24 results about "Electron beam processing" patented technology

The invention discloses a preparation method of a functionally graded material without prefabricated powder addition, which specifically comprises the following steps: step 1, pretreatment: cutting and milling a test block workpiece, processing the test block workpiece into a fixed size and shape, and then cleaning the processed workpiece by using an ultrasonic cleaning machine; step 2, preparing a sample, and polishing the test block by using a metallographic polishing machine until the test block is polished; 3, electron beam treatment, wherein electron beams are adopted for conducting multiple times of irradiation treatment on the sample. And 4, tissue and performance testing is conducted, specifically, the microstructure is observed through a scanning electron microscope, and the mechanical performance of the functionally graded material is detected through a Vickers hardness tester. The method disclosed by the invention can be used for quickly synthesizing the functionally graded material without prefabricated addition, and has an extremely good application scene.

The invention provides an electron beam processing thermal deformation determination method and a processing method, and the determination method comprises the steps: carrying out the simulation of a processing object, obtaining a simulation model, and enabling the simulation model to represent the geometric features, material features and processing boundary conditions of the processing object; determining a transient temperature heat source item of the processing object, wherein the transient temperature heat source item comprises description of an electron beam scanning path and scanning speed, description of electron beam processing technological parameters, and description of a scattering path and energy absorption distribution of an electron beam in a material; the transient temperature heat source item is substituted into the simulation model, and three-dimensional temperature distribution information of the machined object at different moments in the machining process is determined; and determining the thermal deformation of any scanning point on the processing surface at different moments based on the three-dimensional temperature distribution information of the processing object at different moments.

A method for electron beam processing is described herein. A method includes disposing a substrate on a stage of a processing tool comprising a plurality of independently powered, independently controlled modular electron beam devices, concurrently directing a plurality of electron beams from the plurality of electron beam devices to the substrate to process different areas of the substrate concurrently, and, while directing the electron beams to the substrate, moving the substrate at a first constant velocity during a first scan pass and at a second constant velocity during a second scan pass, the first constant velocity being different from the second constant velocity.

The invention relates to a method for correcting imaging defects during electron beam processing of a workpiece, in particular an EUV mirror (6), comprising: moving a focused electron beam (3) to a plurality of test positions (Pi) in an irradiation field of the electron beam (3) by deflecting the electron beam (3), determining imaging defects of the focused electron beam (3) at a respective test position (Pi), determining correction focal lengths (ΔfPi) to correct the imaging defects of the focused electron beam (3) at a respective test position (Pi), and electron beam processing of the workpiece using the correction focal lengths (ΔfPi) to correct the imaging defects.

The application discloses an L-shaped electron beam trajectory electron gun and belongs to the technical field of electron beam processing equipment. The L-shaped electron beam trajectory electron gun comprises a transverse gun barrel and a longitudinal gun barrel connected with the transverse gun barrel, the axis of the transverse gun barrel is perpendicular to the axis of the longitudinal gun barrel; an electron beam generator and a first electron beam correction device are sequentially arranged in the transverse gun barrel along the axis of the transverse gun barrel; a second electron beam correction device and a deflection scanning device are sequentially arranged in the longitudinal gun barrel along the axis of the longitudinal gun barrel; a deflection device is arranged at the joint of the transverse gun barrel and the longitudinal gun barrel, and is used for deflecting the electron beam from the first electron beam correction device by 90 DEG and then introducing the electron beam into the second electron beam correction device; a first air exhaust port is formed in the transverse gun barrel and corresponds to the position of the electron beam generator; and a second air exhaust port is formed in the top end of the longitudinal gun barrel. The application changes the flight path of the electron beam inside the electron gun, and utilizes the screening effect of the electromagnetic field on the charged particles to physically isolate the dust from entering the core area.

The invention discloses an electron beam focusing parameter adaptive calibration method based on regional recursive splitting and analytic field guidance, and belongs to the technical field of electron beam equipment precision control. In order to solve the problems of low full-field uniform sampling efficiency and poor sparse sampling precision in large-view-field electron beam processing, the invention provides a dual-drive adaptive sampling strategy. According to the method, a theoretical curvature distribution diagram is constructed by using an electron optical analytical field to serve as prior guidance, and a distortion sensitive area in a view field is identified according to a multi-dimensional feature fusion criterion of physical prior, differential field nonlinearity and an actual measurement form; a recursive regional geometric subdivision structure is adopted to perform recursive splitting and encrypted sampling on the sensitive region, and narrow window rapid search is realized in combination with a parameter inheritance strategy; and finally, reconstructing a full-field high-precision model based on a scattered data interpolation algorithm. According to the method, sparse sampling can be automatically carried out in the smooth field curvature change region, encryption sampling can be carried out in the severe distortion region, and the calibration efficiency is remarkably improved on the premise of ensuring high focusing precision.

A method for electron beam processing is described herein. A method includes disposing a substrate on a stage of a processing tool comprising a plurality of independently powered, independently controlled modular electron beam devices, concurrently directing a plurality of electron beams from the plurality of electron beam devices to the substrate to process different areas of the substrate concurrently, and, while directing the electron beams to the substrate, moving the substrate at a first constant velocity during a first scan pass and at a second constant velocity during a second scan pass, the first constant velocity being different from the second constant velocity.

The invention relates to the technical field of precision manufacturing, in particular to a vibration isolation device and an electron beam machining machine table. The rigidity adjusting assembly comprises an arc-shaped elastic piece and a piezoelectric fiber composite layer at least attached to the surface of one side of the arc-shaped elastic piece. The bearing table is connected with the base through a sliding assembly extending in the first direction. The first direction is parallel to the plane where the base is located; the first end of the arc-shaped elastic piece is connected with the base, the second end of the arc-shaped elastic piece is connected with the bearing table, and the arc-shaped elastic piece is used for isolating vibration between the base and the bearing table in the first direction. And the piezoelectric fiber composite layer is electrified to adjust the bending radian of the arc-shaped elastic sheet. The vibration isolator is compact in structure, low-frequency vibration isolation can be achieved while the high bearing requirement is met, and the machining precision of a machine table can be improved.

The application discloses a method for pulsed current assisted rolling of double-layer composite thick titanium steel plate, which comprises the following steps: corrugated roller rolling, the steel plate is rolled by additional pulsed current, the corrugated morphology is formed on the surface of the steel plate, and local strong force is formed on the corrugated surface; a large pulsed electron beam is used to treat the composite surface of the steel plate and the titanium plate; the steel plate and the titanium plate are preliminarily assembled, so that the composite surface is in a vacuum state and oxidation is prevented; pressure is applied to the preliminarily assembled steel plate and titanium plate, and pulsed current is additionally applied to mechanically engage the steel plate and the titanium plate, so that a group of blanks is formed; the group of blanks is heated, and pulsed current is additionally applied to roll the composite plate; the corrugated steel plate is rolled, and a large pulsed electron beam is used for treatment, so that the corrugated steel plate and the titanium plate are mechanically engaged first, and then the composite plate is formed by heating and engaging; no oxide is formed on the interface after rolling, and the interface bonding strength of the composite plate is improved.

The utility model discloses a post-pulling type anti-deformation welding tool for electron beam processing, which comprises a base, a pull rod, a flange, a pull claw and a gland, the base is arranged on a driving main shaft of an electron beam welding machine, and the middle part of the base is connected with a corresponding part of the pull rod through a linear bearing; one end of the pull rod is fixedly connected with the middle of the flange, pull claws are distributed on the flange and are perpendicular to bolts, and the gland is arranged in the middle of the distributed pull claws. The pressing device is reasonable in structural design, pressing force can be applied to the part to be welded in advance, the pre-tightening force is made to be larger than the welding seam contraction force, welding deformation is effectively restrained, and the restraining effect on the welding deformation is achieved.

The invention discloses an impurity-free and high-wear-resistant modification method for 2Cr13 stainless steel, which specifically comprises the following steps: step 1, pretreatment: cutting and milling a test block workpiece, processing the test block workpiece into a fixed size and shape, and then cleaning the processed workpiece by using an ultrasonic cleaning machine; step 2, preparing a sample, and polishing the test block by using a metallographic polishing machine until the test block is polished; 3, electron beam treatment, wherein electron beams are adopted for conducting continuous scanning treatment on the sample. And 4, tissue and performance testing: observing the microstructure by adopting a scanning electron microscope, measuring the hardness by utilizing a microhardness tester, and detecting the wear resistance by utilizing a friction wear testing machine. According to the method disclosed by the invention, the surface hardness, the wear resistance and the corrosion resistance of the 2Cr13 stainless steel can be remarkably improved, and the method has an extremely good application scene.

The invention discloses a method for inducing nanocrystallization of the surface of die steel. The method comprises the following steps: (1) pretreatment: cleaning the surface of a milled workpiece by using an absolute ethyl alcohol solvent; (2) drying treatment is conducted, specifically, the pretreated workpiece is placed in a drying box and heated to 60-75 DEG C, and the dried workpiece is obtained; and (3) scanning electron beam processing. According to the technology adopted by the invention, nanocrystals can be generated on the surface of the 5CrNiMo die steel, the comprehensive performance is improved, and the technology has wide market popularization value.

The present application relates to a kind of three-dimensional metamaterial structures and its low-temperature electron beam processing method and application, three-dimensional metamaterial structure includes the metal reflection layer, transmission medium layer, multiple metal connecting layer and multiple metal micropillar group arranged in turn from bottom to top;Three-dimensional metamaterial structure is applied in the refractive index sensor in middle infrared wave band.The present application utilizes the two cycles of low-temperature electron beam exposure-electron beam evaporation process, i.e., can utilize a set of equipment, realizes the processing stacking of multilayer pattern under the premise of single sample entry and exit, forms three-dimensional metamaterial structure with closely connected interlayer connection and high structural strength, and the process utilizes water vapor to condense into amorphous ice layer as the mask of patterning processing, all raw materials are non-toxic and harmless, and the material and structure of three-dimensional metamaterial structure are simple, minimum line width is larger, reduces the requirement of processing precision, also can utilize the method to carry out the height regulation of metal micropillar group, greatly improves sensing sensitivity.

The invention discloses a method for improving the wear resistance of Cr12MoV steel. The method comprises the following steps: (1) pretreatment: cleaning the surface of a milled workpiece by using an absolute ethyl alcohol solvent; (2) drying treatment is conducted, specifically, the pretreated workpiece is placed in a drying box and heated to 50-65 DEG C, and the dried workpiece is obtained; and (3) scanning electron beam processing. The process adopted by the invention can quickly and remarkably improve the wear resistance of the Cr12MoV steel, and has wide market popularization value.

The invention relates to a method for electron beam processing of a surface (25a) of an optical component, in particular a mirror (25) or a mirror substrate, the method comprising: irradiating the surface (25a) of the optical component with at least one electron beam (26) which, during the electron beam processing, is deflected within an irradiation region (28a) relative to a beam direction (Z) of the non-deflected electron beam (26). During the electron beam processing of the surface (25a), the optical component (25) is moved relative to the irradiation region (28a). The invention also relates to an optical component (25), a semiconductor technology system, and a manufacturing system which is designed to carry out the method for electron beam processing.

The utility model discloses an EB (electron beam) coated solid wood composite floor, which is characterized in that a base material layer, a wood veneer layer, a primer layer and an EB wear-resistant coating are sequentially arranged from bottom to top, the upper surface of the wood veneer layer is provided with micro-embossment texture patterns, and the EB wear-resistant coating is formed by curing EB coating through EB electron beam treatment. The EB wear-resistant coating is formed by curing EB coating through EB electron beam treatment, six working procedures for manufacturing the UV wear-resistant primer layer in the prior art are simplified into two working procedures, the curing speed of EB electron beam treatment is high, the coating working procedures can be reduced, the coating curing time can be shortened, the production time of the solid wood composite floor is greatly shortened, and the production efficiency can be improved. The EB wear-resistant coating has excellent wear resistance and hardness, and the EB wear-resistant coating has relatively high tensile strength and relatively high elongation at break, so that the EB wear-resistant coating has excellent flexibility, the impact resistance of the floor is improved, the EB wear-resistant coating is not easy to crack, and the EB wear-resistant coating can effectively replace wear-resistant thin coating in the prior art.

Aspects of the disclosure relate to manufacturing a balloon envelope for use in a stratospheric balloon system using an improved double-bubble blown-film extrusion process with water quenching and electron beam processing. A stream of polyethylene mixture is extruded through an extruder to orient molecules of polymer chains and provide an oriented film. The oriented film is passed through an electron beam, crosslinking the polymer chains to produce a cross-linked film with enhanced mechanical properties. The cross-linked film is heat sealed to form the balloon envelope comprising multiple gores. The resulting balloon envelope exhibits superior characteristics including crystallinity greater than 50%, strength to weight ratio greater than 1 MPa / (dtg / cm3), thickness less than 1.5 mil, thermal emissivity less than 0.03 at 193K, and optical clarity greater than 95%. The manufacturing process may include water quenching to enhance optical clarity and dual electron beam treatment for uniform crosslinking throughout the film thickness.

The invention relates to a bending structure defect electron beam fuse repair manufacturing control system and method, a wire feeder sends out a welding wire along the central axis of an electron beam welding gun, an XYZ-axis moving platform is in threaded connection with the electron beam welding gun, and the pose of the welding gun is adjusted in real time according to the defect position change in the electron beam machining process; the mechanical arm adjusts the space poses of the camera and the XYZ-axis moving platform in the manufacturing process; the control device acquires image information of the damage defect in real time by controlling the camera, and extracts the position, contour shape and thickness characteristics of the damage defect; the pose of the electron beam welding gun is adjusted in real time by controlling the mechanical arm and the XYZ-axis moving platform, and the electron beam size, the electron beam spot position and the wire feeding speed are adjusted in real time by controlling the electron beam power source and the wire feeder. The spacecraft structure damage defects are identified and classified according to shape and size differences, and different processes are selected for defect repair, so that the safety of long-term on-orbit spacecrafts is ensured.

The present application relates to the field of industrial control technology, disclose a kind of electron beam power self-adapting regulation control method and system, the method includes: real-time acquisition electron beam processing workpiece beam amplitude, power output voltage, focusing coil current, according to fixed time window construction power timing adjustment sequence;Beam amplitude variation rate deviation is analyzed based on timing adjustment sequence, obtain amplitude deviation, closed-loop control output voltage, obtain power amplitude correction amount;According to beam amplitude drop rate analysis power output carrier phase characteristics, real-time calibration phase, obtain power phase correction amount;Phase correction amount is mapped as focusing coil current constraint adjustment coefficient, according to amplitude deviation variation gradient setting threshold, obtain focusing current constraint amount;According to beam amplitude drop rate dynamically weighted setting each correction amount, constraint amount, obtain power fusion driving control amount;Fusion driving control amount is input into power control terminal, complete electron beam power self-adapting regulation control.

The invention discloses an optimization method for improving the uniformity of a quadrupole anastigmatic magnetic field based on finite elements, which mainly uses comsol finite element software to carry out quadrupole anastigmatic magnetic lens magnetic field distribution simulation in an electron beam processing process, and carries out modeling in the comsol software according to an actual model. The magnetic field distribution of the quadrupole anastigmatic magnetic lens is optimized by defining material attributes and meshing, the magnetic field distribution conditions under different coil inner diameters and different pole shoe thicknesses can be obtained through the finite element method, the optimal magnetic field uniformity is obtained by optimizing the inner diameter of the magnetic lens and the pole shoe thickness, and the magnetic field uniformity is improved. A key insight is provided for physical research of electron beam anastigmatism, and the method is of great significance to development and optimization of high-performance scientific instruments.

The present disclosure provides an aqueous liquid agent having exceptional stability. The present disclosure provides an aqueous liquid agent containing electron-beam-treated (E)-2-(7-trifluoromethylchroman-4-yldene)-N-(7-hydroxy-5,6,7,8-tetrahydronaphthalen-1-yl)acetamide, or a pharmacologically acceptable salt or solvate thereof. In particular, the present disclosure relates to technology for improving the stability of a suspension that contains a heterocyclidene acetamide derivative, and formulation technology based thereupon.

A kind of electron beam processing equipment acceleration power dynamic index detection method, steps include setting dynamic index, and constructing dynamic index calculation model;Wherein, dynamic index includes acceleration voltage fluctuation rate and acceleration voltage recovery time;Through detection system simulation generation working condition dynamic model;Through dynamic index calculation model, the dynamic index under each working condition is calculated, and the calculation results are summarized and output;The present application realizes the index detection of the anti-interference performance of acceleration power under the transition process of multiple working conditions.

The present disclosure pertains to an avian vaccine that includes a plurality of electron beam (eBeam) -treated bacteria. The present disclosure also pertains to methods of immunizing an avian subject by administering an avian vaccine of the present disclosure to the avian subject. The present disclosure also pertains to methods of making an avian vaccine of the present disclosure by exposing a plurality of bacteria to eBeam treatment.

The application discloses a high-efficiency and low-consumption transmission device for treating wastewater by an electron beam, which comprises a drainage pipe, wherein the drainage pipe extends below an electron accelerator, an included angle between at least a partial pipe section of the drainage pipe and a horizontal plane is an acute angle, a bottom end of the drainage pipe is connected to an irradiation effluent pool, and a top end of the drainage pipe is higher than the irradiation effluent pool; liquid entering the drainage pipe from the top of the drainage pipe flows downward under the action of gravity, passes below the electron accelerator, flows into the irradiation effluent pool after being irradiated by an electron beam, and is treated by the electron beam. The drainage pipe of the application extends in a height direction and is inclined, sewage entering from the top of the drainage pipe flows under the action of gravity and passes below the electron accelerator, and is treated by the electron beam. The transmission device mainly relies on gravity to provide water flow power, does not need to be provided with high-power water pumps and other electric equipment, has the advantages of reducing operation cost, reducing noise, saving energy and reducing energy consumption.