287 results about "Zone plate" patented technology

A Micromirror Array Lens comprises a plurality of micromirrors arranged on a flat or a curved surface to reflect incident light. Each micromirror in the Micromirror Array Lens is configured to have at least one motion. The Micromirror Array Lens forms at least one optical surface profile reproducing free surfaces by using the motions of the micromirrors. The free surface can be any two or three-dimensional continuous or discrete reflective surface. The Micromirror Array Lens having the corresponding optical surface profile provides optical focusing properties substantially identical to those of the free surface. The Micromirror Array Lens can forms various optical elements such as a variable focal length lens, a fixed focal length lens, an array of optical switches, a beam steerer, a zone plate, a shutter, an iris, a multiple focal length lens, other multi-function optical elements, and so on.

A fabrication process for zone plate lenses is based on controlled thin layer deposition for fabricating structures as small as 2 nanometers (nm) in width, and potentially smaller. The substrate for deposition will take the form of a precision hole, fabricated in a substrate, such as silicon by electron beam lithography and subsequent reactive ion etching. A controlled layer deposition is then used to form the required zone plate structure. A subsequent thinning process is used to section the hole and produce a zone plate with the required layer thicknesses.

A pattern generating system for generating two-dimensional images on a surface includes a light source and one or more Zone Plate Modulator (ZPM) arrays. The ZPM arrays comprise diffractive zone plate modulating elements that are capable of either diffracting or reflecting an incident light according to the image data. In a high-resolution pattern generating system, ZPM arrays are used as spot array generators. A complete high-resolution image is formed by scanning individual light spots in the spot array using a subfield scanning means.

A radiation condenser system for an X-ray microscope allows for the efficient collection and relay of radiation from a source to the sample. It generates a converging hollow cone of radiation that can be used in the imaging of a sample or target using a zone plate lens. This system comprises a capillary tube for receiving and focusing radiation onto a sample. A center stop is provided for blocking radiation being transmitted along an axis of the capillary tube.

A lithography apparatus having achromatic Fresnel objective (AFO) that combines a Fresnel zone plate and a refractive Fresnel lens. The zone plate provides high resolution for imaging and focusing, while the refractive lens takes advantage of the refraction index change properties of appropriate elements near absorption edges to recombine the electromagnetic radiation of different energies dispersed by the zone plate. This compound lens effectively solves the high chromatic aberration problem of zone plates. The lithography apparatus allows the use of short wavelength radiation in the 1-15 nm spectral range to print high resolution features as small as 20 nm.

An x-ray metrology system includes one or more transmissive x-ray optical elements, such as zone plates or compound refractive x-ray lenses, to shape the x-ray beams used in the measurement operations. Each transmissive x-ray optical element can focus or collimate a source x-ray beam onto a test sample. Another transmissive x-ray optical element can be used to focus reflected or scattered x-rays onto a detector to enhance the resolving capabilities of the system. The compact geometry of transmissive x-ray optical element allows for more flexible placement and positioning than would be feasible with conventional curved crystal reflectors. For example, multiple x-ray beams can be focused onto a test sample using a transmissive x-ray optical element array. Robust zone plates can be efficiently produced using a damascene process.

A method and objective apparatus are provided for implementing an enhanced phase contrast microscope. A focusing vortex lens, defined by a diffractive spiral zone plate (SZP) lens, is used for the objective for the phase contrast microscope. The SZP lens focuses and imparts a helical phase to incident illumination to image the specimen with spiral phase contrast. The spiral phase contrast microscope is sensitive to phase gradients in all sample axes. Replacing the objective of a microscope with the diffractive SZP lens of the invention immediately provides existing instruments with spiral phase contrast capability.

The invention relates to an integrating method of three-dimensional spatial distribution vortex arrays, and belongs to the field of diffraction optics. A pure-phase code of a two-dimensional uniform-strength vortex optical grating and a pure-phase code of a spiral Dammam wave zone plate are obtained through analytic operation and an optimization algorithm respectively, phase information of the pure-phase codes is overlaid, a lens factor is introduced, discretized phase values are loaded to a spatial light modulator according to the pixel number and the pixel size of the spatial light modulator, and then the corresponding three-dimensional vortex arrays can be obtained. According to the method, the equal-strength and regular-distribution three-dimensional vortex arrays can be obtained, and each vortex beam in the arrays has the specific topological charge number.

A light emitting device and a manufacturing method thereof and a display used the light emitting device, in which fine patterning for the light emitting device is realized by a simple process and the light leakage is prevented and the efficiency at extracting light is increased, are provided. The light emitting device provides an organic electroluminescent (EL) device in which electrodes and a luminescent layer are formed, a diffraction grating or a zone plate, and a filter. Light emitted from the luminescent layer transmits through the diffraction grating or the zone plate, which is formed with a designated grating pitch, or is reflected at the diffraction grating or the zone plate. With this, the transmitting or reflecting light is controlled to be in a designated angle region. And when the light is transmitted through the filter, light having different color tone and chromaticity from those of the light emitted from the luminescent layer is extracted.

The invention relates to a damman wave zone plate which is characterized in that a phase modulation detail is added in each period of the traditional binary phase-only type (0, pi) zone wave plate structure relative to the square of the radial coordinate so as to generate axial constant-strength distribution of focal spots with any numbers within a certain range. The distribution of a plurality of constant-strength focal spots along the optical axis direction can be widely applied to imaging systems (optical microscopes), optical tweezers, implantable contact lens, and the like with large depth of field-. Besides, the damman wave zone plate in binary phase-only distribution is a series of concentric circle structures intuitively and is easy to process and duplicate. Therefore, the damman wave zone plate has important application prospect in the fields of optical imaging systems and biomedicine.

A volume Fresnel zone plate and a method of producing such a device using a femtosecond laser for direct writing of zone plates. A volume zone plate has a number of Fresnel zone plate layers designed to focus light coherently to a single spot. Embodiments include both low numerical aperture (NA) and high NA zone plates, and provide a significant increase in overall diffraction efficiency over a single Fresnel zone plate.

The invention discloses an axial line focusing spiral zone plate. The zone plate is formed by alternately arranging a series of discontinuous spiral light transmitting ring bands and light shielding ring bands. The coordinates of the spiral ring bands in different cycles are adjusted in a certain distributing mode, so that incident light passes through the ring bands in the different cycles to be focused at different focal points, and a hollow-column-shaped line focal point is formed. Compared with a common spiral zone plate with same numerical apertures, the size of the focal point on an optical axis is effectively lengthened; designing and manufacturing are convenient and rapid, and only a production formula of the spiral ring bands and focal distances corresponding to the cycles need to be designed according to requirements; practical application and practical popularization are easy, and particularly practical application to and practical popularization for the vacuum-ultraviolet-ray waveband to the soft-X-ray waveband are easy; the axial line focusing spiral zone plate has broad application prospects in the researching fields such as particulate control, extreme ultra-violet lithography, astronomy, microscopes and micro power systems.

A nano-scale surface analysis system is configured to reduce a laser-produced plasma spot size, while maintaining flux levels at target. The system comprises a condenser zone plate operable to receive short wavelength radiation and focus the short wavelength radiation into a spot on the target. The target is positioned such it is located at an order of diffraction of the condenser zone plate that is greater than the first diffractive order of the condenser zone plate and sufficient to demagnify the spot to a diameter less than one micron. In addition, the target is still positioned such that a flux created at the target by the spot is sufficient to produce a nanoplasma.

A zone plate multilayer structure includes a substrate carrying a plurality of alternating layers respectively formed of tungsten silicide (WSi₂) and silicon (Si). The alternating layers are sequentially deposited precisely controlling a thickness of each layer from a minimum thickness of a first deposited layer adjacent the substrate to a maximum thickness of a last deposited layer. The first minimum thickness layer has a selected thickness of less than or equal to 5 nm with the thickness of the alternating layers monotonically increasing to provide a zone plate multilayer structure having a thickness of greater than 12 μm (microns). The x-rays are diffracted in Laue transmission geometry by the specific arrangement of silicon and tungsten silicide.

The invention relates to a preparation method of an X-ray zone plate. An atomic layer deposition (ALD) method is used to depose alumina/hafnium oxide or alumina/iridium films of different density andthickness alternatively at the surface of a metal wire whose diameter is of a micron order, namely, a first deposed alumina film layer and a second deposed hafnium oxide film or iridium film layer arearranged alternatively and cyclically to form a series of concentric circular rings. The film plated metal wire is cut and polished by focusing ion beams after film plating, and the zone plate of therequired thickness and precision is obtained. The method is suitable for preparing different types of zone plates.

A system and method for improving efficiency of zone plates fabricated by conformal layer coatings is disclosed. In embodiments, the inventive conformal layer coating zone plates provide increased zone widths from one times a deposited conformal layer coating thickness up to and including two times the conformal layer coating thickness. By designing a template that increases a mark-to-space ratio of the annular rings of the template, coating sidewalls of the annular rings with an conformal layer coating to form the zones, and then substantially filling annular channels defined by the annular rings with the conformal layer coating to form wider zones, significant efficiency increases can be achieved over conventional conformal layer coating zone plates, especially for innermost zones.

The invention is a measuring method for vacuum laser dam deformation, which belongs to optical, photo-sensing and geometric position measurement field. The character lies in: there sets a two-dimension position adjusting mechanism between the measuring base and the wave zone plate, when measuring, the invention adjusts the position of wave zone board relative to the measuring base through the adjusting mechanism, makes the laser focus around the centre of the laser receiver, the invention calculates the shift of the measuring point according to the shift of the wave zone plate relative to the measuring point base and the bias of the light-spot on the laser receiver. The invention reduces the diameter of the vacuum channel on the receiving end, at the same time; it also reduces the demands of the receiving range of the laser receiver, thus reduces the vacuum channel diameter, and reduces the system cost.