The application discloses a kind of complex structure parts electrochemical mechanical
polishing equipment based on carrier liquid micro-particle
electrolyte, including
mechanical vibration mechanism and multi-degree-of-freedom transmission mechanism on base, and
mechanical vibration mechanism is equipped with electrochemical
processing mechanism between multi-degree-of-freedom transmission mechanism top, electrochemical
processing mechanism is connected with
liquid storage tank by temperature and
humidity adjusting mechanism;Preloaded with carrier liquid micro-particle
electrolyte in
electrolytic cell, workpiece is clamped by pneumatic
metal clamp, under the driving of multi-degree-of-freedom transmission mechanism, workpiece is contacted with carrier liquid micro-particle
electrolyte in
electrolytic cell all-around movement, simultaneously,
voltage is applied by direct-current power supply, and the
current loop of connection power supply positive pole,
anode workpiece, electrolyte particle,
cathode electrolytic cell and power supply negative pole is formed, during
electrification process, workpiece surface is formed softened
metal oxide film under the electrochemical action of carrier liquid micro-particle electrolyte;Workpiece is contacted with carrier liquid micro-particle in electrolytic
cell by
mechanical vibration mechanism and is vibrated, and the relative friction of multi-degree-of-freedom movement is generated, and the mechanical removal of
surface oxide film is realized, and the electrochemical and mechanical circulation in
polishing process is promoted, and the
polishing efficiency is improved, and the
machining accessibility of complex structure part polishing is good;It has the advantages of high efficiency, good polishing effect, simple operation and low cost.