This application discloses a method for detecting trace
oxygen elements based on an
electron probe microanalyzer, relating to the field of analytical detection technology. The method includes: placing the sample to be tested in the
electron probe microanalyzer to obtain the
signal intensity of
oxygen and the
signal intensity of major elements in the sample; obtaining the theoretical standard content of
oxygen in a standard sample calculated by the built-in
calculator of the
electron probe microanalyzer; determining a total correction factor based on the
signal intensity of oxygen and the
signal intensity of major elements; and determining the
oxygen content in the sample based on the total correction factor, the theoretical standard content of oxygen in the standard sample calculated by the built-in
calculator, and the
signal intensity of oxygen. This application solves the technical problem of insufficient accuracy in detecting trace
oxygen content in samples using electron probe microanalyzers.