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793results about How to "Avoid arcing" patented technology

Polyceramic e-chuck

The present invention discloses an electrostatic chuck for clamping work substrates, said chuck comprising three layers, where the dielectric constant of included non-conductive layers is selected to provide overall lower capacitance to the chuck. In the chuck assembly of the present invention, the top dielectric layer that is in contact with a substrate, such as, for example, a wafer, has a dielectric constant that is preferably greater than about 5, with a resistivity that is preferably greater than about 1E6 ohm.m, whereas the bottom dielectric layer has a dielectric constant that is preferably less than about 5 and a resistivity that is preferably greater than about 1E10 ohm.m. The intermediate layer preferably has a conductive layer where the resistivity is less than about 1 ohm.m. The electrostatic chuck may be bonded to heat sinks coated with anti-arc dielectrics. The heat sink can also be used as an RF electrode. The heat sink may have provisions for coolants and gas channels to feed a cooling gas to the backside of a wafer. The heat sink may have feed thrus to power the segmented electrodes in the electrostatic chuck. The passages for the feed thrus, gas feed holes and lift pins may be lined with ceramics or polymers to prevent any discharge to the heat sink. The electrostatic chuck is for clamping work substrates like Si, GaAs, SiO2, etc. used in semiconductor tools.
Owner:FM INDS

Multi-scale seismic full-waveform inversion method based on local adaptive convexification method

The invention relates to a multi-scale seismic full-waveform inversion method based on a local adaptive convexification method. The method comprises steps: pre-processing is carried out, a zero value sequence serves as an initial value, and an initial speed model serves as a starting value; direct wave information is intercepted; forward modeling direct waves are obtained; an objective function inverted by a seismic source function is built; a direct wave residual and a direct wave residual back propagation wave field are obtained; an updating gradient and an updating direction of the seismic source function are calculated, and a step length is searched; the high-precision seismic source function obtained through inversion is outputted; attenuation time window processing is carried out; seismic data in the time window are simulated; local convexification processing and separation processing are carried out; a high-frequency component in an observation record is removed; a least square objective function is built, and a wave field residual is obtained; a residual back propagation wave field of the model space is obtained; the model updated gradient is obtained; the model updated direction is calculated, and the step length is searched; a multi-scale seismic full-waveform inversion result is outputted; and a final inversion result is outputted. The method is widely applied in the technical field of seismic exploration.
Owner:CHINA NAT OFFSHORE OIL CORP +1
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