The invention is a measuring method for vacuum
laser dam deformation, which belongs to optical, photo-sensing and geometric position measurement field. The character lies in: there sets a two-dimension position adjusting mechanism between the measuring base and the wave
zone plate, when measuring, the invention adjusts the position of wave zone board relative to the measuring base through the adjusting mechanism, makes the
laser focus around the centre of the
laser receiver, the invention calculates the shift of the measuring point according to the shift of the wave
zone plate relative to the measuring point base and the bias of the light-spot on the laser
receiver. The invention reduces the
diameter of the vacuum channel on the receiving end, at the same time; it also reduces the demands of the receiving range of the laser
receiver, thus reduces the vacuum channel
diameter, and reduces the
system cost.