The invention belongs to the fields of
plasma chemical industry, microelectronic precursor preparation and green
nitrogen conversion, and discloses a series combined
discharge-based electronic-grade
nitric acid preparation device, which comprises a pretreatment module, a
dielectric barrier
discharge and
spark discharge series connection module, a gas-liquid mixed absorption module and a
liquid phase refining module. After air is subjected to
drying and flow and pressure regulation, O3 is generated in
dielectric barrier
discharge, and N2O5 is efficiently generated in
spark discharge; n2O5 gas rapidly reacts with a circulating absorption liquid through a vortex-Venturi tube to generate primary dilute
nitric acid, and then the primary dilute
nitric acid is deeply purified through a
liquid phase refining module to obtain electronic-grade nitric acid with the
mass concentration of HNO3 being greater than or equal to 70% and the content of impurities such as
metal ions and TOC being controlled at ppb grade. The
system provided by the invention has the advantages of normal temperature and normal pressure, modular operation, low
energy consumption and high yield, realizes green, efficient and distributed preparation of high-purity nitric acid, and overcomes the defects of
high energy consumption, insufficient purity and the like of the traditional Ostwald process.