800results about "Handling using diaphragms/collimeters" patented technology

The invention concerns an illumination system for wavelengths <=193 nm, particularly for EUV lithography, with at least one light source, which has an illumination A in a predetermined surface; at least one device for producing secondary light sources; at least one mirror or lens device comprising at least one mirror or one lens, which is or are organized into raster elements; one or more optical elements, which are arranged between the mirror or lens device comprising at least one mirror or one lens, which is or are organized into raster elements and the reticle plane, whereby the optical elements image the secondary light sources in the exit pupil of the illumination system.The illumination system is characterized by the fact that the raster elements of the one or more mirror or lenses are shaped and arranged in such a way that the images of the raster elements cover by means of the optical elements the major portion of the reticle plane and that the exit pupil defined by aperture and filling degree is illuminated.

The invention concerns an illumination system, particularly for microlithography with wavelengths <=193 nm, comprising a light source, a first optical component, a second optical component, an image plane and an exit pupil. The first optical component transforms the light source into a plurality of secondary light sources being imaged by the second optical component in said exit pupil. The first optical component comprises a first optical element having a plurality of first raster elements, which are imaged into said image plane producing a plurality of images being superimposed at least partially on a field in said image plane. The first raster elements deflect incoming ray bundles with first deflection angles, wherein at least two of the first deflection angles are different. The first raster elements are preferably rectangular, wherein the field is a segment of an annulus. To transform the rectangular images of the first raster elements into the segment of the annulus, the second optical component comprises a first field mirror for shaping the field to the segment of the annulus.

A method and device which dynamically detects, tracks and filters interfering signals with sufficient speed (i.e. within one IS-95 CDMA data frame period, or 20ms and fidelity to eliminate or greatly reduce the deleterious effects of narrow band interferor signals on a CDMA link. When inserted in an RF signal path an Adaptive Notch Filter (ANF) detects narrow band interferors above a threshold level within the CDMA signal. Detection is accomplished by continuous scanning of a preset excision band, e.g. a specified narrow band associated with an AMPS system. Detected interferors are then automatically acquired and suppressed. This is achieved by electronically placing a rejection notch at the frequency of the interferors. Multiple notch filters may be used to simultaneously suppress multiple interferors. In the absence of interferors a bypass mode is selected allowing the RF signal to bypass the notch. Upon detection of an interferor, a switch is made to a suppression mode where the interferor is steered through a first notch section and suppressed. Alternatively, an external control line may be used to select the bypass mode so that the signal is allowed to pass the notch section, regardless of interferer content.

An X-ray computed tomography apparatus includes a first X-ray tube configured to generate X-rays with which a subject to be examined is irradiated, a first X-ray detector configured to detect X-rays transmitted through the subject, a second X-ray tube which generates X-rays with which a treatment target of the subject is irradiated, a rotating mechanism which rotates the first X-ray tube, the first X-ray detector, and the second X-ray tube around the subject, a reconstructing unit configured to reconstruct an image on the basis of data detected by the first X-ray detector, and a support mechanism which supports the second X-ray tube. The central axis of X-rays from the second X-ray tube tilts with respect to a body axis of the subject. This makes it possible to reduce the dose on a portion other than a treatment target.

Radioimaging methods, devices and radiopharmaceuticals therefor.

A method and device for producing visually sensed images of the internal structure of, particularly, a biological object. When used for diagnostic purposes in medicine the x-ray dosage of tissues surrounding the spot that is being examined is decreased.

An intensity modulated radiation therapy (IMRT) system including a radiation beam delivery device positionable in a plurality of spatial orientations, an IMRT control system adapted to modulate at least an intensity of a radiation beam emanating from the radiation beam delivery device depending on at least one of the spatial orientations of the radiation beam delivery device and in accordance with an IMRT intensity map, and a multilayer multileaf collimator placed in a path of the radiation beam emanating from the radiation beam delivery device, the multilayer multileaf collimator including a plurality of layers of radiation blocking leaves, the layers being at different positions along the path of the radiation beam generally traverse to the radiation beam.

An integrated beam modifying assembly for use with a proton beam therapy machine. Typically the snouts of a proton beam therapy machine are adapted to receive separate apertures and range compensators. Applicants provide an integrated assembly for slotting into the snout of a proton beam therapy machine, which integrated assembly incorporates both aperture material and range compensator material for profiling, shaping, and modulating the beam.

A radiosurgery system is described that is configured to deliver a therapeutic dose of radiation to a target structure in a patient. In some embodiments, inflammatory ocular disorders are treated, specifically macular degeneration. In some embodiments, other disorders or tissues of a body are treated with the dose of radiation. In some embodiments, the target tissues are placed in a global coordinate system based on ocular imaging. In some embodiments, the target tissues inside the global coordinate system lead to direction of an automated positioning system that is directed based on the target tissues within the coordinate system. In some embodiments, a treatment plan is utilized in which beam energy and direction and duration of time for treatment is determined for a specific disease to be treated and/or structures to be avoided. In some embodiments, a fiducial marker is used to identify the location of the target tissues. In some embodiments, radiodynamic therapy is described in which radiosurgery is used in combination with other treatments and can be delivered concomitant with, prior to, or following other treatments.

A method and system for performing fluoroscopic imaging of a subject has high temporal and spatial resolution in a center portion of the captured dynamic images. The system provides for reduced X-ray dose to the patient associated with that part of the X-ray beam associated with a peripheral portion of the captured images although temporal, and in some embodiments spatial, resolution is reduced in the peripheral portion of the image. The system uses a rotating collimator to produce an X-ray beam having narrow wing portions associated with the peripheral portions of the image, and a broader central region associated with the high resolution center portion of the images.

A shielding arrangement for an x-ray apparatus, preferably for mammography examination is disclosed, and comprises at least an x-ray source, a collimator arrangement and a detector assembly, whereby the collimator is arranged between the x-ray source and the detector assembly and through which x-rays pass. The shielding arrangement, at least partly made of x-ray blocking material and provided for blocking, scattering and/or reflecting x-rays is arranged, at least partly, in a space between the x-ray source and collimator.

In a pattern definition device for use in a particle-beam processing apparatus a plurality of apertures (21) are arranged within a pattern definition field (pf) wherein the positions of the apertures (21) in the pattern definition field (pf) taken with respect to a direction (X, Y) perpendicular, or parallel, to the scanning direction are offset to each other by not only multiple integers of the effective width (w) of an aperture taken along said direction, but also multiple integers of an integer fraction of said effective width. The pattern definition field (pf) may be segmented into several domains (D) composed of a many staggered lines (pl) of apertures; along the direction perpendicular to the scanning direction, the apertures of a domain are offset to each other by multiple integers of the effective width (w), whereas the offsets of apertures of different domains are integer fractions of that width.

An apparatus for imaging a structure of interest comprises a plurality of imaging detectors mounted on a gantry. Each of the plurality of imaging detectors has a field of view (FOV), is independently movable with respect to each other, and is positioned to image a structure of interest within a patient. A data acquisition system receives image data detected within the FOV of each of the plurality of imaging detectors.

A micro-miniature x-ray apparatus comprises: a first chip subassembly including a source of x-rays including both Bremsstrahlung photons and characteristic x-rays; a second chip subassembly including a filter for transmitting the characteristic x-rays and blocking the Bremsstrahlung photons; a third chip subassembly including a movable element for focusing or collimating the transmitted characteristic x-rays into a beam and means for controlling the position of the focusing element. In one embodiment, the controlling means include a micro-electromechanical system (MEMS). In another embodiment, the position of the movable element determines how the x-ray beam is steered to the focal area. In still another embodiment, the x-ray source includes a field emitter electron source and a target responsive to the electrons for generating x-rays. In this case, the x-ray beam is also steered by selectively energizing the anode segments. In yet another embodiment, the movable element includes a Fresnel zone plate; in still another embodiment it includes an array of poly-capillaries. Advantageously, our x-ray source, including its focusing, collimating and steering components, can be fabricated small enough to be mounted at the end of a catheter. In addition, in some embodiments it can also fabricated sufficiently inexpensively to be disposable after each use.

A new optimization method for generating treatment plans for radiation oncology is described and claimed. This new method works for intensity modulated radiation therapy (IMRT), intensity modulated arc therapy (IMAT), and hybrid IMRT.

A general imaging scheme is proposed for applications of CBCT. The approach provides a superior CBCT image quality by effective scatter correction and noise reduction. Specifically, in its implementation of CBCT imaging for radiation therapy, the proposed approach achieves an accurate patient setup using a partially blocked CBCT with a significantly reduced radiation dose. The image quality improvement due to the proposed scatter correction and noise reduction also makes CBCT-based dose calculation a viable solution to adaptive treatment planning.

A technique is provided for forming a multi-layer radiation detector. The technique includes a charge-integrating photodetector layer provided in conjunction with a photon-counting photodetector layer. In one embodiment, a plurality of photon-counting photosensor elements are disposed adjacent to a plurality of charge-integrating photosensor elements of the respective layers. Both sets of elements are connected to readout circuitry and a data acquisition system. The detector arrangement may be used for energy discriminating computed tomography imaging and similar computed tomography systems.

The present invention is a directed method and apparatus for collimating a radiation beam such that the full intensity of the radiation beam does not impinge detectors of a radiation detector assembly that are particularly susceptible to saturation or over-ranging. This collimation can be dynamically adjusted on a per view basis using empirical or scout scan data.

In one aspect the invention relates to an apparatus for analyzing the presence of a single molecule using total internal reflection. In one embodiment an apparatus for single molecule analysis includes a support having a sample located thereon; two sources of light at distinct wavelengths, a collimator for directing the light onto the sample through a total internal reflection objective; a receiver for receiving a fluorescent emission produced by a single molecule in the sample in response to the light; and a detector for detecting each of the wavelengths in the fluorescent emission. In another embodiment the apparatus further comprises a focusing laser for maintaining focus of the objective on the sample.

A method of fabricating an apparatus for an enhanced imaging sensor consisting of pixellated micro columnar scintillation film material for x-ray imaging comprising a scintillation substrate and a micro columnar scintillation film material in contact with the scintillation substrate. The micro columnar scintillation film material is formed from a doped scintillator material. According to the invention, the micro columnar scintillation film material is subdivided into arrays of optically independent pixels having interpixel gaps between the optically independent pixels. These optically independent pixels channel detectable light to a detector element thereby reducing optical crosstalk between the pixels providing for an X-ray converter capable of increasing efficiency without the associated loss of spatial resolution. The interpixel gaps are further filled with a dielectric and or reflective material to substantially reduce optical crosstalk and enhance light collection efficiency.

A radioactive emission probe in communication with a position tracking system and the use thereof in a variety of systems and methods of medical imaging and procedures, are provided. Specifically, wide aperture collimation—deconvolution algorithms are provided, for obtaining a high-efficiency, high resolution image of a radioactivity emitting source, by scanning the radioactivity emitting source with a probe of a wide-aperture collimator, and at the same time, monitoring the position of the radioactive emission probe, at very fine time intervals, to obtain the equivalence of fine-aperture collimation. The blurring effect of the wide aperture is then corrected mathematically. Furthermore, an imaging method by depth calculations is provided, based on the attenuation of photons of different energies, which are emitted from the same source, coupled with position monitoring.

The inspection methods and systems of the present invention are mobile, rapidly deployable, and capable of scanning a wide variety of receptacles cost-effectively and accurately on uneven surfaces. The present invention is directed toward a portable inspection system for generating an image representation of target objects using a radiation source, comprising a mobile vehicle, a detector array physically attached to a movable boom having a proximal end and a distal end. The proximal end is physically attached to the vehicle. The invention also comprises at least one source of radiation. The radiation source is fixedly attached to the distal end of the boom, wherein the image is generated by introducing the target objects in between the radiation source and the detector array, exposing the objects to radiation, and detecting radiation.

A system and method for inspecting an object, the system and method comprising a source for generating a penetrating radiation beam for irradiating the object, the beam having, for each instant of time, an instantaneous energy spectrum of intensity, a shaper for modulating the generated beam, thereby creating a shaped beam, the shaper comprising at least a first section and a second section, the first section attenuating the intensity of a portion of the generated beam by a first attenuation factor and the second section attenuating the intensity of another portion of the generated beam by a second attenuation factor, and at least one detector for detecting the shaped beam after the shaped beam interacts with the object. The source may scan a beam across an object while the source and at least one detector are moving on a platform capable of highway travel or on an inspection module movable with respect to the object.

A method and system for particle beam lithography, such as electron beam (EB) lithography, is disclosed. The method and system include selecting one of a plurality of cell patterns from a stencil mask and partially exposing the cell pattern to a particle beam, such as an electron beam, so as to selectively project a portion of the cell pattern on a substrate.

An X-ray CT apparatus, as one example, includes at least one X-ray irradiation source configured to irradiate an X-ray to a volume of interest, at least one X-ray detector including a plurality of detection element segments configured to detect the X-ray penetrated through the volume of interest, at least one collimator configured to create an opening that is movable in at least one of a slice direction and a channel direction, at least one image processing part configured to extract a portion of the volume data, a controller configured to set the opening of the at least one collimator to a second opening size according to a cylinder-like second scanning range that is set to limit the volume of interest and configured to perform a second scan, and at least one reconstruction part configured to reconstruct image data based on data collected by the second scan.

A snapshot backscatter radiography (SBR) system and related method includes at least one penetrating radiation source, and at least one substantially transmissive radiation detector. The substantially transmissive radiation detector is interposed between an object region to be interrogated and the radiation source. The substantially transmissive radiation detector receives and detects forward radiation from the radiation source before transmitting a portion thereof to interrogate the object region, wherein a portion of backscattered radiation provided by the object region is detected by the detector. A changeable collimating grid having a plurality of spaced apart radiation absorbing features is coupled to structure changing a position of the plurality of features and is disposed in at least one of the path of the forward radiation and the path of the backscattered radiation. An image of the object can be obtained by subtracting the forward radiation detected at the detector, or an estimate thereof, from a total of all radiation detected by the detector. Integrated circuit inspection, land mine detection, and luggage or cargo screening systems can all be SBR based.

X-ray pixel beam array systems and methods for electronically shaping radiation fields and modulating radiation field intensity patterns for radiotherapy are disclosed. One exemplary pre-clinical system may include addressable electron field emitters (102, 104) that are operable to emit a plurality of electron pixel beams (106, 108, 110). Each electron pixel beam may correspond to an x-ray target (124) and x-ray pixel beam collimation aperture (136, 138) to convert a portion of energy associated with the electron pixel beam to a corresponding x-ray pixel beam (140, 142). Further, the x-ray pixel beam array collimator (130) forms a one-to-one correspondence between individual electron pixel beam and its corresponding x-ray pixel beam. One exemplary clinical system may include a high-energy electron source (1203), an n-stage scanning system (1210), x-ray pixel beam targets (1212), and an x-ray pixel beam array collimator (1214). A controller (1206) may sequentially direct electron beam pulses to predetermined x-ray pixel targets and produce an electronically controlled radiation field direction, pattern; and intensity pattern.

With a view to providing an X-ray irradiator superior in workability in mounting a collimator box to an X-ray tube, the X-ray irradiator includes: a ring provided on an entry plate of the collimator box so as to surround an X-ray incidence window, the ring receiving therein a flange of the X-ray tube and having plural slots formed radially through the ring; plural tongue pieces inserted through the slots from outside to inside of the ring and holding down the back side of the flange; and a pair of half-rings which holds the plural tongue pieces at positions outside the ring and which, when one ends and opposite ends thereof are respectively opposed to each other, surrounds the ring with the plural tongue pieces inserted respectively into the plural slots.

A single photon emission computed tomography system includes a base for supporting a patient and a detector assembly adjacent the field of view. The detector assembly detects photon strikes from the field of view. A photon-blocking member is disposed between the field of view and the detector and has an aperture slot that allows passage of photons aligned with the slot. A collimating assembly includes a plurality of collimating vanes formed of photon-attenuating material. A support assembly supports the collimating assembly and includes a first support member and a second support member with the collimating assembly being disposed therebetween. An adjustment assembly includes a first adjuster operable to adjust a first distance between the collimating assembly and the first support member and a second adjuster operable to adjust a second distance between the collimating assembly and the second support member.

Various configurations for scatter reduction and control are provided for CT imaging. These configurations include an imaging system having a stationary detector extending generally around a portion of an imaging volume and a distributed X-ray source placed proximal to the stationary detector for radiating an X-ray beam toward the stationary detector. A scatter control system is further provided that is configured to adaptively operate in cooperation with the stationary detector and the distributed X-ray source to focally align collimator septa contained therein to the X-ray beam at a given focal point and to provide X-ray beam scatter control.