectrum, and the system sequentially comprises a micro lens array, a field lens, a soft-edge diaphragm, a spatial filter and a focusing lens along the light path propagation direction. After incident irregular pump light is homogenized by the micro-lens array and collimated by the field lens, soft edge cutting is carried out by the soft edge diaphragm, and a circular flat-topped light spot is output; residual periodic intensity noise in the light field is filtered through a spatial filter formed by a confocal lens group and a pinhole diaphragm; and finally, a flat-topped light spot which is highly uniform in energy density, free of internal modulation and smooth in edge is obtained and is focused to a sample. According to the invention, the problem that the light spot shape, uniformity, edge smoothness and internal noise are difficult to consider at the same time in the prior art is solved, and the spatial overlapping quality of the pump light and the probe light and the signal-to-noise ratio of transient absorption spectrum measurement are remarkably improved.

The present invention belongs to the technical field of objective optical systems and provides a large-aperture, non-distortion, fixed-focus objective optical system adapted for a 1-inch low-light-level CMOS or CCD image plane. The system comprises a first lens group, an aperture, and a second lens group, arranged in sequence. The first lens group comprises a first lens, a second lens, and a third lens; and the second lens group comprises a fourth lens, a fifth lens, a sixth lens, and a seventh lens. The optical specifications achieved by the system are: a wavelength band of 480nm to 1000nm, a maximum distortion of no more than 0.5%, a pixel size of 800px × 600px, and a field of view of 35.5° × 27°. The present invention aims to address the problem of existing large-aperture objective optical systems, which suffers from large distortion indexes that cause image distortion and poor overall imaging quality. The system features high resolution, a large relative aperture, and a wide wavelength band design, achieving day and night confocality, and excellent imaging quality in extreme environments.

The present invention provides a method for constructing the light field distribution of the exit pupil plane of a confocal microscope system. By using geometric optics and reasonable mathematical approximation to analyze the information of the confocal microscope system parameters facing any two-dimensional tilt angle, the light field distribution of the exit pupil plane of the objective lens of the confocal microscope system is constructed, which not only avoids the complexity of the construction method based on diffraction theory and the huge amount of calculation when simulating the distribution, but also avoids the large error caused by approximating the reflected light as a circle in the construction method based on geometric optics, which cannot truly reflect the actual distribution. The method for constructing the light field distribution of the exit pupil plane of the confocal microscope system provided by the present invention takes into account the physical phenomena under actual conditions, and constructs the light field distribution of the exit pupil plane of the objective lens of the confocal microscope system that is more in line with the actual situation.

The application discloses a kind of multi-beam confocal mask defect detection system and method based on fiber laser array, the present application obtains multi-point scanning light field as illumination light source based on fiber laser array, and can be based on the arrangement of laser array Realize the regulation and control of scanning light field, through the joint action of motion platform and multi-surface rotating mirror, realize fast and accurate mask two-dimensional scanning imaging, and based on confocal microscopic imaging method, with high-power microscope objective and photomultiplier tube Realize high-resolution detection of mask defect.Compared with the traditional point scanning type mask defect detection system, the present application has the advantages of high detection resolution, fast scanning speed, multi-point scanning light field can be freely regulated and controlled, and does not need to introduce additional diffractive optical element.

The invention discloses a starlight-level high-definition optical lens, which belongs to the technical field of optical lenses and comprises a first lens, a diaphragm, a second lens, a third lens, a fourth lens and a photosensitive chip which are sequentially arranged along an optical axis from an object plane to an image plane, and the first lens, the third lens and the fourth lens are plastic aspheric lenses. The second lens is a glass spherical lens; the focal lengths of the first lens, the second lens, the third lens and the fourth lens are negative, positive, positive and negative in sequence. According to the optical lens, the FNo. is 1.6, the resolution reaches more than 4 million pixels by 80%, night vision confocal and purple halo weakening are achieved, and the cost is low.

The invention provides an on-machine space pose calibration compensation method for a spectrum confocal sensor, and the method comprises the steps: carrying out the mobile distance measurement of a target plane of the spectrum confocal sensor, and determining the pitch angle offset of the spectrum confocal sensor; determining the eccentric offset of the spectrum confocal sensor and the geometrical relationship among a probe coordinate system, a reference coordinate system and a workpiece coordinate system according to the confocal data of the optical axis of the spectrum confocal sensor and the C axis of the three-axis horizontal centering vehicle during centering; when the spectral confocal sensor scans and measures a measured curved surface of a measured workpiece, measuring point coordinates of the spectral confocal sensor in a probe coordinate system are converted into target coordinates in a workpiece coordinate system, so that the system structure and the calibration process are greatly simplified on the premise of ensuring the measurement precision; and the implementability, the stability and the measurement consistency in the on-machine environment are improved.

The invention discloses a super-starlight-level high-definition optical lens, and relates to the technical field of optical lenses. The invention relates to a super-starlight-level high-definition optical lens. The number of lenses with focal power in the super-starlight-level high-definition optical lens is eight. The optical lens is sequentially provided with a first lens, a second lens, a third lens, a fourth lens, a fifth lens, a sixth lens, a seventh lens and an eighth lens from an object plane to an image plane in the light direction. The second lens and the third lens are combined to form a balsaming lens, and the fourth lens and the fifth lens are combined to form a balsaming lens; the first lens, the fourth lens and the fifth lens are all glass spherical lenses, and the others are all plastic aspheric lenses. The super-starlight-level high-definition optical lens provided by the embodiment of the invention meets the requirements of a lens starlight function, no out-of-focus at high and low temperatures, high resolution, night vision confocal and purple halo.

The invention discloses a structure and a method for wavelength modulation longitudinal polarization confocal vortex generation and topological charge, and belongs to the technical field of scattered field regulation and control of a surface plasmon field, and the structure comprises a plurality of bowknot type slit element atoms which are etched on a substrate and have the same shape and size, and a circular grating, the bowknot type element atoms are uniformly arranged on the circular contour according to different rotation angles theta and share the same circle center with the circular grating. The structure constructed by the invention can realize generation, disappearance and topological charge of wavelength-controlled non-double-wave longitudinal polarization confocal vortex light spots, and can realize confocal of dual-wavelength longitudinal polarization hollow light spots. Based on the above properties, the device can be applied to a hybrid multi-wavelength far field system.

This invention provides an electrically controlled microsphere-enhanced liquid crystal layer, a differential confocal microscopy imaging method and system. The electrically controlled microsphere-enhanced liquid crystal layer includes an electrically controlled liquid crystal layer and a microsphere array disposed on the electrically controlled liquid crystal layer. The method includes the following steps: converting a single-wavelength parallel beam into circularly polarized light, focusing it through an objective lens and an objective lens driver, and scanning the sample through the electrically controlled microsphere-enhanced liquid crystal layer; applying a voltage to the electrically controlled microsphere-enhanced liquid crystal layer; collecting the reflected or scattered return beam from the sample, splitting it into two probe beam paths, and generating corresponding first and second images; calculating the image quality evaluation value of the two-dimensional lateral image based on this, and using this as a feedback signal to apply a voltage to the electrically controlled microsphere-enhanced liquid crystal layer. This invention introduces an electrically controlled microsphere-enhanced liquid crystal layer into the imaging path of a confocal microscope, achieving a significant enhancement in lateral resolution. By controlling the liquid crystal with an applied voltage, the equivalent refractive index can be dynamically adjusted.

The present application relates to a kind of large aperture day and night wide-angle lens, the optical system of the lens includes first lens, second lens, third lens, diaphragm, fourth lens, fifth lens and sixth lens in turn from left to right along the light path of light incidence, first lens is negative meniscus, second lens is double concave negative lens, third lens is double convex positive lens, fourth lens is double convex positive lens, fifth lens is negative meniscus, and sixth lens is double convex positive lens;The first lens, second lens and sixth lens are glass spherical lens;Second lens, fourth lens and fifth lens are plastic aspherical lens.The present application adopts the design of three glass lenses and three plastic lenses, and the shape and optical power of lens are reasonably matched, while meeting the optical performance of 4K high resolution, good environmental stability and the like, meeting the needs of large aperture, large target surface, day and night focusing and the like, and the whole lens is more compact.

A confocal three-dimensional sensor (22) for measuring height of a point on an object (10) is provided. The sensor (22) includes a light source (2) and a light source modulator (16) configured to temporally modulate the light source intensity. A source pinhole aperture (4) is positioned to be illuminated by the light source (2) and a focus-tunable lens (8) is configured to focus illumination passing through the source pinhole aperture (4) onto the object (10). A detector pinhole aperture (12) is configured to receive reflected light from the object (10), wherein the focus-tunable lens (8) is configured to image the reflected light from the object (10) onto the detector pinhole aperture (12). A detector (14) and integrator (15) are configured to output a measurement indicative of total light transmitted through the detector pinhole aperture (12). A processor (20) is operably coupled to the detector (14), integrator (15), and light source modulator (16). The processor (20) is configured to synchronously cause the light source modulator (16) to modulate light source intensity while causing the focus tunable lens (8) to sweep axial focal position, the processor (20) being further configured to calculate a height of the point on the object (10) based on the output from the detector (14) and integrator (15).

The present application relates to the technical field of confocal adjustment, and particularly relates to a large-aperture segmented telescope discretization confocal testing and adjustment method, which comprises the following steps: S1: placing a microlens array on the focal plane of the segmented telescope to rearrange the spatial frequency of the focal point of the segmented telescope; S2: performing differential operation on the light intensity of each light spot and the light intensity of the central sub-aperture to obtain the distance from each light spot to the central sub-aperture; S3: performing testing in each direction by using an eight-neighborhood algorithm according to the distance from each light spot to the central sub-aperture to determine the adjustment step and direction of the segmented telescope; and S4: adjusting the spliced sub-mirror of the segmented telescope according to the adjustment step and direction to maximize the energy of the central sub-aperture. The microlens array is used to rearrange the spatial frequency of the focal point, and higher-precision confocal testing and adjustment are finally achieved.

The present invention discloses a high-performance infrared confocal ultra-clear security lens, which includes a first lens to a fifteenth lens; the first lens to the fifteenth lens each include an object side surface and an image side surface; the first lens to the third lens are a fixed lens group; the fourth lens to the sixth lens are a variable magnification lens group; the seventh lens to the ninth lens are a fixed lens group; the tenth lens to the fifteenth lens are a compensation lens group; the optical imaging lens has only the above fifteen lenses with refractive power. The present invention adopts a large light-through design to ensure that the relative illumination of the edge of the imaging surface is uniform; the entire system adopts non-thermal optimization, and under the condition of focusing at room temperature, high and low temperatures are not out of focus; the chromatic aberration is well optimized, with good image color reproduction, and no blue-purple edge phenomenon; the TTL is very short, and the total length of the structure is short; the resolution is high, the edge imaging is clear, and it can meet the 4K requirements, and the image quality is clear and stable; it has good infrared confocality, and can ensure clear imaging in night mode.

The invention discloses a line spectrum confocal contour measurement sensor based on diffuse reflection signal spectral imaging demodulation, and relates to the technical field of photoelectric precision measurement sensors. The device comprises a dispersion focusing illumination light path and a confocal spectral imaging detection light path. Different from a reflection symmetrical layout of a double-axis structure, a detection light path deviates from a mirror reflection direction and is perpendicular to a detected surface, confocal diffuse reflection information is received, and spectral imaging demodulation is carried out to obtain a contour. According to the scheme, while the vertical resolution equivalent to that of a double-axis spectrum confocal structure is kept, the dependence on a strong reflection signal is eliminated, so that the device can adapt to a complex high-dynamic surface with a wide-range reflection characteristic except for a high-reflection material, and meanwhile, a measurement inclination angle larger than that of a single-axis structure and a traditional double-axis structure is realized. Due to the fact that diffuse reflection signals are relatively weak, the inverse slit device is adopted, the signal intensity of the system is improved by optimizing the structure, and therefore the imaging quality and the signal collecting efficiency of the system are improved.

The present application relates to a kind of based on spectral confocal hemispherical harmonic resonator inner and outer surface topography measurement method.The present application includes: adjusting displacement motion platform and attitude adjustment platform makes spectral confocal measuring head optical axis and hemispherical harmonic resonator rotation shaft intersection;Divide scanning measurement interval and carry out curved surface parallel plate approximation at measurement point, record the theoretical angle between plate and spectral confocal measuring head vertical plane;Spectral confocal measuring head and hemispherical harmonic resonator carry out linear scanning motion and rotation motion respectively, collect the spectral peak position data of each measurement point on the surface of hemispherical harmonic resonator;Establish inclined plate compensation model to calculate the distance position information of the inner and outer surface of hemispherical harmonic resonator at each measurement point, and generate inner and outer surface topography after converting measurement result into point cloud.The method provided by the present application can effectively reduce the measurement error introduced by curved surface, and the whole appearance of hemispherical harmonic resonator inner and outer surface can be obtained by once scanning motion, and online measurement can be realized on processing equipment after simple debugging.

The invention discloses a confocal optical path system and method for suppressing stray light, and belongs to the technical field of optical precision measurement. According to the invention, the beam expander is moved forwards by 2-5 mm relative to the flat beam splitter prism, so that the light beam incident to the core beam splitter is actively converted into the Gaussian beam with the specific divergence angle from the parallel light, and is coupled with the symmetrically arranged confocal light paths, thereby solving the problem that in the existing heterodyne laser vibration measurement technology, the parallel light generates multi-path reflection on the surface of a planar optical element, so that the measurement precision is greatly improved. In the prior art, a stable parasitic interference cavity is formed, high-order and dynamic nonlinear errors and phase drift are introduced, and the technical problems of system complexity, high cost and difficult installation and adjustment caused by traditional suppression means (such as off-axis design and an ultrahigh antireflection film) are solved, the spatial coherence of stray light and main signal light is destroyed, the stray light intensity in the system is suppressed by about two orders of magnitude, and the system stability is improved. The non-linear distortion of a measurement signal is significantly reduced, and the adjustment tolerance and long-term stability of an optical path are improved at the same time.

The present invention discloses a gas Raman detection device based on a semiconductor laser self-locked enhancement cavity, belonging to the field of gas detection. The device comprises a laser unit, a laser linewidth narrowing unit, a self-locked enhancement cavity unit, and a Raman scattered light collection unit. A mode-matching lens is used to tilt the laser beam emitted by the semiconductor laser into an enhanced external cavity. The laser beam is then repeatedly reflected within a confocal spherical mirror cavity formed by a first spherical reflector M1 and a second spherical reflector M2. Part of the laser light is emitted from the external cavity and returns to the semiconductor laser, forming optical feedback, causing the semiconductor laser and the enhanced external cavity to resonate in frequency. The device eliminates the need for enhanced cavity length feedback, resulting in a simple and stable optical path layout, which can simultaneously reduce optical path complexity and device cost. The device boasts an external cavity laser power of tens of watts, and the laser linewidth narrowed by the laser linewidth narrowing unit enables the Raman signal spectrum to have higher resolution and intensity.

The present invention is a signal extraction and image reconstruction method for a wide-field illumination confocal microscopy imaging system, comprising the following steps: using each photosensitive pixel of a camera as a single-pixel detector to reconstruct an image; selecting signals emitted by object points conjugated to the photosensitive pixel of the camera from the reconstructed image, and reconstructing to obtain a diffraction image of the object point; defining a circle and an annulus from each reconstructed image with the image pixel point corresponding to each photosensitive pixel as the center, accumulating the grayscale values ​​corresponding to the pixel points on the circle and the annulus, and assigning the grayscale values ​​to the image pixel points corresponding to the photosensitive pixel conjugated to the object point, and reconstructing to obtain a confocal image I. 圆 and I 环 According to the conjugate mapping relationship between the modulation unit of the spatial light modulator and the photosensitive pixel of the camera, the confocal image I 圆 and I 环 Perform coordinate transformation to obtain the confocal image I′ formed by the object point conjugate with all modulation units of the spatial light modulator 圆 and I′ 环 .

A method of image enhancement of a reflectance confocal microscope is disclosed. The method comprises: receiving by a processor a first image captured by a detector of the confocal microscope, at a first position of a pinhole; receiving one or more second images captured by the detector, at at least one second position of the pinhole; and adding, by the processor, the one or more second images to the first image to reduce a speckle contrast in the combined image. In addition, the first position of the pinhole is a confocal position, and the at least one second position is a shifted position with respect to the confocal position.

The line spectrum confocal measuring head comprises a slit and a lens barrel, the slit is arranged at one end of the lens barrel and is used for introducing a complex-color line light source with a fixed bandwidth into the lens barrel, a dispersion lens group is distributed in the lens barrel and along an emission light path of the slit, so that the complex-color light is separated and focused through the dispersion lens group; and the light with different wavelengths is focused at different positions in the optical axis direction and is sequentially distributed along with increasing of the wavelengths, so that a measured object is placed in a measuring head dispersion area, and the current position of the measured object relative to the dispersion lens group is obtained according to peak information of a reflected light spectrum on the surface of the measured object. The linear light source of the measuring head can realize linear field-of-view detection and obtain field-of-view position information on the axis and outside the axis of a measured object at the same time, the transverse measurement efficiency is improved while the longitudinal measurement range is ensured, the longitudinal measurement range can reach + / -3.6 mm, and the transverse measurement range can reach + / -8.5 mm.

The present application provides a kind of spectral confocal sensor in-machine space pose calibration compensation method, this method includes: according to the target plane of spectral confocal sensor is moved ranging, determine the pitch angle offset of spectral confocal sensor;According to the confocal data of the optical axis of spectral confocal sensor and the C-axis of three-axis horizontal centering vehicle when centring, determine the eccentric offset of spectral confocal sensor and the geometric relationship between probe coordinate system, reference coordinate system, workpiece coordinate system;When spectral confocal sensor is scanned and measured to the measured surface of the measured workpiece, the measuring point coordinates of spectral confocal sensor in probe coordinate system are converted into target coordinates in workpiece coordinate system, on the premise of guaranteeing measurement accuracy, system structure and calibration process are greatly simplified, improve the implementability, stability and measurement consistency in machine environment.

A time resolved reflectance metrology device may detect and image structures in a layer that underlies an at least partially transparent top layer. A pulsed laser beam (pump beam) is used to irradiate the sample to produce transient signals in the underlying layer. The transient signals are detected using a probe beam that reflects from the interface between the top layer and the underlying layer. Light from the probe beam that is reflected from the top surface of the top layer may be eliminated using a confocal lens arrangement before the detector. The confocal lens arrangement, for example, includes a pinhole that is positioned at the image plane for the interface between the top layer and the underlying layer. The structures may be detected and imaged based on the transient signals.