47 results about "Faraday cup" patented technology

The invention relates to the field of mass spectrum equipment, in particular to a low-noise and high-sensitivity mass spectrometer Faraday cup. The Faraday cup comprises a rectangular housing, one side of which is open; the suppression grid is arranged in the shell and is close to the opening; the collector is arranged in the shell and is adjacent to the suppression grid; a slit baffle is arranged at the opening of the shell; the collector is fixed through the insulating lining, insulated from the shell, and used for receiving the ion beam and generating current; the suppression grid electrode is fixed through an insulating lining and a metal positioning block, and negative bias voltage is applied to suppress escape of secondary electrons; the top cover is assembled on the shell to form a sealed whole; the collector connecting piece is arranged on the lower portion of the collector, one end of the Faraday cup outgoing line is welded to the collector connecting piece, and the other end of the Faraday cup outgoing line is led out of the shell. Noise is remarkably reduced, and the detection sensitivity of a mass spectrometer is improved.

The utility model discloses a Faraday cup of an ion receiver of a thermal ionization mass spectrometer, which comprises a non-metal receiving support, a non-metal receiving electrode and a pair of external fixing metal plates, the non-metal receiving support is concaved inwards to form a notch communicated with the outside, the non-metal receiving electrode is arranged in the notch, and the external fixing metal plates are fixed on the non-metal receiving support. The pair of external fixing metal plates are oppositely fixed on the two side surfaces of the non-metal receiving bracket, and the external fixing metal plates and the non-metal receiving bracket are encircled to enable the notch to only have a state that the top is communicated with the outside, so that the whole Faraday cup retains the rigidity of metal, the outside is not easy to deform, and the service life of the Faraday cup is prolonged. The non-metallic material is adopted in the device, so that the device has the characteristic of not rebounding ions, interference on ion measurement can be effectively reduced, and the measurement accuracy is improved.

The utility model discloses a beam signal monitoring device for an electron accelerator, which relates to the technical field of electron accelerators, and comprises a base, a Faraday cup monitor arranged above the base and used for monitoring the current value of an electron beam, and a cooling mechanism arranged above the base and used for cooling, the cooling mechanism comprises a water storage tank, one side of the water storage tank sequentially communicates with a connecting pipeline, a water pump, an extending pipeline and a cooling pipeline, the cooling pipeline is located above the Faraday cup monitor, and the end, away from the extending pipeline, of the cooling pipeline fixedly communicates with a backflow pipeline; the end, away from the cooling pipeline, of the backflow pipeline fixedly communicates with the water storage tank. And the air cooling part is arranged above the Faraday cup monitor and is used for blowing air to flow. The beam signal monitoring device of the electron accelerator is convenient to cool, so that the service life of the monitoring device is prolonged, and the monitoring accuracy of the monitoring device is improved.

The application discloses a kind of electron beam stream reaction lead barrels in the field of radiation protection, including lead barrel body, including butt joint lead barrel body and lead barrel cover, the side of the lead barrel body is equipped with beam entry;Functional insert, including frame and integrated on the frame beam flow diagnostic module, multiple reaction target pieces and magnetic coupling driving structure, the beam flow diagnostic module and multiple reaction target pieces are connected with magnetic coupling driving structure;By integrating all the vulnerable parts and commonly used replacement parts in one frame, the leakage risk caused by multiple dynamic sealing points in traditional design is eliminated using magnetic transmission, one drive shaft can realize faraday cup and fluorescent target detection switching and switching of reaction target sheets of different materials and thicknesses installed on multiple target seats of rotating drum, simple operation, low manufacturing cost, flexible application requirements of multi-task, multi-energy are adapted.

The embodiment of the invention discloses an ion source online detection method and device, electronic equipment and a storage medium, and relates to the technical field of ion sources, and the method comprises the steps: receiving an ion beam emitted by an ion source, and obtaining a first current signal and a second current signal based on the ion beam measurement; the first current signal is measured by moving the Faraday cup along a horizontal axis, and the second current signal is measured by the Faraday cup under at least one bias voltage; performing inversion according to the first current signal and a space response function of the Faraday cup to obtain beam density distribution of the ion source; and / or, according to the second current signal and the spatial response function, performing inversion to obtain ion energy distribution of the ion source; the spatial response function is used for representing the probability that the ion beam is collected after entering the Faraday cup; and carrying out on-line detection on the ion source based on the beam density distribution and / or the ion energy distribution. The embodiment of the invention is suitable for carrying out online detection on the large-size ion source, the detection mode is simple, and the cost is relatively low.

The invention provides a dose control circuit, a dose control system and an ion implanter. The dose control circuit comprises a conversion module and a control module, wherein the conversion module is used for responding to the measurement current and outputting a corresponding scanning voltage to the control module; the measurement current is provided by a Faraday cup and is used for representing the dose of the deflected ion beam; the control module is used for responding to the chip selection signal and providing scanning voltage for the deflection module, so that the deflection module deflects the ion beam based on the scanning voltage; the chip selection signal is a signal determined based on an ion implantation process. Therefore, scanning control of the deflected ion beam dose can be realized in a circuit form, and compared with a control mode of a traditional dose controller, complex design and program writing are not needed, and the method is easy to realize and high in adaptability.

The invention provides a powder electrostatic measurement system, and belongs to the technical field of material electrostatic experiments, the powder electrostatic measurement system comprises a system rack, the system rack is provided with a raw material supply module, an airflow driving module, an experiment pipeline module, a flow monitoring module, an electrostatic measurement module and a powder collection module; the raw material supply module comprises a quantitative discharging mechanism and a powder scattering mechanism. The airflow driving module comprises an air compressor and a powder conveying fan; the flow monitoring module comprises a flow meter, an anti-blocking tee joint and a pulse blower device; the pulse blower device is used for regularly outputting reverse airflow to prevent powder from being accumulated and blocked at a sampling port of the flow meter; the electrostatic measurement module comprises a Faraday cup and an electrostatic charge measurement device; the powder collecting module comprises two powder collecting cylinders which are arranged in series; the problem that influences of different pipeline materials and different section shapes on electrostatic characteristics of powder in an actual industrial scene are difficult to simulate can be solved.

The utility model belongs to the technical field of design and manufacture of isotope magnetic mass spectrometers in analytical instruments, particularly relates to a cavity of an adjustable multi-receiver of a mass spectrometer, and aims to solve the problem that the original adjustable multi-receiver occupies a large space. A front panel, a left panel, a right panel, a rear panel, an upper panel and a lower panel are hermetically and fixedly connected together to form a hollow rectangular cavity; a plurality of left lower connecting holes are formed in the left panel, left lower connecting pipes are mounted on the left lower connecting holes, the left lower connecting pipes are fixedly connected with the left panel, the left lower connecting pipes are in sealed connection with the stepping motors, and one stepping motor is mounted on each left lower connecting pipe; an output shaft of the stepping motor penetrates out of the left lower connecting pipe to be connected with a Faraday cup in the cavity. According to the utility model, the position of the Faraday cup is directly adjusted by using a plurality of stepping motors, and the number of intermediate structures can be reduced, thereby reducing the volume of the cavity.

The invention belongs to the field of mass spectrometry instruments, particularly relates to an ion receiving device, and aims to solve the problem of signal crosstalk among multiple channels of a combined receiver. The ion receiving device provided by the invention comprises a receiver body, and a signal detection cup unit, a slit sheet, a suppression gate unit, a Faraday cup unit and an electron multiplier unit which are mounted on the receiver body, the slit piece, the suppression gate unit and the Faraday cup unit are arranged along a first direction, and an ion beam sequentially passes through the slit piece, the receiver body and the suppression gate unit and then enters the Faraday cup unit; the signal detection cup unit, the Faraday cup unit and the electron multiplier unit are arranged at intervals along a second direction, and the second direction is perpendicular to the first direction. According to the ion receiving device provided by the invention, the signal detection cup unit, the Faraday cup unit and the electron multiplier unit are arranged at intervals along the direction perpendicular to the incident direction of the ion beam, so that signal crosstalk among channels is avoided.

This invention relates to the field of mobile source exhaust particulate matter monitoring technology, and discloses a device and method for measuring the number concentration of nanoscale high-concentration particles based on condensation charging. The measuring device includes a volatile particle removal device, a two-stage condensation growth device, a unipolar charging device, and a dual-path Faraday cup detection device. Sample gas enters from the inlet of the volatile particle removal device, and the outlet of the volatile particle removal device is connected to the inlet of the two-stage condensation growth device; the outlet of the two-stage condensation growth device is connected to the inlet of the unipolar charging device; and the outlet of the unipolar charging device is connected to the inlet of the dual-path Faraday cup detection device. This invention overcomes the shortcomings of existing technologies, achieving efficient removal of volatile particles, high-concentration measurement, and a 10nm particle size detection limit without dilution for measuring the number concentration of ultrafine particulate matter in motor vehicle exhaust, greatly improving detection sensitivity and measurement accuracy.

The utility model discloses a Faraday cup measuring device for measuring beam intensity, which belongs to the field of beam measurement, and comprises an inner cylinder, an outer cylinder, an insulating connecting piece and an iris mechanism, the inner cylinder and the outer cylinder are connected through the insulating connecting piece, the iris mechanism comprises a fixed plate, a rotating plate and a plurality of blades, the fixed plate is fixedly connected with the end part of the inner cylinder, and the rotating plate is fixedly connected with the end part of the inner cylinder. The rotating plate rotates relative to the fixed plate, the blade is arranged between the fixed plate and the rotating plate, a first sliding groove is formed in the rotating plate, a second sliding groove is formed in the fixed plate, a first protrusion and a second protrusion are arranged on the surfaces of the two sides of the blade respectively, the first protrusion is clamped in the first sliding groove, and the second protrusion is clamped in the second sliding groove; the multiple blades are sequentially arranged in the circumferential direction of the inner cylinder, a through hole is defined by the multiple blades, and beam in the inner cylinder penetrates through the through hole to flow out. Therefore, the Faraday cup measuring device not only can measure the beam intensity during an experiment, but also can provide beams with different sizes of beam spots.

The application relates to the technical field of accelerator beam diagnosis, and provides a Faraday cylinder for high-power heavy ions with permanent magnet secondary electron suppression, which comprises a head and a moving device, the head comprises a collecting cup, a permanent magnet and a fixing support, the collecting cup is used for receiving beam particles and secondary electrons generated by beam electron bombardment; the permanent magnet is used for suppressing secondary electron escape; the fixing support is used for fixing the collecting cup and the permanent magnet according to the beam motion direction; the moving device is connected with the fixing support, and the moving device is used for driving the head to switch between a working state and a non-working state. The application receives beam particles and secondary electrons generated by beam electron bombardment through the collecting cup, suppresses secondary electron escape through the permanent magnet, fixes the collecting cup and the permanent magnet according to the beam motion direction through the fixing support, and the permanent magnet can effectively suppress high-energy electron escape, thereby greatly increasing the accuracy of high-energy beam current measurement.

This invention provides a powder electrostatic accumulation characteristic tester, belonging to the technical field of powder material electrostatic testing instruments. It includes an experimental chamber and a chute, a Faraday cup, a humidity control device, a temperature control device, and a feeding device disposed within the chamber. The Faraday cup is located below the bottom of the chute. The humidity control device is used to regulate the humidity within the experimental chamber. The temperature control device is used to regulate the temperature within the experimental chamber. The feeding device includes a lifting mechanism, a tilting plate, and a Faraday cup fixed to the tilting plate. The end of the tilting plate near the top of the chute is hinged, and the lifting mechanism is connected to the position of the tilting plate away from the top of the chute. The Faraday cup is used to hold the powder sample and pours the powder sample into the top of the chute during tilting. This invention can obtain the electrostatic accumulation characteristics of powder samples under different temperature and humidity conditions, and the experimental data is more accurate, providing data support for powder electrostatic prevention in actual production.

The utility model relates to the technical field of mass spectrometers, and provides a Faraday cup detection device for xenon isotope, which comprises a receiver shell, a receiver terminal flange and a receiver mechanism, a first through groove matched with the receiver mechanism is formed in the top of the receiver shell, the receiver terminal flange is fixedly connected with the receiver mechanism, the receiver terminal flange is further fixedly connected with the receiver shell, and the receiver mechanism is provided with a plurality of shielding pieces used for grounding. Specific slit spacing is set for deflection of xenon isotope passing ions in a magnetic field, and a grounded shielding sheet is additionally arranged between two Faraday cups, so that mutual interference between the Faraday cups is effectively prevented, and the accuracy of final abundance ratio calculation is improved.

The invention relates to the technical field of magnetic field information analysis, in particular to a fringing field magnetic field distribution information correction method, device and equipment. Monitoring through a Faraday cup and a Hall probe array to obtain beam focusing degree, beam horizontal offset and magnetic field distribution information of an extended fringe field; according to the beam focusing degree, a preset focusing degree set value, the beam horizontal offset and a preset offset set value, performing trajectory analysis on the magnetic field distribution information of the extended fringe field to obtain an ideal ion motion trajectory; the Helmholtz coil group and the magnetic shielding box are adjusted according to the extended fringe field magnetic field distribution information and the ideal ion motion trail to obtain corrected extended fringe field magnetic field distribution information, the ideal ion motion trail is deduced through trail analysis, hardware is adjusted to optimize the magnetic field, the beam control precision is improved, and the beam control precision is improved. And the ion implantation accuracy and the semiconductor process stability are ensured.

The invention relates to a method for accurately positioning and processing a sample piece in an ion beam processing process, which comprises the following steps of: measuring beam current distribution of an ion beam through a Faraday cup, and measuring beam current density distribution and corresponding coordinates of the ion beam; the offset of the ion beam is determined by fitting the beam distribution to obtain the offset of the beam distribution center of the ion beam and the center of the Faraday cup, and the offset of the sample piece center and the center of the sample table is obtained by measuring the clamping and positioning center through a spectrum confocal displacement sensor; the processing coordinates of the sample piece are compensated by the offset of the ion beam and the offset of clamping and positioning of the sample piece, so that high-precision ion beam processing is realized; the method is scientific and reasonable in process and easy to operate, the spectrum confocal displacement sensor is combined with the Faraday cup to accurately position ion beam processing, and the processing precision of products is greatly improved.

The present application provides an automatic adjustment system and method for a focused beam current, and an ion implanter. The system comprises: a quadrupole magnetic lens group directly facing an output end of an ion source mechanism, the quadrupole magnetic lens group comprising at least one X magnetic lens and at least one Y magnetic lens; a lens position adjustment assembly configured for adjusting a position of the X magnetic lens and / or the Y magnetic lens; a Faraday cup arranged on a side of the quadrupole magnetic lens group away from the ion source mechanism and configured for collecting actual beam current magnitude information; a controller electrically connected to the lens position adjustment assembly and the Faraday cup, and configured for analyzing, according to the actual beam current magnitude information, whether a current beam current is a target beam current, the controller being further configured for controlling the lens position adjustment assembly to adjust the position of the X magnetic lens and / or the Y magnetic lens when the current beam current is not the target beam current, so that the actual beam current magnitude information reaches a maximum value or the current beam current achieves a target beam current value.

The invention discloses an ion isolation device for protecting an off-axis EUV collecting mirror based on an electromagnetic field. The ion isolation device comprises an EUV light source system, a conical cavity, a direct-current voltage generator, an electrode plate, a permanent magnet, a Mo / Si multilayer film collecting mirror, an EUV camera, a Faraday cup and a computer, the EUV light source system is arranged in a vacuum cavity, provides enough energy through laser, excites a target material, generates plasma radiation EUV, and generates debris and high-energy ions along with the generation of the debris and the high-energy ions; the conical cavity isolates the vacuum cavity from the electrode plate and maintains the air pressure in the cavity stable; the direct-current voltage generator provides voltage for the electrode plates; the electrode plate generates an electric field; the permanent magnet generates a magnetic field, and the electric field and the magnetic field act on high-energy ions, so that the ions are deflected, an isolation effect is achieved, and the Mo / Si multilayer film collecting mirror is protected; the Mo / Si multilayer film collecting mirror focuses an EUV light spot of plasma radiation to an IF point; the EUV camera is used for recording the imaging of an IF point and the shape and size of a light spot; the Faraday cup is used for recording the beam intensity of the ion debris; the computer is used for recording, analyzing and calculating images and signals of the EUV camera and the Faraday cup, adjusting electronic controls such as the displacement table, isolating high-energy ions, preventing the high-energy ions from directly damaging the collecting mirror, and effectively prolonging the service life of the EUV collecting mirror.

This invention belongs to the field of mass spectrometry analysis instruments, specifically relating to an ion receiving device designed to solve the signal crosstalk problem between multiple channels of a combined receiver. The ion receiving device provided by this invention includes a receiver body and a signal detection cup unit, a slit, a suppression grid unit, a Faraday cup unit, and an electron multiplier unit mounted on the receiver body. The slit, suppression grid, and Faraday cup units are arranged along a first direction, and the ion beam sequentially passes through the slit, the receiver body, and the suppression grid unit before entering the Faraday cup unit. The signal detection cup unit, Faraday cup unit, and electron multiplier unit are arranged at intervals along a second direction, which is perpendicular to the first direction. By arranging the signal detection cup unit, Faraday cup unit, and electron multiplier unit at intervals along a direction perpendicular to the ion beam incident direction, the ion receiving device provided by this invention avoids signal crosstalk between channels.

The invention provides a movable Faraday cup dust particle charged in-situ measurement device and method, and belongs to the technical field of space environment simulation and electrostatic measurement. The problems that dust electrification states at different spatial positions cannot be captured and dust particle size or quality information cannot be obtained in the prior art are solved. Wherein the first grid mesh and the second grid mesh are arranged at a cup opening of the Faraday cup, the first grid mesh is grounded, and adjustable voltage is applied to the second grid mesh; the rotation driving structure is connected with the Faraday cup and can drive the Faraday cup to move around the rotation center on the horizontal plane, the vertical driving structure is connected with the rotation driving structure and can drive the Faraday cup to move in the vertical direction, and the horizontal driving structure is connected with the vertical driving structure and can drive the Faraday cup to move in the horizontal direction; and the laser scattering sensor is used for observing the quantity and particle size of dust falling into the Faraday cup in real time. The electric quantity of dust at different positions can be measured, and the charge-to-mass ratio of dust particles can be obtained.

The invention discloses a Faraday collector and an ion implantation device. The Faraday collector comprises a base body, an eccentric part and a driving mechanism, the base body is used for receiving charged particle beams; the eccentric part is used for receiving the charged particle beam; the eccentric part is arranged on the base body, and a preset interval is formed between the geometric center of the eccentric part and the geometric center of the base body; the driving mechanism is in transmission connection with the eccentric part and used for driving the eccentric part to eccentrically rotate around the geometric center of the base body, and the eccentric part covers a target area including the geometric center of the base body after rotating by a preset angle. According to the Faraday collector, abrasion and even breakdown caused by long-term bombardment of charged particle beams in the center area of the base body can be avoided, the actual service life of the Faraday collector is remarkably prolonged, the accuracy of current detection of the Faraday collector can be guaranteed, electrical performance deviation of a wafer is avoided, and the product yield is improved.

The invention discloses an electron beam spot measurement and calibration device and method for electron beam selective melting. The device comprises an electron beam emission unit, a focusing deflection unit, a melting forming area, an electron beam spot measurement module and an electron beam spot calibration unit. The electron beam emission unit is used for forming high-energy large-beam electron beams, the focusing deflection unit is used for focusing the high-energy large-beam electron beams into fine electron beam spots and scanning the fine electron beam spots, and the electron beam spot measurement module is located above a melting forming area and used for measuring current density distribution of the electron beam spots. A plurality of measurement calibration positions which are distributed at equal intervals in a two-dimensional mode are arranged in the melting forming area, all the measurement calibration positions jointly form coordinates of the beam spot measurement system, and the electron beam spot calibration unit is used for controlling the electron beam spot measurement module and the focusing deflection unit. According to the invention, accurate measurement of beam spot current density distribution at a fixed position is realized, and thermal damage of a high-energy large-beam electron beam to the small-hole diaphragm and the Faraday cup is also avoided.

The disclosure provides a Faraday cup assembly, an ion implantation device and a method of using the same, and relates to the technical field of semiconductors. The Faraday cup assembly comprises a base, a Faraday cup, a guard ring and a plurality of connecting pieces. The base has a mounting surface provided with a mounting groove, the bottom surface of the mounting groove is provided with at least one mounting hole; the Faraday cup is in the form of a circular ring and is arranged on the bottom surface of the mounting groove, the Faraday cup is provided with a circular ring-shaped cup cavity extending in the circumferential direction, the cup cavity has an open end facing the top of the mounting groove, and the bottom of the cup cavity is provided with a plurality of fixing holes uniformly distributed in the circumferential direction; the guard ring is arranged on the mounting surface and covers the mounting groove, the projection of the guard ring on the open end covers the cup cavity, the guard ring is provided with a plurality of arc-shaped slits distributed in the circumferential direction, and the slits and the fixing holes satisfy the following conditions: wherein n is the number of slits, c is the circumference of the circle where the slits are located, L is the arc length of the slits, and m is the number of fixing holes. The connecting pieces are detachably connected to the mounting holes and pass through the fixing holes opposite to the mounting holes.

This invention relates to a Faraday cup with high electron collection efficiency, comprising a collection cavity, a permanent magnet, and a particle injection channel. An inclined surface is provided inside the collection cavity near the side wall, creating a conical space with a gradually increasing volume from the inlet to the bottom of the cavity, which alters the collision direction of particles within the cavity. The permanent magnet is located outside the collection cavity and generates a magnetic field to change the trajectory of incident and secondary electrons within the cavity. The particle injection channel is located at the inlet of the collection cavity. The first end of the particle injection channel connects to the inlet of the collection cavity, and the second end has a suppression electrode located at the front end of the second end of the particle injection channel. The advantages of this invention are that it allows electrons to collide with the inclined side wall, reducing reflected electrons emitted towards the cup opening, and the permanent magnet alters the electron path, reducing escape and improving electron collection efficiency.

The invention discloses a fast Faraday cup detector for a radio frequency ion implanter, which comprises a fast Faraday cup arranged in the ion implanter and an external driving assembly, and is characterized in that the fast Faraday cup is in transmission connection with the driving assembly; the fast Faraday cup comprises a shell, and a front baffle plate, an insulating plate and a microstrip line assembly which are arranged in the shell, beam holes are formed in the centers of the front baffle plate and the insulating plate, and a microstrip line cavity is formed between the insulating plate and the microstrip line assembly; when the fast Faraday cup is used for measuring the longitudinal distribution of the micro-beam bunches, the driving assembly drives the fast Faraday cup to be inserted into the beam track center of the ion implanter, so that the beam hole in the fast Faraday cup moves to be concentric with the beam light path center, and the beam center part is intercepted to enter the microstrip line cavity; and bombardment is carried out on the microstrip line assembly for measurement. According to the invention, the microstrip line structure is used as a beam receiver, has a high frequency band width, can quickly respond to a beam signal, and can accurately monitor the longitudinal distribution of beams in a microbeam bunch.

The present application relates to the mobile source exhaust particulate matter monitoring technical field, disclose a kind of based on condensation electric charge's nanoscale high concentration particle number concentration measuring device and method.Volatile particle removal device, two-stage condensation growth device, unipolar charging device, two-way faraday cup detection device are included in measuring device.Sample gas enters from the gas inlet of volatile particle removal device, the gas outlet of volatile particle removal device is connected to the gas inlet of two-stage condensation growth device;The gas outlet of two-stage condensation growth device is connected to the gas inlet of unipolar charging device;The gas outlet of unipolar charging device is connected to the gas inlet of two-way faraday cup detection device.The present application can solve the deficiency in the prior art, to motor vehicle exhaust ultrafine particulate matter number concentration measurement realizes efficient removal volatile particle, high concentration measurement, without dilution 10nm particle size detection lower limit, greatly improve the detection sensitivity and the accuracy of measurement result.

The invention relates to an on-line detection device and a detection method for high dose of electron irradiation, a vacuum chamber is enclosed by a vacuum shell, the outer wall of the vacuum shell is provided with a mounting port, a titanium-based vacuum film window is mounted in the mounting port, a water cooling plate covers the mounting port, the water cooling plate is provided with a collimation hole, and the collimation hole is communicated with the titanium-based vacuum film window. The collimation hole penetrates through the water cooling plate and corresponds to the titanium-based vacuum film window, the detection assembly is arranged in the vacuum chamber, and the detection assembly corresponds to the collimation hole; the signal reading device is arranged outside the vacuum shell, and the signal reading device is connected with the detection assembly; the detection process comprises the following steps: a target detection electron enters the Faraday cup-signal reading device to read a current signal; the titanium-based vacuum film window allows efficient penetration of electrons while maintaining internal and external pressure difference in the vacuum chamber, so that gas ionization particles are effectively prevented from entering a detection range, and the technical problem that the intensity of a target detection electron beam cannot be detected in an atmospheric environment is solved; and meanwhile, the detection accuracy is improved.

The utility model discloses a charged ion current characteristic measuring device and an ion implanter. The charged ion current characteristic measuring device comprises a beam limiting plate and a Faraday cup insulated from the beam limiting plate, the beam limiting plate comprises an incident plane and an emergent plane, and a plurality of first through holes penetrating from the incident plane to the emergent plane are formed in the beam limiting plate; the Faraday cup is arranged on the emergent surface of the beam limiting plate, and the Faraday cup and the first through hole are oppositely arranged; and the driving mechanism is connected with the measuring assembly, and the driving mechanism is used for driving the measuring assembly to move and rotate so as to realize the detection of the characteristics of the charged ion current. According to the scheme of the utility model, the accuracy of measuring the characteristics of the charged ion current is high, and the detection efficiency is high.

The invention discloses an electron beam energy collection method and device based on a Faraday cup and an electron beam system, and relates to the technical field of electron beam measurement, and the electron beam energy collection method based on the Faraday cup comprises the steps: controlling the Faraday cup to move in a continuous output state of an electron beam, enabling the Faraday cup to receive the electron beam at different spatial positions in sequence, and outputting an original current signal corresponding to each spatial position; acquiring a plurality of original current signals output by the Faraday cup and a Faraday cup spatial position corresponding to each original current signal, and performing signal processing on each acquired original current signal to obtain a corresponding correction current signal; and reconstructing an energy distribution image of the electron beam spot according to the plurality of correction current signals and the Faraday cup spatial position corresponding to each correction current signal. According to the invention, the electron beam energy collection precision is improved.

A kind of high-power electron beam spot measurement method, comprising the following steps: Faraday cup moves along straight trajectory;Electron beam spot moves along circular trajectory intersecting with the straight trajectory for several rounds, and when electron beam spot meets Faraday cup in each round, the Faraday cup obtains the coordinates of several acquisition points and corresponding current signals;The beam spot characteristics of the electron beam spot are obtained based on the coordinates of each round acquisition point and corresponding current signals;The present application makes electron beam spot do circular motion, greatly shortens the moving distance and time of Faraday cup when collecting electron beam spot electron, improves the measurement efficiency, at the same time, Faraday cup only contacts electron beam spot when it rotates to straight trajectory each time, further reduces the time of Faraday cup exposed in electron beam spot, effectively avoids that Faraday cup is burnt out in the process of measurement, so that the measurement method can be applied to larger power electron beam spot.