The present application relates to the technical field of
electron source performance test, in particular to a device for characterizing the charging behavior of inorganic non-metallic particles under
electron beam charging and a method for evaluating the charge quantity thereof. The present application realizes
high spatial resolution scanning of the
electron beam on the inorganic non-metallic particles and efficient collection of the charging
signal by means of coaxial precise alignment of the vacuum box, the electron emission source and the
Faraday cup in combination with the micropore array at the receiving end of the
Faraday cup, which not only avoids the shielding of the particles on the electron beam, but also ensures the
high resolution of the electron beam. Furthermore, the design of the micropore array, the control of the vacuum degree and the optimization of the electron beam parameters are used to reduce
signal interference, improve the consistency of the electron beam and eliminate
background noise, which effectively guarantees the accuracy and reliability of the characterization results and provides an important technical means for the study of the charging behavior of inorganic non-metallic particles.