229 results about "Characteristic X-ray" patented technology

A micro-miniature x-ray apparatus comprises: a first chip subassembly including a source of x-rays including both Bremsstrahlung photons and characteristic x-rays; a second chip subassembly including a filter for transmitting the characteristic x-rays and blocking the Bremsstrahlung photons; a third chip subassembly including a movable element for focusing or collimating the transmitted characteristic x-rays into a beam and means for controlling the position of the focusing element. In one embodiment, the controlling means include a micro-electromechanical system (MEMS). In another embodiment, the position of the movable element determines how the x-ray beam is steered to the focal area. In still another embodiment, the x-ray source includes a field emitter electron source and a target responsive to the electrons for generating x-rays. In this case, the x-ray beam is also steered by selectively energizing the anode segments. In yet another embodiment, the movable element includes a Fresnel zone plate; in still another embodiment it includes an array of poly-capillaries. Advantageously, our x-ray source, including its focusing, collimating and steering components, can be fabricated small enough to be mounted at the end of a catheter. In addition, in some embodiments it can also fabricated sufficiently inexpensively to be disposable after each use.

The present invention relates to an X-ray source for emitting a characteristic X-ray and a fluorescent X-ray analyzing apparatus using the X-ray source. A secondary target is arranged in superposition on a primary target. An electron beam generated by an electron gun enters the primary target, which passes and emits a continuous X-ray. The secondary target transmits and emits a characteristic X-ray excited by the continuous X-ray emitted from the primary target. The primary target and the secondary target are superposed one on the other, so that the continuous X-ray emitted from the primary target efficiently excites the secondary target thereby to efficiently generate the characteristic X-ray.

An x-ray source comprises a structured anode that has a thin top layer made of the desired target material and a thick bottom layer made of low atomic number and low density materials with good thermal properties. In one example, the anode comprises a layer of copper with an optimal thickness deposited on a layer of beryllium or diamond substrate. This structured target design allows for the use of efficient high energy electrons for generation of characteristic x-rays per unit energy deposited in the top layer and the use of the bottom layer as a thermal sink. This anode design can be applied to substantially increase the brightness of stationary, rotating anode or other electron bombardment-based sources where brightness is defined as number of x-rays per unit area and unit solid angle emitted by a source and is a key figure of merit parameter for a source.

A thin film analysis system includes multi-technique analysis capability. Grazing incidence x-ray reflectometry (GXR) can be combined with x-ray fluorescence (XRF) using wavelength-dispersive x-ray spectrometry (WDX) detectors to obtain accurate thickness measurements with GXR and high-resolution composition measurements with XRF using WDX detectors. A single x-ray beam can simultaneously provide the reflected x-rays for GXR and excite the thin film to generate characteristic x-rays for XRF. XRF can be combined with electron microprobe analysis (EMP), enabling XRF for thicker films while allowing the use of the faster EMP for thinner films. The same x-ray detector(s) can be used for both XRF and EMP to minimize component count. EMP can be combined with GXR to obtain rapid composition analysis and accurate thickness measurements, with the two techniques performed simultaneously to maximize throughput.

An X-ray spectrometer which uses at least one curved analyzing crystal and which provides improved wavelength resolution of characteristic X-rays used for analysis and improved ratio of characteristic X-rays to background intensity by using only effective diffractive regions of the analyzing crystal. X-ray blocking plates upstand from an end of a crystal support member supporting the analyzing crystal in the direction of angular dispersion of the crystal toward the inside of a Rowland circle. Incident X-rays going from the point X-ray source toward the crystal and X-rays diffracted by the crystal toward an X-ray detector are partially blocked by the X-ray blocking plates. The shielded regions vary according to the incident angle θ of the incident X-rays. Optimum or nearly optimum effective regions of the surface of the crystal can be used at all times.

A spectrometer for detecting and quantifying elements in a sample. An exciter ionizes atoms in the sample, and the atoms thereby produce characteristic x-rays. A detector receives the x-rays and produces signals based on the x-rays. A filter system selectively blocks the x-rays from attaining the detector. The selective blocking of the x-rays is accomplished based on an energy of the x-rays. An analyzer receives the signals from the detector and detects and quantifies the elements in the sample based at least in part on the signals. In this manner, detector receives the light element x-rays, and the medium and heavy element x-rays are filtered out to avoid overwhelming the detector. This invention combines the large solid angle, high efficiency, and ability to measure the continuous background spectrum of the energy dispersive x-ray detector with the selectivity of the wavelength dispersive x-ray detector. It thus enables faster and more accurate measurement of light elements in thin films. This invention enhances the light element performance of a system by enabling higher throughput, lower e-beam and x-ray dose to the sample, and improved accuracy from the capability to measure the background radiation.

An X-ray tube which irradiates a primary X-ray to an irradiation point on a sample, an X-ray detector which detects a characteristic X-ray and a scattered X-ray emitted from the sample and outputs a signal including energy information on the characteristic X-ray and scattered X-ray, an analyzer which analyzes the signal, a sample stage on which the sample is placed, a moving mechanism which moves the sample on the sample stage, the X-ray tube, and the X-ray detector relative to each other, a height measuring mechanism which measures a maximum height of the sample, and a control unit which adjusts the distance between the sample and the X-ray tube and the distance between the sample and the X-ray detector by controlling the moving mechanism on the basis of the measured maximum height of the sample, are included.

The material composition of a thin film formed on a substrate or covered by a cap layer that shares one or more elements with the thin film can be determined by combining characteristic material data, such as characteristic x-ray data, from a material composition analysis tool, such as an electron probe-based x-ray metrology (EPMA) operation, with thickness data and (optionally) possible material phases for the thin film. The thickness data and / or the material phase options can be used to determine, for example, the penetration depth of a probe e-beam of the EPMA tool. Based on the penetration depth and the thin film thickness, the characteristic x-ray data from the EPMA operation can be analyzed to determine the composition (e.g., phase or elemental composition) of the thin film. An EPMA tool can include ellipsometry capabilities for all-in-one thickness and composition determination.

New (2R,4R) monatin monosodium salt hydrate crystals characterized by having specific characteristic X-ray diffraction peaks provide general-purpose, stable, and safe monatin sodium salt crystals incorporating no organic solvent. These crystal may be prepared by a method that requires no organic solvent in the crystallization, separation, and drying steps. These crystal are useful as sweeteners and for the preparation of orally consumed products, such as foods, beverages, pharmaceutical products, topical pharmaceutical products, and feeds containing general-purpose, stable, and safe monatin sodium salt crystals.

The sputtering target made of a Ag—Bi-base alloy contains Bi in solid solution with Ag. The sputtering target has an intensity of precipitated Bi of 0.01 at %−1 or less, as calculated by the following mathematical expression (1) based on analysis results of X-ray diffraction, and / or a sum of area ratios of predetermined intensities (third to sixth intensities in 8 intensities) of 89% or more, wherein the area ratios are obtained by calculating a planar distribution of characteristic X-ray intensities of Bi according to X-ray microanalysis: intensity of precipitated Bi=[IBi(102) / IAg(111)+IAg(200)+IAg(220)+IAg(311))] / [Bi]. Remarkable lowering of the yield of Bi content in resultant films can be suppressed by using the sputtering target.

To enable measurement of an elastically scattered electron image, a characteristic-X-ray-based element image and an electron-beam-energy-spectroscopy-based element image with a high S / N and high spatial resolution in an electronic microscope having a function to produce an element image. Measurement of a characteristic X-ray signal and electron beam energy loss spectra or measurement of a plurality of energy filter signals including a core loss of an observed element is performed simultaneously and continuously with detection of elastically scattered electrons transmitted through a specimen to be analyzed, and element images based on characteristic X-rays and electron beam energy spectroscopy are added up while correcting a positional misalignment with respect to elastically scattered electron images continuously observed (see FIG. 1).

The invention belongs to the chemical technical field and relates to a high silver supported zeolite molecular sieve acetate deiodinase adsorber and a preparation method thereof. In the adsorber, the sizes of zeolite cavity openings are respectively 0.66*0.71 nanometers and 0.56*0.56 nanometers, and the adsorber is provided with characteristic X-ray diffraction lines in a BEA (Background Equivalent Activity) type zeolite structure. The deiodinase adsorber is prepared by the steps that saled sodium type zeolite molecular sieve powder with two-dimensional twelve oygen membered ring cavity openings is formed through binder, is in in-situ hydrothermal strengthening treatment to generate chemical bonds and then is treated by ion exchange sodium removal and silver carrying. The adsorber has the advantages of high crystallization degree, strong particle strength, high silver supported and strong adsorption capacity to organic iodide, inorganic iodide and molecular iodide with different sizes contained in strong acidic medium, can enable the total iodide content in product acetic acid after deiodination treatment by the adsorber to be lower than 5ppb and is suitable for being used as raw materials for synthetizing vinyl acetate.

The invention discloses a signal modulation and demodulation device and method in space X-ray communication. Information is coded and modulated into high and low levels. The high and low levels are input into a magnetic field generation device to generate a modulation magnetic field. Electrons in a multi-target material X-ray tube bombard different target materials to generate characteristic X rays. The characteristic X rays are emitted. Characteristic X-ray photons with different energy are taken as information carriers. The information carriers are received by an X-ray detector. Detection signals pass a preamplifier and then are input into an energy discriminator. Energy discrimination is carried out on the characteristic X-ray photons. The characteristic X-ray photons are counted by counters. A count comparator compares characteristic photon count. A signal demodulation circuit demodulates the signals and outputs the signals. According to the device and the method, code elements areloaded through utilization of the characteristic X rays with different energy. The characteristic photon energy is discriminated at a receiving end. The higher the loaded code element number is, thehigher the characteristic photon intensity is. The background noise interference can be reduced. The device and the method are characterized by a high communication rate and a low bit error rate.

The invention relates to a device and a method for measuring multi-wavelength characteristic X ray diffraction of an X ray diffraction spectrum of a measured crystal material sample by selecting a certain characteristic X ray of an X ray tube anode target within a relatively wide wavelength range. The device comprises an X ray tube, a high-pressure generator, a silt, an angle measurer, a detector, a multi-path analyzer, and the like. According to the device and the method disclosed by the invention, large-scale attenuation of the characteristic X ray diffraction due to use of a filter sheet or a crystal monochromator and the like is avoided; required characteristic X rays for measuring needed wavelength can be selected by regulating the tube voltage of the X ray tube and upper and lower thresholds of the multi-path analyzer, so that diffraction rays (characteristic X rays with relatively large wavelengths) on the surface of a sample can be measured in a nondestructive manner, and the diffraction rays (characteristic X rays with relatively small wavelengths) inside the sample can be measured in the nondestructive manner. Moreover, the device is simple and convenient to operate, relatively short in detection time; the characteristic X ray diffraction spectrums obtained by scanning are real and reliable.

Provided is an X-ray analysis apparatus including: an X-ray tubular bulb for irradiating a sample with a radiation beam; an X-ray detector for detecting a characteristic X-ray and a scattered X-ray and outputting a signal containing energy information on the characteristic X-ray and the scattered X-ray; an analyzer for analyzing the signal; a sample stage capable of moving an irradiation point relatively with respect to the sample within a mapping area set in advance; and an X-ray mapping processing section for discriminating an X-ray intensity corresponding to a specific element, determining an intensity contrast in which a color or lightness is changed in accordance with the X-ray intensity, and for performing image display at a position corresponding to the irradiation point, in which the X-ray mapping processing section determines the intensity contrast of the X-ray intensity at the irradiation point by setting in advance the X-ray intensity discriminated as to a reference material in which a component element and a concentration thereof are known as a reference.

The invention relates to a hyperbolic crystal X-ray fluorescence spectrum analyzer, which comprises a light splitting measurement chamber, a vacuumizing part, a sample chamber, a sample feeding device, an X-ray excitation source, a power supply source, an information collecting and processing device, an apparatus system controller and an upper analysis computer. The operating method comprises the following steps that: (1) the X-ray excitation source generates X-ray within a certain wavelength range to irradiate a sample; (2) characteristic X-ray of each element is excitated and enters the light splitting measurement chamber, and an X-ray detector receives and converts the characteristic X-ray into electrical pulse information; (3) the electrical pulse information is recorded by a pulse amplitude information collecting and processing device and is transmitted to the upper analysis computer; and (4) the upper analysis computer generates a required testing result. The hyperbolic crystal X-ray fluorescence spectrum analyzer has the advantages that a four-degree-of-freedom link gear is adopted and taken as a technical core to upgrade a limited discrete-wavelength curved crystal X-ray fluorescence spectrum analyzer to an X-ray fluorescence spectrum analyzer capable of continuous diffraction light splitting and detecting, thereby enlarging the analysis range of the hyperbolic crystal X-ray fluorescence spectrum analyzer.

Provided is a charged particle beam processing apparatus capable of improving yields by suppressing the spread of metal pollution to a semiconductor manufacturing process to a minimum. The charged particle beam processing apparatus includes an ion beam column 1 that is connected to a vacuum vessel 10 and irradiates a sample 35 with an ion beam 11 of nonmetal ion species, a microsampling unit 3 having a probe 16 that extracts a microsample 43 cut out from a sample 35 by the ion beam 11, a gas gun 2 that discharges a gas for bonding the microsample 43 and the probe 16, a pollution measuring beam column 6A that is connected to the same vacuum vessel 10 to which the ion beam column 1 is connected and irradiates an ion beam irradiation traces by the ion beam column 1 with a pollution measuring beam 13, and a detector 7 that detects characteristic X-rays emitted from the ion beam irradiation traces by the ion beam column 1 upon irradiation with the pollution measuring beam 13.

In an X-ray analysis apparatus and an X-ray analysis method, a quantitative analysis is stably performed by stably behaving an X-ray source. There are possessed an X-ray tubular bulb irradiating a primary X-ray to a sample, a primary X-ray adjustment mechanism capable of adjusting an intensity of the primary X-ray, an X-ray detector detecting a characteristic X-ray radiated from the sample, thereby outputting a signal including energy informations of the characteristic X-ray and a scattered X-ray, an analyzer analyzing the above signal, and an incident X-ray adjustment mechanism disposed between the sample and the X-ray detector, and capable of adjusting a total intensity of the characteristic X-ray and the scattered x-ray, which are entered to the X-ray detector.

An X-ray tube which irradiates a primary X-ray to an irradiation point on a sample, an X-ray detector which detects a characteristic X-ray and a scattered X-ray emitted from the sample and outputs a signal including energy information on the characteristic X-ray and scattered X-ray, an analyzer which analyzes the signal, a sample stage on which the sample is placed, a moving mechanism which moves the sample on the sample stage, the X-ray tube, and the X-ray detector relative to each other, a height measuring mechanism which measures a maximum height of the sample, and a control unit which adjusts the distance between the sample and the X-ray tube and the distance between the sample and the X-ray detector by controlling the moving mechanism on the basis of the measured maximum height of the sample, are included.

The invention relates to a three-energy coal ash content online monitoring device which comprises a low-energy gamma source Am241, an intermediate-energy gamma source Cs137, and a lanthanum bromide detector for receiving the low-energy and intermediate-energy gamma rays, wherein gamma photons emitted by the low-energy gamma source Am241 and the intermediate-energy gamma source Cs137 irradiates the coal sample in a sample container; the output terminal of the lanthanum bromide detector is connected with the input terminal of a multi-channel data analysis spectrometer; the collected gamma energy spectrum information and the characteristic X-ray spectrum information are transmitted to a data processing and spectrum unscrambling system; and the data processing and spectrum unscrambling system is used for processing the data. The three-energy coal ash content online monitoring device can be used for coal sampling and automatic rapid detection of as-received coal vehicles without bypass belts, and can be mounted and detected only by slightly changing the structure of the rear end of the sample container.

A method is provided for screening lead concentration compliance of objects, particularly consumer products such as toys, using x-ray fluorescence (XRF) analysis. The measured intensity ratio of the characteristic Lα and Lβ x-rays of lead provides an indication of whether the lead is located primarily in a coating (e.g., paint) layer on the object, or in a thin or thick bulk material. If the intensity ratio indicates that the lead is located in a coating layer or distributed in a thin bulk material, an areal density of lead is determined from at least one of the characteristic x-ray intensities, and the measured areal density is compared to specified lower and upper limits to determine whether the object is unambiguously compliant, unambiguously non-compliant, or indeterminate.