Electron beam fast-forming equipment with on-line monitoring function and operation method thereof

Abstract

The invention discloses electron beam fast-forming equipment with an on-line monitoring function and an operation method thereof. The electron beam fast-forming equipment comprises a central control unit, an electronic gun power source, a deflector / scanner power source, a workbench power source, an electronic gun, a work room, a powder-filling box, a workbench, a secondary electron collector and a secondary electron transmitter. The secondary electron collector receives secondary electron information generated in the microbeam scanning process of electron beams. The secondary electron transmitter is used for shaping and amplifying of the secondary electron information and then feeding the information into the central control unit. The central control unit can analyze and process synchronously-recorded secondary electronic signals and judge whether flaws exist in a manufacturing layer. According to the electron beam fast-forming equipment with the on-line monitoring function and the operation method thereof, secondary reflection electronic signals are used for performing on-line quality monitoring on the element manufacturing process of the electron beam fast-forming equipment, and hence the defect that pollution is likely to occur by the adoption of optical monitoring means is overcome.

Description

technical field

[0001] The invention relates to the technical field of electron beam processing equipment, in particular to an electron beam rapid prototyping equipment with an online monitoring function and an operating method thereof. Background technique

[0002] Electron beam rapid prototyping technology is a newly developed technology, which utilizes the principle of metal powder melting under electron beam bombardment, and completes the processing of parts by means of layered selective scanning and melting. Electron beam rapid prototyping has the advantages of high energy utilization rate, wide source of available materials and high forming speed. During processing, the powder loading box sends the metal powder to the powder spreading platform, and the powder spreader spreads the powder on the powder spreading platform evenly to the forming surface of the forming cylinder. The electron beam emitted by the electron gun under the control of the computer is focused on th...

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