21 results about "Microbeam" patented technology

A radiotherapy system is configured to receive an open-field X-ray beam from a superficial radiotherapy machine and direct the beam through a grid module configured to spatially fractionate the open-field beam into a group of spaced-apart microbeams. A patient applicator defines an enclosed space having a patient support surface for supporting a target body part. A beam receiver of the patient applicator receives the group of microbeams directed at the target body part on the support surface. The enclosed space is defined by a wall structure comprising shielding sufficient to absorb the radiation emitted by the superficial radiotherapy machine. The patient applicator 80 can be portable, and the superficial radiotherapy machine can be wheeled.

The invention provides a precious metal analyzer accurate spot measurement method and system based on a micro-area x fluorescence spectrum, and the method comprises the steps: applying an X-ray light beam to a preset to-be-measured point, adjusting the focusing position of the X-ray light beam through a micro-light beam focusing technology, and generating a micro-area light spot which is aligned with the spot measurement position of the preset to-be-measured point in real time; collecting an X fluorescence signal generated by excitation of the micro-area light spot; performing dynamic noise suppression processing on the X fluorescence signal by using a preset adaptive digital filter to generate a denoised X fluorescence signal; inputting the de-noised X fluorescence signal into a preset spectrum peak value automatic identification algorithm to obtain characteristic peak value data; and matching the characteristic peak value data with a preset precious metal element type database to generate an element spot measurement result. According to the method, the composite problems of displacement drift, signal distortion and element misjudgment in microcell point measurement are solved, and the precision and efficiency of precious metal analysis are remarkably improved.

The invention provides a symmetrical clamped micro-beam electric power sensing device based on MEMS resonators, and belongs to the technical field of MEMS sensing. The sensing device comprises a sensing assembly. The sensing assembly comprises a vibration beam, an excitation electrode, a tuning electrode and an auxiliary electrode. The two ends of the vibration beam in the axial direction of the vibration beam are connected with the auxiliary electrodes, and the exciting electrodes and the tuning electrodes are arranged at intervals in the length direction of the vibration beam and arranged on the same side of the vibration beam. Excitation voltage is applied to the excitation electrode so that the excitation electrode can excite the vibration beam to generate resonance. Tuning voltage is applied to the tuning electrode so that the tuning electrode can adjust the rigidity of the vibration beam according to the environment temperature, and the thermal power corresponding to the heat source can be inverted. The two sensing assemblies are arranged in a central symmetry mode, so that interference of electrostatic fields generated by the excitation electrodes and the tuning electrodes corresponding to different vibration beams can be weakened mutually. According to the invention, high-precision power inversion in a wide temperature range can be realized.

The invention relates to an HZO ferroelectric film with a controllable coercive field, a ferroelectric capacitor and a preparation method of the ferroelectric capacitor. The HZO ferroelectric film is provided with at least one microbeam gallium ion implantation region; and the gallium ion injection amount of each micro-beam gallium ion injection region is 1.3 * 10 < 14 >-5.2 * 10 < 14 > ion / cm < 2 >. According to the HZO ferroelectric film with the controllable coercive field provided by the invention, the coercive field of the HZO ferroelectric film can be accurately regulated and controlled by adjusting the gallium ion injection amount in the micro-beam gallium ion injection region, and meanwhile, the high polarization intensity, the structural uniformity and the electrical stability of the ferroelectric film can be maintained. Moreover, different injection amounts of gallium ions are injected into different regions of the HZO ferroelectric film, different coercive fields can be shown in different regions, the HZO ferroelectric film can be applied to a multi-valued memory, and the storage density is greatly improved.

A micromechanical optical-sensor structure includes a microbeam that is able to bend about a first direction, an actuator controlled to modify the orientation of the microbeam about the direction and, at a free end of the microbeam, antennas of an optical phased array, the antennas being arranged to emit a light beam that is orientable about a second direction transverse to the first direction. The micromechanical structure in addition includes an on-board sensor in the microbeam transmitting a signal representative of the current orientation of the microbeam about the first direction.

The application relates to the technical field of intelligent sensors, in particular to a high-temperature alloy defect intelligent detection system based on deep learning, which comprises the following steps: obtaining a CAD model of a blade to be detected, a linear attenuation coefficient and crystallization temperature field data, constructing a three-dimensional equivalent thickness matrix and a stress distribution probability field, utilizing a multi-agent reinforcement learning model to adaptively decide X-ray energy, detection gain and infrared excitation frequency, realizing deep adaptation of detection parameters and non-uniform attenuation characteristics of components, constructing a physical reference gray field based on the Beer-Lambert law, stripping a complex geometric structure background and extracting a defect sensitive area through residual operation, synchronously fusing an infrared temperature rise abnormal signal, and physically removing grain structure noise of a single crystal structure in combination with a pixel shift law under microbeam deflection, so that accurate and quantitative output of a defect type, three-dimensional coordinates and size is finally realized. Through multimodal fusion and adaptive decision, the application realizes accurate determination and quantification of defects of complex components.

The present application provides a charge collection method and system. The method includes: obtaining a semiconductor device to be measured, performing point-by-point scanning on the semiconductor device to be measured using a heavy ion microbeam, and drawing a plan view of the single event effect sensitive region according to the point-by-point scanning results; constructing a multi-sensitive volume structure model based on the plan view of the single event effect sensitive region, performing radiation particle incidence simulation on the multi-sensitive volume structure model, and calculating the first charge collection amount of the radiation particles in each sub-sensitive volume; summing up the first charge collection amounts in each sub-sensitive volume to obtain the charge collection amount of the radiation particles incident on the semiconductor device to be measured. The present application can construct a charge collection model for single event effects induced by direct ionization of heavy ions, α particles, etc., and can also construct a charge collection model for single event effects induced by secondary particles such as protons and neutrons. Then, the single event effect charge collection amount can be obtained through the charge collection model, increasing the applicable range of the charge collection model.

The present invention discloses an assembling method of a micron-level pencil beam spatially segmented radiotherapy collimator, comprising the following steps: S1, designing parameters and distribution of a pencil beam MBRT beam spot, and determining the size, spacing, and shape of the microbeam; according to design requirements, processing tungsten sheets using laser micro-hole processing technology; S2, stacking the processed tungsten sheets together to form the main structure of the MBRT collimator; S3, using a punching needle of the same size as the micro-hole to pass through the micro-hole to accurately align the stacked tungsten sheets; S4, in order to compress the stacked tungsten sheets, using 3D printing technology to manufacture two "mouth"-shaped structures, with four positioning holes respectively provided at the four corners of the structure, the positioning holes corresponding to the micro-holes at the four corners of the tungsten sheet, the tungsten sheet being compressed through the positioning holes to form a "sandwich" structure, and the positioning holes being fixed by the punching needle; S5, using 3D printing technology to manufacture four "C"-shaped structures, clamping the "sandwich" structure, ensuring that the tungsten sheet is uniformly stressed in all directions, and completing the production of the pencil-type MBRT collimator.

A radiotherapy system is configured to receive an open-field X-ray beam from a superficial radiotherapy machine and direct the beam through a grid module configured to spatially fractionate the open-field beam into a group of spaced-apart microbeams. A patient applicator defines an enclosed space having a patient support surface for supporting a target body part. A beam receiver of the patient applicator receives the group of microbeams directed at the target body part on the support surface. The enclosed space is defined by a wall structure comprising shielding sufficient to absorb the radiation emitted by the superficial radiotherapy machine. The patient applicator 80 can be portable, and the superficial radiotherapy machine can be wheeled.

The application discloses a kind of micro beam bending strength online detection system based on heat drive, manufacturing method and application, belong to microelectronic mechanical system field.This online detection system includes on-chip testing machine and on-chip test sample, on-chip testing machine mainly includes heat drive loading executor, double-beam heat insulation structure, V-shaped amplification lever, region of interest positioning mark structure and double hammer head structure, and on-chip test sample mainly includes rigid block structure, bending test beam and elastic suspension folded beam.The on-chip testing machine of the application relies on its own resistance beam heating to load and release energy, can realize the full-automatic bending fracture strength online detection and test result extraction after power-on, and can be used for monitoring deep etching release process and predicting the reliability of MEMS device structure.

A MEMS temperature sensor including a clamped-clamped microbeam having a drive electrode on one side configured for applying an AC current, and a sense electrode diagonally situated on the other side, a first anchor at one end and a second anchor at the other end of the microbeam. The first anchor receive a DC bias currents, which heats the microbeam to an operating temperature. The sense electrode is configured to capacitively sense oscillations in the microbeam due to an applied AC current. The MEMS temperature sensor has a three wafer construction in which the components are formed. The device is encapsulated by aluminum, and metal wires connect the first and second anchor, the drive electrode and the sense electrode to side electrode pads outside of the encapsulation. The MEMS temperature sensor has a linear operating region of 30-60 degrees Celsius.

The application discloses a kind of full dry type air blowing microbeam light unit, optical cable, its preparation method and device.The light unit includes: light unit sheath, outer layer optical fiber and inner layer optical fiber;The outer layer optical fiber is arranged on the circumference, preferably the outer layer optical fiber is arranged closely on the circumference, forming a circular outer ring;The outer surface of the light unit sheath and the optical fiber is closely attached;The inner layer optical fiber is received in the outer ring formed by the outer layer optical fiber;The inner layer optical fiber and the outer layer optical fiber are filled with water-blocking resin between the inner layer optical fiber and the outer layer optical fiber, and between the inner layer optical fiber.The application combines the design of outer layer optical fiber and inner layer optical fiber, the outer side of outer layer optical fiber closely attaches to light unit, there is no water penetration space between outer layer optical fiber and light unit sheath, so outer layer optical fiber does not need water-blocking treatment, between inner layer optical fiber and outer layer optical fiber, water-blocking resin is filled in the gap, the laying distance of air blowing microcable is improved, clean and environmentally friendly, and the welding efficiency is high.

This invention discloses an electrolytic cell electrode with an integrated in-situ perturbation device and its preparation method. The electrolytic cell electrode includes a substrate layer, an electro-actuated perturbation layer disposed above the substrate layer, and a catalytic wetting layer disposed above the electro-actuated perturbation layer. The electro-actuated perturbation layer is composed of several electrostrictive microbeams, which are fixed to the substrate layer and do not cover the pores in the substrate layer. Each electrostrictive microbeam consists of a fixed part and a driving part connected to the fixed part. The fixed part is used to fix the microbeams to the substrate layer, while the driving part is suspended above the substrate layer and vibrates under the action of a pulsed current, with the vibration direction perpendicular to the plane of the substrate layer. This invention integrates the electro-actuated microbeam array with the electrode body, eliminating the need for an external drive. This saves space and avoids problems such as energy consumption, sealing failure, and leakage short circuits caused by separate designs, making it suitable for high-density, miniaturized electrolysis systems.

The invention relates to the field of system dynamic modeling, in particular to a dynamic modeling method of a rotating FGM micro-beam, which comprises the following steps: setting geometric parameters and material parameters of the FGM micro-beam, and establishing a rotating FGM micro-beam system based on a modified even stress theory and a scale effect; a mixed coordinate method is adopted to describe a deformation displacement field of any point on the FGM micro-beam in the FGM micro-beam system in a floating coordinate system, wherein the deformation displacement field rotates in a large range; discretizing the large-range rotational deformation of the FGM micro beam by adopting a meshless point interpolation method and a meshless radial base point interpolation method; establishing a high-order rigid-flexible coupling nonlinear kinetic equation of the rotating FGM micro-beam system by applying a second type of Lagrange equation, namely obtaining a kinetic simulation model of the rotating FGM micro-beam based on a meshless point interpolation method and a radial base point interpolation method; solving the kinetic equation by adopting a Newmark method to obtain a deformation schematic diagram of the FGM micro beam in large-range rotational motion; the simulation model and the simulation method provided by the invention have the advantages of high efficiency and high precision, and can also consider the dynamic response of the system.

A radiotherapy system is configured to receive an open-field X-ray beam from a superficial radiotherapy machine and direct the beam through a grid module configured to spatially fractionate the open-field beam into a group of spaced-apart microbeams. A patient applicator defines an enclosed space having a patient support surface for supporting a target body part. A beam receiver of the patient applicator receives the group of microbeams directed at the target body part on the support surface. The enclosed space is defined by a wall structure comprising shielding sufficient to absorb the radiation emitted by the superficial radiotherapy machine. The patient applicator can be portable, and the superficial radiotherapy machine can be wheeled.

A beam laser diode takes a silicon-based nitride epitaxial wafer as a carrier and comprises a silicon substrate layer, an aluminum nitride buffer layer, an n-type gallium nitride layer, a quantum well layer, a p-type gallium nitride layer and a SiO2 layer which are sequentially arranged from bottom to top, the p-type electrode is arranged on the p-type gallium nitride layer, and the n-type electrode is arranged on the edge of the n-type gallium nitride layer. A nitride material on a silicon substrate is used for preparing a micro-beam stress sensitive area LD by utilizing photoetching and ICP (Inductively Coupled Plasma) etching processes for emitting light, and after electrification, the laser LD is obtained in the stress sensitive area of the beam. Under the power-on condition, before and after acceleration loading, due to the fact that quantum limits the stark effect, the frequency wavelength of laser changes, and the magnitude of the acceleration can be sensed through difference frequency.

The present invention provides a precise point measurement method and system for a precious metal analyzer based on micro-area X-ray fluorescence spectroscopy. The method applies an X-ray beam to a preset point to be measured, uses microbeam focusing technology to adjust the focus of the X-ray beam, and generates a micro-area spot aligned with the point measurement position of the preset point to be measured in real time. The X-ray fluorescence signal generated by the micro-area spot is collected. A preset adaptive digital filter is used to dynamically suppress noise on the X-ray fluorescence signal to generate a de-noised X-ray fluorescence signal. The de-noised X-ray fluorescence signal is input into a preset spectral peak automatic identification algorithm to obtain characteristic peak data. The characteristic peak data is then matched with a preset database of precious metal element types to generate an element point measurement result. The present invention solves the complex problems of displacement drift, signal distortion, and element misidentification in micro-area point measurement, significantly improving the accuracy and efficiency of precious metal analysis.

A damage measurement technique capable of measuring damage of a sample in a single crystal state, regardless of the surrounding condition, includes irradiating microbeam white X-rays to a sample in a single crystal state, diffraction of a spot generated by the irradiation is detected, a coefficient on variance of an intensity distribution in a specific direction in the detected diffraction spot is calculated, and a damaged state of the sample is specified based on the calculated coefficient.

The present invention relates to a living cell microbeam directional quantitative irradiation imaging device, belonging to the field of the intersection of radiation biology and photoelectric detection technology. It solves the problem that cell irradiation technology can only perform qualitative irradiation on biological living cells and qualitatively analyze the mechanism of action of biological cells being irradiated, but cannot accurately study the mechanism of action of different irradiation dosages on biological cells. It includes a vertical microbeam terminal, a living cell directional irradiation module, a wide-field microscopy module, a mode switching module and a single proton counting and radiation synchronization control module. The vertical microbeam terminal, the living cell directional irradiation module, the mode switching module and the wide-field microscopy module are coordinated in sequence. The mode switching module is connected to the single proton counting and radiation synchronization control module, and the vertical microbeam terminal is coordinated with the single proton counting and radiation synchronization control module. It realizes accurate quantitative and directional irradiation of biological living cells, thereby better studying the quantitative effect of radiation on cells, and can be used for accurate research on the mechanism of action of different irradiation dosages on biological cells.

A radiotherapy system is configured to receive an open-field X-ray beam from a superficial radiotherapy machine and direct the beam through a grid module configured to spatially fractionate the open-field beam into a group of spaced-apart microbeams. A patient applicator defines an enclosed space having a patient support surface for supporting a target body part. A beam receiver of the patient applicator receives the group of microbeams directed at the target body part on the support surface. The enclosed space is defined by a wall structure comprising shielding sufficient to absorb the radiation emitted by the superficial radiotherapy machine. The patient applicator can be portable, and the superficial radiotherapy machine can be wheeled.

This invention belongs to the field of aerospace electronic device reliability testing technology, and particularly relates to a proton microbeam single-event effect testing system and an error rate assessment method. The system includes a common reference positioning fixture, a pulsed laser single-event test module, and a proton microbeam single-event effect test module. A unified absolute coordinate system is established through an optical positioning structure on the fixture, achieving precise alignment of the pulsed laser platform and the proton microbeam platform. The method involves first fixing the pre-processed device under test (DUT) to the fixture, then scanning the sensitive area and acquiring the error section on the pulsed laser platform, and finally transferring it to the proton microbeam platform to reproduce the coordinates and perform point-to-point irradiation of the sensitive area. The on-orbit error rate is then assessed based on the irradiation response data. This invention solves problems such as the difficulty in selecting proton microbeam test parameters, insufficient cross-platform positioning accuracy, and the lack of multi-functional chip partition testing, enabling efficient sensitive area positioning, precise irradiation, and on-orbit reliability assessment.