Method and device for coaxial combined machining with tubular electrode discharging and laser irradiation

Abstract

The invention provides a method and a device for coaxial combined machining with tubular electrode discharging and laser irradiation, and belongs to the field of non-traditional machining and combined machining. Micro-etching machining is performed on the surface of an insulating high-hardness brittle material by virtue of a coaxial action of cone-shaped tube electrode discharging and laser irradiation, recessive material defects and stress concentration generated by pulsed laser acting on the surface of a workpiece can attract spark discharge to always act on the current area, and meanwhile, the spark discharge changes the surface shape and physico-chemical property of the current area, then nonlinear absorption of the current area on laser energy is improved, a local field enhancement effect is generated, and pulsed laser focused irradiation can accelerate an electrochemical reaction to promote generation of a stable discharge gas film layer on the surface of a hollow tool electrode; and the interactive cooperation of two types of energy achieves fixed-area micro-etching of the insulating high-hardness brittle material, the machining efficiency is significantly improved, and the machining quality is improved.

Description

technical field [0001] The invention belongs to the field of special composite processing, especially a method and device for coaxial composite processing of insulating, high-hardness, and brittle materials by electrochemical discharge and laser irradiation, specifically a coaxial composite processing method of tube electrode discharge and laser irradiation and device. Background technique [0002] Compared with metal materials, insulating high-hard and brittle materials have many characteristics, including high hardness, corrosion resistance, high temperature resistance, wear resistance and other material properties. Insulating high-hard-brittle materials represented by alumina ceramics have very broad application prospects in high-tech fields such as microelectronics, microreactors, optoelectronic information automation technology, energy and environmental protection, and biomedicine. In particular, alumina ceramic substrates, which have been widely used in the electronic...

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Problems solved by technology

After reviewing and retrieving existing literature, it is found that the Chinese patent with the publication number CN103831674A discloses a laser-induced thermal cracking grinding method for alumina engineering ceramics. The laser is used as a heat source to heat the parts and Ar gas is used to cool the induced alumina engineering ceramics parts. Initial cracks are formed on the surface, and then the grinding wheel is used for precision wet grinding. This method improves the efficiency of the grinding process, but due to the limitation of the size of the grinding wheel, this method is not suitable for processing microscopic shapes such as micro holes.

The Chinese patent with the publication number CN104942388A discloses a device and method for combined electrochemical discharge and laser processing of transparent insulating hard and brittle materials. , can speed up the erosion speed of transparent hard and brittle materials, but this device and method are only suitable for processing transparent insulating hard and brittle materials, and cannot process opaque insulating hard and brittle materials, and the heat generated by the high energy density generated by pulsed laser and electrochemical discharge The impact effect is easy to cause defects such as collapse, ablation, and fused layer of the workpiece to be processed. Due to the stray nature of electrochemical discharge, it is also difficult to achieve fine localization processing in this method.

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