222 results about "Micro electrode" patented technology

The invention relates to the technical field of microfluidics, in particular to a high-throughput and high-efficiency cell extrusion microfluidic system and a particle introduction method. And a closed-loop control system integrating real-time cell deformation sensing, dynamic parameter decision and physical extrusion and alternating electric field cooperative application is constructed. The chip is provided with an inlet shunting device, a micro-channel and a channel structure of a microelectrode. The method comprises the steps of real-time deformation image acquisition and analysis and dynamic extrusion parameter decision and cooperative application. The invention provides a high-flux and high-efficiency cell extrusion microfluidic system and a particle introduction method, and aims to solve the problems that the drug loading efficiency and the survival rate are difficult to consider due to heterogeneity in the existing cell extrusion technology and a physical extrusion and electroporation coordinated regulation strategy is lacked, so that personalized precise treatment of cells is realized, and the cell quality is improved. The drug loading efficiency, the cell survival rate and the high throughput are obviously improved.

The invention discloses a high-linearity dynamic and static pressure flexible sensor based on Gaussian height distribution. The high-linearity dynamic and static pressure flexible sensor comprises a packaging layer, an upper electrode layer, a piezoelectric layer, a common electrode layer, an insulating layer, a lower electrode layer and a substrate layer which are sequentially stacked from top to bottom, the piezoelectric layer comprises a plurality of PVDF micro-columns, the top ends of the PVDF micro-columns are fixedly connected with the upper electrode layer, the bottom ends of the PVDF micro-columns are provided with micro-electrode layers, and the height of the PVDF micro-columns is of a Gaussian distribution structure from the center to the periphery; the common electrode layer is provided with a plurality of micro-column through holes which are completely overlapped with the PVDF micro-columns; the output leads of the upper electrode layer and the common electrode layer output piezoelectric signals corresponding to dynamic pressure, and the output leads of the common electrode layer and the lower electrode layer output capacitance signals corresponding to static pressure. According to the invention, the dynamic pressure is measured by using the piezoelectricity of PVDF, synchronous measurement of static pressure is realized through a Gaussian distribution structure of a plurality of PVDF micro-columns, and high-sensitivity and high-linearity output of dynamic and static pressure measurement signals is realized.

The invention relates to a high-concentration breeding wastewater treatment method, which comprises the following steps of: enabling wastewater to sequentially pass through a coagulation area A, a flocculation area B and a biochemical area C, and respectively carrying out high-speed stirring coagulation, low-speed flocculation and microbiological treatment, so as to construct an integrated wastewater treatment system which is efficient, anti-blocking, compact and high in automation degree. The device comprises a wastewater tank, a multi-stage treatment assembly, a dosing box, a power distribution cabinet and a clear water tank, the multi-stage treatment assembly comprises a supporting frame, a multi-stage treatment box, an aeration assembly and a biological membrane assembly, a stirring assembly can fully stir wastewater, it is ensured that a coagulant and the wastewater are instantly and uniformly mixed, uniform micro-flocs are formed, and bottom sedimentation is avoided; secondly, a unique pulse aggregation environment is created in a microelectrode plate and stirring mode, destabilization and aggregation of colloidal particles can be promoted, and mild conditions are provided for growth and compaction of flocs; and finally, stable and rich microbial communities are formed for the biological membrane assembly, so that the wastewater treatment efficiency is improved.

A method and system for protecting electrode arrays while implanted on a brain including a flexible electrode array including non-penetrating cortical surface microelectrodes, a ceramic layer covering the electrode array and a polymer layer adjacent the ceramic layer, wherein the ceramic layer and the polymer layer hermetically seal the electrode array. The ceramic layer can be configured to exhibit sufficient flexibility to allow the electrode array to be implanted using minimally invasive surgical techniques, while still hermetically sealing the electrode array from a biological environment.

The invention relates to the technical field of semiconductor micro-nano manufacturing, and discloses a novel semiconductor test probe manufacturing process which comprises the following steps: preparing an ionic liquid electrolyte containing a high-pressure priority adsorbent and a low-pressure priority adsorbent; a first voltage pulse is applied between the microelectrode and the conductive base, the amplitude of the first voltage pulse enables the high-voltage preferential adsorbent to preferentially adsorb on the surface of the microelectrode, and a flexible probe root and a flexible probe body are formed through deposition; then, a second voltage pulse is applied, and the amplitude of the second voltage pulse is lower than that of the first voltage pulse, so that the low-voltage preferential adsorbent preferentially adsorbs and deposits to form a superhard probe tip. The probe with the functional gradient structure is integrally manufactured by programmed voltage regulation and control in single continuous deposition, high hardness of the needle tip and high flexibility of the needle body are simultaneously realized on a single structure, the manufacturing process is remarkably simplified, and the cost is reduced.

The invention discloses a multifunctional neural electrode for intracranial pressure detection and closed-loop nerve regulation, the multifunctional electrode sequentially comprises a PMUT electrode for intracranial pressure detection and nerve regulation and a macro-micro electrode for electroencephalogram signal detection from top to bottom, and the PMUT electrode is bonded on the macro-micro electrode. The PMUT electrode is bonded to the macro-micro electrode to serve as a multifunctional electrode, the PMUT electrode can serve as a pressure sensor and can also serve as an ultrasonic transducer, the dual functions of intracranial pressure detection and fixed-point ultrasonic nerve stimulation are achieved, the macro-micro electrode can achieve detection of local field potential and peak potential, and the ultrasonic nerve stimulation function is achieved. Therefore, a detection-feedback-regulation closed-loop system is realized.

The invention relates to the technical field of biology, and provides a chip assembly and a preparation method thereof. The chip assembly comprises a substrate, a circuit layer, a culture piece and a microelectrode array. The microelectrode array is located in the culture tank of the culture piece, the culture tank can be used for containing the to-be-monitored organ, and the to-be-monitored organ can make contact with the substrate and make contact with the microelectrode array when located in the culture tank. The substrate and the microelectrode array are both flexible structural members, so that the substrate and the microelectrode array can deform. Therefore, when the organoid is in the culture tank and the organoid is in contact with the microelectrode array, the microelectrode array deforms to be matched with the appearance of the organoid, so that the organoid is in more sufficient contact with the microelectrode array, the signals, collected by the microelectrode array, of the organoid are more accurate, and the damage of the microelectrode array to the organoid can be reduced. The base is also a flexible structural member, and the microelectrode array arranged on the base can move correspondingly by deforming the base so as to adjust the position of the microelectrode array.

The invention discloses an intelligent zinc-aluminum coating quality monitoring method and system for a wind power blade bolt, and solves the problems that internal defects of a coating cannot be found in an early stage and predictive maintenance cannot be realized in the prior art. The method comprises the following steps: acquiring multi-source monitoring data of coating internal defects, interface micro-strain and corrosion states through a terahertz imaging unit, a pre-embedded FBG sensing unit and a microelectrode array ECN acquisition unit which are integrated on an inspection robot; after carrying out local preprocessing by utilizing an edge computing gateway, synchronizing data to a digital twinborn analysis platform deployed with a coating state intelligent evaluation model so as to output a current health state grade and residual life prediction of the coating; finally, a maintenance decision suggestion is automatically generated or an equipment control instruction is triggered based on the result, closed-loop monitoring from state sensing to intelligent execution is formed, and the system comprises a corresponding hardware module and a software platform and is used for achieving the method.

The invention discloses a microelectrode for collecting cell electrophysiological signals and a preparation method thereof.The microelectrode comprises a substrate, an electrode array, a wire array and a bonding pad array, the electrode array, the wire array and the bonding pad array are arranged on the substrate, the electrode array is distributed in a dispersed mode with a preset position as the center, and the wire array is connected with the electrode array and the bonding pad array; the electrode array comprises a first conducting layer, the wire array sequentially comprises a first conducting layer, a second conducting layer and an insulating layer, the bonding pad array sequentially comprises a first conducting layer and a second conducting layer, and the first conducting layer and the second conducting layer are made of different materials. According to the embodiment, the performance of the microelectrode array can be improved, the preparation cost is reduced, and the preparation efficiency is improved. The microelectrode can be widely applied to the technical field of microelectrodes.

The invention discloses a single vesicle particle electrochemical signal identification and classification method and identification system, and the method comprises the steps: S1, preparing a carbon fiber ultramicro electrode, applying a voltage in a patch clamp system constant potential mode, and collecting picoampere-level current response generated by oxidation of a single vesicle content on the surface of the electrode; s2, carrying out smooth filtering on the collected original current signal, and realizing characteristic peak identification and multi-dimensional physical / statistical characteristic extraction by using a multi-parameter peak identification method based on a threshold value; s3, carrying out preprocessing operations including missing value processing, standardization, principal component analysis dimension reduction and category equalization on the extracted peak value characteristic data; and S4, on the basis of the preprocessed feature data, constructing and training at least one machine learning model for automatically identifying the particle size category of the vesicle particles. The method combines the advantages of single-vesicle electrochemical high-sensitivity measurement and intelligent algorithm classification, and has the advantages of high recognition efficiency, good repeatability, wide applicability and the like.

The present application relates to the technical field of microelectrode preparation, and particularly relates to a transparent microelectrode array chip preparation method, comprising the following steps: S1. pretreating a glass substrate to improve the substrate surface cleanliness and adsorbability of the electrode film; S2. evaporating an ITO film on the surface of the pretreated glass substrate by using a magnetron sputtering process, as a transparent electrode; S3. spin-coating a photoresist on the surface of the ITO film and performing a patterning treatment, and then etching the ITO film to form a preset electrode structure by using a dry etching process, and then removing the photoresist and cleaning and drying; S4. coating an insulating layer on the surface of the substrate by using a PECVD process, patterning the insulating layer and etching by using a dry etching process to realize windowing, and then removing the photoresist and cleaning and drying; and realizing photoelectric synchronous detection. Avoiding metal residue interference: photoresist masks are used throughout the etching process to replace traditional metal hard masks.

A three-dimensional (3D) microelectrode array device for in vitro electrophysiological applications includes a substrate and micro vias extending from the bottom face to the top face of the substrate. A microneedle at each micro via extends from the bottom face upward beyond the top face and forms a hypodermic microneedle array on the top face. Metallic traces on the bottom face interconnect the hypodermic microneedles to form the 3D microelectrode array. A microheater is positioned on the bottom face of the substrate. Microfluidic ports may be formed at the substrate. Interdigitated electrodes may be formed at the substrate.

The present disclosure is directed to neural interface devices and methods that accesses the subarachnoid space to enable minimally invasive modulation and recording of neural structures. Exemplary embodiments may comprise an implantable pulse generator and a microelectrode catheter. In particular embodiments, the microelectrode catheter comprises one or more stimulating and recording electrodes. Exemplary embodiments may also include methods comprising performing a lumbar puncture to access the spinal subarachnoid space and advancing microcatheter through the spinal subarachnoid space.

The present application relates to the technical field of semiconductor electrostatic chuck, in particular to an electrostatic chuck ceramic plate with microelectrode and a processing method. In the processing, the electrode forming surface of the ceramic layer is first determined, photoresist is coated and dried, and the photoresist reserved area and the exposed area are formed through exposure and development. The exposed area is subjected to metal plating, and then the photoresist in the reserved area is removed. After cleaning, the exposed area is plated with a metal layer to form a microelectrode. The electrostatic, temperature sensing and heating layer plates are independently manufactured into microelectrodes through the process, and then are bonded to form a ceramic plate. The present application replaces the traditional process with the precision process of photoetching and development combined with plating, improves the forming precision and layout density of the microelectrode, realizes independent manufacturing and high-density integration of the microelectrodes of the three types of layer plates, solves the problem of integration of functional electrodes in the prior art, can realize accurate control of multiple temperature zones, has a mature and coherent process, guarantees the forming quality of the microelectrode, improves the chucking and temperature control performance, meets the needs of semiconductor process, and has practicality and mass production value.

The application discloses an electronic tuning type multifunctional sensor and a preparation method thereof. The sensor comprises a quartz crystal, a composite electrode and an oscillation circuit; the first end of the composite electrode is connected with the first end of the oscillation circuit, the second end of the oscillation circuit is connected with the first end of the quartz crystal, the second end of the quartz crystal is connected with the second end of the composite electrode, and the second end of the oscillation circuit is an output end. The composite electrode comprises a substrate, a planar inductive microelectrode and a planar capacitive microelectrode which are arranged on two sides and are connected in series through a via hole; a nano-magnetic iron oxide film is deposited on the inductive side, a hydroxylated ultra-high specific surface area disordered porous carbon film is deposited on the capacitive side, and a perfluorosulfonic acid protective layer is coated on the surfaces of the two films. The application forms a frequency selection network by connecting the double-sided electrode and the quartz crystal in series, and outputs an anti-interference frequency signal; the protective layer is insulated and prevents short circuit on the inductive side, and improves the humidity response on the capacitive side; manual overturning can switch the detection of metal damage, non-metal defects and environmental humidity, and the sensor has the advantages of high stability and low cost.

The invention discloses a method for identifying logging interpretation electrical standard parameters, and solves the problems of inaccurate difference and low efficiency caused by the influence of subjective factors on the manual identification result of the logging interpretation electrical standard parameters in the prior art. The method comprises the following steps: S1, establishing a benchmarking array for a well section to be identified; s2, matching the target well data on the apparent resistivity curve A based on the established benchmarking array; obtaining optimal matching data; s3, determining a reference layer identified by the electrical standard; s4, identifying a microsphere standard, a sound wave calcium judgment standard and a deep three lateral standard; s5, identifying a microelectrode standard; and S6, identifying a micro-gradient calcium judgment standard. The device for realizing the automatic identification of the logging interpretation electrical standard parameters comprises an establishing unit; a matching unit; a determination unit; a first identification unit; a second identification unit; and a third identification unit. According to the method, logging interpretation electrical standard parameters can be rapidly identified, and quality improvement and efficiency improvement of logging interpretation reservoir thickness division work are assisted.

The invention belongs to the technical field of beauty equipment, and particularly relates to a beauty light zirconium ion excitation device which comprises a device shell, the head of the device shell is provided with an ion excitation head, the ion excitation head comprises an insulating base and an excitation electrode group fixed on the insulating base, and the excitation electrode group is formed by arranging a plurality of microelectrodes in an array form; the device shell is internally provided with an ion excitation circuit, the ion excitation circuit comprises a high-voltage generation module and an electrode driving module, the high-voltage generation module is electrically connected with the electrode driving module, and the electrode driving module is respectively connected with each microelectrode in the excitation electrode group through a wire. According to the invention, the electrode group formed by arranging a plurality of independent microelectrodes in a specific array is arranged on the ion excitation head, the electrode driving module is respectively connected with the microelectrodes, and the array formed by the plurality of microelectrodes can physically form an ion excitation source with wider coverage and more dense distribution; and the generated ion current is milder and more stable.

The invention belongs to the technical field of signal detection, and relates to a three-dimensional integrated cell electrophysiology platform and a preparation method and application thereof.The three-dimensional integrated cell electrophysiology platform is composed of microelectrodes and a three-dimensional micro-scaffold, and the microelectrodes comprise a two-dimensional plane microelectrode and a three-dimensional microelectrode; wherein the microelectrode is used for applying stimulation to cells in a two-dimensional plane and a three-dimensional space and collecting electrophysiological signals; the three-dimensional micro-scaffold is used for simulating a three-dimensional microenvironment of normal physiological activities of cells; the average diameter of the two-dimensional planar microelectrode and the average diameter of the three-dimensional microelectrode are each independently 1 [mu] m or less. The three-dimensional integrated cell electrophysiology platform provided by the invention has the functions of high-precision processing, high structural design flexibility and high integration, and is suitable for various scenes such as cell culture, cell detection, cell excitation and the like.

The invention discloses an in-vitro biological neural network accurate regulation and control method and system based on a microelectrode array, and the method comprises the steps: S1, culturing and planting neuronal cells on a microelectrode array chip, and forming an in-vitro neural network with spontaneous activity; s2, preprocessing the in-vitro neural network to enable the in-vitro neural network to enter a stable function state capable of being effectively activated; s3, recording an electrophysiological signal, sampling the structure and function connection of the neural network, and dynamically selecting an optimal stimulation site; s4, applying electrical stimulation to the selected stimulation sites according to a preset regulation and control target, collecting neural network response signals in real time, and constructing a closed-loop regulation and control loop; and S5, performing quantitative analysis on the neural network based on the multi-dimensional evaluation index to form a comprehensive evaluation result, and feeding back the comprehensive evaluation result to the step S4 to optimize a subsequent stimulation strategy. According to the method, organic unification of sensing, intelligent decision making, closed-loop intervention and multi-dimensional quantitative evaluation of a neural network structure and a function state can be realized.

The application provides a wide stress full-linearity flexible ion-dissociation sensor and a preparation method thereof, which comprises a heat-shrinkable film material layer, a flexible AgNWs / MXene electrode, and a dielectric layer, the dielectric layer is attached between the two flexible AgNWs / MXene electrodes, and the two flexible AgNWs / MXene electrodes are provided with corresponding heat-shrinkable film material layers. The electrode of the application adopts the AgNWs / MXene composite electrode with good mechanical properties, the AgNWs microelectrode provides a conductive framework, and the MXene plays a role in protecting the AgNWs from oxidation and corrosion and providing a pseudo-capacitance; the application is based on the ion-dissociation effect of the ion gel film, uses the ion gel film with a porous microstructure as the dielectric layer, so that the dielectric layer has a larger deformable surface area and provides a larger deformation capacity, is thousands of times of the traditional solid-state similar sensor, and makes the ion-dissociation sensor have better linearity, higher sensitivity and faster response speed.

The application discloses a kind of light stimulation, electric stimulation, concentration gradient combined control device and preparation method, including light stimulation light intensity gradient chip layer, cell capture culture chip layer and microelectrode layer;Cell capture culture chip layer is provided with several main sample introduction sections and several capture culture channels;Capture culture channel is provided with several groups of capture culture cavities, and capture culture cavity is provided with several capture structures;Light stimulation light intensity gradient chip layer is provided with several main liquid introduction sections and several light intensity adjustment channels, and each light intensity adjustment channel is provided with light intensity adjustment section;The interdigital electrode region on microelectrode layer corresponds to the position of capture culture cavity.There is also S1-S5 etc.Preparation step.The light stimulation, electric stimulation, concentration gradient combined control device of the application can realize integrated multi-factor combined stimulation based on microfluidic platform, parallel experiment, high integration, multiple units are operated simultaneously, and has the advantages of small pollution risk, low reagent loss etc..

The invention belongs to the technical field of analysis and detection, and particularly relates to a bifunctional zinc ion selective microelectrode, an ultramicro electrochemical sensor, a preparation method and application. The method comprises the following steps: preparing a platinum ultramicro disc electrode through the steps of laser drawing, polishing, electrode extraction and the like, doping a multi-walled carbon nanotube into a zinc ion selective membrane solution, and curing to form a membrane to obtain a target microelectrode; according to the ultramicro electrochemical sensor, the microelectrode is used as a core functional part and is matched with a reference electrode and an auxiliary electrode to form a three-electrode system. The diameter of the electrode is 25 [mu] m, the RG value is about 3, the linear correlation coefficient of zinc ions reaches up to 0.997, and the electrode has excellent selectivity, conductivity and position control accuracy. High-resolution monitoring of the concentration of zinc ions in a negative electrode interface in-situ micro-area under different electrolyte additive systems and different charge-discharge multiplying powers in the charge-discharge process of the aqueous zinc ion battery can be realized through a potential response mode of a scanning electrochemical microscope.

The present technology relates to a measurement system, a measurement method, and an information processing method that make it possible to identify a region of interest with higher accuracy in a shorter period of time. The measurement system comprises a control unit that, for each of a plurality of electrodes included in an MEA disposed in a well in which cells are cultured, identifies a region of interest by performing processing based on measurement information different from measurement information obtained via measurements performed by the electrodes, and either performs new measurements using only electrodes included in the region of interest or deletes measurement information obtained by electrodes other than those included in the region of interest from the measurement information of the plurality of electrodes. The present technology can be applied to a measurement system.

The invention discloses a preparation process of a palladium nano-film hydrogen sensor, and belongs to the field of sensor preparation. The preparation process of the palladium nano-film hydrogen sensor comprises the following steps: step 1, pre-treating an aluminum sheet, and flattening to remove a surface oxide layer; 2, carrying out primary oxidation and secondary oxidation; thirdly, the aluminum oxide layer is subjected to chambering operation, and an aluminum-based negative mold is obtained; step 4, carrying out polymerization and demolding; 5, coating the PMMA nano-column array sample through electron beam evaporation equipment to form a palladium alloy nano-film; step 6, preparing and arranging a microelectrode; 7, completing electrical connection and packaging between the microelectrode and an external circuit; the response value and the response speed of the prepared palladium nano-film hydrogen sensor are remarkably improved, and the situation that the sensor is rapidly aged and breaks down due to embrittlement, cracking or stripping caused by substrate limitation and strong lattice stress is avoided.

The invention provides a chip copper interconnection layer deplating recovery method and system, electronic equipment and a medium, and the method comprises the steps: recognizing an active reaction boundary dissolved by a copper interconnection layer in real time, and dynamically dividing a microelectrode array into a core deplating region, an edge inhibition region and an isolation region according to the active reaction boundary; a forward dissolving electric field is applied to the core deplating area to efficiently remove a copper material, meanwhile, a reverse restraining electric field is applied to the edge restraining area to actively restrain transverse etching of the side wall, the isolation area avoids interference on a non-target area through a passive or high-resistance state, and therefore localized precise regulation and control of the deplating process are achieved. According to the invention, the uncontrollable erosion of the side wall of the micron-sized copper circuit is obviously reduced.

The present invention discloses a nano-synaptic integrated device and a preparation method of the nano-synaptic integrated device. The nano-synaptic integrated device includes a substrate, an insulating layer disposed on the substrate, and a plurality of nano-synaptic units disposed on the insulating layer. Each of the nano-synaptic units includes a first microelectrode and a second microelectrode disposed facing each other and a GaN-based nanowire disposed between the first microelectrode and the second microelectrode, a first end of the GaN-based nanowire is bond-connected to the first microelectrode, and a second end of the GaN-based nanowire is bond-connected to the second microelectrode. In the present invention, the GaN-based nanowire is used as a synapse element in the device. The GaN-based nanowire has a controllable direct band gap and stable physical and chemical properties. In this nano-synaptic integrated device, the plurality of nano-synaptic units are integrated and disposed on the same substrate, which can be prepared on scale, with small size and high integration level. The plurality of nano-synaptic units can be independently controlled or can be controlled in an overall array according to an arranged array pattern.

The invention discloses a preparation method of an addressable disc ultramicro electrode array for electrochemical imaging, which comprises the following steps of: 1, preparing a nanowire array by using an ultrathin slicing machine as processing equipment and a silicon wafer with a micron groove array structure as a template; 2, transferring the nanowire array to a silicon wafer, performing three-dimensional alignment on a molybdenum mask plate with a lead pattern and the nanowire array, and realizing lap joint of a lead and the nanowire array and preparation of the lead by combining a physical vapor deposition method; 3, resin is poured on the silicon wafer for normal-temperature curing, and the pattern is transferred to the resin; 4, macroscopic wire lap joint and packaging are carried out, a resin block with an embedded array structure is obtained, the end face is trimmed through an ultra-thin slicing machine, the dot array is exposed, and preparation of the addressable disc ultramicro electrode array is completed. According to the method, the addressable disc ultramicro electrode array which is high in consistency, high in spatial resolution and capable of being expanded at will can be prepared simply and efficiently at low cost.

Poposed is an ultra-micro electrode using a low melting point metal and a method of manufacturing the same. The method includes preparing an insulating member having a hollow portion formed in a longitudinal direction, filling a metal in a liquid state having a melting point of 25 to 400° C. into the hollow portion of the insulating member, cooling to solidify the metal filled in the hollow portion of the insulating member, and manufacturing the ultra-micro electrode by forming a neck in the insulating member and the metal and breaking a portion in which the neck is formed.

This disclosure provides a neural microelectrode with temperature regulation and temperature measurement functions, which can be applied in the field of microelectromechanical systems (MEMS) biosensor technology. The neural microelectrode includes: a substrate including a detection region; a microfluidic channel disposed within the substrate and overlapping with the detection region, the microfluidic channel being used to transport liquid; a microelectrode array disposed on the substrate and overlapping with the detection region, the microelectrode array being used to measure the electrical signal of the detection region; a temperature measuring element disposed on the substrate and overlapping with the detection region, the temperature measuring element being used to measure the temperature of the detection region; and an insulating layer disposed on the microelectrode array and the temperature measuring element, covering the microelectrode array and the temperature measuring element. This disclosure integrates temperature regulation and temperature measurement functions into a single microelectrode, enabling simultaneous temperature control of neurons and recording of neuronal electrical signals, as well as real-time measurement of neuronal temperature.