A micro-miniature x-
ray apparatus comprises: a first
chip subassembly including a source of x-rays including both
Bremsstrahlung photons and characteristic x-rays; a second
chip subassembly including a filter for transmitting the characteristic x-rays and blocking the
Bremsstrahlung photons; a third
chip subassembly including a movable element for focusing or collimating the transmitted characteristic x-rays into a beam and means for controlling the position of the focusing element. In one embodiment, the controlling means include a micro-electromechanical
system (MEMS). In another embodiment, the position of the movable element determines how the x-
ray beam is steered to the
focal area. In still another embodiment, the x-
ray source includes a field emitter
electron source and a target responsive to the electrons for generating x-rays. In this case, the x-ray beam is also steered by selectively energizing the
anode segments. In yet another embodiment, the movable element includes a
Fresnel zone plate; in still another embodiment it includes an array of poly-capillaries. Advantageously, our x-ray source, including its focusing, collimating and steering components, can be fabricated small enough to be mounted at the end of a
catheter. In addition, in some embodiments it can also fabricated sufficiently inexpensively to be disposable after each use.